JP2013224470A - Surface treatment apparatus and surface treatment method for long body, and method for producing copper clad laminated resin film substrate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a surface treatment apparatus and a method for the same, by which the formation of wrinkles or the like in a long body, such as a long resin film, is almost suppressed even in the case when a thermal load acting on the long body is increased by the setting of a higher conveying speed (film deposition speed) or the like, and to provide a method for producing a copper clad laminated resin film substrate.SOLUTION: A surface treatment apparatus is a treatment apparatus, such as a sputtering web coater, which includes a cooling can roller 56, surface treatment means accompanying thermal load such as sputtering cathodes 57, 58, 59, 60, and a pre-feed roller 55, and winds a long body 52 being conveyed on the outer circumferential surface of the cooling can roll through the pre-feed roll and treats the surface side of the long body by the surface treatment means. In the treatment apparatus, the pre-feed roller is constituted of a heating roller, and includes a width expansion mechanism for imparting tensile force heading in the width direction to the long body being conveyed, in the outer circumferential surface of the heating roller.

Description

  The present invention winds a long body such as a long resin film, a metal foil, and a metal strip conveyed by a roll-to-roll method around the outer peripheral surface of a cooling can roll through a front feed roll, The present invention relates to a surface treatment apparatus and a surface treatment method for a long body that is surface-treated by a surface treatment means that involves a thermal load such as sputtering, on the surface side of the long body that is not in contact with the outer peripheral surface of the can roll. The present invention relates to a surface treatment apparatus and a surface treatment method for a long body in which wrinkles are unlikely to occur in a long body such as a long resin film, and a method for producing a copper-clad laminated resin film substrate.

  Flexible wiring boards are used in liquid crystal panels, notebook computers, digital cameras, mobile phones, and the like. The flexible wiring board is manufactured from a heat-resistant resin film with a metal film in which a metal film is formed on one side or both sides of a heat-resistant resin film. In recent years, wiring patterns formed on flexible wiring boards have become increasingly finer and denser, and it has become even more important that the heat-resistant resin film with metal film itself is smooth and free of defects. Yes.

  As a manufacturing method of this kind of heat-resistant resin film with a metal film, a method of manufacturing by attaching a metal foil to a heat-resistant resin film with an adhesive (referred to as a manufacturing method of a three-layer substrate), heat-resistant to the metal foil By coating with a conductive resin solution and drying to manufacture (called casting method), dry plating method (vacuum film forming method) or a combination of dry plating method (vacuum film forming method) and wet plating method A method for producing a metal film on a heat-resistant resin film (referred to as a metallizing method) has been conventionally known. Further, the dry plating method (vacuum film forming method) in the metalizing method includes a vacuum deposition method, a sputtering method, an ion plating method, an ion beam sputtering method and the like.

  Regarding the metallizing method, Patent Document 1 discloses a method in which chromium is sputtered on a polyimide insulating layer and then copper is sputtered to form a conductor layer on the polyimide insulating layer. In Patent Document 2, a first metal thin film formed by sputtering using a copper nickel alloy as a target and a second metal thin film formed by sputtering using copper as a target are laminated on a polyimide film in this order. A flexible circuit board material (that is, a copper-clad laminated resin film substrate) is disclosed. In addition, when manufacturing a heat resistant resin film with a metal film by vacuum film-forming to a heat resistant resin film like a polyimide film, it is common to use the sputtering web coater described below.

  And although the sputtering method mentioned above has the advantage which is excellent in the adhesive force of the metal thin film etc. which were formed into a film, it is said that the heat load given to a heat resistant resin film is large compared with the vacuum evaporation method. It is also known that when a large heat load is applied to the heat resistant resin film during film formation, wrinkles are likely to occur in the film.

  In order to prevent the generation of wrinkles, a sputtering web coater is used to heat-resistant during film formation by wrapping a long heat-resistant resin film conveyed by roll-to-roll or the like while closely contacting a cooling can roll having a cooling function. The system which cools a property resin film from the back side is adopted. For example, Patent Document 3 discloses an unwinding type (roll-to-roll type) vacuum sputtering apparatus which is an example of the sputtering web coater. This unwinding / winding-type vacuum sputtering apparatus includes a cooling roll that functions as a cooling can roll, and further, a sub-roll (pre-feed roll) on the carry-in side (upstream side of the heat-resistant resin film) of the cooling roll. The sub-roll is used to control the heat-resistant resin film in close contact with the cooling roll.

