JP6127771B2 - Core adapter, winding device having the same, and roll-to-roll surface treatment apparatus provided with the device - Google Patents

Description

  The present invention relates to a core adapter for winding a long substrate transported by roll-to-roll and a winding device having the core adapter, and in particular, a continuous heat-resistant resin film such as sputtering while being transported by roll-to-roll. The present invention relates to a core adapter used in a roll-to-roll surface treatment apparatus for forming a film and a winding apparatus having the core adapter.

  In a liquid crystal panel, a notebook computer, a digital camera, a mobile phone, and the like, a flexible wiring board in which a wiring pattern is formed on a heat resistant resin film is used. This flexible wiring board is manufactured by applying a patterning process to a heat-resistant resin film with a metal film in which a metal film is formed on one or both sides of the heat-resistant resin film. There is a tendency to increase the density, and accordingly, a heat-resistant resin film with a metal film is required to be smooth without wrinkles.

  As a method for producing this type of heat-resistant resin film with a metal film, conventionally, a method in which a metal foil is attached to a heat-resistant resin film with an adhesive (a method for producing a three-layer substrate), a heat-resistant resin solution on a metal foil After coating, the method of manufacturing by drying (casting method), manufacturing by forming a metal film on a heat-resistant resin film by vacuum film forming method alone or by combination of vacuum film forming method and wet plating method A method (metalizing method) or the like is known. Examples of the vacuum film forming method used for the metalizing method include a vacuum deposition method, a sputtering method, an ion plating method, and an ion beam sputtering method.

  Regarding the metallizing method, Patent Document 1 describes a method of forming a conductor layer by sputtering copper after sputtering a chromium layer on a polyimide insulating layer. Patent Document 2 discloses a flexible circuit board in which a first metal thin film by sputtering using a copper nickel alloy as a target and a second metal thin film by sputtering using copper as a target are formed on a polyimide film. A material is disclosed. Film formation by these sputtering methods is generally excellent in adhesion, but it is said that the heat load applied to the heat-resistant resin film as a base material is larger than that of the vacuum deposition method. It is also known that when a large heat load is applied to the heat resistant resin film during film formation, the film is likely to be wrinkled.

  Therefore, in the process of producing a heat-resistant resin film with a metal film by forming a film on the heat-resistant resin film such as the polyimide film by a vacuum film-forming method, sputtering with a can roll in which a coolant is circulated is provided. Web coaters are commonly used. This device has a long heat-resistant resin film that is transported by a so-called roll-to-roll system that is unwound from a winding roll and wound by a winding roll. Sputtering is performed while being wound around the outer peripheral surface and cooling.

  In order to satisfactorily cool the heat-resistant resin film with a metal film with such a can roll, it is important to stably adhere the heat-resistant resin film with a metal film to the outer peripheral surface of the can roll. In the two-roll system, tension control is precisely performed by tension sensor rolls provided on the upstream side and the downstream side of the can roll. Further, in the take-up roll, in order to prevent wrinkles from being taken up with a stable tension, the tension control is performed by the upstream tension sensor roll in the same manner as the can roll.

Japanese Patent Laid-Open No. 2-98994 Japanese Patent No. 3447070

  However, even when film formation is performed while cooling with a can roll of a sputtering web coater, the heat-resistant resin film with metal film is wound on the take-up roll due to the large heat load that the heat-resistant resin film with metal film receives during film formation. When removed, wrinkles may occur at the center of the resin film, particularly in the width direction. In order to reduce the generation of wrinkles, a near roll may be installed on the upper part of the winding roll, but the generation of wrinkles may not be sufficiently prevented.

  This is because only the unwinding roll and the winding roll have different support mechanisms from the other rolls. Specifically, each of the unwinding roll and the winding roll is provided on both sides of the cylindrical core. After the core adapter is attached to the cylinder, a method is adopted in which a member called a tapered cone attached to the tip of the piston rod of the cylinder is sandwiched and fixed from both sides. Therefore, the degree of eccentricity between the center axis of the core and the center axis of the cylinder depends on whether or not the core and the core adapter are attached to each other, which may cause wrinkles in the resin film.

