JP2013007073A - Method of manufacturing can roll including gas discharge mechanism - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method of manufacturing a can roll capable of substantially uniformizing thermal conductance of a gap part between an outer peripheral surface of the can roll and a long resin film wound around it.SOLUTION: The method of manufacturing a can roll including a tubular base part 10 and an outermost peripheral part 13 formed on its outer peripheral surface 10a, wherein a plurality of gas introduction passages 14 for introducing gas to be discharged to the outer peripheral surface side of the outermost peripheral part 13 is embedded between the base part 10 and the outermost peripheral part 13, includes processes of: arranging a plurality of resin bodes 12 each having a shape identical to that of the gas introduction passage 14 at positions of the plurality of gas introduction passages 14; forming the outermost peripheral part 13, by an electroforming method, on the outer peripheral surface 10a of the base part 10 to cover the plurality of resin bodies 12; and removing the plurality of resin bodies 12 after the outer peripheral part 13 is formed.

Description

  The present invention relates to a method for manufacturing a can roll having a gas release mechanism for releasing gas from the outer peripheral surface of the can roll through a gas introduction path and a gas discharge hole.

  Flexible wiring boards are used in liquid crystal panels, notebook computers, digital cameras, mobile phones, and the like. The flexible wiring board is manufactured from a heat-resistant resin film with a metal film in which a metal film is formed on one side or both sides of a heat-resistant resin film. In recent years, wiring patterns formed on flexible wiring boards have become increasingly finer and more dense, and it has become even more important that the heat-resistant resin film with metal film itself is smooth without wrinkles. Yes.

  As a manufacturing method of this type of heat-resistant resin film with a metal film, a method of conventionally manufacturing a metal foil by attaching it to a heat-resistant resin film with an adhesive (a method of manufacturing a three-layer substrate), a heat-resistant resin on a metal foil Manufacturing method by coating solution and drying to manufacture (casting method) or heat-resistant resin film by vacuum film forming method or by combination of vacuum film forming method and wet plating method A method (metalizing method) or the like is known. Examples of the vacuum film forming method in the metalizing method include a vacuum deposition method, a sputtering method, an ion plating method, and an ion beam sputtering method.

  As for the metallizing method, Patent Document 1 discloses a method in which chromium is sputtered on a polyimide insulating layer and then copper is sputtered to form a conductor layer on the polyimide insulating layer. In Patent Document 2, a first metal thin film formed by sputtering using a copper nickel alloy as a target and a second metal thin film formed by sputtering using copper as a target are laminated on a polyimide film in this order. A disclosed flexible circuit board material is disclosed. In addition, when manufacturing a heat resistant resin film with a metal film by vacuum-depositing on a heat resistant resin film like a polyimide film, it is common to use a sputtering web coater.

  By the way, in the vacuum film-forming method mentioned above, although sputtering method is generally excellent in adhesive force, it is said that the heat load given to a heat resistant resin film is large compared with vacuum evaporation method. It is also known that when a large heat load is applied to the heat resistant resin film during film formation, the film is likely to be wrinkled. In order to prevent the generation of this wrinkle, in the above-described sputtering web coater, the heat resistant resin film being formed is wound by winding a long heat resistant resin film conveyed by roll-to-roll around a can roll having a cooling function. A method of cooling from the back side is adopted.

  For example, Patent Document 3 discloses an unwinding type (roll-to-roll type) vacuum sputtering apparatus which is an example of a sputtering web coater. This unwinding / winding-type vacuum sputtering apparatus is provided with a cooling roll that plays the role of the above-mentioned can roll, and a long heat-resistant resin by a sub-roll provided at least on the film feeding side or the feeding side of the cooling roll. Control is performed so that the film is in close contact with the cooling roll.

  However, as described in Non-Patent Document 1, since the outer peripheral surface of the can roll is not flat when viewed microscopically, the can roll and the long heat-resistant resin film conveyed in close contact with the outer peripheral surface There is a gap (gap) that is separated by a vacuum space. For this reason, it cannot be said that the heat of the long heat-resistant resin film generated during the film formation is efficiently transferred to the can roll, and this has caused wrinkling of the film.

In order to solve this problem, Patent Document 4 proposes a technique of introducing gas from the can roll side into a gap portion between the outer peripheral surface of the can roll and the long heat-resistant resin film wound around the can roll. Thereby, since the thermal conductivity of the gap portion is higher than that of vacuum, the thermal load of the long heat-resistant resin film during film formation is reduced, and the generation of wrinkles can be effectively suppressed. . According to Non-Patent Document 2, when the gas introduced into the gap portion is an argon gas having a pressure of 500 Pa and the distance between the outer surface of the can roll and the heat resistant resin film is a molecular flow region of about 40 μm or less. The thermal conductance of the gap portion is described as 250 (W / m ² · K).

Japanese Patent Laid-Open No. 2-98994 Japanese Patent No. 3447070 Japanese Patent Laid-Open No. 62-247073 International Publication No. 2005/001157 pamphlet

"Vacuum Heat Transfer Models for Web Substrates: Review of Theory and Experimental Heat Transfer Data," 2000 Society of Vacuum Coaters, 43rd. Annual Technical Conference Proceeding, Denver, April 15-20, 2000, p.335 "Improvement of Web Condition by the Deposition Drum Design," 2000 Society of Vacuum Coaters, 50th. Annual Technical Conference Proceeding (2007), p.749

  As described above, when introducing gas into the gap portion from the can roll side, a plurality of gas introduction passages are provided in the outermost cylindrical portion of the can roll, and a plurality of gas discharges opened to the outer peripheral surface side in each gas introduction passage Providing holes has been done. The can roll having such a structure is manufactured, for example, by the method shown in FIGS. That is, first, a jacket roll structure composed of a concentric shaft-shaped outer tube portion 1 and an inner tube portion 2 as shown in FIG. 1A is produced, and a refrigerant is provided between the outer tube portion 1 and the inner tube portion 2. Is provided with a cooling water circulation path 3. Next, using a gun drill, as shown in FIG. 1B, a plurality of gas introduction paths 4 parallel to the rotation axis direction are provided at substantially equal intervals in the circumferential direction over the entire circumference of the outer cylinder portion 1. Perforate. Then, using a micro drill or a laser, as shown in FIG. 1C, a plurality of gas discharge holes 5 opened to the outer peripheral surface side of the can roll are drilled in each gas introduction path 4.

