JP6439668B2 - Method for producing can roll with gas release mechanism - Google Patents

Description

  The present invention provides a gas discharge can roll comprising a metal cylindrical body having a plurality of gas introduction passages and a plurality of gas discharge holes extending from each of the gas introduction passages and opening on the outer peripheral surface at the outer peripheral thick part, and The present invention relates to a manufacturing method and a vacuum processing apparatus for a long substrate on which the gas release can roll is mounted.

  For electronic devices such as liquid crystal panels, notebook computers, digital cameras, and mobile phones, a flexible wiring board in which a metal film is coated on a heat-resistant resin film is used. This flexible wiring board can be obtained by patterning a wiring pattern on a metal film of a heat-resistant resin film with a metal film in which a metal film is formed on one side or both sides of a heat-resistant resin film. Along with this, the heat-resistant resin film with metal film itself is required to be smooth and free from defects such as wrinkles.

  As a method for producing this type of long heat-resistant resin film with a metal film, conventionally, a method in which a metal foil is attached to a heat-resistant resin film with an adhesive (manufacturing method of a three-layer substrate), heat resistance to the metal foil A method in which a resin solution is coated and then dried (casting method), and a method in which a metal film is formed on a heat-resistant resin film by a vacuum film formation method or a vacuum film formation method and a wet plating method (meta Rising method) is known. Examples of the vacuum film forming method used for the metalizing method include a vacuum deposition method, a sputtering method, an ion plating method, and an ion beam sputtering method.

  Among the above manufacturing methods, as for the metalizing method, Patent Document 1 describes a method in which a chromium layer is sputtered on a polyimide insulating layer and then copper is sputtered to form a conductor layer on the polyimide insulating layer. Patent Document 2 discloses a flexible circuit in which a first metal thin film is formed on a polyimide film by sputtering using a copper nickel alloy as a target, and then a second metal thin film is formed by sputtering using copper as a target. A technique for producing a substrate material is disclosed. In addition, when continuously vacuum-depositing a heat-resistant resin film such as the above polyimide film, a sputtering web coater that performs sputtering deposition on the surface of a long resin film while being conveyed by roll-to-roll is used. It is common.

  By the way, among the vacuum film forming methods described above, the sputtering method is generally excellent in adhesion, but it is said that the heat load applied to the heat resistant resin film is larger than the vacuum vapor deposition method. It is also known that when a large heat load is applied to the heat resistant resin film during film formation, the film is likely to be wrinkled. In order to prevent the generation of wrinkles due to this thermal load, the sputtering web coater described above has a long heat resistance that is conveyed by roll-to-roll to the outer peripheral surface of a so-called can roll made of a metal cylindrical body in which a refrigerant circulates. A method of cooling the heat-resistant resin film during sputtering film formation from its back side by winding a conductive resin film is employed.

  For example, Patent Document 3 discloses an unwinding type (roll-to-roll type) vacuum sputtering apparatus which is an example of a sputtering web coater. This unwinding / winding-type vacuum sputtering apparatus is provided with a cooling roll that plays the role of the above-described can roll. Further, in the cooling roll, a sub-roll provided on at least the film feeding side or the feeding side is provided. Control is performed so that the heat-resistant resin film is in close contact with the cooling roll.

  However, as described in Non-Patent Document 1, since the outer peripheral surface of the can roll is not flat when viewed microscopically, the outer peripheral surface of the can roll and the heat resistant resin film conveyed in contact therewith There is a gap (gap part) that is separated via a vacuum space. For this reason, it cannot be said that the heat of the heat resistant resin film generated at the time of film formation is efficiently transferred to the can roll, and this causes wrinkles of the film.

In order to solve such a problem, gas is introduced from the can roll side into the gap portion between the outer peripheral surface of the can roll and the heat resistant resin film so that the thermal conductivity of the gap portion is higher than that of the vacuum. Techniques to do this have been proposed. For example, Patent Document 4 discloses a technique of providing a large number of fine holes serving as gas inlets on the outer peripheral surface of the can roll as a method of introducing gas from the can roll side. This method is a very effective means because it can suppress the generation of wrinkles by reducing the heat load of the heat resistant resin film during film formation. According to Non-Patent Document 2, when the gas introduced into the vacuum chamber is argon gas and the pressure of the introduced gas is 500 Pa, the gap between the outer peripheral surface of the can roll and the heat resistant resin film wound around the can roll When the distance is a molecular flow region of about 40 μm or less, the thermal conductance of this gap portion is assumed to be 250 (W / m ² · K).

  As described above, when gas is introduced into the gap from a large number of holes provided on the outer peripheral surface of the can roll, the amount of gas released from these holes is not greatly varied depending on the location. A plurality of gas introduction paths extending in the central axis direction of the can roll are provided over the entire circumference at substantially equal intervals in the circumferential direction, and each of the plurality of gas introduction paths is provided with an outer peripheral surface. It is necessary to provide a plurality of gas discharge holes that open.

  As a method of providing a plurality of gas introduction paths in the outer peripheral thick portion of the can roll as described above, a method of drilling with a gun drill in the outer peripheral thick portion of the cylindrical member has been conventionally used. Alternatively, an inner roll having a grooved outer peripheral surface is prepared, and a slightly larger dissimilar metal outer pipe is thermally expanded and fixed by shrink fitting that fits on the outer peripheral side of the inner drum. It was. In this shrink fitting, although it is difficult to come off by using an outer pipe having a smaller thermal expansion coefficient than the inner drum, the inner drum and the outer pipe may be loosened due to repeated thermal loads.

  In particular, after processing the gas discharge holes by laser, the outer pipe surface may be attached with molten metal generated during processing, or the surface may be slightly flat, so cylindrical cutting or cylindrical polishing as the final finish As a result, the thin outer pipe is cut and polished to a thickness of about 1 to 5 mm, so that the outermost outer pipe loosens due to the heat generated when processing the gas discharge holes by the laser. was there.