  The present invention has been made in view of such conventional problems, and an object of the present invention is to produce a high-quality heat-resistant resin film substrate with a metal film without wrinkles with high productivity.

In order to achieve the above object, an adapter provided by the present invention is a pair of core adapters attached to both sides of a cylindrical core for winding a long substrate around an outer peripheral surface, and each core adapter is attached to the core. A first engaging portion having an inclined surface formed on an inner peripheral side edge of the cylindrical portion so as to contact the inclined surface of the truncated conical support member biased toward the entire circumference; An insertion portion having a shape in which only the outer peripheral surface is reduced in diameter with respect to the first engagement portion so as to be fitted from the end to the inner side of the core, and a step on the outer peripheral surface side of the first engagement portion and the insertion portion formed by, it consists of a second engaging portion which engages through a flexible member on one end face of the core, except for the inclined surface of the step and the first engagement portion of the second engagement portion no step on the outer peripheral surface and inner peripheral surface side as a whole, have an oblique wound coil spring is wound around the outer peripheral surface of the insertion portion It is characterized in that.

  According to the present invention, a high-quality heat-resistant resin film substrate with a metal film free from wrinkles can be produced with high productivity.

It is a front view which shows one specific example of the vacuum film-forming apparatus with which the winding apparatus which has a core adapter which concerns on this invention is used suitably. It is explanatory drawing of the attachment method of the core adapter which concerns on this invention, and after a core adapter is inserted in the both ends of a core, a mode that the both sides are supported by a taper cone is shown. It is a perspective view of an example of a core adapter concerning the present invention. It is a fragmentary sectional view when the core adapter of FIG. 3 is cut | disconnected in the axial direction, and the engagement state with the edge part of a core and the taper part of a taper cone is shown. It is the side view and front view of a normal coil spring (a) and a diagonal winding coil spring (b). It is a partial front view when the diagonally wound coil spring attached to the core adapter of FIG. 3 is viewed from the central axis direction of the core adapter, and there is no load (a) and the load is applied to the core by being fitted to the core. The state (b) is shown. It is a graph which shows the change of the winding tension fluctuation rate at the time of using the conventional core adapter and the core adapter of this invention.

  First, a long substrate vacuum film forming apparatus in which a winding apparatus having a core adapter of the present invention is preferably used will be described with reference to FIG. The vacuum film-forming apparatus shown in FIG. 1 includes a vacuum chamber composed of an unwinding chamber 111, a film-forming chamber 112, and a winding chamber 113, and a long heat-resistant material that is housed in the vacuum chamber and conveyed by roll-to-roll. Mainly composed of a group of rolls for defining a transport path of a conductive resin film substrate (hereinafter also simply referred to as a long film or a long substrate) F and a means for forming a metal film on the long film F by a metalizing method. And is also called a sputtering web coater. This vacuum film-forming apparatus is suitably used when the film forming process is continuously and efficiently performed on the surface of the long film F that is conveyed in a vacuum by a roll-to-roll method.

  Specifically, the long film F unwound from the unwinding roll 114 is wound around the outer peripheral surface of the can roll 123 and is subjected to a surface treatment with a heat load while being cooled, and then the winding roll 129 is wound up. Of the transport path from the unwinding roll 114 to the winding roll 129, the free rolls 115 and 120 for guiding the long film F between the unwinding roll 114 and the can roll 123, and the tension of the long film F The tension sensor rolls 119 and 121 for measuring the above and the motor-driven front feed roll 122 provided immediately upstream of the can roll 123 are arranged in the order of these symbols.

  The front feed roll 122 plays a role of adjusting the speed of the long film F toward the can roll 123 with respect to the peripheral speed of the can roll 123, and thereby a coolant such as water circulates inside. The long film F being continuously conveyed can be brought into close contact with the outer peripheral surface of the can roll 123, and can be cooled well.

  On the conveyance path from the unwinding roll 114 to the can roll 123, a heater box 116 for drying the long film F before sputtering film formation is provided. In the heater box 116, a pair of heaters 117 and 118 facing each other with the long film F interposed therebetween are incorporated. The type of the heaters 117 and 118 is not particularly limited as long as the moisture of the long film F can be removed. For example, a sheath heater, a carbon heater, a lamp heater, or the like can be used.