  As described above, it is necessary to use a gun drill in order to drill a plurality of gas introduction paths in the thick wall portion of the outer cylindrical portion of the can roll. However, the gun drill has a depth that allows substantially drilling up to about 100 times its diameter (drilling length), and it has been difficult to drill fine holes deeper than this. Therefore, for example, when producing a wide can roll exceeding 700 mm in consideration of the productivity of a heat-resistant resin film with a metal film, the length (depth) of the gas introduction path is about 700 mm. As a result, the diameter of the gas introduction path exceeded 7 mm.

  As a result, the volume of the gas introduction path becomes large and gas accumulation tends to occur, and the flow control of the introduced gas may become unstable. In addition, in order to form a gas introduction passage having a large hole diameter, it is necessary to increase the thickness of the outer cylinder portion. As a result, the distance from the cooling water circulation passage to the surface of the outer cylinder portion increases, Cooling efficiency may be impaired.

  Furthermore, the gun drill has a property that it advances while tilting toward the thinner wall around the hole when drilling. As a result, if the gas introduction path is perforated near the outer peripheral surface of the outer cylinder portion, the perforating direction gradually approaches the outer peripheral surface side even if it attempts to perforate parallel to the outer peripheral surface. In order to avoid this, a hole is drilled in the central portion of the outer cylinder portion in the thickness direction. In this case, since the interval between the outer peripheral surface and the gas introduction path is increased, the gas introduction path is extended to the outer peripheral surface side. It becomes difficult to drill fine gas discharge holes that are opened. As described above, a huge amount of labor and cost have been spent on the production of the gas discharge mechanism by the gun drill.

  The present invention has been made in view of such conventional problems, such as a film-forming process in which a long heat-resistant resin film conveyed by roll-to-roll is wound around the outer peripheral surface of a can roll and a thermal load is applied. A method for producing a can roll that cools heat and can release gas to a gap between the outer peripheral surface of the can roll and a long heat-resistant resin film wound around the outer face to prevent wrinkling of the film In particular, the manufacture of a can roll capable of making the thermal conductance of the gap portion substantially uniform by making the gap portion substantially constant over almost the entire region where the long heat-resistant resin film is wound. It aims to provide a method.

  In order to achieve the above object, the method for producing a can roll provided by the present invention comprises a cylindrical base portion and an outermost peripheral portion provided on the outer peripheral surface thereof, and between these base portions and the outermost peripheral portion, A can roll manufacturing method in which a plurality of gas introduction passages for introducing gas into gas discharge holes opened on the outer peripheral surface side of the outermost peripheral portion are embedded, each having a gas introduction passage at a position of the plurality of gas introduction passages. A step of arranging a plurality of resin bodies having substantially the same shape, a step of forming an outermost peripheral portion by electroforming on the outer peripheral surface of a cylindrical base so as to cover the plurality of resin bodies, and forming an outermost peripheral portion And a step of removing a plurality of resin bodies.

  According to the present invention, a gas introduction path that is thinner than a gun drill can be formed in a short time, and a gas reservoir in the gas introduction path can be reduced, so that the controllability of the gas introduction amount is improved. Further, since the gas introduction path can be formed near the surface of the outer cylinder portion, the depth of the gas discharge hole can be reduced, and the processing time by the laser or the micro drill can be shortened.

  Moreover, since the thickness of the whole outer cylinder part becomes thin, and an outer cylinder part can be formed with copper with favorable heat conductivity by electroforming, it is possible to efficiently cool a long resin film during film formation. it can. As a result, the thermal conductance can be further improved in the entire gap portion between the can roll and the long resin film as compared with the conventional can roll, so that the occurrence of wrinkles in the long resin film can be suppressed extremely efficiently. Can do.

It is process drawing which shows the conventional manufacturing method of the can roll provided with the gas introduction path. It is process drawing which shows 1st Embodiment of the manufacturing method of the can roll which concerns on this invention. It is process drawing which shows 2nd Embodiment of the manufacturing method of the can roll which concerns on this invention. It is process drawing which shows one specific example of the drilling method of a gas discharge hole. It is a schematic diagram which shows one specific example of the long substrate processing apparatus of the roll-to-roll system in which the can roll produced with the manufacturing method of this invention is used suitably. It is sectional drawing of the can roll which the elongate substrate processing apparatus of FIG. 5 comprises.

  In the can roll obtained by the production method of the present invention, an outer cylinder portion around which a long heat-resistant resin film (hereinafter also simply referred to as a long resin film) is wound is formed on a cylindrical base portion and an outer peripheral surface of the base portion. And the outermost peripheral portion. A plurality of gas introduction paths are embedded between the base portion and the outermost peripheral portion. The plurality of gas introduction paths are arranged over the entire circumference at substantially equal intervals in the circumferential direction of the can roll, and each of them is provided with a plurality of gas discharge holes opening on the outer peripheral surface side. ing. Thereby, it becomes possible to introduce gas into the gap part between the outer peripheral surface of a can roll and a long resin film through a gas discharge hole by supplying gas to a gas introduction path.

  The gas introduction path preferably has a length (depth) extending in the rotation axis direction of 50% or more of the width of the can roll. This is because if this value is less than 50%, gas cannot be supplied uniformly to the entire gap portion. The gas introduction path may be a through-hole penetrating from one side surface to the other side surface in the width direction of the can roll, or may be a bottomed hole that opens only on one side surface.