  In order to prevent this loosening, Patent Document 5 discloses a technique of engraving a groove in the inner drum to increase the contact pressure per unit area with the outer pipe, and Patent Document 6 discloses a technique of sandwiching an uneven metal plate between the inner drum and the outer pipe. However, Patent Document 7 discloses a method of sandwiching a soft metal plate grooved between an inner drum and an outer pipe.

Japanese Patent Laid-Open No. 2-98994 Japanese Patent No. 3447070 Japanese Patent Laid-Open No. 62-247073 International Publication No. 2005/001157 Japanese Patent Laid-Open No. 56-112492 Japanese Patent Laid-Open No. 3-188292 Japanese Patent No. 3542080

"Vacuum Heat Transfer Models for Web Substrates: Review of Theory and Experimental Heat Transfer Data," 2000 Society of Vacuum Coaters, 43rd. Annual Technical Conference Proceeding, Denver, April 15-20, 2000, p.335 "Improvement of Web Condition by the Deposition Drum Design," 2000 Society of Vacuum Coaters, 50th. Annual Technical Conference Proceeding (2007), p.749

  However, even when using the methods described in Patent Documents 5 to 7, when a large heat load is applied to the outer pipe during use, or when it is assumed to be used in a situation where high-temperature heat treatment is repeated, If the outer pipe is subjected to a large heat load or if the outer pipe is thinly cut and the tightening stress is reduced, the inner drum and outer pipe may loosen and impair reliability. It was.

  On the other hand, the drilling of the thick part by the gun drill has the property of being biased in the direction of thin thickness, and when trying to drill the gas introduction path near the outer peripheral surface of the cylindrical member, it approaches the outer peripheral surface side. Therefore, in the drilling by the gun drill, it is necessary to drill a gas introduction path in the central portion in the thickness direction, and a minute gas discharge hole communicating therewith is deeply drilled, so that the drilling process becomes more difficult. In addition, if the gas introduction path is not provided near the outer peripheral surface of the cylindrical member, the distance from the refrigerant circulation path to the outer peripheral surface of the can roll is also increased, and the cooling efficiency of the can roll is reduced.

  In addition, the gun drill has a depth (drilling length) of about 100 times the diameter within a practical range, and it has been difficult to drill deep fine holes. For example, when the productivity of the heat resistant resin film with a metal film is taken into consideration, the width of the can roll used exceeds 700 mm. If the length (depth) of the gas introduction path to be formed is 700 mm, the distance between the gas introduction paths is reduced when the hole diameter of the gun drill is increased. As described above, since the gun drilling process takes enormous time and cost, in order to shorten the production time, two rows or more gas introduction paths are formed by irradiating the laser to one gas introduction path obliquely. Sometimes it was provided.

  The present invention has been made in view of the above-described conventional problems, and is used when performing a process that requires a heat load such as sputtering film formation on a long resin film conveyed by roll-to-roll. It is an object of the present invention to provide a highly reliable gas release can roll, a method for manufacturing the same, and a sputtering film forming apparatus equipped with the can roll.

  In order to achieve the above object, a method of manufacturing a metal cylindrical roll with a gas release mechanism according to the present invention includes a plurality of gas introduction passages extending in the central axis direction, and extending from each of them and opening at an outer peripheral surface. A method of manufacturing a can roll with a gas release mechanism having a plurality of gas discharge holes in the outer peripheral thick portion, wherein a plurality of grooves extending in the direction of the central axis are formed on the outer peripheral surface side of the cylindrical base material in the circumferential direction Grooving step provided over the entire circumference at substantially equal intervals, and laminating by laser metal deposition of a hard metal over the entire outer peripheral surface side of the cylindrical base material. A step of forming a plurality of gas introduction paths having a structure in which a groove is covered with the hard metal, a surface processing step of cylindrical grinding or polishing the built-up outer peripheral surface, and each of the gas introduction paths Drilling from the outer peripheral surface after the surface processing It is characterized by comprising a piercing step of forming a plurality of gas discharge holes.

  ADVANTAGE OF THE INVENTION According to this invention, even if it is a case where it uses when a big heat load is applied or a heat processing of high temperature is repeated, the reliable gas discharge can roll which cannot be damaged can be provided.

It is a schematic diagram which shows one specific example of the film-forming apparatus of the long resin film by the roll-to-roll system provided with the can roll. It is a schematic sectional drawing which shows one specific example of a gas discharge can roll. It is a perspective view explaining the manufacture procedure of the gas discharge | release can roll of this invention. It is a fragmentary perspective view explaining a part of manufacturing procedure of FIG. It is a partial front view explaining a part of manufacturing procedure of FIG. It is a schematic diagram which shows the state which the laser processing head inclines and opposes with respect to the outer peripheral surface of the cylindrical base material by which grooving was carried out. It is a perspective view which shows the other specific example of the arrangement | sequence form of the gas discharge hole provided in the gas discharge can roll of this invention. It is a perspective view explaining the manufacture procedure of the gas discharge can roll using the conventional shrink fitting. It is a fragmentary perspective view explaining a part of manufacturing procedure of FIG. It is a perspective view explaining the manufacture procedure of the gas discharge can roll by the conventional gun drill. It is a fragmentary perspective view explaining a part of manufacturing procedure of FIG.

  First, as a specific example of a vacuum processing apparatus in which the gas release can roll of the present invention is suitably mounted, a vacuum film forming apparatus for a long resin film will be described with reference to FIG. The vacuum film forming apparatus 50 shown in FIG. 1 is an apparatus also called a sputtering web coater, and continuously applies a long resin film F such as a long heat-resistant resin film in a roll-to-roll system under a reduced pressure atmosphere. It is mainly comprised from the conveyance means to convey, the processing means which performs sputtering film-forming which is a process which requires a heat load with respect to this long resin film F, and the vacuum chamber 51 which accommodates these. This vacuum film-forming apparatus 50 is suitably used when the surface of the long resin film F is continuously and efficiently subjected to film formation.

More specifically, the vacuum chamber 51 is provided with various vacuum pump-related devices such as a dry pump, a turbo molecular pump, and a cryocoil (not shown). The pressure can be adjusted to about 0.1 to 10 Pa by reducing the pressure to about 10 ⁻⁴ Pa and then introducing a sputtering gas. A known gas such as argon can be used as the sputtering gas, and a gas such as oxygen may be further added depending on the purpose. The shape and material of the vacuum chamber 51 are not particularly limited as long as they can withstand such a reduced pressure state, and various types can be used.