  The transport path from the can roll 123 to the take-up roll 129 is the motor-driven post-feed roll 124 that adjusts the peripheral speed of the can roll 123, similarly to the transport path from the unwind roll 114 to the can roll 123 described above. Tension sensor rolls 125 and 127 for measuring the tension of the long film F and free rolls 126 and 128 for guiding the long film F are arranged in the order of these symbols. The vacuum film forming apparatus may be further provided with a free roll (not shown) for changing the conveying direction of the long film F.

  In the unwinding roll 114 and the winding roll 129, the tension balance of the long film F is maintained by torque control by a powder clutch or the like. Further, the long film F is unwound from the unwinding roll 114 by the take-up roll 129 by the rotation of the can roll 123 and the motor-driven front feed roll 122 and the rear feed roll 124 that rotate in conjunction with the rotation of the can roll 123. It is supposed to be.

  Around the can roll 123, four plate-shaped magnetron sputtering cathodes 130, 131, 132 and 133 as film forming means are formed on the outer peripheral surface along a transport path defined on the outer peripheral surface of the can roll 123. It is provided so as to face the long film F to be wound. In the case of sputtering a metal film, a plate-like target can be used. However, when a plate-like target is used, nodules (growth of foreign matter) may occur on the target. When this becomes a problem, it is preferable to use a cylindrical rotary target that generates no nodules and has high target use efficiency.

The vacuum film forming apparatus described above is further provided with vacuum exhaust equipment (not shown) such as a dry pump, a turbo molecular pump, and a cryocoil for reducing the pressure in the vacuum chamber and maintaining the state. With this evacuation equipment, the film formation chamber 112 of the film formation apparatus is depressurized to an ultimate pressure of about 10 ⁻⁴ Pa and then adjusted to a pressure of about 0.1 to 10 Pa by introducing a sputtering gas. Sputter deposition is performed under conditions. A known gas such as argon is used as the sputtering gas, and a gas such as oxygen is further added depending on the purpose. The shape and material of the vacuum chamber is not particularly limited as long as it can withstand the above-described reduced pressure state, and various types can be used.

  By using the vacuum film forming apparatus as described above, for example, when a film of a Ni-based alloy or the like and a Cu film are formed on the surface of the long film F by sputtering, a high power can be applied to the sputtering. Film formation becomes possible. Therefore, a high-quality heat-resistant resin film with a metal film without wrinkles can be produced with high productivity. The heat-resistant resin film with a metal film thus produced can be processed into a flexible wiring board by a subtractive method. Here, the subtractive method is a method of manufacturing a flexible wiring board by removing a portion of a metal film (for example, the Cu film) not covered with a resist by etching.

  The film made of the Ni alloy or the like is called a seed layer, and the composition is selected depending on desired characteristics such as electrical insulation and migration resistance of the heat-resistant resin film with a metal film. For the seed layer, various known alloys such as Ni—Cr alloy, Inconel, Constantan, and Monel can be used. Moreover, when it is desired to further increase the thickness of the metal film (Cu film) of the long heat-resistant resin film with a metal film, a wet plating process may be performed as a post-process for the vacuum film formation process. This post-treatment wet plating is a combination of wet plating methods such as thickening the metal film only by electroplating, electroless plating as primary plating, and electrolytic plating as secondary plating. May be thicker. In the wet plating process, various conditions of a general wet plating method can be employed.

  Examples of the heat-resistant resin film used for the heat-resistant resin film with a metal film include, for example, a polyimide film, a polyamide film, a polyester film, a polytetrafluoroethylene film, a polyphenylene sulfide film, and a polyethylene naphthalate film. Or the resin film chosen from a liquid crystal polymer film can be mentioned. These materials are preferable from the viewpoints of flexibility as a flexible substrate required for a heat-resistant resin film with a metal film, strength required for practical use, and suitable electrical insulation as a wiring material.

  Next, a specific example of the core adapter of the present invention used for the take-up roll 129 of the vacuum film forming apparatus described above will be described in detail. The winding roll 129 includes a cylindrical (pipe) -shaped core 10 having both ends opened as shown in FIG. 2A, and a long film having a predetermined length and width is wound around the outer peripheral surface thereof. The As shown in FIG. 2B, a pair of substantially cylindrical core adapters 20 are attached to both sides of the core 10.