  In the present invention, in order to produce the gas introduction path having the above structure, first, a cylindrical base that is a component of the outer cylinder part is prepared, and a resin body having substantially the same shape as the gas introduction path is provided on the outer peripheral surface side thereof. After the formation of the outermost peripheral portion, the step of disposing the outermost peripheral portion at substantially equal intervals in the direction, the step of forming the outermost peripheral portion by electroforming on the outer peripheral surface of the base so as to cover the resin body, And a step of removing the resin body.

  Hereinafter, the first embodiment of the manufacturing method of the present invention will be described with reference to the process diagrams of FIGS. In addition, only the perspective view about an outer cylinder part is partially shown by the process drawing of these Fig.2 (a)-(e). First, as shown in FIG. 2A, a cylindrical base 10 that is a component of the outer cylinder is prepared. On the inner peripheral surface side of the cylindrical base portion 10, a cylindrical inner cylindrical portion (not shown) having the same width as the cylindrical base portion 10 and having a concentric shaft shape is provided. A space between the outer peripheral surface of the inner cylindrical portion and the inner peripheral surface of the cylindrical base portion 10 is a cooling water circulation path (not shown) through which the refrigerant flows. The material of the cylindrical base 10 is preferably a material having high thermal conductivity such as aluminum, copper, and stainless steel and excellent plating properties during electroforming.

  Next, as shown in FIG. 2 (b), a plurality of resin bodies 12 are arranged on the outer peripheral surface 10 a of the cylindrical base portion 10 over the entire circumference at substantially equal intervals in the circumferential direction. These resin bodies 12 are buried by electroforming as will be described later, and then removed by high-temperature treatment or the like, thereby forming a gas introduction path. Therefore, the resin body 12 is molded at a location where the gas introduction path is to be provided so as to have a shape substantially equivalent to the shape of the gas introduction path.

  In FIG. 2B, as an example, a plurality of rectangular parallelepiped resin bodies 12 formed on the outer peripheral surface 10a of the cylindrical base portion 10 at substantially equal intervals in the circumferential direction are arranged in the rotation axis direction. A state in which the cylindrical base 10 extends from one end to the other end in the width direction is shown. The shape of the resin body 12 is not limited to this. For example, the cross-sectional shape orthogonal to the longitudinal direction of the resin body 12 may be a triangle, a trapezoid, a semi-ellipse, a semi-circle, a polygon, or the like in addition to the rectangle shown in FIG.

  Further, each resin body 12 may extend in a direction parallel to the outer peripheral surface 10a and inclined with respect to the rotation axis. That is, each resin body 12 may be curved or bent into an S shape or the like as long as it extends on the outer peripheral surface 10a. Furthermore, one end portion of each resin body 12 may not extend to the end portion of the cylindrical base portion 10. However, even in this case, the length of the resin body 12 is preferably 50% or more of the width of the cylindrical base portion 10.

  The resin used for the resin body 12 is made of a material that remains solid in the subsequent electroforming process and can be removed in the subsequent removing process. An example of such a resin is a resin having a softening point of 60 ° C. or higher and lower than 100 ° C. If the softening point of the resin is 60 ° C. or higher, the resin will not melt in the electroforming process. On the other hand, by setting the softening point to less than 100 ° C., the resin can be easily removed by dipping in warm water. The resin used for the resin body 12 may be a water-soluble or alkaline aqueous solution-soluble resin, or a water-insoluble one that is soluble only in an organic solvent. Among these, it is desirable that it is water-soluble or soluble in an alkaline aqueous solution in consideration of usability.

  For example, when the resin body 12 is a resin in which a polyglycerin fatty acid ester resin and a polyvinylpyrrolidone / vinyl acetate copolymer resin are mixed, the desired softening point is achieved by appropriately selecting the mixing ratio thereof. can do. That is, as described above, in the electroforming process, it can be melted away with warm water while maintaining a solid state. Alternatively, when a three-membered ring compound such as abietic acid is used for the resin body 12, the resin body 12 can be dissolved in an alkaline aqueous solution while achieving a softening point for maintaining a solid in the electroforming process. Examples of resins exhibiting such properties include those known as fixed waxes used in polishing and cutting of semiconductor wafers, for example.

  As described above, the resin used for the resin body 12 may be removed by dissolving in hot water, or may be removed by dissolving in an alkaline aqueous solution. The liquid used in the removing step is the resin material. Appropriately selected based on Furthermore, it is also possible to obtain a conductive resin by appropriately adding metal powder such as silver powder or carbon powder to the resin. The resin body 12 is, for example, disposed on the outer peripheral surface 10a after being molded into the shape of the gas introduction path, or discharging resin that flows by heating into the shape of the gas introduction path using a syringe or the like. Thus, the outer peripheral surface 10a of the cylindrical base 10 can be formed.

  Next, as shown in FIG. 2C, the outermost peripheral portion 13 is formed on the outer peripheral surface 10 a of the cylindrical base portion 10 by electroforming so as to cover the resin body 12. Here, the electroforming method is a method in which a metal is deposited thickly by electroplating. Accordingly, as a pretreatment, a metal film is formed on the surface of the cylindrical base 10 provided with the resin body 12 by sputtering, electroless plating, or application of a conductive paint or conductive powder. It is necessary to impart conductivity. In addition, if the resin body 12 itself is formed of a conductive resin, it is not necessary to provide conductivity by the pretreatment.

  Since a long resin film is wound around the outer peripheral portion of the outermost peripheral portion 13 formed by the electroforming method, after the outermost peripheral portion 13 is formed, the outer peripheral surface is substantially in a cross section orthogonal to the rotation axis direction of the can roll. It is desirable to perform polishing so as to form a perfect circle. Polishing can use a known method.