  In this vacuum chamber 51, a long length from the unwinding roll 52 to the winding roll 64 through the motor-driven can roll 56 so as to continuously perform the film forming process while conveying the long resin film F by roll-to-roll. Various types of rolls that define the transport path of the long resin film F are disposed. Among these roll groups, in the transport path from the unwinding roll 52 to the can roll 56, a free roll 53 that guides the long resin film F, a tension sensor roll 54 that measures the tension of the long resin film F, and In order to make the long resin film F adhere to the outer peripheral surface of the can roll 56, a motor-driven feed roll 55 that adjusts the peripheral speed of the can roll 56 is arranged in this order.

  The motor-driven feed roll 61 that adjusts the peripheral speed of the can roll 56 and the tension sensor roll 62 that measures the tension of the long resin film F also in the conveyance path from the can roll 56 to the take-up roll 64 in the same manner as described above. And the free roll 63 which guides the elongate resin film F is arrange | positioned in this order. The unwinding roll 52 and the winding roll 64 described above maintain the tension balance of the long resin film F by torque control using a powder clutch or the like. Further, after the long resin film F is unwound from the unwinding roll 52 and travels along the transport path by the motor-driven can roll 56 and the motor-driven feed rolls 55 and 61 that rotate in conjunction with the motor-driven can roll 56. Then, it is wound up by a winding roll 64.

  Angle range A in which the long resin film F is wound on the outer peripheral surface of the can roll 56 (from the angular position at which the long resin film F sent from the front feed roll 55 starts to contact the outer peripheral surface of the can roll 56, A magnetron sputtering cathode as a dry film-forming means is provided at a position opposite to the region of the long resin film F wound around the can roll 56 so as to be fed to the rear feed roll 61 (range up to an angular position away from the outer peripheral surface). 57, 58, 59, and 60 are provided in this order along the transport path of the long resin film F defined on the outer peripheral surface. In addition, the above-described angle range A may be referred to as a holding angle of the long resin film F.

  When a metal film is formed by sputtering, a plate-shaped target can be used for the above-described magnetron sputtering cathodes 57 to 60. However, nodule (growth of foreign matter) is generated on the surface of the plate-shaped target. Therefore, a cylindrical rotary target that does not generate nodules and has high target use efficiency may be used. In addition, since the vacuum film forming apparatus of FIG. 1 performs sputtering film forming as a process that requires a heat load, a magnetron sputtering cathode is provided. However, the process that requires a heat load is limited to sputtering film forming. Instead of this, CVD (Chemical Vapor Deposition) or vacuum deposition may be used. In the case of these processes, another vacuum film forming means is provided in place of the plate target.

  The vacuum film forming apparatus 50 can produce a heat resistant resin film with a metal film in which a film made of, for example, a Ni-based alloy and a Cu film are laminated on the surface of the heat resistant resin film. Examples of the heat-resistant resin film used in the heat-resistant resin film with a metal film in this case include a polyimide film, a polyamide film, a polyester film, a polytetrafluoroethylene film, a polyphenylene sulfide film, and a polyethylene naphthalate film. And a liquid crystal polymer film. These heat-resistant resin films are preferable because they have flexibility as a flexible substrate with a metal film, strength necessary for practical use, and electrical insulation suitable as a wiring material.

  The film made of Ni alloy or the like is called a seed layer, and various known alloys such as Ni-Cr alloy, Inconel, Constantan, Monel, etc. can be used, but the composition is electrical insulation of the heat-resistant resin film with metal film. Is selected according to desired characteristics such as stability and migration resistance. In addition, the Cu film formed on the seed layer may be thickened using a wet plating method. In order to increase the film thickness, there are a case where a metal film is formed only by electroplating, and a case where electroless plating is performed as primary plating and wet plating such as electrolytic plating is combined as secondary plating. In either case, various conditions of a general wet plating method can be employed for the wet plating process.

  Thus, the heat resistant resin film with a metal film obtained can produce a flexible wiring board, for example by patterning by a subtractive method. Here, the subtractive method is a method of manufacturing a flexible wiring substrate by removing a metal film (for example, the Cu film) not covered with a resist by etching. In addition to the case where the above-described metal film such as Ni-Cr alloy or Cu is laminated on the long resin film F, an oxide film, a nitride film, a carbide film, or the like may be formed depending on the purpose. The vacuum film forming apparatus as described above can also be used when forming these oxide films and the like.

  Next, the can roll 56 of one specific example of the present invention mounted on the vacuum film forming apparatus 50 will be described with reference to FIG. The can roll 56 according to one specific example of the present invention is composed of a metal cylindrical roll 1 whose outer peripheral surface serves as a conveyance path around which the long resin film F is wound, and a rotating shaft located at a central axis O portion thereof. 2 is rotatably supported. A jacket member 3 made of, for example, a cylindrical member concentric with the cylindrical roll 1 or a spirally wound pipe is provided on the inner peripheral surface side of the cylindrical roll 1, whereby a coolant such as cooling water circulates. A refrigerant circulation path 3a is defined. The refrigerant flowing in the refrigerant circulation path 3a is circulated with a refrigerant cooling device (not shown) provided outside the vacuum chamber 51 via a rotary shaft 2 having a double piping structure including an inner forward path and an outer return path. Yes. Thereby, the long resin film F wound around the outer peripheral surface of the cylindrical roll 1 is cooled by the temperature-controlled refrigerant.

  A plurality of gas introduction passages 4 parallel to the direction of the central axis O of the can roll 56 are provided at substantially equal intervals in the circumferential direction at the outer peripheral thick portion of the cylindrical roll 1 constituting the can roll 56 described above. Arranged. In each of the plurality of gas introduction paths 4, a plurality of gas discharge holes that open at substantially equal intervals in the rotation axis direction of the can roll 56 on the outer peripheral surface side of the cylindrical roll 1 (that is, the outer peripheral surface side of the can roll 56). 5 is provided. The number of the gas introduction paths 4 and the number of the gas discharge holes 5 included in each gas introduction path 4 are the angle range (holding angle A) or gap around which the long resin film F of the outer peripheral surface of the can roll 56 is wound. It is determined as appropriate depending on the amount of gas introduced into the part, the exhaust pump capacity of the vacuum chamber 51, and the like.

