JP6070455B2 - Wrinkle stretching roll, wrinkle stretching method, surface treatment apparatus and surface treatment method - Google Patents

Description

  The present invention relates to a crease-stretching roll and a crease-stretching method for removing a film crease generated in a long resin film conveyed in a vacuum chamber by a roll-to-roll method, and in particular, a drying treatment with a thermal load, A roll-stretching roll and a roll-stretching method for removing film wrinkles generated on a long resin film due to surface activation treatment such as plasma treatment and ion beam irradiation treatment, sputtering film-forming treatment, and the like, and the above-described roll-stretching roll The present invention relates to a surface treatment apparatus and a surface treatment method in which is incorporated.

  Many types of flexible wiring boards obtained by forming a metal film on a resin film are used for liquid crystal panels, notebook computers, digital cameras, mobile phones, etc. A long resin film with a metal film in which a metal film is formed on one side or both sides is used. As the wiring pattern becomes finer and higher in density, it is becoming important for the long resin film with a metal film to be a flat surface.

  As a method for producing this type of long resin film with a metal film, a method in which a metal foil is attached to a long resin film with an adhesive (referred to as a three-layer substrate production method), a resin solution on the metal foil A long resin is produced by a method of manufacturing after coating (referred to as casting method), dry plating method (vacuum film forming method) or a combination of dry plating method (vacuum film forming method) and wet plating method. 2. Description of the Related Art Conventionally, a method of manufacturing a metal film on a film (referred to as a metalizing method) is known. Further, the dry plating method (vacuum film forming method) in the metalizing method includes a vacuum deposition method, a sputtering method, an ion plating method, an ion beam sputtering method and the like.

  And about the said metallizing method, after sputtering chromium on a polyimide insulating layer, the method of sputtering copper and forming a conductor layer on a polyimide insulating layer is disclosed by patent document 1. FIG. In Patent Document 2, a first metal thin film formed by sputtering using a copper nickel alloy as a target and a second metal thin film formed by sputtering using copper as a target are laminated on a polyimide film in this order. A flexible circuit board material (that is, a copper-clad laminated resin film substrate) is disclosed. In addition, when manufacturing a long resin film with a metal film by vacuum film-forming on a long resin film like a polyimide film, it is common to use the sputtering web coater described below.

  By the way, it is said that the sputtering method generally has an advantage of excellent adhesion such as a formed metal thin film, but has a larger heat load applied to the long resin film than the vacuum deposition method. It is also known that when a large heat load is applied to the long resin film during film formation, film defects are likely to occur in the long resin film.

  Therefore, in order to prevent the occurrence of film wrinkles, in the sputtering web coater described below, for the long resin film conveyed by the roll-to-roll method, by winding while closely contacting the cooling can roll having a cooling function, A method of cooling the long resin film being formed from the back side is employed.

  However, when producing a long resin film with a metal film using the above-mentioned sputtering web coater, in addition to a film forming process such as sputtering, for example, a long film before the metal film is formed with respect to a process involving a thermal load. Heater drying treatment to remove moisture contained in the resin film, surface activation treatment such as plasma treatment and ion beam irradiation treatment performed before film formation treatment to improve the adhesion between the long resin film and the metal film Therefore, it was difficult to sufficiently remove the film ridges of the long resin film only by the method of winding the long resin film around the cooling can roll and cooling it.

  Hereinafter, the process with a heat load in the case of manufacturing a long resin film with a metal film using a sputtering web coater will be specifically described with reference to the drawings.

  The sputtering web coater shown in FIG. 1 includes an unwinding chamber 110, an ion beam chamber 134, a film forming chamber 111, and a winding chamber 112.

  First, the long resin film 113 on which the metal film is formed is unwound from the unwinding roll 114 in the unwinding chamber 110, passes through the tension sensor roll 115, and the heater box 116 containing the drying heaters 117 and 118. To reach the freeroll 119.

  Next, the long resin film 113 that has passed through the free roll 119 is carried into the ion beam chamber 134, and after passing through the free roll 135, an ion beam is generated while the back side of the long resin film 113 is cooled by the cooling roll 136. An ion beam is irradiated from the apparatus 138 and reaches the free roll 137. In order to improve the adhesion between the metal film to be formed and the long resin film 113, it is effective to perform surface activation treatment by irradiating the long resin film 113 with the ion beam described above. However, when the ion beam is irradiated to the long resin film 113 without cooling, it causes film wrinkles due to the heat load. Therefore, the ion is applied while cooling the back side of the long resin film 113 with the cooling roll 136. Beam irradiation is performed.

  Next, the long resin film 113 that has passed through the free roll 137 is carried into the film forming chamber 111, passes through the free roll 120 and the tension sensor roll 121, and includes the front feed roll 122, the cooling can roll 123, and the rear feed roll. Via 124, the tension sensor roll 125 and the free roll 126 are passed through to the take-up chamber 112. Incidentally, the long resin film 113 wound around the outer peripheral surface of the cooling can roll 123 via the front feed roll 122 is cooled from the back side by the cooling can roll 123 while the magnetron sputtering cathode is formed on the surface of the long resin film 113. A metal film is formed by 130, 131, 132, and 133.

  Next, the long resin film 113 carried into the take-up chamber 112 is taken up by the take-up roll 129 via the free roll 127 and the tension sensor roll 128.

  In the sputtering web coater, motors that rotate the unwinding roll 114, the front feed roll 122, the cooling can roll 123, the rear feed roll 124, etc. according to the tension values of the tension sensor rolls 115, 121, 125, and 128. The number of rotations, motor torque, and the like are controlled, and a predetermined tension range with respect to the long resin film 113 is maintained and conveyed. Moreover, in FIG. 1, illustration of a part of free roll for changing the conveyance direction of the long resin film 113 and vacuum exhaustion equipment is abbreviate | omitted.

  By the way, in order to improve the adhesion between the metal film to be formed and the long resin film 113 in the unwinding chamber 110 for removing moisture and the like contained in the long resin film 113, and before the film formation, Since the ion beam irradiation process in the ion beam chamber 134 and the sputtering process in the film formation chamber 111 for forming a metal film on the long resin film 113 give a large heat load to the long resin film 113, It is easy to generate film wrinkles.

  More specifically, using the sputtering web coater shown in FIG. 1, the downstream side of the process in which each treatment with a thermal load is performed, that is, the vicinity of the free roll 119 at the exit of the drying process in the unwinding chamber 110, the ion beam chamber. Film flaws are likely to occur in the vicinity of the free roll 137 at the exit of the ion beam irradiation process in 134 and in the vicinity of the feed roll 124 after the exit of the sputtering film formation process in the deposition chamber 111. The long resin film tends to thermally expand as a result of each treatment involving a thermal load, but since there is no air between each roll and the long resin film in the vacuum chamber, the long resin film is a roll. It is closely attached and restrained. For this reason, the film cannot be stretched and a film wrinkle occurs. For example, a typical linear thermal expansion coefficient of a polyimide film (long resin film) is 12 ppm / K, and is calculated to increase by 0.12 mm with an increase of 10 ° C. per 1000 mm width.

  In such a technical background, Non-Patent Document 1 introduces a number of methods in which a transport roll is devised in order to reduce film wrinkles caused by processing accompanied by heat load. For example, the Concave Spreader Roller with a narrow central part of the roll, the Bowed Roller with which the roll bends like a bow, the Expander Spreader Roller where the contact surface of the roll expands during rotation, the Nipped Roller that pulls both ends of the film, and the rubber roll The Compliant Cover Spreader, etc., in which slant grooves are formed in the depth direction, are introduced.

  Furthermore, Patent Document 3 introduces a method in which a cooling can roll is devised to reduce film wrinkles. That is, this cooling can roll has a V-shape with the outer peripheral line formed by connecting the central points located at the approximate center in the axial direction on the surface of the can roll as the base end side and from the base end side toward both axial end sides. A plurality of parallel or substantially parallel periodic groove structures extending symmetrically so as to have a shape, the direction in which the V-shaped tip of the groove heads and the rotation direction of the can roll are set to be the same It is. When such a periodic groove structure is provided in the can roll, the roll is applied to the long resin film in contact with the surface of the can roll so that the tread pattern of the automobile tire discharges rain water from the center to both ends when running on rainy weather. Tension for spreading the long resin film from the center toward both ends in the axial direction can be applied.

  In view of this, a roll-stretching roll using the structure of the cooling can roll introduced in Patent Document 3 has been developed.

  That is, as shown in FIG. 8, the roll-stretching roll 12 is formed by connecting a rubber film covering the outer peripheral surface of the roll body and a center point located substantially in the axial direction on the rubber film surface. A roll main body and a direction in which the V-shaped front ends are parallel or substantially parallel to each other and symmetrically extending so as to form a V-shape from the base end side toward both axial ends. And a widening mechanism comprising a plurality of periodic grooves 13 provided on the outer peripheral surface of the rubber coating so that the rotation directions of the rubber coatings are the same. A tension is applied to the long resin film in the width direction of the long resin film by the above-mentioned widening mechanism to the long resin film conveyed by the roll-to-roll method in the vacuum chamber while making contact. occured It is intended to remove the Irumu wrinkles.

Japanese Patent Laid-Open No. 2-98994 Japanese Patent No. 3447070 JP 2011-94221 A (see paragraph 0032, FIG. 3)

“The Mechanics of Web Handling”, David R. Roisum, Ph.D, TAPPI PRESS, (1998) p.141-156

  By the way, as shown to FIG. 2 (A)-(B), the formation position of the film collar 14 which generate | occur | produced in the elongate resin film 11, and the outer peripheral line 12P of the rubber-coated film in the said stretcher roll 12 were made into the base end side. When the position of the V-shaped tip of the periodic groove 13 does not match, the width of the long resin film 11 is such that the tread pattern of the automobile tire discharges rainwater uniformly from the center toward both ends when running in rainy weather. Since the tension is applied substantially evenly in the direction, the film ridges 14 are evenly removed from the long resin film 11 after passing the crease-stretching roll 12 as shown in FIG. 2 (B). Yes.

  However, as shown in FIGS. 3 (A) to 3 (B), the position of the film ridge 24 formed at the substantially central portion in the width direction of the long resin film 21 and the position of the outer peripheral line 22P on the heel stretching roll 22 (that is, Since the periodic groove body 23 does not exist on the outer peripheral line 22P of the above-mentioned roll-stretching roll 22, when the V-shaped tip position of the periodic groove body 23 coincides with the long length, the long resin film The width of the long resin film 21 can be reduced as shown in FIG. In some cases, the film wrinkles generated at the center of the direction remained without being removed. In particular, in the vacuum chamber, as described above, since air does not intervene between the roll and the long resin film, the long resin film is in a state of being in close contact with and constrained to the stretching roll. Even if the film wrinkles generated in the substantially central portion in the width direction are pulled toward the both ends of the film by the wrinkle-stretching roll 22, it is considered that the wrinkles are not easily stretched.

  Further, as shown in FIGS. 4A to 4B, the outer peripheral lines formed by connecting the center points located substantially in the center in the axial direction on the rubber coating surface are the lines shown in FIG. There is also developed a modified example of a heel-stretching roll having a slight width instead of a shape (in the modified example, the outer peripheral line is referred to as an “outer peripheral line part”). That is, the roll-stretching roll according to the modified example has an outer peripheral line portion 32P formed by connecting a central point located approximately in the center in the axial direction on the rubber coating surface and having a slight width, and the base end. The rubber coating is formed so that the direction in which the V-shaped leading ends are parallel to or substantially parallel to each other and symmetrically extend so as to form a V shape from the side toward both ends in the axial direction and the rotation direction of the roll body is the same. A widening mechanism including a plurality of periodic grooves 33 provided on the outer peripheral surface is provided.