  Next, the outer cylinder part which consists of the cylindrical base part 10 and the outermost peripheral part 13 formed in the outer peripheral surface 10a is immersed in warm water, alkaline aqueous solution, an organic solvent etc. according to the material of the resin body 12 as mentioned above. . Thereby, the resin body 12 is removed, and a cylindrical member having a plurality of gas introduction paths 14 as shown in FIG. 2D is obtained.

  Next, drilling is performed by a laser or a micro drill from the outer peripheral surface side of the cylindrical member toward the gas introduction path 14. Thereby, as shown in FIG. 2 (e), a plurality of gas discharge holes 15 can be opened in each gas introduction path 14. FIG. 2E shows an example in which five gas discharge holes 15 are provided in each gas introduction path 14. In the case of drilling with a micro drill, the depth is generally limited to 10 to 20 times the hole diameter.

  When drilling in the outermost peripheral portion 13 made of copper with a laser, a laser having an oscillation wavelength from the visible region to the near infrared region absorbed by copper may be used, and a pulse YAG laser or a fiber laser is particularly suitable. Further, an infrared wavelength carbon dioxide laser that hardly absorbs copper can be processed by applying an absorbing paint or the like to the processing surface. In addition, although the said method drills the gas discharge hole 15 after the removal of the resin body 12, it may be reverse. That is, the gas introduction path 14 may be formed by removing the resin body 12 after the gas discharge hole 15 is drilled by a laser or the like.

  Next, a second embodiment of the manufacturing method of the present invention will be described with reference to the process diagrams of FIGS. In the process diagrams of FIGS. 3A to 3E, only a perspective view of the outer cylinder portion is partially shown as in FIGS. 2A to 2E. In the manufacturing method of the second embodiment, first, the outer peripheral surface of a cylindrical base similar to that shown in FIG. 2A is ground by using a processing machine, and a plurality of the bases as shown in FIG. A plurality of groove portions 21 corresponding to the gas introduction path are formed.

  FIG. 3A shows, as an example, a plurality of groove portions 21 formed on the outer peripheral surface 20a of the cylindrical base portion 20 over the entire circumference with a substantially uniform interval in the circumferential direction. Each groove portion 21 extends from one end to the other end in the width direction of the cylindrical base portion 20 in parallel with the rotation axis direction. The groove portion 21 having such a structure can be ground by using a known machining technique, and the machining time can be drastically shortened unlike the formation of a gas introduction path by a conventional gun drill. The groove 21 may be formed by electroforming.

  The cross-sectional shape orthogonal to the longitudinal direction of the groove portion 21 may be a triangle, a trapezoid, a semi-elliptical shape, a semi-circular shape, a polygonal shape, etc. in addition to the rectangle shown in FIG. In addition, the extending direction of each groove portion 21 may extend in a direction parallel to the outer peripheral surface 20a and inclined with respect to the rotation axis. That is, each groove portion 21 may be curved or bent in an S shape or the like as long as it extends on the outer peripheral surface 20a. Furthermore, the end of each groove 21 where no gas is introduced may not extend to the end of the cylindrical base 20. However, even in this case, the length of the groove portion 21 is preferably 50% or more of the width of the cylindrical base portion 20.

  Next, as shown in FIG. 3B, each groove portion 21 is filled with a resin 22. For this resin 22, for example, a resin having a softening point of 60 ° C. or higher and lower than 100 ° C. similar to the resin body 12 of the first embodiment can be used. As in the first embodiment, when the resin 22 is not a conductive resin, the resin 22 is subjected to a conductive treatment by sputtering or the like.

  Next, the outermost peripheral portion 23 is formed as shown in FIG. 3C by performing electroforming (thickening electroplating) on the cylindrical base portion 20 in which the groove portion 21 is filled with the resin 22. Suitable materials for the outermost peripheral portion 23 are copper, silver, and nickel, which have high thermal conductivity and a high growth rate during plating (electroforming). The thinner the outermost peripheral portion 23 formed by this electroforming method, the better the workability of the gas discharge hole in the next process, but it requires some strength when the outer peripheral surface is cut and polished. 1-5 mm is preferable. In the first embodiment, when a metal is laminated on the outer peripheral surface 10a of the cylindrical base portion 10 without electroconductive treatment on the surface of the non-conductive resin body 12, the groove portion is filled with resin as a result. It is possible to obtain a structure similar to the structure of FIG.

  After the outermost peripheral portion 23 is formed, the resin 22 is removed by immersing in hot water, an alkaline aqueous solution, an organic solvent or the like in the same manner as the first embodiment described above, and the gas introduction as shown in FIG. A cylindrical member provided with the path 24 is obtained. The obtained cylindrical member is further perforated by a laser or a micro drill from the outer peripheral surface side toward the gas introduction path 24 in the same manner as in the first embodiment. Thereby, as shown in FIG. 3E, a plurality of gas discharge holes 25 can be provided in each gas introduction path 24.

  By the way, although the manufacturing method of the said 1st and 2nd embodiment was opening a gas discharge hole with a laser or a micro drill, the method of opening a gas discharge hole is not limited to this. For example, when filling the groove 21 with the resin 22 in the second embodiment, as shown in FIG. 4A, a plurality of the same materials as the resin 22 described above are used at positions corresponding to the gas discharge holes 25, respectively. The protrusion 30 is formed. These protrusions 30 can be processed by, for example, known injection molding. In this state, after conducting the conductive treatment, the outermost peripheral portion 31 is formed by electroforming. As a result, as shown in FIG. 4B, a mountain-shaped raised portion 32 is formed on the outer peripheral surface of the outermost peripheral portion 31 formed by electroforming at a position corresponding to the protruding portion 30.

  Then, by polishing the outer peripheral surface of the outermost peripheral portion 31 having the raised portion 32 so as to be a perfect circle in a cross section orthogonal to the rotation axis, a large amount of metal is scraped off at the raised portion 32. The resin of the part 30 is exposed. Thereby, the gas discharge hole 25 can be formed. As described above, by forming the protrusion on the surface of the resin provided on the cylindrical base, the gas discharge hole can be formed without using laser or micro drilling.