  By the way, when the conveyance speed of a long heat-resistant resin film is increased for the purpose of increasing the production efficiency of sputtering film formation, it is necessary to perform sputtering film formation with a desired film thickness in a short time. Since the heat load applied to the resin film becomes larger, there has been a problem that the generation of wrinkles in the heat-resistant resin film cannot be completely prevented only by the cooling action of the cooling can roll described above. Also, even if the film transport speed is not set high, the heat load applied to the heat resistant resin film is relatively large when a thin heat resistant resin film is applied compared to a thick film. There was a problem that the generation of wrinkles in the heat-resistant resin film could not be completely prevented only by the cooling action of the cooling can roll.

  And in the sputtering apparatus of patent document 3, the cylindrical cooling can roll is applied, and while the conveyance tension by a roll acts on the length direction of the heat resistant resin film wound around the cooling can roll, long heat resistance Since the above tension does not act in the width direction of the heat-resistant resin film, the heat load acting on the heat-resistant resin film is relatively set by increasing the conveyance speed or applying a thin heat-resistant resin film. When it became large, although it was cooled with the cooling can roll, wrinkles might occur in the width direction of the long heat-resistant resin film due to the thermal load.

  In order to solve this problem, Patent Document 4 discloses a drum-shaped cooling can roll shape in which the center of the roll is higher than the end of the roll (crown roll shape: the center is about 2 to 3 mm higher when calculated from Patent Document 4). In this way, a device is proposed in which wrinkles are unlikely to occur in the width direction of the film. Moreover, in patent document 5, the long heat resistant resin film which was heated by additional means, such as an electron beam impact heating apparatus, with respect to the long heat resistant resin film before carrying in to a cooling can roll, was extended by thermal expansion. A non-patent document 1 proposes an inverted crown shape in which a roll end side is higher than a roll center portion after being expanded in the width direction of a film by an “elongating roll” such as an expand roll and then carried into a cooling can roll. In this device, a cooling can roll structure is adopted, and the peripheral speed on the end side of the cooling can roll is faster than the central portion of the roll so that wrinkles hardly occur in the width direction of the film.

  However, in each apparatus described in Patent Document 4 and Non-Patent Document 1, a cooling can roll having a crown shape or an inverted crown shape is newly manufactured instead of the cylindrical cooling can roll structure that has been widely used. Since there is a need, there is a problem that the apparatus lacks versatility and is expensive. On the other hand, in the apparatus described in Patent Document 5, an electron beam impact heating apparatus or an expand roll is provided on the carry-in side of the cooling can roll. Since it is necessary to provide the “stretching roll” as described above, an additional arrangement space for these additional members is required, and the structure in the apparatus becomes complicated.

Japanese Patent Laid-Open No. 2-98994 Japanese Patent No. 3447070 Japanese Patent Laid-Open No. 62-247073 Japanese Patent Laid-Open No. 10-8249 JP-A-2-166280

“The Mechanics of Web Handling”, David R. Roisum, Ph. D, TAPPI PRESS, (1998) p.83-84

  The present invention has been made paying attention to such problems, and the problem is that the cooling can roll can be made into a special shape even when the heat load acting on the long body is relatively increased. No change, no extra space for additional components in the device, and no complicated device structure, avoiding long-body wrinkles due to thermal load An object of the present invention is to provide a long surface treatment apparatus, a surface treatment method and a method for producing a copper clad laminated resin film substrate.

That is, the invention according to claim 1
The cooling can roll that is rotationally driven, the surface treatment means with a thermal load disposed along the outer peripheral surface of the cooling can roll on the side facing the cooling can roll, and the rotational drive disposed in the vicinity of the cooling can roll A front feed roll is provided in the vacuum chamber, and a long body conveyed by the roll-to-roll method is wound around the outer peripheral surface of the cooling can roll through the front feed roll and in contact with the outer peripheral surface of the cooling can roll. In the surface treatment apparatus for a long body that is surface-treated by the surface treatment means on the surface side of the long body that is not,
The front feed roll is constituted by a heating roll, and the outer peripheral surface of the heating roll is provided with a widening mechanism that applies tension in the width direction to the long body to be conveyed,
The invention according to claim 2
In the surface treatment apparatus of the elongate body which concerns on invention of Claim 1,
The heating roll widening mechanism includes a rubber coating covering the outer peripheral surface of the heating roll and an outer peripheral line formed by connecting a central point located substantially in the center in the axial direction on the rubber coating surface. And the rotation direction of the heating roll is the same as the direction in which the V-shaped tip ends are parallel or substantially parallel to each other and extend symmetrically so as to form a V-shape from the base end side toward both ends in the axial direction. Thus, it is comprised by the some periodic groove body provided in the outer peripheral surface of the rubber-made film.