  And also in the roll-stretching roll which concerns on a modification, as shown to FIG. 4 (A)-(B), it has the some width | variety in the formation position of the film roll 34 which generate | occur | produced in the long resin film 31, and the roll-stretching roll 32. When the position of the outer peripheral line portion 32P does not match, tension is applied substantially evenly in the width direction of the long resin film 31 in which the film ridges 34 are formed. As shown in B), the film ridges 34 are evenly removed from the long resin film 31 after passing the crease-stretching roll 32.

  However, as shown in FIGS. 5 (A) to 5 (B), the position of the film ridge 44 formed at the substantially central portion in the width direction of the long resin film 41 and the outer peripheral line portion having a slight width in the heel stretching roll 42. When the position of 42P coincides by chance, the periodic groove body 43 does not exist in the outer peripheral line portion 42P of the above-described roll-stretching roll 42, so that the long resin film 41 is formed at a substantially central portion in the width direction. Since the mechanism for expanding the width of the periodic groove 43 cannot be applied to the film ridges formed, the film ridges formed at the substantially central portion in the width direction of the long resin film 41 are removed as shown in FIG. Sometimes it was left without it.

  The present invention has been made paying attention to such problems, and the problem is that the position of the film ridge formed at the substantially central portion in the width direction of the long resin film and the outer peripheral line of the crease-stretching roll Even when the position of the outer peripheral line part having a slight width coincides with the position, a film stretching roll and a film stretching method capable of removing the film film uniformly and reliably are provided, and the above film stretching roll is also provided. Is to provide a surface treatment apparatus and a surface treatment method.

  Therefore, in order to solve the above-mentioned problems, the present inventors have conducted experiments by changing the structure of the outer peripheral line portion having a conventional outer peripheral line or a slight width in the rubber coating to a structure described later, and a long resin is obtained. Even when the position of the film ridge formed at the substantially central portion in the width direction of the film coincides with the position of the outer peripheral line or the position of the outer peripheral line portion having a slight width on the heel stretching roll, the film ridge is surely removed. I found out that I could do it.

That is, the invention according to claim 1
A rubber coating covering the outer peripheral surface of the roll body, the outer peripheral line of the center point are formed by connecting each located substantially axial center on said rubber coating surface and the base end side and axially from the base end side the outer periphery of the rubber coating so that the rotation direction of the direction and the roll body where the V-shaped tip is directed is the same with each other parallel or substantially parallel extending symmetrically such that V-shape toward the opposite end side A long resin that has a widening mechanism composed of a plurality of periodic grooves provided on the surface, and is conveyed in a vacuum chamber in a roll-to-roll manner while in contact with the outer peripheral surface of the rubber coating. to the film by the widening mechanism in crease smoothing roll that applies tension toward the width direction of the long resin film,
A plurality of the periodic groove member provided on the outer peripheral surface of the rubber coating, is divided into both side regions located to the axial direction on both sides of the center region and the central region with the peripheral line in the middle, the central with areas composed of the right region on the left side region and right on the left side and the peripheral line in the middle, the periodic grooved member formed in the left region and said right region of the central region without the grooves of the periodic groove body in the central region intersect one another, from the left area beyond the peripheral line is extended to the right area, and, beyond the peripheral line from said right side area It is extended to the left area, characterized in that as the V-shaped tip is not formed to the outer peripheral line and the base end side to the central region.

The invention according to claim 2
In the kneading roll according to claim 1,
A plurality of rectangular unit regions are formed by equally dividing the central region over the outer peripheral direction of the roll body, and one of the rectangular unit regions has a left corner at the rear end in the rotational direction of the roll body. Two triangular areas defined by a straight line connecting the right corner of the front end are formed, and the other rectangular unit area adjacent to the rectangular unit area has a left end and a rear right end of the roll body in the rotational direction. The two triangular regions defined by straight lines connecting the corners are formed, and the periodic region is extended from the left region of the central region to the right region in the two triangular regions in each rectangular unit region. The grooved body and the periodic grooved body extending from the right side region to the left side region are formed, respectively,
The invention according to claim 3
In the kneading roll according to claim 1,
A plurality of rectangular unit regions are formed by equally dividing the central region over the outer peripheral direction of the roll body, and one rectangular unit region is formed from the left region to the right region of the central region. The periodic groove extending is formed, and the periodic groove extending from the right region to the left region of the central region is formed in the other rectangular unit region adjacent to the rectangular unit region. Characterized by the formation of a body,
The invention according to claim 4
In the roll extending roll in any one of Claims 1-3,
The width dimension of the central region is set to 20% or less of the width dimension in the long resin film, not less than the pitch dimension between the grooves in the periodic groove body,
The invention according to claim 5
In the roll extending roll in any one of Claims 1-4,
The rubber coating for covering the outer peripheral surface of the roll body is made of fluororubber.

Next, the invention according to claim 6 is:
A rubber coating covering the outer peripheral surface of the roll body, the outer peripheral line of the center point are formed by connecting each located substantially axial center on said rubber coating surface and the base end side and axially from the base end side the outer periphery of the rubber coating so that the rotation direction of the direction and the roll body where the V-shaped tip is directed is the same with each other parallel or substantially parallel extending symmetrically such that V-shape toward the opposite end side A film formed on a long resin film that is conveyed in a vacuum chamber by a roll-to-roll method using a roll-stretching roll equipped with a widening mechanism composed of a plurality of periodic grooves provided on the surface. In the method of extending the cocoon to remove the cocoon by the above widening mechanism,
A plurality of the periodic groove member provided on the outer peripheral surface of the rubber coating on the crease smoothing roll, the both side regions located to the axial direction on both sides of the center region and the central region with the peripheral line in the middle It is defined, the said central region together with composed of the right region on the left side region and right on the left side and the peripheral line in the middle, which is formed in the left region and the right region of the central region periodic grooves body, without the grooves of the periodic groove body intersect each other in the central region, extending from the left side region to the right area beyond the peripheral line, and the from the right side area beyond peripheral line, characterized by using the crease smoothing roll as the V-shaped tip to the base end side of the above peripheral line is not formed is extended the central region to the left area

The invention according to claim 7
The method for stretching a crease according to claim 6,
A plurality of rectangular unit regions are formed by equally dividing the central region over the outer peripheral direction of the roll body, and one of the rectangular unit regions has a left corner at the rear end in the rotational direction of the roll body. Two triangular areas defined by a straight line connecting the right corner of the front end are formed, and the other rectangular unit area adjacent to the rectangular unit area has a left end and a rear right end of the roll body in the rotational direction. The two triangular regions defined by straight lines connecting the corners are formed, and the periodic region is extended from the left region of the central region to the right region in the two triangular regions in each rectangular unit region. Characterized by using the crease-rolling roll in which the groove and the periodic groove extending from the right region to the left region are respectively formed,
The invention according to claim 8 provides:
The method for stretching a crease according to claim 6,
A plurality of rectangular unit regions are formed by equally dividing the central region over the outer peripheral direction of the roll body, and one rectangular unit region is formed from the left region to the right region of the central region. The periodic groove extending is formed, and the periodic groove extending from the right region to the left region of the central region is formed in the other rectangular unit region adjacent to the rectangular unit region. It is characterized by using the above-described roll-stretching roll on which a body is formed,
The invention according to claim 9 is:
In the method for stretching the crease according to any one of claims 6 to 8,
The width dimension of the central region in the stretching roll is set to 20% or less of the width dimension in the long resin film, not less than the pitch dimension between the grooves in the periodic groove body,
The invention according to claim 10 is:
The method for stretching a crease according to claim 7 or 8,
Within the angle (holding angle) at which the long resin film is in contact with the outer circumferential surface of the stretching roll, one rectangular unit region of the stretching roll and the other rectangular unit region adjacent thereto are arranged. A set of rectangular unit areas as a unit is included, and
The invention according to claim 11 is:
In the method for stretching the crease according to any one of claims 6 to 10,
The rubber coating for covering the outer peripheral surface of the roll body is made of fluororubber.

Furthermore, the invention according to claim 12 is
In a surface treatment apparatus comprising a surface treatment means for performing a surface treatment with a thermal load on a long resin film conveyed in a vacuum chamber by a roll-to-roll method,
It has the above-mentioned roll extending roll described in any one of claims 1 to 5 in the above-mentioned vacuum chamber,
The invention according to claim 13 is:
In a surface treatment apparatus comprising a surface treatment means for performing a surface treatment with a thermal load on a long resin film conveyed in a vacuum chamber by a roll-to-roll method,
The said stretcher roll according to claim 2 or 3 is provided in said vacuum chamber, and said stretcher is within an angle (holding angle) at which said long resin film is in contact with an outer peripheral surface of said stretcher roll. characterized in that to contain the one of said rectangular unit areas and a set of the rectangular unit areas in units of other one of the rectangular unit areas adjacent thereto in the roll,
The invention according to claim 14 is:
The surface treatment apparatus according to claim 12 or 13,
Characterized in that the crease smoothing roll is installed in the conveyance path downstream of the processed the lengthwise resin film by the surface treatment means,
The invention according to claim 15 is:
In the surface treatment apparatus in any one of Claims 12-14,
The surface treatment with heat load is a treatment by a vacuum film formation method,
The invention according to claim 16 provides:
The surface treatment apparatus according to claim 15 ,
The vacuum film forming method is magnetron sputtering.

Next, the invention according to claim 17 is:
In a surface treatment method for performing a surface treatment with a thermal load on a long resin film conveyed in a vacuum chamber by a roll-to-roll method,
And characterized by applying the crease smoothing method according to any of claims 6 to 11 relative to the elongated resin film film wrinkles caused by the surface treatment,
The invention according to claim 18
The surface treatment method according to claim 17,
The surface treatment with thermal load is a treatment by a vacuum film formation method,
The invention according to claim 19 is
The surface treatment method according to claim 18 ,
The vacuum film forming method is magnetron sputtering.

According to the roll stretching roll according to the present invention and the roll stretching method using this roll,
A plurality of periodic groove bodies provided on the outer peripheral surface of the rubber coating are partitioned into a central region having an outer peripheral line in the center and both side regions located on both sides in the axial direction of the central region, and the central region is the outer periphery A periodic groove formed in a left region and a right region of the central region is formed by a left region located on the left side with a line at the center and a right region located on the right side. Each groove of the body extends from the left region beyond the outer peripheral line to the right region without intersecting each other, and extends from the right region beyond the outer peripheral line to the left region to extend the outer peripheral line into the central region. A V-shaped tip having a base end side is not formed.

  And the position of the film ridge formed at the substantially central part in the width direction of the long resin film coincides with the position of the central region of the periodic groove provided on the outer peripheral surface of the rubber coating on the heel stretch roll. Even in such a case, the periodic grooves formed in the left region and the right region of the central region are arranged such that the outer circumferential lines are extended from the left region without crossing the grooves of the periodic grooves in the central region. It extends beyond the right region and extends from the right region beyond the outer periphery to the left region, so that a V-shaped tip having the outer periphery as a base side is not formed in the central region. Therefore, with respect to the film ridge formed at the substantially central portion in the width direction of the long resin film, the periodic groove body extending from the left region of the central region to the right region beyond the outer peripheral line and the right side of the central region Area To effect the respective extended periodic grooved body to the left side area beyond the peripheral line, it is possible to remove the film wrinkles formed in an elongated resin film evenly and reliably.