  If it is not necessary to partially stop the supply of the introduced gas by not using the gas rotary joint, the gas introduction path may have a spiral shape surrounding the outer peripheral surface of the can roll. In addition, the outer peripheral surface of the outermost peripheral portion is surrounded by hard plating such as chromium plating, nickel plating, diamond-like carbon coating, tungsten carbide coating, titanium nitride coating so as not to scratch the long resin film to be conveyed. The surface may be processed.

  As described above, in the can roll manufacturing method according to the present invention, since it is not necessary to use a gun drill when forming the gas introduction path, a thin gas introduction path having a desired shape is connected to the outer peripheral surface of the outer cylinder portion of the can roll. Can be formed near. In addition, the can roll manufacturing method according to the present invention can form a gas introduction path thinner than the gun drill in a short time, and the gas accumulation in the gas introduction path is reduced, so that the controllability when controlling the gas introduction amount is improved.

  Furthermore, since the gas introduction path can be formed near the surface of the outer cylinder portion, the depth of the gas discharge hole can be reduced, and the processing time by the laser or the micro drill can be shortened. In addition, the thickness of the entire outer cylinder portion can be reduced, and the outer cylinder portion can be manufactured from copper having good thermal conductivity by electroforming, so that the long resin film can be efficiently cooled during film formation. Can do. In this way, by installing a can roll with a gas releasing mechanism having an outer cylinder part produced by the method of the present invention on a sputtering web coater of a long resin film by a roll-to-roll method, Damage can be significantly improved.

  As a processing apparatus for a long resin film by a roll-to-roll method provided with a can roll, for example, there is a film forming apparatus shown in FIG. 5, specifically, a vacuum film forming apparatus by sputtering. This sputtering vacuum deposition apparatus will be specifically described with reference to FIG. The long resin film deposition apparatus shown in FIG. 5 is an apparatus called a sputtering web coater, which continuously and efficiently deposits a film on the surface of the long resin film conveyed by a roll-to-roll method. It is preferably used when applied.

  A film forming apparatus (sputtering web coater) 50 for a long resin film conveyed by a roll-to-roll method is provided in a vacuum chamber 51, and a long resin film F unwound from an unwinding roll 52 is motored. Then, a predetermined film forming process is performed while being wound around the can roll 56 and conveyed, and then taken up by the take-up roll 64. The can roll 56 arranged in the middle of the conveyance path from the unwind roll 52 to the take-up roll 64 is rotationally driven by a motor, and a temperature-controlled refrigerant circulates inside the can roll 56.

In the film forming apparatus 50, the pressure inside the vacuum chamber 51 is reduced to an ultimate pressure of about 10 ⁻⁴ Pa during sputtering film formation, and then the pressure is adjusted to about 0.1 to 10 Pa by introducing a sputtering gas. A known gas such as argon is used as the sputtering gas, and a gas such as oxygen is further added according to the purpose. The shape and material of the vacuum chamber 51 are not particularly limited as long as they can withstand a reduced pressure state, and various types can be used. In order to maintain the reduced pressure state in the vacuum chamber 51 described above, the vacuum chamber 51 is provided with various devices such as a dry pump, a turbo molecular pump, and a cryocoil (not shown).

  A free roll 53 that guides the long resin film F and a tension sensor roll 54 that measures the tension of the long resin film F are arranged in this order on the conveyance path from the unwinding roll 52 to the can roll 56. Yes. The long resin film F fed from the tension sensor roll 54 toward the can roll 56 is adjusted with respect to the peripheral speed of the can roll 56 by a motor-driven feed roll 55 provided in the vicinity of the can roll 56. Accordingly, the long resin film F can be brought into close contact with the outer peripheral surface of the can roll 56 and conveyed.

  Similarly to the above, the motor-driven feed roll 61 that adjusts the peripheral speed of the can roll 56 and the tension sensor roll that measures the tension of the long resin film F are also provided on the conveyance path from the can roll 56 to the take-up roll 64. 62 and a free roll 63 for guiding the long resin film F are arranged in this order.

  In the unwinding roll 52 and the winding roll 64, the tension balance of the long resin film F is maintained by torque control using a powder clutch or the like. Further, the long resin film F is unwound from the unwinding roll 52 and wound around the winding roll 64 by the rotation of the can roll 56 and the motor-driven feed rolls 55 and 61 that rotate in conjunction with the rotation of the can roll 56. It has become.

  In the vicinity of the can roll 56, magnetron sputtering cathodes 57, 58, 59, and 60 as film forming means are provided at positions facing the conveyance path where the long resin film F is wound on the outer cylinder portion of the can roll 56. It has been. In addition, the angle range A shown in FIG. 5 corresponding to the range in which the long resin film F is wound around the outer cylinder portion of the can roll 56 may be referred to as a holding angle of the long resin film F.

  In the case of sputtering a metal film, a plate-like target can be used as shown in FIG. 5, but when a plate-like target is used, nodules (growth of foreign matter) are generated on the target. There is. When this becomes a problem, it is preferable to use a cylindrical rotary target that generates no nodules and has high target use efficiency.

  In addition, since the film forming apparatus 50 for the long resin film F in FIG. 5 is assumed to be a sputtering process as a process to which a thermal load is applied, the magnetron sputtering cathodes 57, 58, 59, and 60 are illustrated. In the case where the heat-applying process is another process such as a vapor deposition process, another vacuum film forming means is provided instead of the plate target. Note that CVD (chemical vapor deposition), vacuum deposition, or the like can be used as another vacuum film forming process that requires a thermal load.