  The inner diameter of each gas discharge hole 5 is such a size that gas can be satisfactorily introduced into a gap (gap) formed between the outer peripheral surface of the can roll 56 and the long resin film F wound around the can roll 56. desirable. In this case, it is possible to provide a large number of gas discharge holes 5 having a small inner diameter on the outer peripheral surface of the can roll 56 with a narrow pitch so that the thermal conductivity can be spread over the entire outer peripheral surface of the can roll 56 without reducing the cooling efficiency. This is preferable in that it can be made uniform. However, since a processing technique in which a large number of holes having a small inner diameter are provided at a narrow pitch is difficult, in reality, a fine hole having an inner diameter of about 30 to 1000 μm, more preferably an inner diameter of about 150 to 500 μm is formed at a pitch of 5 to 10 mm. It is preferable to provide the outer surface of the can roll 56.

  The plurality of gas introduction paths 4 are connected to a gas rotary joint 6 provided at one end of the cylindrical roll 1. Further, the gas rotary joint 6 is connected to the outside of the vacuum chamber 51 via a gas supply line 7. Gas is supplied from a gas supply source (not shown). The gas rotary joint 6 has a rotating portion having a plurality of distribution passages respectively communicating with the plurality of gas introduction passages 4 and an opening so that one end portion thereof communicates with these distribution passages, and the other end portion supplies gas. And a stationary part having a flow path connected to the line 7. With this configuration, gas can be distributed substantially uniformly to the plurality of gas introduction paths 4, and therefore, a gap portion formed between the outer peripheral surface of the can roll 56 and the long resin film F wound around the can roll 56 ( The gaps can be made substantially uniform over the entire circumference.

  The gas rotary joint 6 has a gas supply control means for shutting off the gas supply to the gas introduction path 4 located in a region other than the holding angle A around which the long resin film F is wound on the outer peripheral surface of the can roll 56. It is preferable to provide. As such a gas supply control means, for example, the shape of the opening on the side where the distribution path communicates in the flow path provided in the stationary part described above is configured so as not to communicate with the distribution path located in a region other than the holding angle A. It is mechanically opened and closed by forming, or the valves provided in the plurality of distribution paths are opened and closed electrically or electromagnetically depending on whether they are within the angular range of the holding angle A or out of the range. Means can be mentioned.

  By the gas supply control means described above, gas is only in the gap formed between the outer peripheral surface of the can roll 56 and the long resin film F wound around the outer peripheral surface within the range of the holding angle A. It is possible to prevent the gas from being released from the outer peripheral surface in the angular range other than the holding angle A. Thereby, since most of the gas introduced from the gas supply line 7 can be introduced into the gap portion between the outer peripheral surface of the can roll 56 and the long resin film F wound around the can roll 56, the interval between the gap portions is substantially constant. Therefore, it is possible to control the gas flow rate in order to maintain the heat conductivity, and to make the thermal conductance substantially uniform in the entire gap between the outer peripheral surface of the can roll 56 and the long resin film F wound around the can roll 56.

  If the gap between the outer peripheral surface of the can roll 56 and the long resin film F wound around the can roll 56 is about 40 μm, the gas released from the outer peripheral surface of the can roll 56 into the gap portion is the vacuum chamber 51 described above. Can be evacuated with a vacuum pump. The gas introduced into the gap portion is preferably argon, which has relatively good thermal conductivity, but if it is the same as the atmospheric gas in the vacuum chamber 51 during sputtering film formation, this atmospheric gas will not be contaminated. Further, the gap interval of the gap part where the long resin film F is separated from the outer peripheral surface of the can roll varies depending on the type and thickness of the long resin film F, the tension during film conveyance, the amount of gas introduced, and the like.

  The above-described can roll 56 of one specific example of the present invention can be suitably used for plasma processing and ion beam processing in addition to the vacuum film forming apparatus 50 described above. These plasma treatment and ion beam treatment are performed in a vacuum chamber in a reduced-pressure atmosphere for the purpose of surface modification of a long resin film. However, these treatments are also processes in which a heat load is applied to the long resin film. Likely to happen. Therefore, if the can roll of the present invention is used, the gap distance between the outer peripheral surface of the can roll and the resin film can be maintained almost constant, and the thermal conductance can be easily made uniform. Can be eliminated.

  The plasma treatment is, for example, a method of treating a long resin film by generating oxygen plasma or nitrogen plasma by performing discharge in a reduced pressure atmosphere made of a mixed gas of argon and oxygen or a mixed gas of argon and nitrogen. It is. The ion beam treatment is a method of treating a long resin film by generating a plasma discharge in a magnetic field gap to which a strong magnetic field is applied and irradiating positive ions in the plasma as an ion beam with an electric field by an anode. .

  Next, a manufacturing method of the above-described gas release can roll 56 will be described with reference to FIGS. In this manufacturing method, the gas discharge can roll 56 is configured by punching a gas introduction path one by one with a gun drill in the thick wall portion of the cylindrical member, or by shrink fitting the outer pipe on the grooved inner drum. Rather than producing a cylindrical roll, the grooving processing is performed on a cylindrical base material by laser metal deposition.

  That is, as shown in FIG. 3, after grooving (a) to a cylindrical base material made of, for example, stainless steel, the outer layer than the cylindrical member is built up by laser metal deposition (b), The surface of the build-up portion is thinly cylindrically ground and polished (c), hard chrome plating treatment (d) is performed, polishing is performed again (e), and then a gas discharge hole is drilled by a laser (f) Then, both sides are laser welded (g) and finished by polishing (f).