The invention according to claim 3
In the surface treatment apparatus of the elongate body which concerns on invention of Claim 1 or 2,
The elongate body before the surface treatment is preliminarily heated by the front feed roll above the temperature of the elongate body during the surface treatment that is heated by the surface treatment means with thermal load. age,
The invention according to claim 4
In the surface treatment apparatus of the elongate body which concerns on the invention in any one of Claims 1-3,
The peripheral speed of the front feed roll that is rotationally driven is set slower than the peripheral speed of the cooling can roll that is rotationally driven,
The invention according to claim 5
In the surface treatment apparatus of the elongate body which concerns on the invention in any one of Claims 1-4,
The surface treatment means with thermal load is composed of film forming means by sputtering,
The invention according to claim 6
In the surface treatment apparatus of the elongate body which concerns on the invention in any one of Claims 1-4,
The surface treatment means accompanied by a thermal load is constituted by surface activation means using corona or plasma.

Next, the invention according to claim 7 provides:
A long body transported by a roll-to-roll system in a vacuum chamber is wound around the outer peripheral surface of a cooling can roll that is driven to rotate via a pre-rotated feed roll and is in contact with the outer peripheral surface of the cooling can roll. In the surface treatment method for a long body, the surface treatment is performed by a surface treatment means with a thermal load arranged along the outer peripheral surface of the cooling can roll on the side facing the cooling can roll with respect to the surface side of the long body that is not ,
The front feed roll arranged near the cooling can roll and on the carry-in side of the long body is composed of a heating roll having a widening mechanism on the outer peripheral surface, and the length before the surface treatment is conveyed. The scale body is preheated by the front feed roll, and the long body before the surface treatment is carried into the cooling can roll while applying a tension in the width direction by a width expanding mechanism,
The invention according to claim 8 provides:
In the surface treatment method of the elongate body which concerns on invention of Claim 7,
The heating roll widening mechanism includes a rubber coating covering the outer peripheral surface of the heating roll and an outer peripheral line formed by connecting a central point located substantially in the center in the axial direction on the rubber coating surface. And the rotation direction of the heating roll is the same as the direction in which the V-shaped tip ends are parallel or substantially parallel to each other and extend symmetrically so as to form a V-shape from the base end side toward both ends in the axial direction. Thus, it is comprised by the some periodic groove body provided in the outer peripheral surface of the rubber-made film.

The invention according to claim 9 is
In the surface treatment method of the elongate body which concerns on invention of Claim 7 or 8,
More than the temperature of the long body during the surface treatment that is heated by the surface treatment means with heat load, characterized in that the long body before the surface treatment is pre-heated by the pre-feed roll,
The invention according to claim 10 is:
In the surface treatment method of the elongate body which concerns on invention in any one of Claims 7-9,
The peripheral speed of the front feed roll that is rotationally driven is set slower than the peripheral speed of the cooling can roll that is rotationally driven,
The invention according to claim 11 is:
In the surface treatment method for a long body according to the invention of claim 10,
The peripheral speed of the front feed roll is set to be 0.02% to 1% slower than the peripheral speed of the cooling can roll,
The invention according to claim 12
In the surface treatment method of the elongate body which concerns on invention in any one of Claims 7-11,
The surface treatment means with thermal load is a film forming means by sputtering,
The invention according to claim 13 is:
In the surface treatment method of the elongate body which concerns on invention in any one of Claims 7-11,
The surface treatment means with thermal load is a surface activation means by corona or plasma,
The invention according to claim 14 is:
In the surface treatment method of the elongate body which concerns on invention of Claim 12,
The long body is composed of a long heat-resistant resin film, and the film temperature is higher than the film temperature at the time of film formation of the heat-resistant resin film during film formation in which the temperature is raised by sputtering film formation means with a thermal load. The heat-resistant resin film before the surface treatment is preheated by a pre-feed roll within a range equal to or lower than the temperature obtained by adding 100 ° C. to the time film temperature.