Moreover, according to the surface treatment apparatus according to the present invention,
Since it has the above-described roll-stretching roll in the vacuum chamber, it becomes possible to remove film wrinkles generated on the long resin film evenly and reliably due to the treatment with heat load,
Furthermore, according to the surface treatment method according to the present invention,
Since the above-mentioned wrinkle-stretching method has been applied to long resin films that have been wrinkled due to treatment with heat load, it is possible to remove film wrinkles formed on long resin films evenly and reliably. It becomes.

Schematic structure explanatory drawing of a sputtering web coater. FIG. 2A is a side view of a conventional kneading roll incorporated into a sputtering web coater, and FIG. 2B is an explanatory view of the operation of the conventional kneading roll according to the conventional example. FIG. 3 (A) is a side view of a conventional kneading roll incorporated in a sputtering web coater, and FIG. 3 (B) is an explanatory view showing the cause of an adverse effect that occurs when the conventional kneading roll is applied. FIG. 4A is a side view of a kneading roll according to a conventional modification incorporated in a sputtering web coater, and FIG. 4B is an explanatory view of the operation of the kneading roll according to the conventional modification. FIG. 5 (A) is a side view of a conventional stretching roll incorporated in a sputtering web coater, and FIG. 5 (B) is a diagram showing the causes of adverse effects caused by applying the conventional stretching roll according to the modification. FIG. 6 (A) is a side view of a kneading roll according to the present invention incorporated in a sputtering web coater, FIG. 6 (B) is an operation explanatory view of the kneading roll according to the present invention, and FIG. 6 (C) is The elements on larger scale of FIG. 6 (B). FIG. 7 (A) is a side view of a kneading roll according to a modification of the present invention incorporated in a sputtering web coater, FIG. 7 (B) is an operation explanatory view of the kneading roll according to a modification of the present invention, and FIG. 7C is a partially enlarged view of FIG. The perspective view which shows schematic structure of the roll extending roll which concerns on the prior art example which applied the structure of the cooling can roll introduced by patent document 3. FIG.

  Hereinafter, embodiments of the present invention will be described in detail.

(1) Kneading rolls First, the kneading rolls according to the present invention are:
A rubber coating covering the outer peripheral surface of the roll body;
The outer peripheral line formed by connecting the central points located approximately in the center in the axial direction on the rubber coating surface is the base end side, and is symmetrical so as to be V-shaped from the base end side toward the both axial end sides. It is composed of a plurality of periodic grooves provided on the outer peripheral surface of the rubber coating so that the direction in which the V-shaped tip is directed parallel to or substantially parallel to each other and the rotation direction of the roll body is the same. Equipped with a widening mechanism,
A plurality of periodic groove bodies provided on the outer peripheral surface of the rubber coating is divided into a central region having the outer peripheral line in the center and both side regions located on both sides in the axial direction of the central region,
The central region is composed of a left region located on the left side and a right region located on the right side with the outer periphery as the center,
The periodic grooves formed in the left and right regions of the central region are extended from the left region to the right region beyond the outer peripheral line without intersecting each other in the central region. And extended from the right region to the left region over the outer circumference,
A V-shaped tip having the outer peripheral line as the base end side is not formed in the central region.

And according to the kneading roll according to the present invention,
Even in the case where the position of the central region of the periodic groove provided on the outer peripheral surface of the rubber coating coincides with the position of the film ridge formed at the substantially central portion in the width direction of the long resin film. A periodic groove extending from the left region of the central region to the right region over the outer peripheral line and the outer periphery from the right region of the central region with respect to the film ridge formed at the substantially central portion in the width direction of the long resin film. Since each of the periodic grooves extending beyond the line to the left region acts, the film wrinkles formed on the long resin film can be removed evenly and reliably.

  For this reason, it becomes possible to manufacture the long resin film with a metal film | membrane without a film flaw by incorporating the roll extending roll which concerns on this invention in a sputtering web coater.

  Hereinafter, the crease-stretching roll according to the first embodiment of the present invention and the crease-stretching roll according to the second embodiment will be specifically described with reference to the drawings.

(1-1) Kneading roll according to the first embodiment As shown in FIGS. 6A to 6C, a rubber coating covering the outer peripheral surface of the roll body and a plurality of cycles provided on the outer peripheral surface The kneading roll 52 according to the first embodiment provided with a widening mechanism constituted by a general groove 53 includes a central region 52a in which the plurality of periodic grooves 53 have an outer peripheral line 52P in the center and the center The central region 52a is divided into both side regions 52b and 52c located on both sides in the axial direction of the region 52a, and the central region 52a has a left region 52a1 located on the left side and a right region 52a2 located on the right side with the outer peripheral line 52P as the center. It consists of and.

  Further, as shown in FIG. 6C, the periodic grooves 53 formed in the left region 52a1 and the right region 52a2 of the central region 52a intersect with each other in the central region 52a. Without extending the outer peripheral line 52P from the left region 52a1 to the right region 52a2, and extended from the right region 52a2 to the left region 52a1 beyond the outer peripheral line 52P and into the central region 52a. A V-shaped tip having a base end side is not formed.

  The periodic groove bodies 53 formed in the both side regions 52b and 52c located on both sides in the axial direction of the central region 52a have the outer circumferential line 52P as the base end side and from the base end side toward the both ends in the axial direction. A pattern extending symmetrically so as to be V-shaped, or parallel to each other, and having the same V-shaped tip direction and the direction of rotation of the roll body (this pattern is limited to both side regions 52b and 52c). The periodic groove body 53 in the central region 52a is formed in a pattern in which no V-shaped tip is formed as described above.

  Furthermore, in the kneading roll according to the first embodiment, as shown in FIG. 6C, a plurality of rectangular unit areas 521 and 522 are divided by equally dividing the central area 52a in the outer peripheral direction of the roll body. One triangular unit region 521 is formed with two triangular regions partitioned by a straight line connecting the left corner of the rear end of the roll body and the right corner of the tip, and the rectangular unit region includes In the other adjacent rectangular unit region 522, two triangular regions defined by a straight line connecting the front left corner and the rear right corner of the roll body are formed, and each rectangular unit region 521, A periodic groove 53 extending from the left region 52a1 of the central region 52a to the right region 52a2 and a periodic region extending from the right region 52a2 to the left region 52a1 in the two triangular regions at 522. Body 53 is formed respectively.

  Then, by applying the kneading roll according to the first embodiment, for example, the position of the central region 52a of the periodic groove 53 provided on the outer peripheral surface of the rubber coating and the width of the long resin film 51 Even when the position of the film ridge 54 formed in the substantially central portion in the direction coincides with the position of the film ridge 54 formed in the substantially central portion in the width direction of the long resin film 51, the left side of the central region 52a. A periodic groove 53 extending from the region 52a1 over the outer periphery 52P to the right region 52a2, and a periodic groove 53 extending from the right region 52a2 of the central region 52a over the outer periphery 52P to the left region 52a1. Therefore, the film ridge 54 formed on the long resin film 51 can be removed evenly and reliably.

  Here, about the width dimension of the center area | region 52a shown in FIG.6 (C) in the stretcher roll 52 which concerns on 1st embodiment, it is more than the pitch dimension between the grooves in the periodic groove body 53, and in the long resin film 51. It may be set to 20% or less of the width dimension. The width dimension of the central region 52a is preferably the same as the pitch dimension between the grooves in the periodic groove body 53. However, when the pitch between the grooves in the periodic groove body 53 is very fine, the processing of the central region 52a is performed. Since it becomes difficult, 20% or less of the width dimension in the long resin film 51 is sufficient. However, when it exceeds 20% of the width dimension in the long resin film 51, the long resin film 51 is pulled right and left by the periodic groove body 53 in the central region 52a, which may cause film wrinkles. is there. Therefore, the width dimension of the central region 52 a is preferably set to be not less than the pitch dimension between the grooves in the periodic groove body 53 and not more than 20% of the width dimension in the long resin film 51.

  Further, in the kneading roll 52 according to the first embodiment in which the central area 52a is equally divided and a plurality of rectangular unit areas 521 and 522 are formed in the outer peripheral direction of the roll body, the kneading roll 52 A set of rectangular units having the one rectangular unit region 521 and the other rectangular unit region 522 adjacent thereto as a unit within an angle (holding angle) at which the long resin film 51 is in contact with the outer peripheral surface. It is advisable to include an area. When the set of rectangular unit areas is not included and the number is less than one set, the rectangular unit with respect to the film ridge 54 formed at the substantially central portion in the width direction of the long resin film 51 as shown in FIG. This is because the periodic groove body 53 in the region 521 or the rectangular unit region 522 does not act, and the long resin film 51 cannot be stretched evenly to the left and right, and the long resin film 51 may meander. .

  In addition, as a material which comprises the rubber film in the stretching roll 52, the fluororubber which does not affect a long resin film in the film-forming process step is preferable, and "Viton" manufactured by DuPont, which is commercially available. (Registered trademark) is exemplified.

(1-2) Kneading rolls according to the second embodiment As shown in FIGS. 7A to 7C, a rubber coating covering the outer peripheral surface of the roll body and a plurality of cycles provided on the outer peripheral surface The kneading roll 62 according to the second embodiment including a widening mechanism configured with a general groove body 63 includes a central region 62a in which the plurality of periodic groove bodies 63 have an outer peripheral line 62P in the center, and the center The central region 62a is divided into both side regions 62b and 62c located on both sides in the axial direction of the region 62a, and the central region 62a has a left side region 62a1 located on the left side and a right side region 62a2 located on the right side with the outer peripheral line 62P as the center. It consists of and.

  In addition, as shown in FIG. 7C, the periodic grooves 63 formed in the left region 62a1 and the right region 62a2 of the central region 62a intersect each other in the central region 62a. Without extending the outer peripheral line 62P from the right region 62a2 to the left region 62a1, and from the left region 62a1 beyond the outer peripheral line 62P to the right region 62a2, the outer peripheral line 62P in the central region 62a. A V-shaped tip having a base end side is not formed.

  The periodic grooves 63 formed in the both side regions 62b and 62c located on both sides in the axial direction of the central region 62a have the outer circumferential line 62P as the base end side and from the base end side toward the both ends in the axial direction. A pattern extending symmetrically so as to be V-shaped and parallel to each other or substantially parallel to each other, and the direction in which the V-shaped tip is directed and the rotation direction of the roll body are the same (however, this pattern is limited to both side regions 62b and 62c). The periodic grooves 63 in the central region 62a are formed in a pattern in which no V-shaped tip is formed as described above.

  Furthermore, in the kneading roll according to the second embodiment, as shown in FIG. 7C, a plurality of rectangular unit regions 621 and 622 are formed by equally dividing the central region 62a over the outer peripheral direction of the roll body. In the one rectangular unit region 621, a periodic groove 63 extending from the right region 62a2 of the central region 62a to the left region 62a1 is formed, and the other adjacent to the rectangular unit region 621 is formed. Each of the rectangular unit regions 622 is formed with a periodic groove 63 extending from the left region 62a1 to the right region 62a2 of the central region 62a.

  Then, by applying the kneading roll according to the second embodiment, for example, the position of the central region 62a of the periodic groove 63 provided on the outer peripheral surface of the rubber coating and the width of the long resin film 61 Even in the case where the position of the film ridge 64 formed in the substantially central portion in the direction coincides with the position, the left side of the central region 62a with respect to the film ridge 64 formed in the substantially central portion in the width direction of the long resin film 61. A periodic groove 63 extending from the region 62a1 over the outer peripheral line 62P to the right region 62a2, and a periodic groove 63 extending from the right region 62a2 of the central region 62a over the outer periphery 62P to the left region 62a1. Therefore, the film ridges 64 formed on the long resin film 61 can be removed evenly and reliably.