  As shown in FIG. 2C, the core 10 to which the core adapter 20 is attached is sandwiched and supported by a tapered cone 31 formed of a truncated cone member from both sides. The taper cone 31 is provided at the tip of the piston rod 30 of an air cylinder (not shown). As shown in FIG. 2D, the core 10 is always supported by the air cylinder even when the core 10 is supported. It is urged in the direction of sandwiching (the direction of the arrow). The support mechanism including the piston rod 30, the tapered cone 31, and the air cylinder is mounted on a rotation drive unit (not shown), and the rotation of the rotation drive unit causes the winding roll 129 to rotate via the support mechanism. A long film is wound on the outer peripheral surface. In the present invention, the core adapter, the support mechanism, and the rotation drive unit are collectively defined as a winding device.

  The core adapter 20 will be described in more detail with reference to FIGS. The core adapter 20 is formed of a substantially cylindrical member having both ends opened, and one end thereof is a first engagement portion 21 that abuts the inclined surface 32 of the tapered cone 31 over the entire circumference. The first engaging portion 21 is formed to be thicker than the core 10, and the inner peripheral side edge portion 22 has a tapered cone 31 so that the inclined surface 32 of the tapered cone 31 can come into contact with each other. Tapered at the same angle as the inclined surface.

  The end of the core adapter 20 opposite to the first engaging portion 21 is an insertion portion 23 that is fitted into the core 10 from the end. The insertion portion 23 has a diameter smaller than that of the first engagement portion 21, and the second engagement includes an annular step surface over the entire circumference at the approximate center in the axial direction of the core adapter 20. A joint portion 24 is formed. The outer diameter of the second engaging portion 24 is formed to be larger than the inner diameter of the core 10, and the outer peripheral surface 23 a side of the insertion portion 23 is allowed to abut on the annular step surface to allow an O-ring or the like. A flexible member 25 is fitted. Thereby, when the insertion part 23 of the core adapter 20 is inserted inside the core 10, the second engagement part 24 is engaged with the one end surface 11 of the core 10 via the flexible member 25. The material of the flexible member 25 can be, for example, urethane rubber that can withstand use in a vacuum chamber.

  As described above, the taper cone 31 that is in contact with the inner peripheral side edge 22 of the first engagement portion 21 of the core adapter 20 over the entire circumference is biased in the direction of sandwiching the core 10, so the taper cone Due to the truncated conical shape 31, a centering action is performed so that the central axis of the core adapter 20 and the central axis of the tapered cone 31 coincide with each other. At this time, since the first engaging portion 21 is formed thicker than the core 10 as described above, even if the core 10 is formed of a conductive resin material that cannot be thickened, for example, The problem that the core 10 is broken or deformed by the pressing force is less likely to occur. Further, since the flexible member 25 is compressed in the axial direction of the core 10 by the annular end surface 11 of the core 10 and the second engaging portion 24 of the core adapter 20, the core 10 is rotated when the winding roll 129 rotates. And no slippage between the core adapter 20 and the core adapter 20. In addition, the diagonal winding coil spring mentioned later is not concerned in the support of the direction which pinches | interposes the core 10 by this support mechanism.

  Incidentally, since it is desired that the core adapter 20 be easily attached to or detached from the core 10, the outer diameter of the insertion portion 23 described above in the core adapter 20 is larger than the inner diameter of the core 10 as shown in FIG. 4. It is formed a little smaller. Due to this, the clearance (C) between the outer peripheral surface 23 a of the insertion portion 23 and the inner peripheral surface 10 a of the core 10 is supported by the taper cone 31 with the central axis of the core 10 horizontal and the core adapter 20. In some cases, the center axis of the core 10 is shifted downward by the clearance C from the center axis of the core adapter 20 due to the influence of the weight of the core 10, which may cause the winding roll 129 to be eccentric.