Next, the invention according to claim 15 is:
A long heat-resistant resin film, a base metal layer made of nickel alloy or chromium formed on the surface of the heat-resistant resin film using the surface treatment method for a long body according to claim 14, and a base metal In a method for producing a copper-clad laminated resin film substrate composed of a copper thin film layer formed on the surface of the layer,
Provided with a plurality of sputtering film forming means in the vacuum chamber, using the plurality of sputtering film forming means, a base metal layer made of nickel alloy or chromium on the surface of the heat-resistant resin film, and a copper thin film layer on the surface of the base metal layer The film is formed continuously.

According to the surface treatment apparatus and the surface treatment method for a long body according to the present invention,
The front feed roll arranged near the cooling can roll and on the carry-in side of the long body is composed of a heating roll having a widening mechanism on the outer peripheral surface, and the long body before the surface treatment is conveyed. Is preheated by the front feed roll, and is carried into the cooling can roll while applying a tension in the width direction by the width increasing mechanism of the front feed roll.

  For this reason, the cooling can roll can be changed to a special shape such as a crown shape or an inverted crown shape, or an extra space for arranging additional members such as an electron beam impact heating device or an expanding roll can be provided in the device. Without adopting a simple apparatus structure, it is possible to avoid the occurrence of wrinkles on the long body due to the surface treatment with heat load.

Explanatory drawing which shows schematic structure in surface treatment apparatuses of elongate bodies, such as a sputtering web coater. In a surface treatment apparatus comprising a front feed roll (consisting of a metal roll not provided with a widening mechanism and a roll temperature set to room temperature 20 ° C.) and a cooling can roll (roll temperature set to room temperature 20 ° C.), a cooling can roll Explanatory drawing which shows the phenomenon in which wrinkles generate | occur | produce in elongate bodies, such as a heat resistant resin film. In a surface treatment apparatus comprising a front feed roll (consisting of a rubber roll without a widening mechanism and a roll temperature set to room temperature 20 ° C.) and a cooling can roll (roll temperature set to 60 ° C.), on the cooling can roll Explanatory drawing which shows the phenomenon in which wrinkles generate | occur | produce in elongate bodies, such as a heat resistant resin film. In a surface treatment apparatus comprising a front feed roll (consisting of a heated rubber roll without a widening mechanism and a roll temperature set to 110 ° C.) and a cooling can roll (the roll temperature set to 60 ° C.), on the cooling can roll Explanatory drawing which shows the phenomenon in which wrinkles generate | occur | produce in elongate bodies, such as a heat resistant resin film. In a surface treatment apparatus comprising a front feed roll (consisting of a rubber roll with a widening mechanism and a roll temperature set to room temperature 20 ° C.) and a cooling can roll (roll temperature set to 60 ° C.), on the cooling can roll Explanatory drawing which shows the phenomenon in which wrinkles generate | occur | produce in elongate bodies, such as a heat resistant resin film. In a surface treatment apparatus comprising a front feed roll (configured with a rubber heating roll with a widening mechanism and roll temperature set to 110 ° C.) and a cooling can roll (roll temperature set to 60 ° C.), on the cooling can roll Explanatory drawing which shows that the phenomenon in which wrinkles generate | occur | produce in elongate bodies, such as a heat resistant resin film, is suppressed. The schematic perspective view of the front feed roll which concerns on this invention comprised with the rubber-made heating roll provided with a widening mechanism.

  Hereinafter, embodiments of the present invention will be described in detail.

  First, a schematic configuration of a surface treatment apparatus having a surface treatment means in a vacuum chamber (decompression chamber) will be described by taking a sputtering web coater as an example.

  In this sputtering web coater (surface treatment apparatus), a long heat-resistant resin film conveyed by a roll-to-roll method is cited as an example of a long body.

(1) Sputtering Web Coater A sputtering web coater (surface treatment device) 50 is a winding roll 51 for unwinding the long resin film 52 and a winding roll 51 for unwinding the long resin film 52 as shown in FIG. A take-up roll 64, a cooling can roll 56 provided between the unwinding roll 51 and the take-up roll 64 and having a temperature-controlled refrigerant circulating therein and rotated by a servo motor, A pre-feed roll 55 that is provided on the upstream side and is rotationally driven by a servomotor and feeds the long resin film 52 supplied from the unwinding roll 51 to the cooling can roll 56, and provided on the downstream side of the cooling can roll 56. And is driven by a servo motor and is sent out from the cooling can roll 56. It has a structure in which a feed roll 61 is disposed after the rumm 52 is carried out to the winding roll 64 side, and magnetron sputtering cathodes 57, 58, 59, 60 are used as surface treatment means (dry plating means). It is provided along the outer peripheral surface of the cooling can roll 56 on the opposite side of the cooling can roll 56.