  Specifically explaining each step, as shown in FIG. 4A, first, a metal cylindrical base material 100 is prepared. The cylindrical substrate 100 may be a cylindrical member obtained by joining rectangular metal plates by butt welding or friction stir welding, or may be processed from a seamless pipe or a cast pipe. A concentric jacket member 101 is provided on the inner peripheral surface side of the cylindrical substrate 100 to form a refrigerant circulation path 101a. After the outer peripheral surface of the cylindrical base material 100 is subjected to cylindrical grinding as necessary, as shown in FIG. 4B, the outer peripheral surface side of the cylindrical base material 100 is arranged in the direction of the central axis of the cylindrical base material 100. A plurality of grooves 100a that form a plurality of gas introduction passages 4 are formed by grooving. Next, as shown in FIG. 4C, a build-up layer 102 made of a hard metal is formed on the outer peripheral surface side of the cylindrical base material 100 by laser metal deposition.

  Laser metal deposition is performed by irradiating the surface of a metal base material such as a metal plate with a laser beam and supplying a powdered melt material constituting a hard metal film to the irradiated spot, thereby providing the surface of the metal base material with the solution material. Is a method of forming a hard metal film by melting and solidifying the material. In such laser metal deposition, the molten material forms a molten pool at the spot of the laser beam by the heat source of the laser beam. By supplying an inert shielding gas around the laser beam and the spot, the molten material in the molten pool is provided. Can prevent oxidation.

  When forming the build-up layer 102, the build-up is repeated on both walls in the order of (a) to (e) in FIG. 5 so that the groove 100a is not filled by laser metal deposition in the vicinity of the groove 100a. Finally, a lid is formed by covering the upper opening of the groove 100a with a hard metal. When building up, by using a laser processing head that can be tilted in an arbitrary direction with respect to the normal line of the outer peripheral surface of the cylindrical base material 100, by overlaying while appropriately adjusting the tilt direction and tilt angle, A gas introduction path in which the upper portion of the groove is covered with the hard metal film can be formed without filling the inside of the groove 100a.

  For example, as shown in FIG. 6, in the vicinity of the groove 100a, the inclination angle α of the laser processing head H with respect to the normal N of the outer peripheral surface of the cylindrical substrate 100 is preferably −80 ° or more and + 80 ° or less, and more preferably. The gas introduction path can be satisfactorily formed by inclining to −60 ° or more and + 60 ° or less. Further, in the formation of the hard metal film using the laser metal deposition, since the precise power control of the laser beam is possible, the influence on the cylindrical base material 100 which is the metal base material is small and the cylindrical base material is used. Since 100 metal components do not dissolve in the hard metal film, the original performance of the hard metal film can be exhibited even if the hard metal film is thin.

  As a method for forming a hard metal film, it is conceivable to use a conventionally known powder plasma welding method. In this method, the outer peripheral surface of the cylindrical base material, which is a metal base material, and the metal film are dissolved. Since the metal of the cylindrical base material melts into the hard metal film in a wide range by arcing, especially in the arc, it is necessary to increase the thickness of the hard metal film in order to make the composition of the surface of the hard metal film a hard metal composition. As a result, there arises a problem that the depth of the hole to be drilled increases at the time of laser drilling of the gas discharge hole described later. Furthermore, the heat load to the cylindrical base material which is a metal base material is large, and it is not suitable as a treatment applied to the cylindrical base material in which the groove for the gas introduction path is formed.

  Further, as another film forming method for the hard metal film, it is conceivable to use a thermal spraying method, but in this method, the thermal spray particles obtained by melting the molten material are mechanically sprayed on the outer peripheral surface of the cylindrical base material. In order to join, there is a possibility of peeling due to a thermal load. In addition, since the coating formed of the spray particles becomes a porous film on a cylindrical base material serving as a metal base material, it is not suitable for use in a vacuum like a can roll of a sputtering web coater.

  On the other hand, when laser metal deposition is used, one of Cr, Ni, Co, Mo, W, Fe, Ti, tungsten carbide, etc., without causing the above-mentioned problems of powder plasma welding and thermal spraying. A can roll with a gas release mechanism that can cover the outer peripheral surface of the cylindrical base material 100 with a cemented carbide or the like made of an alloy mainly composed of seeds or more and thus has an outer peripheral surface with improved smoothness and hardness. It can be produced. In particular, even if the hard metal film on the surface of the can roll with a gas release mechanism is formed of chromium, a chromium film stronger than the conventional hard chromium plating can be formed.

  In addition, the melt powder used as the hard metal film may be a tungsten carbide WC added with Ni, Cr, Co, etc., Ni added with Cr, Co, etc., Cr alone, etc. Since mirror polishing is not so easy, it is preferable to select appropriately in consideration of the specifications of the vacuum film forming apparatus. In addition, there is a concern that fine holes are opened in the build-up by laser metal deposition, but if the gap is less than the μm order, even if the gas in the gas introduction path leaks from the gap, Since the gas discharge hole is formed, there is no problem.

  Next, in order to ensure the roundness of the outer peripheral portion of the cylindrical base material 100 formed by laser metal deposition and covered with the build-up layer 102, cylindrical grinding is performed and mirror polishing is performed to form the hard metal film 112. . In that case, it finishes so that the thickness from the outer peripheral surface after grinding | polishing process to a gas introduction path may be set to 1-5 mm. If the thickness is less than 1 mm, it is difficult to maintain the strength. Conversely, if the thickness exceeds 5 mm, it is difficult to process the gas discharge hole. In addition, surface treatment such as hard chrome plating may be performed on the outer peripheral surface before the above mirror polishing process in order to prevent scratches. For this surface treatment, in addition to hard chrome plating, nickel plating, diamond-like carbon coating, tungsten carbide coating, titanium nitride coating, or the like may be performed.

  Next, as shown in FIG. 4 (d), a plurality of gas discharge holes are drilled toward the outer peripheral surface of the hard metal film 112, preferably by drilling with a laser such as a YAG laser. Then, annular side plates are laser welded to both side surfaces, and finish polishing is performed to complete the gas release can roll. Instead of drilling with a laser, drilling may be performed using a micro drill. When drilling with a laser, in order to scatter the laser so that the laser irradiation optical system is not damaged by the reflection of the laser, further improve the drilling efficiency by reducing the reflection of the laser and increasing the absorption. Therefore, you may roughen the outer peripheral surface which gave the hard metal membrane | film | coat by precision blasting. It is desirable that the hard metal film be polished before precision blasting because variations in plating thickness can be eliminated and the precision blasting can be performed uniformly.