  Therefore, in the core adapter 20 of one specific example of the present invention, at least one (two are illustrated in FIGS. 3 and 4) along the circumferential direction on the outer peripheral surface 23 a of the insertion portion 23. 26 is wound. In contrast to the general coil spring shown in FIG. 5A, the diagonally wound coil spring 26 differs from the general coil spring shown in FIG. It is a spring wound so as to be inclined with respect to (direction). By joining both ends of the spring to form a substantially O-shaped ring, the coil can be elastically deformed by changing the inclination angle of the coil with respect to the load from the radial direction of the ring. Such a diagonally wound coil spring is available, for example, from Bal Seal of the United States.

  As shown in FIG. 6A, by winding an annular oblique coil spring 26 around the outer peripheral surface 23 a of the insertion portion 23 of the core adapter 20, as shown in FIG. When the insertion portion 23 is inserted inside the core 10, the oblique winding coil spring 26 is elastically deformed in the radial direction of the core adapter 20 with respect to the radial load of the core adapter 20, thereby leveling the core 10. Even at times, the centering action works and the central axis of the core adapter 20 and the central axis of the core 10 coincide.

  As a result, the clearance C between the inner peripheral surface 10a of the core 10 and the outer peripheral surface 23a of the insertion portion 23 of the core adapter 20 becomes substantially uniform over the entire circumference, and the eccentricity of the winding roll 129 hardly occurs. . At this time, since the annular oblique coil spring 26 contacts the inner peripheral surface 10a of the core 10 with a substantially uniform force over the entire circumference of the ring, the inner peripheral surface 10a of the core 10 is scraped to cause dust generation. The problem which becomes becomes difficult to occur. 6A, the diagonally wound coil in the radial direction of the core adapter 20 with respect to the coil height (H) when no load is applied to the diagonally wound coil spring 26 from the radial direction of the core adapter 20. The ratio of the deformation amount (X) of the spring 26 is referred to as a deformation rate.

  The diagonally wound coil spring 26 is preferably fixed so that it does not shift in the axial direction when the insertion portion 23 of the core adapter 20 is inserted into the core 10. Examples of the fixing method include a method in which a groove is provided on the outer peripheral surface 23a of the insertion portion 23 of the core adapter 20 over the entire circumference and the groove is fitted into the groove. Alternatively, the inclined winding coil spring may be made difficult to move by providing a taper portion or a step inclined in the axial direction in the insertion portion 23 of the core adapter 20, or mechanical coupling such as pinning the oblique winding coil spring 26. You may fix using a means.

  The above-described core adapter 20 exhibits an excellent effect when the weight of the core 10 is heavy, and specifically, a remarkable effect that the eccentricity can be suppressed when the weight of the core 10 is 3 kg or more is obtained. Moreover, when the film thickness of the long film F is thin, wrinkles are likely to occur and the influence of eccentricity is large, so that a remarkable effect is obtained when the film thickness of the long film F is about 5 to 25 μm. When the take-up roll 129 is eccentric, the tension sensor roll detects a change in tension, and thereby a control system for changing the driving force of the take-up roll 129 to make the take-up tension constant is effective. The control system becomes difficult to follow when the film conveyance speed is 1 m / min or more.

  In the core adapter 20 of the present invention, the clearance C between the inner peripheral surface 10a of the core 10 and the outer peripheral surface 23a of the insertion portion 23 of the core adapter 20 shown in FIG. It is preferable that it exists in the range of 1.0 mm or less. When the clearance C is less than 0.1 mm, the inner peripheral surface 10a of the core 10 and the outer peripheral surface 23a of the insertion portion 23 are likely to come into contact with each other during rotation, and dust may be generated from the core 10. On the other hand, when the clearance C exceeds 1.0 mm, when the core adapter 20 is attached to the core 10, the central axis of the core adapter 20 tends to be eccentric with respect to the central axis of the core 10, which causes wrinkles and dust generation. May occur.

  Further, within the range of the clearance C, it is preferable that the deformation rate of the diagonally wound coil spring 26 is 5% or more and 35% or less. If the deformation rate exceeds 35%, the spring is too weak, for example, it cannot be supported in the case of a heavy core 10 having a weight of 5 kg or more, and the core 10 is lowered by the clearance C and a part of the inner peripheral surface 10a of the core 10 There is a possibility that the core adapter 20 may be fixed in a state where a part of the outer peripheral surface 23a of the insertion portion 23 of the core adapter 20 is in contact. On the other hand, if the deformation rate is less than 5%, the spring is too strong, and when the insertion portion of the core adapter 20 is inserted into the core 10, the inner peripheral surface 10a of the core 10 may be scraped and cause dust generation.