  Further, on the upstream conveyance path from the unwinding roll 51 to the cooling can roll 56, a free roll 53 for guiding the long resin film 52, a tension sensor roll 54 for measuring the tension of the long resin film 52, A front feed roll 55 that is rotationally driven by a servo motor is disposed. Then, a carry-in tension is applied to the long resin film 52 by the front feed roll 55 that is adjusted so that the peripheral speed of the cooling can roll 56 that is rotationally driven by the servomotor is reduced. The long resin film 52 that is fed out toward the cooling can roll 56 is brought into close contact with the outer peripheral surface of the cooling can roll 56 and conveyed. In order to make the long resin film 52 adhere to the cooling can roll 56 more completely, the peripheral speed of the front feed roll 55 is set to 0.02% to 1 with respect to the peripheral speed of the cooling can roll 56 serving as the reference speed. It is desirable to set it at% late. This is because if the content is less than 0.02%, the adhesion effect of the long resin film 52 is not sufficient, and if it exceeds 1%, the long resin film 52 may be damaged.

  In addition, a downstream feed roll 61 that is rotationally driven by a servomotor on the downstream side conveyance path from the cooling can roll 56 to the take-up roll 64, a tension sensor roll 62 that measures the tension of the long resin film 52, Free rolls 63 for guiding the long resin film 52 are respectively disposed. Then, a carry-out tension is applied to the long resin film 52 by the rear feed roll 61 adjusted so that the circumferential speed is the same or faster with respect to the cooling can roll 56, and the cooling can roll 56 moves toward the take-up roll 64. The long resin film 52 is discharged toward it.

  Further, the unwinding roll 51 and the winding roll 64 are configured such that the tension balance of the long resin film 52 is maintained by torque control using a powder clutch or the like. Further, the long resin film 52 is unwound from the unwinding roll 51 by the rotation of the cooling can roll 56 and the servomotor-driven front feed roll 55 and the rear feed roll 61 that rotate in conjunction with the rotation of the cooling can roll 56. 64 is wound up.

  In the sputtering web coater (surface treatment apparatus) 50, as described above, the magnetron sputtering cathodes 57, 58, 59, and 60 are provided along the outer peripheral surface of the cooling can roll 56 as surface treatment means (dry plating means). ing.

In sputtering film formation, the pressure inside the reduced pressure chamber of the sputtering web coater 50 is reduced to an ultimate pressure of about 10 ⁻⁴ Pa, and then the pressure is adjusted to about 0.1 to 10 Pa by introducing a sputtering gas. A known gas such as argon is used as the sputtering gas, and a gas such as oxygen is further added depending on the purpose. The shape and material of the sputtering web coater (surface treatment apparatus) 50 are not particularly limited as long as they can withstand a reduced pressure state, and various types can be used. In order to maintain the reduced pressure state in the reduced pressure chamber of the sputtering web coater 50, the sputtering web coater 50 is provided with various devices such as a dry pump, a turbo molecular pump, and a cryocoil (not shown).

  In the case of sputtering a metal film, a plate-like target (not shown) can be used. However, when a plate-like target is used, nodules (foreign material growth) are generated on the target. Sometimes. When this becomes a problem, it is preferable to use a cylindrical rotary target that generates no nodules and has high target use efficiency. Moreover, since the sputtering web coater (surface treatment apparatus) 50 shown in FIG. 1 assumes sputtering as a surface treatment means with a thermal load, magnetron sputtering cathodes 57, 58, 59, and 60 are shown. In the case where the surface treatment means accompanied by the heat load is other such as vapor deposition treatment, other surface treatment means can be provided instead of the plate target. As other surface treatment means accompanied by a thermal load, there are a film formation means by CVD (chemical vapor deposition), a surface activation means by corona or plasma, and the like.

(2) Pre-feed roll (2-1) In the surface treatment apparatus and the surface treatment method according to the present invention, they are arranged in the vicinity of the cooling can roll 56 and on the carry-in side of the long resin film (long body) 52. The pre-feed roll 55 is formed of a heating roll having a widening mechanism on the outer peripheral surface.