  Here, also about the width dimension of the center area | region 62a shown in FIG.7 (C) in the roll extending roll 62 which concerns on 2nd embodiment, more than the pitch dimension between the grooves in the periodic groove body 63, it is in the long resin film 61. It may be set to 20% or less of the width dimension. The width dimension of the central region 62a is preferably the same as the pitch dimension between the grooves in the periodic groove body 63, but when the pitch between the grooves in the periodic groove body 63 is very fine, the processing of the central region 62a is performed. Since it becomes difficult, 20% or less of the width dimension in the long resin film 61 is sufficient. However, when 20% of the width dimension of the long resin film 61 is exceeded, the long resin film 61 is pulled right and left by the periodic groove body 63 in the central region 62a, which may cause film wrinkles. is there. Therefore, the width dimension of the central region 62a is preferably set to be not less than the pitch dimension between the grooves in the periodic groove body 63 and not more than 20% of the width dimension in the long resin film 61.

  Further, in the kneading roll 62 according to the second embodiment in which the central area 62a is equally divided and a plurality of rectangular unit areas 621 and 622 are formed in the outer peripheral direction of the roll body, the kneading roll 62 A set of rectangular units having the one rectangular unit region 621 and the other rectangular unit region 622 adjacent thereto as a unit within an angle (holding angle) at which the long resin film 61 is in contact with the outer peripheral surface. It is advisable to include an area. When the set of rectangular unit regions is not included and is less than one set, the rectangular unit with respect to the film ridge 64 formed at the substantially central portion in the width direction of the long resin film 61 as shown in FIG. This is because the periodic groove 63 in the region 621 or the rectangular unit region 622 does not work, and the long resin film 61 cannot be stretched evenly from side to side, and the long resin film 61 may meander. .

  As for the material constituting the rubber film in the stretching roll 62, as in the case of the first embodiment, a fluororubber that does not affect the long resin film during the film forming process is preferable, “Viton” (registered trademark) manufactured by DuPont is exemplified.

(2) Sputtering web coater A film generated when a metal film is formed on a long resin film (polyimide film) by using the sputtering web coater shown in FIG. 1 to produce a long resin film with a metal film. The effect at the time of applying a scissors and the scissors roll according to the present invention will be described.

  Incidentally, when the metal film is formed by sputtering, a plate-like target (see magnetron sputtering cathodes 130, 131, 132, 133) can be used as shown in FIG. 1, but when a plate-like target is used. Nodules (growth of foreign matter) may occur on the target. When this phenomenon becomes a problem, it is preferable to use a cylindrical rotary target that generates no nodules and has high target use efficiency.

  Further, the sputtering web coater shown in FIG. 1 is an apparatus premised on a sputtering process, and thus a magnetron sputtering cathode is illustrated. However, a film forming process with a thermal load is another film forming method such as vapor deposition. In this case, another film forming means is provided in place of the target. Examples of other film forming means include CVD (chemical vapor deposition) and vacuum vapor deposition.

  First, the sputtering web coater shown in FIG. 1 on the premise of the sputtering process is an unwind chamber 110 for performing a heater drying process on the long resin film 113, an ion beam chamber 134 for performing an ion beam irradiation process, and a component for performing a sputtering process. The film chamber 111 and the winding chamber 112 are configured.

  And since the said heater drying process, ion beam irradiation process, and sputtering process give a big heat load to a long resin film, it is easy to generate | occur | produce a film flaw.

  In particular, on the downstream side of the process in which treatment with heat load is performed, that is, near the free roll 119 at the exit of the drying process in the unwind chamber 110, near the free roll 137 at the exit of the ion beam irradiation process in the ion beam chamber 134, and Film flaws are likely to occur in the vicinity of the feed roll 124 after the sputtering film forming process exit in the film forming chamber 111.

  Hereinafter, the effect when the film wrinkles generated in the long resin film (polyimide film) and the wrinkle stretching roll according to the present invention are applied will be specifically described.

(2-1) Sputtering process As for the film temperature when the long resin film 113 passes through all the magnetron sputtering cathodes 130, 131, 132, 133 during film formation, a thermocouple is attached to the long resin film 113. It was attached and measured.

  As a result of the measurement, when the temperature of the cooling can roll 123 is 20 ° C., the total power input to the magnetron sputtering is 65 kW, and the film speed is 8 m / min, the film temperature has reached 110 ° C. Several film wrinkles were generated. Since the temperature of the long resin film (polyimide film) 113 was increased to 110 ° C., about 1080 ppm in the width direction of the film [a typical linear thermal expansion coefficient of the polyimide film is 12 ppm / K as described above, 12 ppm / K × (Δ90 ° C.)] is stretched. However, since the “rear feed roll 124” incorporated in the sputtering web coater shown in FIG. 1 does not have a wrinkle stretching function, film wrinkles are likely to occur.

  Therefore, when the “rear feed roll (motor-driven roll) 124” was replaced with the conventional roll-stretching roll shown in FIG. 8, the roll-stretching effect was confirmed, but the width direction of the long resin film (polyimide film) 113 was substantially reduced. The effect was hardly confirmed with respect to the film ridge formed in the center part.

  On the other hand, in place of the conventional kneading roll shown in FIG. 8, the same experiment was performed by replacing the kneading roll according to the first embodiment shown in FIGS. 6 (A) to (C). It was confirmed that the film stretching effect was also obtained on the film film formed in the substantially central part in the width direction of the length resin film (polyimide film) 113.

  In addition, the same effect was confirmed also when the kneading roll based on 2nd embodiment shown to FIG. 7 (A)-(C) is applied.

(2-2) Heater drying process Next, the film temperature when the long resin film 113 passes through the drying heaters 117 and 118 in the unwinding chamber 110 is measured by attaching a thermocouple to the long resin film 113. did.

  As a result of the measurement, when the heater control temperature was 200 ° C. and the film speed was 8 m / min, the film temperature reached 110 ° C., and several film wrinkles were generated on the long resin film 113. Since the temperature of the long resin film (polyimide film) 113 has increased to 110 ° C., the film is stretched by about 1080 ppm [12 ppm / K × (Δ90 ° C.)] in the width direction of the film. However, the “free roll 119” incorporated in the sputtering web coater shown in FIG.

  Therefore, when the “free roll 119 (which may be changed to a motor-driven roll)” was replaced with the conventional kneading roll shown in FIG. 8, the kneading effect was confirmed, but a long resin film (polyimide film) The effect was hardly confirmed with respect to the film ridge formed in the substantially center part of 113 of the width direction.

  On the other hand, in place of the conventional kneading roll shown in FIG. 8, the same experiment was performed by replacing the kneading roll according to the first embodiment shown in FIGS. 6 (A) to (C). It was confirmed that the film stretching effect was also obtained on the film film formed in the substantially central part in the width direction of the length resin film (polyimide film) 113.

  In addition, the same effect was confirmed also when the kneading roll based on 2nd embodiment shown to FIG. 7 (A)-(C) is applied.

(2-3) Ion Beam Irradiation Treatment Further, the film temperature when the long resin film 113 passed through the ion beam generator 138 in the ion beam chamber 134 was measured by attaching a thermocouple to the long resin film 113. .

  As a result of the measurement, when the temperature of the cooling roll 136 is 20 ° C., the input power of the ion beam is 2 kW, and the film speed is 8 m / min, the film temperature has reached 110 ° C. Film wrinkles occurred. Since the temperature of the long resin film (polyimide film) 113 has increased to 110 ° C., the film is stretched by about 1080 ppm [12 ppm / K × (Δ90 ° C.)] in the width direction of the film. However, since the “free roll 137” incorporated in the sputtering web coater shown in FIG.

  Therefore, when the “free roll 137 (which may be changed to a motor driven roll)” was replaced with the conventional roll-stretching roll shown in FIG. 8, the roll-stretching effect was confirmed, but a long resin film (polyimide film) The effect was hardly confirmed with respect to the film ridge formed in the substantially center part of 113 of the width direction.

  On the other hand, in place of the conventional kneading roll shown in FIG. 8, the same experiment was performed by replacing the kneading roll according to the first embodiment shown in FIGS. 6 (A) to (C). It was confirmed that the film stretching effect was also obtained on the film film formed in the substantially central part in the width direction of the length resin film (polyimide film) 113.

  In addition, the same effect was confirmed also when the kneading roll based on 2nd embodiment shown to FIG. 7 (A)-(C) is applied.

(3) Long resin film and copper-clad laminated resin film substrate (3-1) Long resin film The long resin film applied in the present invention is, for example, a long resin such as a polyethylene terephthalate (PET) film. Examples thereof include a film and a long heat-resistant resin film such as a polyimide film.

(3-2) Copper-clad laminated resin film (long resin film with metal film) substrate A copper-clad laminated resin film (long resin with metal film) using a sputtering web coater in which the rolls according to the present invention are incorporated. Film) substrate can be manufactured.

  The copper-clad laminated resin film (long resin film with metal film) substrate includes a base metal layer made of Ni, Ni-based alloy, chromium, etc. on the surface of the long resin film, and copper laminated on the surface of the base metal layer. A structure composed of a thin film layer is exemplified. The copper clad laminated resin film substrate having such a structure is processed into a flexible wiring substrate by a subtractive method. Here, the subtractive method is a method of manufacturing a flexible wiring board by removing a metal film (for example, the copper thin film layer) not covered with a resist by etching.

  The layer made of Ni alloy or the like is called a seed layer (underlying metal layer), and its composition is selected depending on desired characteristics such as electrical insulation and migration resistance of the copper-clad laminated resin film substrate. The seed layer can be made of various known alloys such as Ni—Cr alloy or Inconel, Condanthan, Monel and the like. Further, when it is desired to further increase the thickness of the metal film (copper thin film layer) of the copper-clad laminated resin film (long resin film with metal film) substrate, the metal film may be formed using a wet plating method. There are cases where a metal film is formed only by electroplating (ie, electroplating), and electroless plating is performed as primary plating and wet plating such as electrolytic plating is combined as secondary plating. is there. The wet plating process may employ various conditions of a conventional wet plating method.

  Moreover, as a heat resistant resin film used for the said copper clad laminated resin film (long resin film with a metal film) board | substrate, a polyimide-type film, a polyamide-type film, a polyester-type film, a polytetrafluoroethylene-type film, a polyphenylene sulfide, for example Resin film selected from polyethylene film, polyethylene naphthalate film or liquid crystal polymer film, from the viewpoint of having flexibility as a copper-clad laminated resin film, practically necessary strength, and electrical insulation suitable as a wiring material preferable.

  In addition, although the structure which laminated | stacked metal films, such as Ni-Cr alloy and Cu, on the heat resistant resin film was illustrated as said copper clad laminated resin film (long resin film with a metal film) board | substrate, other than the said metal film Depending on the purpose, an oxide film, a nitride film, a carbide film, or the like can be used.

  Examples of the present invention will be specifically described below with reference to comparative examples.

  The “stretching roll” incorporated in the sputtering web coater shown in FIG. 1 is as follows.

(1) Kneading rolls used in the examples The kneading rolls used in the examples are the kneading rolls according to the first embodiment shown in FIGS. 6 (A) to (C) and FIG. 7 (A). Two types of crease rolls according to the second embodiment shown in (C) were used.