  The can roll used in the film forming apparatus shown in FIG. 5 has a structure shown in FIG. 6, for example. More specifically, the outer cylinder portion 1 has a plurality of gas introduction passages 4 arranged in parallel to the direction of the rotation axis O over the entire circumference at substantially equal intervals in the circumferential direction. Yes. Each of the plurality of gas introduction paths 4 has a plurality of gas discharge holes 5 that open to the outer peripheral surface side at substantially equal intervals in the direction of the rotation axis O of the can roll.

  A cooling water circulation path 3 through which a coolant such as cooling water flows is formed on the inner surface side of the outer cylinder portion 1. The cooling water circulation path 3 may be formed between the outer cylinder portion 1 as shown in FIG. 6 and the inner cylinder portion 2 concentric with the outer cylinder portion 1, and a flow path such as a pipe is provided on the inner peripheral surface of the outer cylinder portion 1. For example, they may be arranged in a spiral shape. The refrigerant flowing in the cooling water circulation path 3 is cooled by a refrigerant cooling device (not shown) provided outside the apparatus and circulates between the cooling water circulation path 3 and the can roll. The temperature of the outer cylinder portion 1 can be adjusted. Such a structure is called a jacket roll structure.

  The gas supplied from the gas supply line 7 is distributed to each gas introduction path 4 through the gas rotary joint 6, and is discharged from the outer peripheral surface of the outer cylinder portion 1 through the gas introduction path 4 and the gas discharge hole 5. Thereby, gas is introduce | transduced into the gap part between the outer peripheral surface of a can roll, and the elongate resin film wound there.

  The number of these gas introduction paths 4 and the number of gas discharge holes 5 of each gas introduction path 4 are appropriately determined according to the length of the long resin film, the tension of the long resin film, the amount of gas released, and the like. be able to. The inner diameter of each gas discharge hole 5 is not particularly limited as long as the gas can be satisfactorily introduced into the gap portion between the outer peripheral surface of the can roll and the long resin film wound around the can roll. However, if the diameter of the gas discharge hole 5 exceeds 1000 μm, the cooling efficiency immediately above the gas discharge hole is reduced, so that a diameter of about 30 to 1000 μm is generally preferable.

  Regarding the plurality of gas discharge holes 5 provided in each gas introduction path 4, it is possible to make the heat conductivity uniform over the entire outer cylinder part by arranging a large number of gas discharge holes 5 having a small inner diameter with a narrow pitch. It is preferable in terms. However, since a processing technique for providing a large number of gas discharge holes 5 with a small inner diameter at a narrow pitch is difficult, in reality, it is more preferable to arrange the gas discharge holes 5 with a diameter of about 100 to 500 μm at a pitch of 5 to 10 mm. preferable.

  The gas supplied to the plurality of gas introduction paths 4 is supplied from the gas supply line 7 to each gas introduction path 4 through the gas rotary joint 6 and pipes. When the gas introduction path 4 is located in a region other than the holding angle A with which the long resin film contacts on the rotating outer surface of the can roll, the gas supply control is such that the gas supply to the gas introduction path 4 can be cut off. Preferably means are provided. Examples of such gas supply control means include a mechanically or electromagnetically operated valve that can partially close the gas flow path in the gas rotary joint 6.

  Thereby, in the range of the holding angle A where the long resin film is wound around the can roll, gas is released from the gas discharge hole 5, so that the gap formed by the outer peripheral surface of the can roll and the long resin film is formed. Gas is released. On the other hand, no gas is released from the gas discharge holes 5 other than the holding angle A where the long resin film is not wound. Therefore, since most of the introduced gas can be discharged to the gap formed between the outer peripheral surface of the can roll and the long resin film, the gas flow rate control for maintaining the gap interval substantially constant becomes easy. It becomes possible to make the thermal conductance uniform in the entire gap portion between the outer peripheral surface of the can roll and the long resin film.

  When the distance between the outer peripheral surface of the can roll and the long resin film wound around the can roll is about 40 μm, the gas released into the gap can be exhausted by a vacuum pump provided in the vacuum film forming apparatus. . Therefore, if the type of gas released into the gap is the same as the type of gas in the sputtering atmosphere, the sputtering atmosphere will not be contaminated.

  The can roll obtained by the production method of the present invention can be suitably used for plasma processing and ion beam processing in addition to the film forming apparatus described above. In other words, plasma treatment and ion beam treatment are performed under a reduced pressure atmosphere in a vacuum chamber for the purpose of surface modification of a long resin film, but the heat treatment is applied to the long resin film, which causes wrinkles. It becomes. Therefore, if the gas release can roll obtained by the production method of the present invention is used, the gap interval between the outer peripheral surface of the gas release can roll and the long resin film can be maintained almost constant, and the thermal conductance is reduced. Since it can be made uniform easily, the generation of wrinkles can be eliminated.

  The plasma treatment is a known plasma treatment method, for example, by performing discharge in a reduced-pressure atmosphere made of a mixed gas of argon and oxygen or a mixed gas of argon and nitrogen, thereby generating oxygen plasma or nitrogen plasma for a long time. It is a method of processing a scale resin film. In addition, ion beam treatment uses a known ion beam source, generates a plasma discharge with a magnetic field gap to which a strong magnetic field is applied, and irradiates positive ions in the plasma as an ion beam by electrolysis with an anode. This is a method of treating a resin film.

  Moreover, as a heat resistant resin film used for a heat resistant resin film with a metal film, for example, a polyethylene terephthalate (PET) film, a polyimide film, a polyamide film, a polyester film, a polytetrafluoroethylene film, a polyphenylene sulfide film , Polyethylene naphthalate film, liquid crystal polymer film and the like. These heat-resistant resin films are preferable because they have flexibility as a flexible substrate with a metal film, strength necessary for practical use, and electrical insulation suitable as a wiring material.

  A heat resistant resin film with a metal film can be obtained by using a heat resistant resin film as the long resin film and forming a metal film by sputtering or the like. Specifically, a wrinkle-free long heat-resistant resin film with a metal film can be produced by a metalizing method using a film-forming apparatus (sputtering web coater) for a long heat-resistant resin film with a metal film.