  And as an example of the heating roll provided with the widening mechanism on the outer peripheral surface constituting the front feed roll, as shown in FIG. 7, for example, fluororubber covering the outer peripheral surface of the heating roll 110 of the IH (induction heating) system, etc. A rubber coating film (not shown) made of and an outer peripheral line 110a formed by connecting a central point located substantially at the center in the axial direction on the rubber coating surface is defined as the base end side, and the axial direction from this base end side The outer peripheral surface of the rubber coating is parallel or substantially parallel to each other so as to be V-shaped toward both ends, and the direction in which the V-shaped tip is directed and the rotation direction of the heating roll 110 are the same. And a front feed roll 101 composed of a plurality of periodic groove bodies 110b provided on the front side.

  It should be noted that the angle, depth, and pitch of the periodic groove 110b in the front feed roll 101 are the thickness of the long resin film (long body) 52, the adhesion force, the transport tension (to the cooling can roll 56). It is determined by the carry-in tension) and the holding angle (the carry-in angle to the cooling can roll 56).

(2-2) The front feed roll incorporated in the conventional surface treatment apparatus (sputtering web coater) is made of a metal or rubber roll (but not a heating roll) that does not have a widening mechanism on the outer peripheral surface. It is configured.

  Here, in order to confirm the effect of the surface treatment apparatus and the surface treatment method according to the present invention, a front feed roll composed of a rubber heating roll not provided with a widening mechanism on the outer peripheral surface, and a widening mechanism on the outer peripheral surface. A front feed roll composed of a rubber roll (however, not a heating roll) is manufactured separately. The surface treatment apparatus (sputtering web) shown in FIG. The following comparative tests are carried out by incorporating them individually into the coater.

  Further, in the surface treatment apparatus (sputtering web coater) shown in FIG. 1 in which “front feed rolls” having different structures are individually incorporated, wrinkles are observed on the surface-treated long resin film (polyimide film is used). In order to explain the generated mechanism in an easy-to-understand manner, each set temperature and positional relationship of the “front feed roll” and “cooling can roll” in the surface treatment device (sputtering web coater), the temperature of the long resin film, the conveyance direction, The direction of the acting tension or the like is converted into a two-dimensional plane and displayed in FIGS.

(3) Comparative test In the comparative test, the conveying speed of the long resin film (polyimide film) is set to “8 m / min”, which causes a relatively large thermal load acting on the film, and the temperature of the long resin film is the film The film was measured using a thermocouple attached to the film, and all magnetron sputtering was used (total power input to magnetron sputtering was 65 kW).

(3-1) Pre-feed roll (consisting of a metal roll that does not have a widening mechanism on the outer peripheral surface and the roll temperature is set to room temperature 20 ° C) and a cooling can roll (the roll temperature is set to room temperature 20 ° C) When the magnetron sputtering film formation is performed on the long resin film (long body) using the surface treatment apparatus (sputtering web coater) in FIG. 1, the long resin film 10 that has passed through the previous feed roll 11 is shown in FIG. 2. As shown in FIG. 2, the magnets are carried into the cooling can roll 12 and pass through the magnetron sputtering cathodes 13, 14, 15, 16 while being in close contact with the cooling can roll 12. The long resin film 10 is heated to around 110 ° C. by 16 heat loads. And although the elongate resin film 10 on the cooling can roll 12 is heated and thermally expands, since it is restrained by the cooling can roll 12, it cannot extend and the wrinkles 17 generate | occur | produce.

  In addition, the typical linear thermal expansion coefficient of the polyimide film used as an example of a long resin film is 12 ppm / K, and when the long resin film is a polyimide film, it increases by 0.12 mm with an increase of 10 ° C. per 1000 mm width. It becomes calculation. This phenomenon is the same when the front feed roll is composed of a rubber roll (but not a heating roll) that does not have a widening mechanism.

(3-2) A front feed roll (consisting of a rubber roll that does not have a widening mechanism on the outer peripheral surface and the roll temperature is set to room temperature 20 ° C) and a cooling can roll (the roll temperature is set to 60 ° C) When the magnetron sputtering film formation is performed on the long resin film using the surface treatment apparatus (sputtering web coater) of FIG. 1, the long resin film 70 that has passed the front feed roll 71 is 60 ° C. as shown in FIG. And is heated by the cooling can roll 72 and thermally expands. For this reason, the long resin film 70 is magnetron sputtered in a state of being slightly extended on the cooling can roll 72 in the direction of the arrow in FIG. 3 (the outer direction of the film width direction) and in close contact with the cooling can roll 72. The cathode 73, 74, 75, 76 is conveyed to the arrangement region. However, in this region, the long resin film 70 is heated to around 110 ° C. by the heat load of the magnetron sputtering cathodes 73, 74, 75, and 76, so that wrinkles 77 are generated due to thermal expansion as shown in FIG. .