(1-1) The kneading roll according to the first embodiment First, the kneading roll according to the first embodiment shown in FIGS. 6A to 6C is a fluororubber that covers the outer peripheral surface of the roll body. (Registered trademark “Viton” manufactured by DuPont) and a widening mechanism composed of a coating film and a plurality of periodic groove bodies 53 provided on the outer peripheral surface of the rubber coating film. The central region 52a is divided into a central region 52a having the outer peripheral line 52P in the center and both side regions 52b and 52c located on both sides in the axial direction of the central region 52a. The left area 52a1 is located on the right side, and the right area 52a2 is located on the right side.

  Further, as shown in FIG. 6C, the periodic groove bodies 53 formed in the left area 52a1 and the right area 52a2 of the central area 52a are arranged so that the grooves of the periodic groove bodies 53 are mutually in the central area 52a. Without crossing, it extends from the left region 52a1 over the outer peripheral line 52P to the right region 52a2, and extends from the right region 52a2 over the outer peripheral line 52P to the left region 52a1 and extends into the central region 52a. A V-shaped tip having a base end side of 52P is not formed.

  Further, the periodic groove bodies 53 formed in the both side regions 52b and 52c located on both sides in the axial direction of the central region 52a have the outer peripheral line 52P as the base end side and from the base end side toward the both ends in the axial direction. A pattern extending symmetrically so as to be V-shaped, or parallel to each other, and having the same direction of the V-shaped tip and the direction of rotation of the roll body (however, the pattern of the periodic grooves is formed in both side regions 52b, The periodic grooves 53 in the central region 52a are formed in a pattern in which no V-shaped tip is formed as described above.

  In the periodic groove body 53, the groove depth is 0.2 mm, the groove width is 0.2 mm, the pitch is 1 mm, and the opening angle (lead angle) of the V-shaped tip is set to 80 °.

  Further, in the above-described roll-stretching roll, as shown in FIG. 6C, a plurality of rectangular unit regions 521 and 522 are formed by equally dividing the central region 52a over the outer peripheral direction of the roll body, The rectangular unit region 521 is formed with two triangular regions partitioned by a straight line connecting the left and right corners of the roll body at the rear end in the rotation direction and the other rectangular shape adjacent to the rectangular unit region. In the unit region 522, two triangular regions defined by a straight line connecting the front left corner and the rear right corner of the roll body are formed, and two triangular regions in each of the rectangular unit regions 521 and 522 are formed. A periodic groove 53 extending from the left region 52a1 of the central region 52a to the right region 52a2 and a periodic groove 53 extending from the right region 52a2 to the left region 52a1 are respectively included therein. It is formed.

  The width dimension of the central area 52a is set to 20 mm, and corresponds to each arc length of the rectangular unit areas 521 and 522 formed by equally dividing the central area 52a in the outer peripheral direction of the roll body. The central angle is set to about 20 °, and 18 (that is, 360 ° ÷ 20 ° = 18) rectangular unit regions are formed in the outer peripheral direction of the roll body.

(1-2) Kneading roll according to the second embodiment Next, the kneading roll according to the second embodiment shown in FIGS. 7 (A) to (C) is a fluorine coating the outer peripheral surface of the roll body. A widening mechanism including a rubber (registered trademark “Viton” manufactured by DuPont) coating and a plurality of periodic grooves 63 provided on the outer peripheral surface of the rubber coating is provided. The center region 62a having the outer peripheral line 62P in the center and the both side regions 62b and 62c positioned on both sides in the axial direction of the central region 62a, and the central region 62a is centered on the outer peripheral line 62P. The left area 62a1 is located on the left side, and the right area 62a2 is located on the right side.

  In addition, as shown in FIG. 7C, the periodic groove bodies 63 formed in the left area 62a1 and the right area 62a2 of the central area 62a are connected to each other. Without crossing, it extends from the right region 62a2 over the outer peripheral line 62P to the left region 62a1, and extends from the left region 62a1 over the outer peripheral line 62P to the right region 62a2 to enter the outer region in the central region 62a. A V-shaped tip having the base end side of 62P is not formed.

  Further, the periodic groove bodies 63 formed in the both side regions 62b and 62c located on both sides in the axial direction of the central region 62a have the outer peripheral line 62P as the base end side and from the base end side toward the both ends in the axial direction. A pattern extending symmetrically so as to be V-shaped, or parallel to each other and having the same direction of the V-shaped tip and the rotation direction of the roll body (however, the pattern of the periodic grooves is formed in both side regions 62b, The periodic grooves 63 in the central region 62a are formed in a pattern in which no V-shaped tip is formed as described above.

  In the periodic groove 63, the groove depth is 0.2 mm, the groove width is 0.2 mm, the pitch is 1 mm, and the opening angle (lead angle) of the V-shaped tip is set to 80 °.

  Further, in the above-described roll-stretching roll, as shown in FIG. 7C, a plurality of rectangular unit regions 621 and 622 are formed by equally dividing the central region 62a along the outer peripheral direction of the roll body, The rectangular unit region 621 is formed with a periodic groove 63 extending from the right region 62a2 to the left region 62a1 of the central region 62a, and the other rectangular unit region 622 adjacent to the rectangular unit region 621. Are formed with periodic grooves 63 extending from the left region 62a1 to the right region 62a2 of the central region 62a.

  The width dimension of the central area 62a is set to 20 mm, and corresponds to each arc length of the rectangular unit areas 621 and 622 formed by equally dividing the central area 62a in the outer peripheral direction of the roll body. The central angle is set to about 20 °, and 18 (that is, 360 ° ÷ 20 ° = 18) rectangular unit regions are formed in the outer peripheral direction of the roll body.

(2) Wrinkle-stretching roll used in the comparative example The wrinkle-stretching roll used in the comparative example is a peripheral line (a central point located approximately in the center in the axial direction on the rubber coating surface) in the conventional wrinkle-stretching roll shown in FIG. Peripheral lines 12P formed by linking each other are the conventional roll-stretching rolls according to the modified example having a slight width instead of the linear shape shown in FIGS. 8, 2B, and 3B.

  That is, as shown in FIGS. 4 (A) to (B), the conventional roll-stretching roll according to this modification has a coating made of fluoro rubber (registered trademark “Viton” manufactured by DuPont) covering the outer peripheral surface of the roll body, The outer peripheral line portion 32P formed by connecting the center points located approximately in the center in the axial direction on the surface of the fluororubber coating is V-shaped from the base end side toward the both axial end sides. A plurality of periodic grooves 33 provided on the outer peripheral surface of the fluororubber coating so that the direction of the V-shaped tip and the direction of rotation of the roll main body are the same as each other, extending parallel to each other or substantially parallel to each other. And a widening mechanism composed of

  In the periodic groove body 33, the groove depth is 0.2 mm, the groove width is 0.2 mm, the pitch is 1 mm, and the opening angle (lead angle) of the V-shaped tip is set to 80 °.

(3) Film formation conditions of sputtering web coater Using the sputtering web coater shown in FIG. 1, the long resin film 113 has a width of 500 mm, a length of 1000 m, and a thickness of 25 μm. Kapton (registered trademark) "is used.

  In addition, the cooling can roll 123 in the film forming chamber 111 in the sputtering web coater is a cooling roll having a diameter of 800 mm and a width of 800 mm, and the surface of the can roll main body is subjected to hard chrome plating.

  The metal film formed on the long resin film (heat-resistant polyimide film) 113 is a Cu film formed on the Ni—Cr film as the seed layer, and the magnetron sputter target 130 has Ni— A Cr target is used, a Cu target is used for the magnetron sputter targets 131, 132, and 133. Argon gas is introduced at 300 sccm, and the power applied to each cathode is controlled by power control. The film thickness of the Ni—Cr layer formed using one Ni—Cr target constituting the magnetron sputtering cathode 130 is 10 nm, and the magnetron sputtering cathodes 131, 132, and 133 are constituted. The film thickness of the Cu film formed using three Cu targets is 100 nm.

  The tension of the unwinding roll 114 and the winding roll 129 is 100N. The long resin film (heat resistant polyimide film) 113 is set on the unwinding roll 114, and the leading end of the long resin film (heat resistant polyimide film) 113 is wound up via the cooling can roll 123. 129 is attached to form a film.

Before the film formation process, the film formation chamber is evacuated to 5 Pa by a plurality of dry pumps, and further evacuated to 3 × 10 ⁻³ Pa using a plurality of turbo molecular pumps and cryocoils. .

  Moreover, the film conveyance speed acts on the long resin film (heat-resistant polyimide film) 113 and the long resin film (heat-resistant polyimide film) 113 and the heat load acting on the long resin film (heat-resistant polyimide film) 113 is relatively small. Two types of “8 m / min” with a relatively large heat load are set. Compared to when the film transport speed is "4 m / min", when the film transport speed is "8 m / min", twice the power is applied to each sputtering cathode to obtain the desired film thickness. (Ie, the heat load acting on the film is doubled). Similarly, in order to maintain the drying effect and the ion beam irradiation effect, it is necessary to apply twice the electric power. When the conveyance speed of the film is “8 m / min”, the total power applied to the sputtering cathode is “65 kW”.

  And after setting the conveyance speed of the long resin film (heat resistant polyimide film) 113 to “4 m / min” or “8 m / min”, argon gas is introduced into each magnetron sputter cathode 130, 131, 132, 133. Then, electric power is applied to start forming a Ni—Cr film constituting the seed layer and a Cu film formed on the Ni—Cr film.

[Example 1]
In Example 1, the free roll 119 in the unwinding chamber 110, the free roll 137 in the ion beam chamber 134, and the rear feed roll 124 in the film forming chamber 111 in the sputtering web coater are shown in FIGS. The kneading rolls according to the first embodiment shown in (C) are used.

  That is, the free roll 119 located on the process outlet side of the drying heaters 117 and 118 in the unwinding chamber 110 is composed of the kneading roll according to the first embodiment having a diameter of 150 mm and a width of 800 mm, and is long. The angle (holding angle) at which the resin film 113 is in contact with the free roll 119 is about 70 °.

  In addition, the free roll 137 located on the process exit side of the ion beam generator 138 in the ion beam chamber 134 is also composed of the kneading roll according to the first embodiment having a diameter of 150 mm and a width of 800 mm, and is a long resin. The angle (holding angle) at which the film 113 is in contact with the free roll 137 is about 100 °.

  Further, the rear feed roll (motor drive roll) 124 located on the process outlet side of the magnetron sputtering cathodes 130, 131, 132, 133 in the film forming chamber 111 is also 150 mm in diameter and 800 mm in width according to the first embodiment. The angle (holding angle) at which the long resin film 113 is in contact with the rear feed roll 124 is about 120 °. The peripheral speed of the front feed roll 122 located on the process inlet side of the magnetron sputtering cathodes 130, 131, 132, and 133 is rotated at a speed that is 0.1% slower than the peripheral speed of the reference cooling can roll 123. Yes.

  In addition, according to the first embodiment, the above-described roll-stretching rolls were used for the free roll 119 in the unwinding chamber 110, the free roll 137 in the ion beam chamber 134, and the rear feed roll 124 in the film forming chamber 111, respectively. Regarding the effect of the roll stretching roll in the sputtering web coater, the long resin film (heat-resistant polyimide film) 113 passes through the free roll 119, the free roll 137, and the rear feed roll 124 on the upstream side and the downstream side, respectively. The degree of reduction was visually observed from the observation window.