  As described above, by using the core adapter of the present invention in the winding device of the vacuum film forming apparatus for a long substrate conveyed by roll-to-roll, the winding tension is stabilized and the long substrate is mounted at high speed. It is possible to suppress the occurrence of wrinkles that are likely to occur on the take-up roll when transported. Therefore, it becomes possible to manufacture a high-quality heat-resistant resin film substrate with a metal film without wrinkles with high productivity.

  In the above description, the case where the core adapter of the present invention is used for a winding roll of a vacuum film forming apparatus has been described as an example. However, the present invention is not limited to such a specific example. The present invention can be implemented in various modes without departing from the spirit of the invention. For example, the core adapter of the present invention may be applied to an unwinding roll. In this case, the unwinding tension can be stabilized. In addition, when winding a charged film, a conductive core (made of metal) is used, and a conductive core and a conductive core adapter are used by using a conductive material for the core adapter and the oblique coil spring. It is effective to prevent the electrification to ground the core by conducting well.

  In addition, in the vacuum film forming apparatus of FIG. 1, a metal film to be laminated on the long film F is formed of an oxide film, a nitride film, a carbide film, etc. according to the purpose in addition to Ni—Cr alloy, Cu, or the like. Sometimes. Further, since the vacuum film forming apparatus of FIG. 1 assumes a sputtering process as a process that requires a thermal load, a magnetron sputtering cathode is shown in the figure. In some cases, another vacuum film forming means is provided in place of the plate target. Examples of other vacuum film forming means include CVD (chemical vapor deposition) or vacuum vapor deposition.

  Further, the film forming process of the long heat-resistant resin film in a reduced pressure atmosphere has been described as an example, but is not limited to a reduced pressure atmosphere, for example, in a drying apparatus using a heater in atmospheric pressure Moreover, the winding roll and winding apparatus which attached the core adapter based on this invention can be used suitably. The long substrate used in this case can be a resin film such as a polyethylene terephthalate (PET) film or a heat resistant resin film such as a polyimide film, as well as a metal foil or a metal strip.

[Example]
In the vacuum film forming apparatus (sputtering web coater) as shown in FIG. 1, the heat-resistant polyimide film “Kapton (registered trademark)” manufactured by Toray DuPont Co., Ltd. having a width of 500 mm, a length of 1000 m, and a thickness of 25 μm as the long film F ”Was conveyed on a roll-to-roll basis, and a metal film was formed on the surface by sputtering to produce a heat-resistant resin film with a metal film.

  Specifically, for the can roll 123, a metallic cylindrical body having a diameter of 800 mm and a width of 800 mm was used, and the outer peripheral surface thereof was subjected to hard chrome plating. The core 10 of the winding roll 129 was an aluminum cylindrical member having an outer diameter of 164 mm, a width (length in the axial direction) of 800 mm, and a wall thickness of 5 mm, and the outer peripheral surface thereof was hard chrome plated. A core adapter 20 as shown in FIG. 3 was attached to both ends of the core 10.

  The insertion portion 23 of the core adapter 20 is formed with two grooves having a depth of 3.0 mm over the entire circumference, and a wire diameter (d) as shown in FIG. An annular winding coil spring 26 having a width (W) of 5.0 mm and a coil height (H) of 4.5 mm was attached. The insertion portion 23 of the core adapter 20 was inserted into the core 10. Before the core 10 with the core adapter 20 attached to both ends is attached to the vacuum film forming apparatus, the clearance C between the outer peripheral surface 23a of the insertion portion 23 of the core adapter 20 and the inner peripheral surface 10a of the core 10 includes the upper and lower sides. When measured in several places, all were 0.5 mm.