(3-3) A front feed roll (configured with a rubber heating roll having no widening mechanism on the outer peripheral surface and the roll temperature set to 110 ° C.) and a cooling can roll (the roll temperature set to 60 ° C.) When the magnetron sputtering film formation is performed on the long resin film using the surface treatment apparatus (sputtering web coater) of FIG. 1, the long resin film 80 that has passed through the front feed roll 81 is pre-feeded as shown in FIG. 4. The film temperature is increased from 20 ° C. to 110 ° C. by being heated by the roll 81, and the long resin film 80 is about 1080 ppm [(12 ppm / K) in the direction of the arrow in FIG. X ([Delta] 90 [deg.] C. = 110-20)]. However, since the front feed roll 81 is not provided with a widening mechanism, the collar 88 is generated as shown in FIG. 4 before being carried into the cooling can roll 82.

  Further, when the long resin film 80 heated to 110 ° C. is carried into the cooling can roll 82 set to 60 ° C., the long resin film 80 is cooled and is moved in the direction of the arrow in FIG. Direction), the long resin film 80 is in close contact with the cooling can roll 82 (the contraction force is suppressed by the close contact), and the magnetron sputtering cathodes 83, 84, It is conveyed to the arrangement area of 85,86.

  In this region, the long resin film 80 is heated to around 110 ° C. by the heat load of the magnetron sputtering cathodes 83, 84, 85, 86, and the shrinkage toward the arrow direction in FIG. 4 (inner direction in the film width direction). Although the force is slightly relaxed, since the front feed roll 81 is not provided with a widening mechanism, there is a limit to the mitigating action on the contraction force, and as shown in FIG. End up.

(3-4) Front feed roll (composed of a rubber roll with a widening mechanism on the outer peripheral surface and the roll temperature is set to room temperature 20 ° C) and a cooling can roll (roll temperature set to 60 ° C) When the magnetron sputtering film formation is performed on the long resin film using the surface treatment apparatus (sputtering web coater) 1, the long resin film 90 that has passed through the front feed roll 91 provided with a widening mechanism as shown in FIG. Is slightly widened in the direction of the arrow in FIG. 5 (the outer direction of the film width direction) by the widening mechanism of the front feed roll 91, but the roll temperature of the front feed roll 91 is 20 ° C. Has its limits. Then, as shown in FIG. 5, it is carried into a cooling can roll 92 set at 60 ° C. and is heated by the cooling can roll 92 to thermally expand, and the long resin film 90 is placed on the cooling can roll 92. It is conveyed to the arrangement region of the magnetron sputtering cathodes 93, 94, 95, 96 in a state of being slightly extended in the direction of the arrow in FIG. 5 (outside direction of the film width direction) and in close contact with the cooling can roll 92. However, in this region, the long resin film 90 is heated to around 110 ° C. by the heat load of the magnetron sputtering cathodes 93, 94, 95, and 96, so that wrinkles 97 are generated due to thermal expansion as shown in FIG. .

(3-5) Figure with front feed roll (configured with a rubber heating roll with a widening mechanism on the outer peripheral surface and roll temperature set to 110 ° C) and cooling can roll (roll temperature set to 60 ° C) When the magnetron sputtering film formation is performed on the long resin film using the surface treatment apparatus 1 (sputtering web coater), the long resin film 100 that has passed the front feed roll 101 is the front feed roll as shown in FIG. The film temperature is raised from room temperature 20 ° C. to 110 ° C. by being heated by 101, and the long resin film 100 is about 1080 ppm [(12 ppm / K) × in the direction of the arrow in FIG. (Δ90 ° C. = 110−20)] is in an expanded state, and further, in the mechanism for expanding the width of the front feed roll 101 shown in FIG. Ri, is carried in the direction of the arrow cooling can roll 102 which is set to spread it is with 60 ° C. for (in the film width direction outer side) of FIG.