[Presence / absence of film wrinkle generation and effect of wrinkle rolls]
(1) When the film conveyance speed was “4 m / min”, no film wrinkles occurred on the upstream side of the free roll 119, the free roll 137, and the rear feed roll 124 constituted by the above-described roll-stretching rolls. .

(2) When the film transport speed is changed from “4 m / min” to “8 m / min”, which is twice as much (total power to the sputtering cathode, heater total power, and ion beam power are double each), Although several film wrinkles always occurred on the upstream side of the configured free roll 119, free roll 137, and rear feed roll 124, due to the effect of the wrinkle stretching roll according to the first embodiment, for example, by chance Even if a film wrinkle is generated at the substantially center in the width direction of the long resin film (heat-resistant polyimide film) 113, the film wrinkle is stretched and on the downstream side of the free roll 119, the free roll 137 and the rear feed roll 124. No film wrinkles were observed.

  That is, even when the film transport speed is set to “8 m / min” and the thermal load acting on the long resin film (heat-resistant polyimide film) 113 is high, it is constituted by the kneading rolls according to the first embodiment. It was confirmed that the film wrinkles were removed by the wrinkle-stretching effect of the free roll 119, the free roll 137, and the rear feed roll 124.

  In addition, it replaces with the roll extending roll which concerns on 1st embodiment shown to FIG. 6 (A)-(C), and the roll extending roll which concerns on 2nd embodiment shown to FIG. 7 (A)-(C). Even when the free roll 119 in the unwind chamber 110, the free roll 137 in the ion beam chamber 134, and the rear feed roll 124 in the film forming chamber 111 are respectively configured using The same heel-stretching effect as when using a stretching roll has been confirmed.

[Example 2]
In Example 2, the kneading roll according to the first embodiment is used only for the free roll 119 in the unwinding chamber 110 in the sputtering web coater.

  That is, the free roll 119 located on the process outlet side of the drying heaters 117 and 118 in the unwinding chamber 110 is composed of the kneading roll according to the first embodiment having a diameter of 150 mm and a width of 800 mm, and is long. The angle (holding angle) at which the resin film 113 is in contact with the free roll 119 is about 70 °.

  On the other hand, the free roll 137 located on the process exit side of the ion beam generator 138 in the ion beam chamber 134 is composed of a rubber roll having a diameter of 150 mm and a width of 800 mm that does not have a stretching function, and is a long resin film 113. Is in contact with the free roll 137 (holding angle) is about 100 °.

  Similarly, the rear feed roll (motor drive roll) 124 located on the process exit side of the magnetron sputtering cathodes 130, 131, 132, 133 in the film forming chamber 111 is also a rubber having a diameter of 150 mm and a width of 800 mm and not having a stretching function. The angle (holding angle) at which the long resin film 113 is in contact with the rear feed roll 124 is about 120 °. The peripheral speed of the front feed roll 122 located on the process inlet side of the magnetron sputtering cathodes 130, 131, 132, and 133 is rotated at a speed that is 0.1% slower than the peripheral speed of the reference cooling can roll 123. Yes.

  And about the effect of the stretch roll in the sputtering web coater based on Example 2 used for the free roll 119 in the unwinding chamber 110, the said stretch roll is the long resin film (heat resistant polyimide film) 113. In the unrolling chamber 110, the free roll 119, the free roll 137 in the ion beam chamber 134, and the rear feed roll 124 in the film forming chamber 111 are reduced on the upstream side and the downstream side, respectively. It observed visually from the observation window.

[Presence / absence of film wrinkle generation and effect of wrinkle rolls]
(1) When the conveyance speed of the film is “4 m / min”, the free roll 119 configured with the above-described roll-stretching roll, the free roll 137 configured with the rubber roll not having the stretch-stretching function, and the rear feed roll 124 There was no film wrinkle on the upstream side.

(2) When the film transport speed is changed from “4 m / min” to “8 m / min”, which is twice as much (total power to the sputtering cathode, heater total power, and ion beam power are double each), Although the formed free roll 119, the free roll 137 composed of a rubber roll having no curl stretching function, and several film wrinkles were always generated on the upstream side of the rear feed roll 124, the first embodiment Even if a film wrinkle occurs in the center in the width direction of the long resin film (heat-resistant polyimide film) 113 on the upstream side of the free roll 119 due to the effect of the wrinkle stretching roll according to the above, The film was stretched and not transmitted to the downstream side, and a large amount of film wrinkles was not confirmed on the downstream side of the free roll 119.

  However, since the free roll 137 and the rear feed roll 124 located on the downstream side of the free roll 119 are composed of rubber rolls that do not have a stretching function, a film is formed on the downstream side of the free roll 137 and the rear feed roll 124. Although wrinkles were confirmed, film wrinkles due to the heat load of the drying heaters 117 and 118 in the unwinding chamber 110 have been removed by the free roll 119, and thus are confirmed on the downstream side of the rear feed roll 124. The film wrinkle was slight.

  In addition, it replaces with the roll extending roll which concerns on 1st embodiment shown to FIG. 6 (A)-(C), and the roll extending roll which concerns on 2nd embodiment shown to FIG. 7 (A)-(C). Even when the free roll 119 in the unwinding chamber 110 is configured by using the kneading roll, the same kneading effect as when the kneading roll according to the first embodiment is used has been confirmed.

[Example 3]
In Example 3, the kneading roll according to the first embodiment is used only for the free roll 137 in the ion beam chamber 134 of the sputtering web coater.

  In other words, the free roll 137 located on the process exit side of the ion beam generator 138 in the ion beam chamber 134 is composed of the kneading roll according to the first embodiment having a diameter of 150 mm and a width of 800 mm, and is a long resin. The angle (holding angle) at which the film 113 is in contact with the free roll 137 is about 100 °.

  On the other hand, the free roll 119 located on the process outlet side of the drying heaters 117 and 118 in the unwinding chamber 110 is composed of a rubber roll having a diameter of 150 mm and a width of 800 mm and not having a stretching function. The angle (holding angle) at which the film 113 is in contact with the free roll 119 is about 70 °.

  Similarly, the rear feed roll (motor drive roll) 124 located on the process exit side of the magnetron sputtering cathodes 130, 131, 132, 133 in the film forming chamber 111 is also a rubber having a diameter of 150 mm and a width of 800 mm and not having a stretching function. The angle (holding angle) at which the long resin film 113 is in contact with the rear feed roll 124 is about 120 °. The peripheral speed of the front feed roll 122 located on the process inlet side of the magnetron sputtering cathodes 130, 131, 132, and 133 is rotated at a speed that is 0.1% slower than the peripheral speed of the reference cooling can roll 123. Yes.

  And about the effect of the roll extending roll in the sputtering web coater based on Example 3 where the said roll extending roll was used for the free roll 137 in the ion beam chamber 134, the long resin film (heat resistant polyimide film) 113 is In the unrolling chamber 110, the free roll 119, the free roll 137 in the ion beam chamber 134, and the rear feed roll 124 in the film forming chamber 111 are reduced on the upstream side and the downstream side, respectively. It observed visually from the observation window.

[Presence / absence of film wrinkle generation and effect of wrinkle rolls]
(1) When the film conveyance speed is “4 m / min”, a free roll 119 composed of a rubber roll having no curl stretching function, a free roll 137 composed of the above curl stretching roll, and a curl stretching function Film wrinkles did not occur on the upstream side of the feed roll 124 after the rubber roll was formed.

(2) When the film transport speed is doubled from “4 m / min” to “8 m / min” (total power to the sputtering cathode, total heater power, and ion beam power are each doubled) There are always several free rolls 119 composed of rubber rolls that do not have, free roll 137 composed of the above-described roll-stretching rolls, and upstream of the feed roll 124 that is composed of rubber rolls that do not have a stretch-stretching function. Although a film wrinkle has occurred, due to the effect of the wrinkle-stretching roll according to the first embodiment, on the upstream side of the free roll 119 and the free roll 137, for example, a long resin film (heat-resistant polyimide film) happens to happen. Even if a film wrinkle is generated at substantially the center in the width direction of 113, this film wrinkle is a free roll constituted by the wrinkle-stretching roll. Without stretched to transmitted to the downstream side by 37, was not a large amount of film wrinkles are found in the downstream side of the free roll 137.

  However, since the rear feed roll 124 located on the downstream side of the free roll 137 is composed of a rubber roll that does not have the function of stretching the film, film defects have been confirmed on the downstream side of the rear feed roll 124. Since the film defects generated on the upstream side of the roll 119 and the free roll 137 were removed by the free roll 137, the film defects confirmed on the downstream side of the rear feed roll 124 were fewer than those in Example 2.

  In addition, it replaces with the roll extending roll which concerns on 1st embodiment shown to FIG. 6 (A)-(C), and the roll extending roll which concerns on 2nd embodiment shown to FIG. 7 (A)-(C). Even when the free roll 137 in the ion beam chamber 134 is configured using the above, it is confirmed that the same stretching effect as when the stretching roll according to the first embodiment is used.

[Example 4]
In Example 4, the kneading roll according to the first embodiment is used only for the rear feed roll (motor drive roll) 124 in the film forming chamber 111 in the sputtering web coater.

  That is, the rear feed roll (motor drive roll) 124 located on the process outlet side of the magnetron sputtering cathodes 130, 131, 132, 133 in the film forming chamber 111 has a diameter of 150 mm and a width of 800 mm according to the first embodiment. The angle (holding angle) at which the long resin film 113 is in contact with the rear feed roll 124 is about 120 °. The peripheral speed of the front feed roll 122 located on the process inlet side of the magnetron sputtering cathodes 130, 131, 132, and 133 is rotated at a speed that is 0.1% slower than the peripheral speed of the reference cooling can roll 123. Yes.

  On the other hand, the free roll 119 located on the process outlet side of the drying heaters 117 and 118 in the unwinding chamber 110 is composed of a rubber roll having a diameter of 150 mm and a width of 800 mm and not having a stretching function. The angle (holding angle) at which the film 113 is in contact with the free roll 119 is about 70 °.

  Similarly, the free roll 137 located on the process exit side of the ion beam generator 138 in the ion beam chamber 134 is also composed of a rubber roll having a diameter of 150 mm and a width of 800 mm and not having a stretching function. The angle (holding angle) at which the film 113 is in contact with the free roll 137 is about 100 °.

  The effect of the roll stretching roll in the sputtering web coater according to Example 4 in which the roll stretching roll is used as the rear feed roll (motor-driven roll) 124 in the film forming chamber 111 is as follows. (Adhesive polyimide film) 113 on the upstream side and the downstream side passing through the free roll 119 in the unwind chamber 110, the free roll 137 in the ion beam chamber 134, and the rear feed roll 124 in the film forming chamber 111, respectively. The degree of film wrinkle reduction was visually observed from the observation window.

[Presence / absence of film wrinkle generation and effect of wrinkle rolls]
(1) When the conveyance speed of the film is “4 m / min”, the free roll 119 and the free roll 137 made of rubber rolls that do not have a roll-stretching function, There was no film wrinkle on the upstream side.

(2) When the film transport speed is changed from “4 m / min” to “8 m / min”, which is twice as much (total power to the sputtering cathode, heater total power, and ion beam power are each doubled) Although there were always several film wrinkles on the upstream side of the feed roll 124 after the free roll 119 and the free roll 137 constituted by the rubber rolls having no rubber, the first embodiment Due to the effect of the kneading roll according to the form, on the upstream side of the free roll 119, the free roll 137 and the rear feed roll 124, for example, a film is accidentally placed in the center of the long resin film (heat resistant polyimide film) 113 in the width direction. Even if wrinkles occur, this film wrinkle is formed by the above-described wrinkle-stretching roll and then stretched by the feed roll 124. Without being transmitted to the downstream side is, the film wrinkles was never identified in the downstream side of the rear feed roll 124.