  The roughness of the outer peripheral surface after this precision blasting is preferably 0.1 to 0.3 μm as the center line average roughness Ra. If the center line average roughness (Ra) is less than 0.1 μm, the 5 ° specular reflectance at the laser wavelength of 1.06 μm used for drilling the gas discharge holes exceeds 2%, so the reflected laser is an optical system for laser irradiation. May cause damage. On the other hand, since the 5 ° regular reflectance at the laser wavelength of 1.06 μm does not change even if the center line average roughness Ra exceeds 0.3 μm, it is not necessary to roughen beyond 0.3 μm, and polishing mirror finishing in the subsequent process This is not preferable because the labor required for the operation increases. As an abrasive used for precision blasting, an alumina abrasive or a SiC abrasive having a particle diameter of 20 to 100 μm is suitable although it depends on the hardness of the hard metal film. The center line average roughness (Ra) can be obtained by appropriately adjusting the abrasive particle size and the precision blasting time.

  From the surface of the can roll subjected to precision blasting to the gas introduction path, a row of gas discharge holes is formed in each gas introduction path along the direction of the rotation axis by laser. Alternatively, as shown in FIG. 7, two or more rows of gas discharge holes 155 may be formed by laser along the rotation axis direction with respect to each gas introduction path 154. In this case, since the gas discharge hole 155 is opened obliquely with respect to the outer peripheral surface of the hard metal film 152, it is very difficult to insert the cutting edge with a micro drill.

  On the other hand, if a laser is used, it is possible to easily open an oblique gas discharge hole. However, if the incident angle exceeds 60 ° with respect to the normal direction, the shape of the gas discharge hole becomes an extremely elliptical shape. In addition, the sharp edge portion of the elliptical peripheral portion is melted by the laser and the hole diameter is increased, which is not preferable. Since the gap between the outer peripheral surface of the can roll and the heat-resistant resin film is further away immediately above the gas discharge hole, the heat conduction efficiency is lowered, so it is not preferable that the gas discharge hole is further increased. is there.

  As described above, the gas release can roll produced by forming a hard metal film by laser metal deposition on the outer peripheral surface side of the cylindrical base material grooved on the outer peripheral surface is used for the formation of the gas introduction path. Since it is not necessary to use a gun drill, it can be manufactured in a short time and can be manufactured without risk of failure. Furthermore, by mounting the can roll on a vacuum processing apparatus, the thermal conductance can be increased while maintaining the gap between the outer peripheral surface of the can roll and the long resin film wound around the can roll substantially constant. To provide a highly reliable vacuum processing apparatus capable of producing a high-quality heat-resistant resin film with a metal film without wrinkles because it can be homogeneously increased and is not easily damaged even under repeated high heat loads. it can.

  On the long resin film F which is mounted with the gas release can rolls of the examples and comparative examples of the present invention shown below in a vacuum film forming apparatus (sputtering web coater) 50 as shown in FIG. A Ni—Cr film as a seed layer and a Cu film thereon were continuously formed to produce a long heat-resistant resin film with a metal film. For the long resin film F, a heat-resistant polyimide film “UPILEX (registered trademark)” manufactured by Ube Industries, Ltd. having a width of 500 mm, a length of 800 m, and a thickness of 25 μm was used.

[Example 1] (Laser metal deposition)
A gas release can roll having an outer diameter of 800 mm and a width of 750 mm, which was surface-treated by hard chrome plating, was manufactured according to the manufacturing process shown in FIG. Specifically, first, as shown in FIG. 4A, a cylindrical base material 100 having a finished outer diameter of 796 mm and a thickness of 15 mm made of stainless steel (SUS316L) that has been cut and polished is prepared, and the inner peripheral surface side thereof is prepared. A concentric jacket member 101 was attached to form a refrigerant circulation path 101a, and a double pipe (not shown in FIG. 4A) was attached to the central axis portion. Next, as shown in FIG. 4 (b), 180 grooves 100a having a width of 3 mm and a depth of 3 mm serving as gas introduction paths are formed on the outer peripheral surface side of the cylindrical base material 100 at an angle of 2 ° in the circumferential direction. It was formed with a cutting cutter.

  A SUS316L powder (LPW) was used on the outer peripheral surface of the cylindrical base material 100 thus grooved by using a laser metal deposition device manufactured by Trumpf Co., Ltd. equipped with an Nd: YAG laser with a laser output of 1000 W. Technology Co., Ltd., model number: LPW316) is supplied, and a build-up layer 102 as shown in FIG. 4C is formed under the conditions of a laser output of 500 W, a single-layer build-up thickness of 0.5 mm, and a single bead width of 0.5 mm. Formed. In this build-up processing, the laser processing head was operated so that the groove 100a serving as the gas introduction path was not filled. The thickness of the built-up layer 102 obtained was set to about 3 mm at a location where the groove was not cut. A cylindrical body having an outer diameter of 802 mm having a gas introduction path 104 formed in the thick portion by covering the groove 100a for this build-up processing is subjected to cylindrical grinding, and hard chromium plating with a thickness of 100 μm is applied to provide an outer diameter of 800 mm. Finished.

  Next, the outer peripheral surface of the hard metal film 112 having a thickness of 2 mm obtained by the cylindrical grinding and the hard chrome plating is precision blasted, and then the wavelength of 1.06 μm and the output of 100 W from the processed surface side to each gas introduction path 104. By irradiating the pulse Nd: YAG laser, as shown in FIG. 4D, each gas introduction path 104 was provided with a plurality of gas discharge holes 105 opened in the normal direction on the outer peripheral surface. A plurality of gas discharge holes 105 provided in each gas introduction path 104 were set with a laser head at a position having an inner diameter of 200 μm and irradiated with laser at a pitch of 7 mm.