  Examples of the long heat-resistant resin film with a metal film include a structure in which a film made of a Ni-based alloy or the like and a Cu film are laminated on the surface of the heat-resistant resin film. The heat resistant resin film with a metal film having such a structure is processed into a flexible wiring board by a subtractive method. Here, the subtractive method is a method of manufacturing a flexible wiring substrate by removing a metal film (for example, the Cu film) not covered with a resist by etching.

  The film made of Ni alloy or the like is called a seed layer, and Ni—Cr alloy or various known alloys such as Inconel, Constantan and Monel can be used, and the composition thereof is the electric insulation of the heat-resistant resin film with a metal film. Is selected according to desired characteristics such as stability and migration resistance. Moreover, when it is desired to make the metal film of the long heat-resistant resin film with a metal film thicker, the metal film may be formed using a wet plating method. In some cases, the metal film is formed only by electroplating, or in combination with electroless plating as primary plating and wet plating such as electrolytic plating as secondary plating. The wet plating process may employ various conditions of a conventional wet plating method.

  In this way, a high-quality heat-resistant resin film with a metal film that does not generate wrinkles can be produced with a high yield and applied to flexible wiring boards such as liquid crystal televisions and mobile phones. In addition, as the heat-resistant resin film with a metal film, a structure in which a metal film such as a Ni—Cr alloy or Cu is laminated on a long heat-resistant resin film is exemplified. It is also possible to use a film, a nitride film, a carbide film, or the like. The can roll manufacturing method of the present invention can also be used for the can roll manufacturing method used for the film forming process.

  Using a film-forming apparatus (sputtering web coater) 50 for a long heat-resistant resin film with a metal film shown in FIG. A Cu film was formed. For the long resin film F, a heat-resistant polyimide film “UPILEX (registered trademark)” manufactured by Ube Industries, Ltd. having a width of 500 mm, a length of 800 m, and a thickness of 25 μm was used. As the can roll 56, a can roll with a gas release mechanism as shown in FIG. 6 produced by the production method of the present invention was used.

  The can roll with a gas release mechanism had a diameter of 900 mm and a width of 750 mm, and an outermost peripheral portion made of copper having a thickness of 2 mm was formed on the outer cylinder portion by electroforming. In addition, 360 gas introduction passages having a cross section of 2 mm × 2 mm are formed at regular intervals, and 47 mm gas discharge holes having an inner diameter of 0.2 mm are formed in each gas introduction passage by a YAG laser having an oscillation wavelength of 1.064 μm at intervals of 10 mm. Provided. However, gas release holes were made not to exist in the vicinity of both ends 20 mm of the long resin film F. Hard chrome plating was applied to the outer peripheral surface of the outer cylinder.

  This can roll with a gas release mechanism was produced by the following manufacturing method. First, a stainless steel roll having a diameter of 896 mm and a width of 750 mm was prepared. This stainless steel roll has a jacket roll structure composed of an outer cylinder part 1 and an inner cylinder part 2 concentric with the outer cylinder part 1 as shown in FIG. 6, and between these outer cylinder part 1 and inner cylinder part 2. The cooling water circulation path 3 through which the refrigerant flows is formed.

  As shown in FIG. 3A, the cylindrical base portion of the outer cylindrical portion 1 has a width of 2 mm, a depth of 2 mm, and a length parallel to the rotation axis direction over the entire circumference at substantially equal intervals in the circumferential direction. 360 pieces of 750 mm groove portions 21 were ground. These groove portions 21 were filled with conductive resin 22 having a softening point of 80 ° C. as shown in FIG. This conductive resin 22 was obtained by kneading a mixed powder of 70% hexaglycerin tristearate resin and 30% polyvinylpyrrolidone / acetic acid copolymer resin and silver powder.

  Next, as shown in FIG. 3C, the outermost peripheral portion 23 was formed by electroforming, and immersed in warm hot water at 95 ° C. to remove the conductive resin 22 by dissolution. As a result, as shown in FIG. 3 (d), the gas introduction path 24 provided over the entire circumference with a substantially uniform interval in the circumferential direction of the cylindrical base 20 was provided. Note that one end of each groove 21 was closed by welding a stainless steel disk. The reason why the grooves 21 are first ground to both ends is to facilitate removal of the resin filled in the grooves. Thereafter, the surface of the outermost peripheral portion 23 was polished so as to be substantially circular in a cross section perpendicular to the rotation axis of the can roll. After the outermost peripheral portion 23 was polished, a plurality of gas discharge holes 25 were opened in each gas introduction path 24 as shown in FIG. As shown in FIG. 6, the gas rotary joint 6 is connected to the entrance of the gas introduction path 24 on one side surface (side surface where the groove portion 21 is formed to the end portion) of the can roll with the gas release mechanism thus obtained. I let you.

  The angle at which the long resin film F does not come into contact with the can roll 56 around the can roll 56 of the film forming apparatus 50 (an angle other than the film holding angle A) was about 30 °. As a result, there are 30 gas introduction paths 24 existing in this angular range. Gas was prevented from flowing through the flow path in the gas rotary joint 6 corresponding to this angle range.

  In order to form a Ni—Cr film and a Cu film as seed layers on the polyimide film, a Ni—Cr target was used for the magnetron sputter target 57 and a Cu target was used for the magnetron sputter targets 58 to 60. . Argon gas was introduced at 300 sccm, and the power applied to each cathode was 5 kW. Furthermore, the tension of the unwinding roll 52 and the winding roll 64 was 80 N, and the can roll 56 was controlled to 20 ° C. by water cooling.