  However, since the free roll 119 and the free roll 137 located on the upstream side of the rear feed roll 124 are composed of rubber rolls that do not have the function of stretching the wrinkle, the free roll 119 and the free roll 137 and the rear feed roll 124 were all inferior to Example 1 in which the roll-feeding roll according to the first embodiment was configured, but the rear-feed roll 124 did not have a roll-stretching function. Compared with Example 2 and Example 3 comprised by this, it was excellent.

  In addition, it replaces with the roll extending roll which concerns on 1st embodiment shown to FIG. 6 (A)-(C), and the roll extending roll which concerns on 2nd embodiment shown to FIG. 7 (A)-(C). Even when the rear feed roll (motor-driven roll) 124 in the film forming chamber 111 is configured using the same, the same stretching effect as that when the stretching roll according to the first embodiment is used is confirmed.

[Comparative Example 1]
In Comparative Example 1, the free roll 119 in the unwinding chamber 110, the free roll 137 in the ion beam chamber 134, and the rear feed roll 124 in the film forming chamber 111 in the sputtering web coater are shown in FIGS. Each of the conventional kneading rolls according to the modification shown in (B) is used.

  That is, the free roll 119 located on the process outlet side of the drying heaters 117 and 118 in the unwinding chamber 110 has a diameter of 150 mm and a width of 800 mm according to the modification shown in FIGS. 4 (A) to (B). The angle (holding angle) at which the long resin film 113 is in contact with the free roll 119 is about 70 °.

  In addition, the free roll 137 positioned on the process exit side of the ion beam generator 138 in the ion beam chamber 134 is also composed of the above-described conventional roll extending roll having a diameter of 150 mm and a width of 800 mm, and the long resin film 113 is free. The angle (holding angle) in contact with the roll 137 is about 100 °.

  Further, the rear feed roll (motor drive roll) 124 located on the process exit side of the magnetron sputtering cathodes 130, 131, 132, 133 in the film forming chamber 111 is also composed of a conventional stretching roll having a diameter of 150 mm and a width of 800 mm. The angle (holding angle) at which the long resin film 113 is in contact with the rear feed roll 124 is about 120 °. The peripheral speed of the front feed roll 122 located on the process inlet side of the magnetron sputtering cathodes 130, 131, 132, and 133 is rotated at a speed that is 0.1% slower than the peripheral speed of the reference cooling can roll 123. Yes.

  4 (A) to 4 (B) includes a free roll 119 in the unwinding chamber 110, a free roll 137 in the ion beam chamber 134, and a rear feed in the film forming chamber 111. Regarding the effect of the stretch roll in the sputtering web coater according to Comparative Example 1 used for each of the rolls 124, the long resin film (heat-resistant polyimide film) 113 is composed of the free roll 119, the free roll 137, and the rear feed roll 124. The degree of reduction of film wrinkles on the upstream side and downstream side passing through each was visually observed from the observation window.

[Presence / absence of film wrinkle generation and effect of wrinkle rolls]
(1) When the film conveyance speed is “4 m / min”, no film wrinkle occurs on the upstream side of each of the free roll 119, the free roll 137, and the rear feed roll 124, which are configured by a conventional roll-stretching roll. It was.

(2) When the film transport speed is changed from “4 m / min” to “8 m / min”, which is twice as much (total power to the sputtering cathode, total heater power, and ion beam power are each doubled) Although several film wrinkles always occurred on the upstream side of the free roll 119, the free roll 137, and the rear feed roll 124, which are formed of rolls, the film wrinkles are generated almost at the center in the width direction due to the effect of the conventional roll stretching roll. Most of the film wrinkles were removed except for the film wrinkles.

  However, it is not possible to remove the film wrinkles that have occurred at the approximate center in the width direction of the long resin film (heat-resistant polyimide film) 113 with the conventional wrinkle-stretching rolls shown in FIGS. The film wrinkle was confirmed on the downstream side of the free roll 119, the free roll 137, and the rear feed roll 124. That is, the comparative example 1 was remarkably inferior to Examples 1-4 regarding the effect which removes a film flaw.

[Comparative Example 2]
In Comparative Example 2, the conventional kneading rolls shown in FIGS. 4A to 4B are used only for the free roll 119 in the unwinding chamber 110 in the sputtering web coater.

  That is, the free roll 119 located on the process outlet side of the drying heaters 117 and 118 in the unwinding chamber 110 is composed of a conventional kneading roll having a diameter of 150 mm and a width of 800 mm, and the long resin film 113 is free. The angle (holding angle) in contact with the roll 119 is about 70 °.

  On the other hand, the free roll 137 located on the process exit side of the ion beam generator 138 in the ion beam chamber 134 is composed of a rubber roll having a diameter of 150 mm and a width of 800 mm that does not have a stretching function, and is a long resin film 113. Is in contact with the free roll 137 (holding angle) is about 100 °.

  Similarly, the rear feed roll (motor drive roll) 124 located on the process exit side of the magnetron sputtering cathodes 130, 131, 132, 133 in the film forming chamber 111 is also a rubber having a diameter of 150 mm and a width of 800 mm and not having a stretching function. The angle (holding angle) at which the long resin film 113 is in contact with the rear feed roll 124 is about 120 °. The peripheral speed of the front feed roll 122 located on the process inlet side of the magnetron sputtering cathodes 130, 131, 132, and 133 is rotated at a speed that is 0.1% slower than the peripheral speed of the reference cooling can roll 123. Yes.

  And about the effect of the stretching roll in the sputtering web coater which concerns on the comparative example 2 used for the conventional roll 119 in the unwinding chamber 110, the conventional stretching roll shown to FIG. 4 (A)-(B), A long resin film (heat-resistant polyimide film) 113 passes through each of the free roll 119 in the unwind chamber 110, the free roll 137 in the ion beam chamber 134, and the rear feed roll 124 in the film forming chamber 111. The degree of film wrinkle reduction on the upstream side and the downstream side was visually observed from the observation window.

[Presence / absence of film wrinkle generation and effect of wrinkle rolls]
(1) When the film conveyance speed is “4 m / min”, a free roll 119 composed of a conventional roll-stretching roll, a free roll 137 composed of a rubber roll having no roll-stretching function, and a rear feed roll 124 No film flaws occurred on the upstream side.

(2) When the film transport speed is changed from “4 m / min” to “8 m / min”, which is twice as much (total power to the sputtering cathode, total heater power, and ion beam power are each doubled) Although several film wrinkles were always generated on the upstream side of the free roll 119 composed of rolls, the free roll 137 composed of rubber rolls not having a curl-stretching function, and the rear feed roll 124, Due to the effect of the free roll 119 composed of stretch rolls, some film wrinkles generated on the upstream side of the free roll 119 have been removed.

  However, it is not possible to remove the film wrinkles that have occurred at the approximate center in the width direction of the long resin film (heat-resistant polyimide film) 113 with the conventional wrinkle-stretching rolls shown in FIGS. The film wrinkle was confirmed on the downstream side of the free roll 119, the free roll 137, and the rear feed roll 124. That is, Comparative Example 2 was significantly inferior to Examples 1 to 4 in terms of the effect of removing film wrinkles.

[Comparative Example 3]
In Comparative Example 3, the conventional kneading rolls shown in FIGS. 4A to 4B are used only for the free roll 137 in the ion beam chamber 134 of the sputtering web coater.

  That is, the free roll 137 located on the process exit side of the ion beam generator 138 in the ion beam chamber 134 is configured by a conventional roll extending roll having a diameter of 150 mm and a width of 800 mm, and the long resin film 113 is a free roll. The angle (holding angle) in contact with 137 is about 100 °.

  On the other hand, the free roll 119 located on the process outlet side of the drying heaters 117 and 118 in the unwinding chamber 110 is composed of a rubber roll having a diameter of 150 mm and a width of 800 mm and not having a stretching function. The angle (holding angle) at which the film 113 is in contact with the free roll 119 is about 70 °.

  Similarly, the rear feed roll (motor drive roll) 124 located on the process exit side of the magnetron sputtering cathodes 130, 131, 132, 133 in the film forming chamber 111 is also a rubber having a diameter of 150 mm and a width of 800 mm and not having a stretching function. The angle (holding angle) at which the long resin film 113 is in contact with the rear feed roll 124 is about 120 °. The peripheral speed of the front feed roll 122 located on the process inlet side of the magnetron sputtering cathodes 130, 131, 132, and 133 is rotated at a speed that is 0.1% slower than the peripheral speed of the reference cooling can roll 123. Yes.

  And as for the effect of the stretching roll in the sputtering web coater which concerns on the comparative example 3 used for the conventional roll stretching roll 137 in the ion beam chamber 134, the conventional stretching roll shown to FIG. 4 (A)-(B), A long resin film (heat-resistant polyimide film) 113 passes through each of the free roll 119 in the unwind chamber 110, the free roll 137 in the ion beam chamber 134, and the rear feed roll 124 in the film forming chamber 111. The degree of film wrinkle reduction on the upstream side and the downstream side was visually observed from the observation window.

[Presence / absence of film wrinkle generation and effect of wrinkle rolls]
(1) When the film transport speed is “4 m / min”, a free roll 119 composed of a rubber roll having no curl stretching function, a free roll 137 composed of a conventional curl stretching roll, and a curl stretching function The film wrinkle did not occur on the upstream side of the feed roll 124 after the rubber roll was formed.

(2) When the film transport speed is doubled from “4 m / min” to “8 m / min” (total power to the sputtering cathode, total heater power, and ion beam power are each doubled) There are always several free rolls 119 composed of rubber rolls that do not have, free roll 137 composed of conventional kneading rolls, and several upstream on the feed roll 124 after being composed of rubber rolls that do not have kneading functions. However, due to the effect of the free roll 124 constituted by the conventional roll-stretching roll, some film wrinkles generated on the upstream side of the free roll 119 and the free roll 137 were removed. .

  However, it is not possible to remove the film wrinkles that have occurred at the approximate center in the width direction of the long resin film (heat-resistant polyimide film) 113 with the conventional wrinkle-stretching rolls shown in FIGS. The film wrinkle was confirmed on the downstream side of the free roll 119, the free roll 137, and the rear feed roll 124. That is, Comparative Example 3 was significantly inferior to Examples 1 to 4 in terms of the effect of removing film defects.

[Comparative Example 4]
In Comparative Example 4, the conventional kneading rolls shown in FIGS. 4A to 4B are used only for the rear feed roll (motor drive roll) 124 in the film forming chamber 111 of the sputtering web coater.

  That is, the rear feed roll (motor drive roll) 124 located on the process exit side of the magnetron sputtering cathodes 130, 131, 132, 133 in the film forming chamber 111 is composed of a conventional stretching roll having a diameter of 150 mm and a width of 800 mm. The angle (holding angle) at which the long resin film 113 is in contact with the rear feed roll 124 is about 120 °. The peripheral speed of the front feed roll 122 located on the process inlet side of the magnetron sputtering cathodes 130, 131, 132, and 133 is rotated at a speed that is 0.1% slower than the peripheral speed of the reference cooling can roll 123. Yes.

  On the other hand, the free roll 119 located on the process outlet side of the drying heaters 117 and 118 in the unwinding chamber 110 is composed of a rubber roll having a diameter of 150 mm and a width of 800 mm and not having a stretching function. The angle (holding angle) at which the film 113 is in contact with the free roll 119 is about 70 °.