  Note that the plurality of gas discharge holes 105 are provided only in the inner region of the outer periphery of the can roll, on the inner side from the position of 20 mm inside from both edges of the region where the long resin film is wound, and the other can rolls The gas discharge holes 105 were not provided at both ends. Next, an annular side plate is laser welded to both sides of the above cylindrical body, final mirror polishing is performed to remove metal debris around the opening generated by laser processing, and a gas rotary joint is attached. Thus, the can roll 56 with a gas release mechanism was completed.

  When the produced can roll 56 was mounted on the vacuum film forming apparatus 50, the angle other than the holding angle A around which the long resin film F was wound on the outer peripheral surface of the can roll 56 was about 30 °. There are 15 gas introduction paths existing in an angle range other than the holding angle A. Therefore, in the flow path of the stationary part of the gas rotary joint, in the flow path of the stationary part of the gas rotary joint, in order to prevent the gas from being distributed to the distribution path located within the angle range of about 30 ° of the distribution path of the rotating part of the gas rotary joint. The opening on the side communicating with the plurality of distribution paths was formed in a substantially C-shaped opening.

  In order to laminate the Ni—Cr film as a seed layer and the Cu film thereon on the heat resistant polyimide film, a Ni—Cr target is used for the magnetron sputter target 57 and a Cu target is used for the magnetron sputter targets 58 to 60. It was used. The heat-resistant polyimide film was set on the unwinding roll 52, and the leading end of the heat-resistant polyimide film was attached to the winding roll 64 through a roll group such as a can roll 56. The tension on the unwinding roll 52 side and the winding roll 64 side was 80 N, and water whose temperature was controlled to 20 ° C. was circulated inside the can roll 56 as a refrigerant.

The vacuum chamber 51 was evacuated to 5 Pa by a plurality of dry pumps, and further evacuated to 3 × 10 ⁻³ Pa using a plurality of turbo molecular pumps and cryocoils. In this state, 300 sccm of argon gas was introduced to each magnetron sputter cathode and 5 kW of power was applied while conveying the heat-resistant polyimide film at a conveyance speed of 4 m / min, and 100 sccm of argon gas was introduced into the gas release can roll. Then, deposition of a Ni—Cr film and a Cu film thereon was started.

  During the film formation, the surface shape of the heat-resistant polyimide film was measured with a laser displacement meter installed between the magnetron sputter cathodes. The heat-resistant polyimide film was about 40 μm away from the outer peripheral surface of the can roll 56. Was confirmed. Moreover, when the long heat resistant resin film with a metal film wound up on the winding roll 64 after film formation was visually inspected, no defects such as wrinkles were found.

[Comparative example 1] (grooved shrink fitting)
As shown in FIG. 8, (a) grooving, (b) shrink fitting, (c) outermost layer grinding, (d) hard chrome plating, (e) polishing, (f) drilling, A gas release can roll having an outer diameter of 800 mm and a width of 750 mm, which was surface-treated by hard chrome plating, was manufactured in accordance with a manufacturing process including (g) laser welding on both sides and (f) finish polishing. Specifically, first, as shown in FIG. 9A, a cylindrical base material 200 having a finished outer diameter of 796 mm and a thickness of 15 mm made of stainless steel (SUS316L) that has been cut and polished is prepared, and a concentric circle is formed on the inner peripheral surface side thereof. A circular jacket member 201 was provided to form a refrigerant circulation path 201a, and a double pipe (not shown in FIG. 9A) was attached to the central axis portion.

  After cylindrical grinding of the outer peripheral surface of the cylindrical base material 200, as shown in FIG. 9B, the cylindrical base material 200 is provided on the outer peripheral surface side of the cylindrical base material 200 at an angle of 2 ° in the circumferential direction. 180 grooves 3Oa having a width of 3 mm and a depth of 3 mm serving as a plurality of gas introduction paths extending in the direction of the central axis were formed by a grooving cutter. As shown in FIG. 9C, the outer peripheral surface 202 of the cylindrical base material 200 thus grooved is subjected to a surface treatment by hard chrome plating and has a finished inner diameter of 795 mm and a thickness of 10 mm. Was heat-fitted and shrink-fitted.

  In addition, the outer peripheral surface of the cylindrical base material 200 and the inner peripheral surface of the outer pipe 202 were cut and polished so that good shrink fitting could be performed. Next, the outer pipe 202 was cut and polished to a thickness of 2 mm to form an outermost peripheral layer 212 having an outer diameter of 800 mm. As described above, loosening of the outer pipe was observed when the outer pipe 202 was polished to the outermost peripheral layer 212 having a thickness of 2 mm.

  Thereafter, in the same manner as in Example 1, after carrying out hard chrome plating with a thickness of 100 μm, the outer peripheral surface of the outermost peripheral layer 212 with a thickness of 2 mm was precision blasted, and then the wavelength of 1. from the processed surface side toward each gas introduction path 204. A pulse Nd: YAG laser with a power of 06 μm and an output of 100 W was irradiated, and a plurality of gas discharge holes 205 having an inner diameter of 200 μm as shown in FIG. When drilling the gas discharge hole 205 by processing with this laser, a strain of about 100 μm that affects the roundness was generated in the outermost peripheral layer 212. I gave up making a heat-resistant resin film.

[Comparative Example 2] (Gun drill)
As shown in FIG. 10, (a) gun drilling, (b) grinding, (c) hard chrome plating, (d) polishing, (e) drilling, (f) both side laser welding, and ( g) A gas release can roll having an outer diameter of 800 mm and a width of 750 mm, which was surface-treated by hard chrome plating, was manufactured in accordance with a manufacturing process consisting of finish polishing. Specifically, first, as shown in FIG. 11A, a cylindrical roll 300 having a finished inner diameter of 776 mm and a thickness of 15 mm made of stainless steel (SUS316L) that has been cut and polished is prepared, and a concentric jacket is formed on the inner peripheral surface side thereof. The member 301 was attached to form the refrigerant circulation path 301a, and a double pipe (not shown in FIG. 11A) was attached to the central axis portion.