The core 10 with the core adapter 20 attached to both ends was attached to a vacuum film forming apparatus. Specifically, the inclined surface 32 of the taper cone 31 provided at the tip of the piston rod 30 that can reciprocate in the axial direction is provided on the first engaging portion 21 of the core adapter 20 that is attached to both ends of the core 10. It was made to contact | abut to the inner peripheral side edge part 22. FIG. At this time, the air pressure of the air cylinder was set to 4 kgf / cm ² and the piston rod 30 was urged in the direction in which the core 10 was sandwiched. With respect to the core 10 of the take-up roll 129 attached in this way, the eccentricity of the right side, the central part, and the left side of the core 10 is measured with a micrometer (not shown) attached to the inner wall of the take-up chamber 113. When measured, all were ± 30 μm or less.

  The heat-resistant polyimide film (long film F) was set on the unwinding roll 114, and the tip of the heat-resistant polyimide film was attached to the winding roll 129 via a roll group including the can roll 123. The tension of the unwinding roll 114 and the winding roll 129 was 100N. In order to form a Cu film as a metal film on a Ni-Cr film as a seed layer on the surface of the long film F, a Ni-Cr target is used for the magnetron sputtering cathode 130, and a magnetron sputtering cathode 131, A Cu target was used for 132 and 133.

The unwinding chamber 111, the film forming chamber 112, and the winding chamber 113 were evacuated to 5 Pa using a plurality of dry pumps, and then evacuated to 3 × 10 ⁻³ Pa using a plurality of turbo molecular pumps and cryocoils. In this state, the conveyance speed of the heat resistant polyimide film (long film F) was set to 9 m / min, and conveyance was started. The circumferential speed of the front feed roll 122 was rotated at a speed 0.1% slower than the circumferential speed of the can roll 123 on the basis of the speed in order to make the long film F closely adhere to the can roll 123. The temperature of the can roll 123 was controlled to 60 ° C., and the temperature of the heaters 117 and 118 was controlled to 100 ° C.

  Argon gas is introduced into each of the magnetron sputtering cathodes 130, 131, 132, and 133, electric power is applied, and a Ni—Cr film seed layer having a thickness of 10 nm is formed on the long film F conveyed by roll-to-roll, A Cu film having a film thickness of 100 nm was formed. The total power applied to the sputtering cathode was 70 kW.

  During film formation, no wrinkles were observed on the heat resistant polyimide film on the take-up roll 129. Further, when the winding tension was monitored by the tension sensor roll 127, the winding tension varied at a cycle of about 4 seconds as shown in FIG. When the tension fluctuation rate was observed, it was ± 0.6% (reference numeral 1 in FIG. 7). In addition, another long film F was set on the unwinding roll 114 and the film formation test was performed three times by the same method as described above. As shown in FIG. It was less than ± 1% (reference numerals 2 to 4 in FIG. 7).

  After film formation of 1000 m of heat-resistant polyimide film is completed, power supply to each magnetron sputtering cathode 130, 131, 132, 133 is stopped, supply of argon gas is stopped, and heat-resistant polyimide film (long film) The conveyance of F) was stopped. Thereafter, the plurality of dry pumps, the plurality of turbo molecular pumps, and the cryocoil were stopped, and the atmosphere was introduced into the unwinding chamber 111, the film forming chamber 112, and the winding chamber 113. Then, the take-up roll 129 on which the formed long film F was wound was taken out into the atmosphere, and the temperature was lowered to room temperature in the state as it was, and then the long film F was examined. Was not.

[Comparative example]
A take-up roll 129 was attached to the vacuum film forming apparatus in the same manner as in the above example except that the annular oblique coil spring 26 was not attached to the core adapter 20. When the eccentricity of the right side, the central part, and the left side of the core 10 was measured with a micrometer (not shown) attached to the inner wall of the winding chamber 113 in the same manner as in the example, the right side was ± 50 μm, the central part. Was ± 100 μm, and the left side was ± 200 μm.

  Thereafter, a heat-resistant resin film with a metal film was produced in the same manner as in the examples. During film formation, diagonal wrinkles were observed at the center of the heat-resistant polyimide film on the take-up roll 129. Further, when the winding tension was monitored by the tension sensor roll 127 in the same manner as in the example, as shown in FIG. 7, the winding tension fluctuated in a cycle of about 4 seconds, and the tension fluctuation rate was observed. ± 4% (reference numeral 5 in FIG. 7).