  Similarly, the free roll 137 located on the process exit side of the ion beam generator 138 in the ion beam chamber 134 is also composed of a rubber roll having a diameter of 150 mm and a width of 800 mm and not having a stretching function. The angle (holding angle) at which the film 113 is in contact with the free roll 137 is about 100 °.

  4 (A) to 4 (B) is used for the rear feed roll (motor drive roll) 124 in the film forming chamber 111. Regarding the effect of the roll, a long resin film (heat-resistant polyimide film) 113 includes a free roll 119 in the unwinding chamber 110, a free roll 137 in the ion beam chamber 134, and a rear feed roll in the film forming chamber 111. The degree of film wrinkle reduction on the upstream side and the downstream side passing through each of 124 was visually observed from the observation window.

[Presence / absence of film wrinkle generation and effect of wrinkle rolls]
(1) When the film conveyance speed is “4 m / min”, the free roll 119 and the free roll 137 made up of rubber rolls that do not have the kneading function and the feed roll 124 made up of the conventional kneading roll No film flaws occurred on the upstream side.

(2) When the film transport speed is changed from “4 m / min” to “8 m / min”, which is twice as much (total power to the sputtering cathode, heater total power, and ion beam power are each doubled) There were always several film wrinkles on the upstream side of the feed roll 124 after the free roll 119 and the free roll 137 constituted by rubber rolls having no rubber and the conventional roll extending roll. Due to the effect of the rear feed roll 124 composed of the stretcher roll, some of the film rolls generated on the upstream side of the free roll 119, the free roll 137, and the rear feed roll 124 have been removed.

  However, it is not possible to remove the film wrinkles that have occurred at the approximate center in the width direction of the long resin film (heat-resistant polyimide film) 113 with the conventional wrinkle-stretching rolls shown in FIGS. The film wrinkle was confirmed on the downstream side of the free roll 119, the free roll 137, and the rear feed roll 124. That is, Comparative Example 4 was significantly inferior to Examples 1 to 4 with respect to the effect of removing film wrinkles.

  According to the roll-stretching roll and the roll-stretching method according to the present invention, and the surface treatment apparatus and the surface treatment method in which the roll-stretching roll is incorporated, the film wrinkles generated on the long resin film by the treatment with the thermal load are evenly and reliably Since it can be removed, it can be used as a manufacturing method for copper-clad laminated resin film (long resin film with metal film) substrates used in liquid crystal panels, laptop computers, digital cameras, mobile phones, etc. have.

DESCRIPTION OF SYMBOLS 110 Unwinding chamber 113 Long resin film 114 Unwinding roll 115 Tension sensor roll 116 Heater box 117 Drying heater 118 Drying heater 119 Free roll 134 Ion beam chamber 135 Free roll 136 Cooling roll 137 Free roll 138 Ion beam generator 111 Deposition chamber 120 Free roll 121 Tension sensor roll 122 Front feed roll 123 Cooling can roll 124 Rear feed roll 125 Tension sensor roll 126 Free roll 130 Magnetron sputtering cathode 131 Magnetron sputtering cathode 132 Magnetron sputtering cathode 133 Magnetron sputtering cathode 112 Winding chamber 127 Free roll 128 Tension sensor roll 129 Scraping roll 11 Long resin film 12 Roller roll 12P Peripheral line 13 Periodic groove 14 Film trough 21 Long resin film 22 Stretch roll 22P Perimeter line 23 Periodic groove 24 Film trough 31 Long resin film 32 Stretching roll 32P Perimeter line portion 33 Periodic groove body 34 Film ridge 41 Long resin film 42 Stretching roll 42P Perimeter line portion 43 Periodic groove body 44 Film trough 51 Long resin film 52 Stretching roll 52P Perimeter line 52a Central area 52a1 Left region 52a2 Right region 52b Both sides region 52c Both sides region 521 Rectangular unit region 522 Rectangular unit region 53 Periodic groove 54 Film ridge 61 Long resin film 62 皺 Stretch roll 62P Peripheral line 62a Central region 62a1 Left region 62a2 Right side Region 62b both Area 62c side regions 621 rectangular unit areas 622 rectangular unit areas 63 periodically Mizotai 64 film wrinkles

Claims (19)

A rubber coating covering the outer peripheral surface of the roll body, the outer peripheral line of the center point are formed by connecting each located substantially axial center on said rubber coating surface and the base end side and axially from the base end side the outer periphery of the rubber coating so that the rotation direction of the direction and the roll body where the V-shaped tip is directed is the same with each other parallel or substantially parallel extending symmetrically such that V-shape toward the opposite end side A long resin that has a widening mechanism composed of a plurality of periodic grooves provided on the surface, and is conveyed in a vacuum chamber in a roll-to-roll manner while in contact with the outer peripheral surface of the rubber coating. to the film by the widening mechanism in crease smoothing roll that applies tension toward the width direction of the long resin film,
A plurality of the periodic groove member provided on the outer peripheral surface of the rubber coating, is divided into both side regions located to the axial direction on both sides of the center region and the central region with the peripheral line in the middle, the central with areas composed of the right region on the left side region and right on the left side and the peripheral line in the middle, the periodic grooved member formed in the left region and said right region of the central region without the grooves of the periodic groove body in the central region intersect one another, from the left area beyond the peripheral line is extended to the right area, and, beyond the peripheral line from said right side area the to the left side region is extended, the crease smoothing roll, characterized in that as the V-shaped tip of the outer peripheral line and the base end side to the central region is not formed. The said central region over the outer periphery of the roll body evenly partition the plurality of rectangular unit areas are formed, and, on one of the rectangular unit areas and the rotational direction rear left corner of the roll body tip two triangular region defined by a straight line connecting the right angle portion is formed, the rotation direction leading left corner of the roll body to the other of the rectangular unit area adjacent to the rectangular unit area and the rear right with two triangular region defined by a straight line connecting the corner portion is formed, the periodic of the two said triangular area of each rectangular unit areas is extended from the left area of the central region to the right area The roll extending roll according to claim 1, wherein the groove body and the periodic groove body extending from the right region to the left region are formed. A plurality of rectangular unit regions are formed by equally dividing the central region over the outer peripheral direction of the roll body, and one rectangular unit region is formed from the left region to the right region of the central region. The periodic groove extending is formed, and the periodic groove extending from the right region to the left region of the central region is formed in the other rectangular unit region adjacent to the rectangular unit region. The body-stretching roll according to claim 1, wherein a body is formed. The width dimension of the said center area | region is set to 20% or less of the width dimension in the said long resin film more than the pitch dimension between the grooves in the said periodic groove body, The any one of Claims 1-3 characterized by the above-mentioned. Crab stretch roll according to crab. The said roll made from rubber | gum which coat | covers the outer peripheral surface of the said roll main body is comprised with the fluoro rubber, The roll extending roll in any one of Claims 1-4 characterized by the above-mentioned. A rubber coating covering the outer peripheral surface of the roll body, the outer peripheral line of the center point are formed by connecting each located substantially axial center on said rubber coating surface and the base end side and axially from the base end side the outer periphery of the rubber coating so that the rotation direction of the direction and the roll body where the V-shaped tip is directed is the same with each other parallel or substantially parallel extending symmetrically such that V-shape toward the opposite end side A film formed on a long resin film that is conveyed in a vacuum chamber by a roll-to-roll method using a roll-stretching roll equipped with a widening mechanism composed of a plurality of periodic grooves provided on the surface. In the method of extending the cocoon to remove the cocoon by the above widening mechanism,
A plurality of the periodic groove member provided on the outer peripheral surface of the rubber coating on the crease smoothing roll, the both side regions located to the axial direction on both sides of the center region and the central region with the peripheral line in the middle It is defined, the said central region together with composed of the right region on the left side region and right on the left side and the peripheral line in the middle, which is formed in the left region and the right region of the central region periodic grooves body, without the grooves of the periodic groove body intersect each other in the central region, extending from the left side region to the right area beyond the peripheral line, and the from the right side area beyond peripheral line, characterized by using the crease smoothing roll as the V-shaped tip to the base end side of the above peripheral line is not formed is extended the central region to the left area Way stretch. A plurality of rectangular unit regions are formed by equally dividing the central region over the outer peripheral direction of the roll body, and one of the rectangular unit regions has a left corner at the rear end in the rotational direction of the roll body. Two triangular areas defined by a straight line connecting the right corner of the front end are formed, and the other rectangular unit area adjacent to the rectangular unit area has a left end and a rear right end of the roll body in the rotational direction. The two triangular regions defined by straight lines connecting the corners are formed, and the periodic region is extended from the left region of the central region to the right region in the two triangular regions in each rectangular unit region. The method according to claim 6, wherein the crease-stretching roll is used in which the groove and the periodic groove extending from the right region to the left region are formed. A plurality of rectangular unit regions are formed by equally dividing the central region over the outer peripheral direction of the roll body, and one rectangular unit region is formed from the left region to the right region of the central region. The periodic groove extending is formed, and the periodic groove extending from the right region to the left region of the central region is formed in the other rectangular unit region adjacent to the rectangular unit region. The method for stretching a knot according to claim 6, wherein the kneading roll in which a body is formed is used. Claims width of the central region in the crease smoothing roll, or pitch dimension between the grooves in the periodic Mizotai, characterized in that it is set to less than 20% of the width of the long resin film The wrinkle-stretching method in any one of 6-8. The angle (embracing angle) in which is in contact with the long resin film on the outer circumferential surface of the crease smoothing rolls, one of the rectangular unit areas and the other of the rectangular unit areas adjacent thereto in the crease smoothing roll crease smoothing method according to claim 7 or 8, characterized in that to include a set of the rectangular unit areas in the unit. The method for stretching a kneading cloth according to any one of claims 6 to 10, wherein the rubber film covering the outer peripheral surface of the roll body is made of fluororubber. In a surface treatment apparatus comprising a surface treatment means for performing a surface treatment with a thermal load on a long resin film conveyed in a vacuum chamber by a roll-to-roll method,
A surface treatment apparatus comprising the above- described roll-stretching roll according to claim 1 in the vacuum chamber. In a surface treatment apparatus comprising a surface treatment means for performing a surface treatment with a thermal load on a long resin film conveyed in a vacuum chamber by a roll-to-roll method,
The said stretcher roll according to claim 2 or 3 is provided in said vacuum chamber, and said stretcher is within an angle (holding angle) at which said long resin film is in contact with an outer peripheral surface of said stretcher roll. surface treatment apparatus is characterized in that to contain the one of said rectangular unit areas and a set of the rectangular unit areas in units of other one of the rectangular unit area adjacent thereto in the roll. The surface treatment apparatus of claim 12 or 13, characterized in that the crease smoothing roll is installed in the conveyance path downstream of the processed the lengthwise resin film by the surface treatment means. The surface treatment with the thermal load, the surface treatment apparatus according to any one of claims 12 to 14, characterized in that the treatment by vacuum deposition. The surface treatment apparatus according to claim 15, wherein the vacuum film forming method is magnetron sputtering. In a surface treatment method for performing a surface treatment with a thermal load on a long resin film conveyed in a vacuum chamber by a roll-to-roll method,
Surface treatment method characterized by applying the crease smoothing method according to any of claims 6 to 11 relative to the elongated resin film film wrinkles caused by the surface treatment. The surface treatment method according to claim 17, wherein the surface treatment with a thermal load is a treatment by a vacuum film formation method. The surface treatment method according to claim 18, wherein the vacuum film formation method is magnetron sputtering.

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