Then, the heat-resistant polyimide film was set on the unwinding roll 52, and the tip of the heat-resistant polyimide film was attached to the winding roll 64 via the can roll 56. The vacuum chamber 51 was evacuated to 5 Pa with a plurality of dry pumps, and then further evacuated to 3 × 10 ⁻³ Pa using a plurality of turbo molecular pumps and cryocoils. Next, after the conveyance speed of the heat-resistant polyimide film was set to 4 m / min, argon gas was introduced into each magnetron sputtering cathode and electric power was applied, and 1000 sccm of argon gas was introduced into the can roll 56, and Ni—Cr Film formation and a Cu film on the film were started.

  During film formation, the surface shape of the heat-resistant polyimide film was measured with a laser displacement meter installed between magnetron sputtering cathodes. As a result, it was confirmed that the heat-resistant polyimide film was separated from the outer peripheral surface of the can roll 56 by about 40 μm. Note that the gap interval between the outer peripheral surface of the can roll 56 and the heat-resistant polyimide film varies depending on the type and thickness of the heat-resistant polyimide film, the film conveyance tension, the amount of gas introduced, and the like.

  And while observing from the observation window which can observe the polyimide film surface on the can roll 56 during film-forming, the electric power applied to each cathode was increased gradually. As a result, the maximum sputtering power (total of four units) that does not cause wrinkles due to the thermal load of sputtering was 80 kW.

  Thus, the processing method of the long resin film which employ | adopted the can roll with a gas emission mechanism produced with the manufacturing method of this invention makes sputtering power high compared with the can roll with a gas emission mechanism produced with the conventional gun drill. Therefore, the film transport speed for obtaining the same film thickness can be increased, and the productivity can be improved. In addition, the can roll manufacturing method of the present invention can manufacture a can roll with a gas release mechanism in a short time as compared with the manufacture with a conventional gun drill, and the manufacturing cost is low. This contributed to the cost reduction of the heat-resistant resin film with metal film.

DESCRIPTION OF SYMBOLS 1 Outer cylinder part 2 Inner cylinder part 3 Cooling water circulation path 4 Gas introduction path 5 Gas discharge hole 6 Gas rotary joint 7 Gas supply line 8 Bearing 10 Cylindrical base 12 Resin body 13 Outermost peripheral part 14 Gas introduction path 15 Gas discharge hole 20 Cylindrical base portion 21 Groove portion 22 Resin 23 Outermost peripheral portion 24 Gas introduction path 25 Gas discharge hole 30 Projection portion 31 Outermost peripheral portion 32 Swelling portion 50 Film forming apparatus 51 Vacuum chamber 52 Unwinding roll 53 Free roll 54 Tension sensor roll 55 Feed roll 56 Can Roll 57-60 Magnetron Sputtering Cathode 61 Feed Roll 62 Tension Sensor Roll 63 Free Roll 64 Winding Roll F Long (Heat Resistant) Resin Film

Claims (12)

A plurality of gas introductions comprising a cylindrical base portion and an outermost peripheral portion provided on the outer peripheral surface thereof, and introducing a gas released to the outer peripheral surface side of the outermost peripheral portion between the base portion and the outermost peripheral portion. A method for producing a can roll with a buried road,
A step of disposing a plurality of resin bodies having substantially the same shape as the gas introduction passages at the positions of the plurality of gas introduction passages, and electroforming on the outer peripheral surface of the base so as to cover the plurality of resin bodies. A method for manufacturing a can roll, comprising: a step of forming the outermost peripheral portion; and a step of removing the plurality of resin bodies after forming the outermost peripheral portion.   In the step of disposing the plurality of resin bodies, the plurality of resin bodies are disposed over the entire circumference at substantially equal intervals in the circumferential direction of the base, and each resin body is in the direction of the rotation axis of the can roll 2. The method for producing a can roll according to claim 1, wherein the can roll is formed so that the length in the rotation axis direction is 50% or more of the width of the can roll.   In the step of disposing the plurality of resin bodies, a plurality of groove portions that respectively define the plurality of gas introduction paths are formed on the outer peripheral surface side of the base portion, and the plurality of groove portions are filled with resin to form the plurality of resin portions. The method for producing a can roll according to claim 1, wherein a resin body is provided.   The method for producing a can roll according to any one of claims 1 to 3, wherein in the step of forming the outermost peripheral portion, a conductive treatment is applied to the plurality of resin bodies before the electroforming method. .   The method for producing a can roll according to any one of claims 1 to 4, wherein the plurality of resin bodies have a softening point of 60 ° C or higher and lower than 100 ° C.   The method for producing a can roll according to any one of claims 1 to 3, wherein the plurality of resin bodies are conductive resins.   The method of manufacturing a can roll according to any one of claims 1 to 6, wherein the outermost peripheral portion is formed of copper.   Each of the plurality of gas introduction paths further includes a step of providing a plurality of gas discharge holes opened on the outer peripheral surface of the outermost peripheral portion at substantially equal intervals in the rotation axis direction of the can roll. The manufacturing method of the can roll in any one of Claims 1-7.   The method of manufacturing a can roll according to claim 8, wherein the step of providing the plurality of gas discharge holes is a step of drilling with a laser or a micro drill.   In the step of providing the plurality of gas discharge holes, a plurality of resin protrusions are respectively formed in positions corresponding to the plurality of gas discharge holes in the step of disposing the plurality of resin bodies. The outermost peripheral portion having a plurality of raised portions is formed on the outer peripheral surface by performing the step of forming the outermost peripheral portion, and the plurality of gas discharge holes are opened by polishing the surface. The manufacturing method of the can roll of Claim 8.   After the step of providing the plurality of gas discharge holes, the method further includes a step of polishing the outer peripheral surface of the outermost peripheral portion so that a cross-sectional shape orthogonal to the rotation axis direction of the can roll becomes a substantially perfect circle The method for producing a gas release can roll according to claim 8 or 9, wherein:   The can roll according to any one of claims 8 to 11, further comprising a step of performing hard plating on an outer peripheral surface of the outermost peripheral portion after the step of providing the plurality of gas discharge holes. Manufacturing method.

Images