  In addition, another long film F was set on the unwinding roll 114 and the film formation test was performed four times by the same method as described above. As shown in FIG. ± 1 to 5% (reference numerals 6 to 9 in FIG. 7). When the winding roll 129 after film formation was taken out into the atmosphere and the temperature was lowered to room temperature, the presence or absence of wrinkles was examined. As a result, diagonal wrinkles were confirmed in the center.

  The reason for the difference between the example and the comparative example is that the comparative example does not have the diagonally wound coil spring, so the core is lowered by the clearance between the inner peripheral surface of the core and the outer peripheral surface of the core adapter. As a result, it is considered that the central axis of the core is eccentric with respect to the central axis of the core adapter. The eccentricity of the core periodically changes the distance between the take-up roll 129 and the free roll 128, and accordingly, the tension between the rolls also periodically changes, and the take-up tension measured by the tension sensor roll 127. Is considered to be unstable and cause wrinkling.

F Long heat-resistant resin film substrate (long substrate)
H Coil height W Coil width d Wire diameter X Spring deformation C Clearance 10 Core 11 Annular end face 20 Core adapter 21 First engagement part 22 Inner peripheral edge 23 Insertion part 24 Second engagement part 25 Flexible member 26 Inclined coil spring 30 Piston rod 31 Tapered cone 32 Inclined surface 111 Unwind chamber 112 Film forming chamber 113 Winding chamber 114 Unwinding rolls 115, 120, 126, 128 Free rolls 119, 121, 125, 127 Tension sensor roll 116 Heater box 117, 118 Heater 122 Front feed roll 123 Can roll 124 Rear feed roll 129 Winding rolls 130, 131, 132, 133 Magnetron sputtering cathode

Claims (10)

A pair of core adapters attached to both sides of a cylindrical core for winding a long substrate around an outer peripheral surface, each core adapter being inclined with a truncated conical support member biased toward the core A first engagement part having an inclined surface formed on an inner peripheral side edge of the cylindrical part so as to contact the entire surface, and the first engagement to be fitted from the end to the inside of the core Formed by a step on the outer peripheral surface side of the first engaging portion and the insertion portion, and a flexible member is formed on one end surface of the core. through it and a second engagement portion for engaging, without a step on the outer peripheral surface and inner peripheral surface side as a whole except for the inclined surface of the step and the first engagement portion of the second engaging portion, A core adapter, wherein an oblique coil spring is wound around the outer peripheral surface of the insertion portion.   The oblique coil spring is fitted in a groove provided along the circumferential direction on the outer circumferential surface of the insertion portion, and when the insertion portion is fitted in the core, the outer circumferential surface of the insertion portion and the The clearance between the inner peripheral surface of the core is 0.1 mm or more and 1.0 mm or less, and the deformation rate of the diagonally wound coil spring in the radial direction of the core is 5% or more and 35% or less. The core adapter according to claim 1.   The core adapter according to claim 1, wherein a mass of the core is 3 kg or more.   The core adapter according to any one of claims 1 to 3, wherein a material of the core, the core adapter, and the diagonally wound coil spring is conductive.   While attaching the core adapter in any one of Claims 1-4 to the both ends of a cylindrical core, and making the said supporting member urged | biased toward this core contact the 1st engaging part of this core adapter A method of winding a long substrate around the outer peripheral surface of the core by rotating the support member.   A winding device for winding a long substrate conveyed by roll-to-roll onto a cylindrical core, wherein the core adapter according to any one of claims 1 to 4 and a first engagement portion of the core adapter A winding mechanism comprising: a support mechanism having a truncated cone-shaped support member that is in contact with the entire circumference and biased toward the core; and a rotation drive unit that rotates the support mechanism. apparatus.   The winding device according to claim 6, wherein the winding device is provided in a vacuum chamber in which the long substrate is conveyed in a roll-to-roll manner.   Provided at the end of the vacuum chamber, processing means for applying a heat load to at least one surface of the long substrate transported by roll-to-roll in the vacuum chamber, and a transport path of the long substrate A roll-to-roll surface treatment apparatus comprising the winding device according to claim 7.   9. A roll-to-roll film forming apparatus, wherein the processing means according to claim 8 is a dry plating means.   The roll-to-roll film forming apparatus according to claim 9, wherein the dry plating means is a sputtering cathode.

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