  Next, as shown in FIG. 11 (b), the cylindrical roll 300 extends in the direction of the axis of rotation of the cylindrical roll 300 at an angle of about 2 ° in the central portion in the thickness direction of the outer peripheral thick portion of the cylindrical roll 300. A gas introduction passage 304 having an inner diameter of 5 mm was drilled with a gun drill. Since the straightness is poor in gun drilling, holes were made from both end faces of the cylindrical roll 300. Thereafter, the outer peripheral surface of the cylindrical roll 300 was cylindrically cut by 3 mm to finish the outer diameter to 800 mm.

  Since the gun drill has a characteristic of bending toward the direction of thin wall thickness, it is judged that it is difficult to open the gas introduction path by the gun drill near the outer peripheral surface of the cylindrical roll 300 from the beginning. After the gas introduction path 304 was formed in the central portion in the thickness direction of 300, the outer peripheral surface of the cylindrical roll 300 was cylindrically cut. This cylindrical cutting is for making the subsequent gas discharge hole shallow and facilitating processing by a laser.

  Thereafter, similarly to Example 1, after carrying out hard chrome plating with a thickness of 100 μm and precision blasting the outer peripheral surface of the cylindrical roll 300, the wavelength of 1.06 μm from the processed surface side toward each gas introduction path 304, output A pulse Nd: YAG laser of 100 W is irradiated, and as shown in FIG. 11 (c), a plurality of gas discharge holes 305 having an inner diameter of 200 μm arranged in a line along the extending direction of each gas introduction path 304 are arranged at a pitch of 7 mm. Perforated. After that, annular side plates were laser welded to both sides of the cylindrical roll 300, final mirror polishing was performed, and a gas rotary joint was attached to complete a can roll with a gas release mechanism.

  The production of the can roll by this gun drill took about 5 times as compared with the case of Example 1. The produced can roll with a gas release mechanism was mounted on the vacuum film forming apparatus 50 in the same manner as in Example 1 to produce a long heat-resistant resin film with a metal film. During the film formation, the surface shape of the heat-resistant polyimide film was measured with a laser displacement meter installed between the magnetron sputter cathode, and it was confirmed that the heat-resistant polyimide film was separated from the gas release can roll by about 40 μm. It was. Moreover, when the long heat resistant resin film with a metal film wound up on the winding roll 64 after film formation was visually inspected, no defects such as wrinkles were found.

  From the above results, it was found that the gas release can roll produced with the build-up of hard metal by laser metal deposition had the same performance as the gas release can roll produced using the conventional gun drill. . Therefore, the long film that is subjected to heat-intensive processing such as sputtering without using a gun drilling method or a breakage shrink-fitting method, which has a much longer processing time and a higher processing risk, is well cooled to reduce wrinkles. It has been found that an outgassing can roll that can effectively prevent the occurrence can be provided.

F Long resin film O Rotation center axis H Laser processing head N Normal 1 Cylindrical roll 2 Double pipe 3 Jacket member 3a Refrigerant circulation part 4 Gas introduction path 5 Gas discharge hole 6 Gas rotary joint 7 Gas supply line 50 Vacuum film formation Equipment 51 Vacuum chamber 52 Unwinding roll 53, 63 Free roll 54, 62 Tension sensor roll 55, 61 Feed roll 56 Can roll 57, 58, 59, 60 Magnetron sputtering cathode 64 Winding roll 100 Cylindrical substrate 100a Groove 101 Jacket Member 101a Refrigerant circulation path 102 Hard metal coating 104 Gas introduction path 105 Gas discharge hole 200 Cylindrical base material 200a Groove 201 Jacket member 201a Refrigerant circulation path 202 Outer pipe 204 Gas introduction path 205 Gas discharge hole 300 Cylinder Lumpur 301 jacket member 301a refrigerant circulation channel 304 gas introduction path 305 gas discharge hole

Claims (9)

A method of manufacturing a can roll with a gas release mechanism having a plurality of gas introduction passages extending in the central axis direction and a plurality of gas discharge holes extending from each of the gas introduction passages and opening at an outer peripheral surface in a thick portion of the outer periphery There,
A groove cutting step of providing a plurality of grooves extending in the central axis direction on the outer peripheral surface side of the cylindrical base material over the entire circumference at substantially equal intervals; and the outer peripheral surface of the cylindrical base material Forming a plurality of gas introduction paths having a structure in which the plurality of grooves are covered with the hard metal by performing build-up by laser metal deposition of a hard metal over the entire surface on the side; A surface processing step of cylindrically grinding or polishing the outer peripheral surface, and a drilling step of providing a plurality of gas discharge holes by drilling from the outer peripheral surface side after the surface processing for each of the gas introduction paths. A method for producing a can roll with a gas release mechanism.   2. The gas discharge mechanism according to claim 1, wherein the drilling step is a laser processing step, and has a precision blasting step of roughening the cylindrically ground or polished outer peripheral surface before the drilling step. Of manufacturing can rolls.   3. The can roll with a gas release mechanism according to claim 1, wherein the plurality of gas discharge holes are provided in a region corresponding to a length of 50% or more with respect to a width of the can roll. Production method.   4. The gas discharge mechanism according to claim 1, wherein each of the plurality of gas introduction paths includes at least one row of gas discharge holes extending in the central axis direction. 5. Can roll manufacturing method.   5. The gas discharge mechanism according to claim 1, further comprising a step of performing hard chrome plating on the outer peripheral surface polished or polished after the surface processing step. 6. Can roll manufacturing method.   The hard metal is an alloy mainly containing any one of Cr, Ni, Co, Mo, W, Fe, and Ti, according to any one of claims 1 to 5. Of manufacturing a can roll with a gas release mechanism.   The method for producing a can roll with a gas release mechanism according to any one of claims 1 to 6, wherein the outer peripheral surface is mirror-polished after the step of drilling the plurality of gas release holes.   The method for manufacturing a can roll with a gas release mechanism according to any one of claims 1 to 7, wherein a thickness of the hard metal after the surface processing step is 1 to 5 mm.   9. The can with a gas discharge mechanism according to claim 1, wherein a cross-sectional shape of each of the plurality of gas introduction paths in a plane perpendicular to the extending direction is a substantially rectangular shape. A method for manufacturing a roll.

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