  Next, when the long resin film 100 heated to 110 ° C. is carried into the cooling can roll 102 set to 60 ° C., the long resin film 100 is cooled and is moved in the direction of the arrow in FIG. Although the contraction force toward the inner direction acts on the long resin film 100, the long resin film 100 is in close contact with the cooling can roll 102 (the contraction force is suppressed by the close contact), and the magnetron sputtering cathodes 103 and 104 are in contact with each other. , 105, 106 to the arrangement area.

  In this region, the long resin film 100 is heated to around 110 ° C. by the heat load of the magnetron sputtering cathodes 103, 104, 105, 106, and therefore shrinks in the direction of the arrow in FIG. 6 (the inner side in the film width direction). As the force is relaxed and the front feed roll 101 is provided with a widening mechanism, the relaxation effect on the contraction force is amplified and wrinkles are generated in the long resin film 100 as shown in FIG. There is no.

  Note that the set temperature of the heating roll constituting the pre-feed roll 101 is equal to or higher than the film temperature at the time of film formation of the long resin film 100 during film formation in which the temperature is raised by the sputtering film formation means accompanied by a thermal load. The film temperature may be set to be equal to or lower than the temperature obtained by adding 100 ° C to the film temperature. The set temperature of the heating roll constituting the pre-feed roll 101 is a temperature obtained by adding 100 ° C. to the film temperature at the time of film formation of the long resin film 100 during film formation in which the temperature is raised by the sputtering film forming means with a thermal load. If it exceeds, when the long resin film 100 is carried into the front feed roll 101, wrinkles may occur on the long resin film 100 on the front feed roll 101 due to a rapid temperature change of the long resin film 100. It is. In the surface treatment apparatus (sputtering web coater), since the long resin film 100 is conveyed in a vacuum chamber under a reduced pressure atmosphere, heat radiation between the front feed roll 101 and the cooling can roll 102 is only radiant heat. The temperature of the long resin film 100 does not decrease between the roll 101 and the cooling can roll 102.

(4) Long body and copper-clad laminated resin film substrate (4-1) Long body Examples of the long body to be surface-treated include a long resin film, metal foil, and metal strip. Examples of the resin film include a long resin film such as a polyethylene terephthalate (PET) film, a long heat resistant resin film such as a polyimide film, and the like.

(4-2) Copper-clad laminated resin film (heat-resistant resin film with metal film) substrate A copper-clad laminated resin film (heat-resistant resin film with metal film) substrate using the surface treatment method for a long body according to the present invention. Can be manufactured.

  The copper-clad laminated resin film (heat-resistant resin film with metal film) substrate includes a base metal layer made of Ni, Ni-based alloy, chromium, etc. on the surface of the heat-resistant resin film, and copper laminated on the surface of the base metal layer. A structure composed of a thin film layer is exemplified. The copper clad laminated resin film substrate having such a structure is processed into a flexible wiring substrate by a subtractive method. Here, the subtractive method is a method of manufacturing a flexible wiring board by removing a metal film (for example, the copper thin film layer) not covered with a resist by etching.

  The layer made of Ni alloy or the like is called a seed layer (underlying metal layer), and its composition is selected depending on desired characteristics such as electrical insulation and migration resistance of the copper-clad laminated resin film substrate. The seed layer can be made of various known alloys such as Ni—Cr alloy or Inconel, Condanthan, Monel and the like. Moreover, when it is desired to further increase the thickness of the metal film (copper thin film layer) of the copper-clad laminated resin film (heat-resistant resin film with metal film) substrate, the metal film may be formed using a wet plating method. There are cases where a metal film is formed only by electroplating (ie, electroplating), and electroless plating is performed as primary plating and wet plating such as electrolytic plating is combined as secondary plating. is there. The wet plating process may employ various conditions of a conventional wet plating method.

  Moreover, as a heat resistant resin film used for the said copper clad laminated resin film (heat resistant resin film with a metal film), for example, a polyimide film, a polyamide film, a polyester film, a polytetrafluoroethylene film, a polyphenylene sulfide film A resin film selected from a film, a polyethylene naphthalate-based film or a liquid crystal polymer-based film is mentioned, which is preferable in terms of flexibility as a copper-clad laminated resin film, practically necessary strength, and electrical insulation suitable as a wiring material. .

  In addition, as the copper-clad laminated resin film (heat-resistant resin film with metal film), a structure in which a metal film such as a Ni—Cr alloy or Cu is laminated on a long heat-resistant resin film is exemplified. In addition, an oxide film, a nitride film, a carbide film, or the like can be used depending on the purpose.

  Examples of the present invention will be specifically described below with reference to comparative examples.

  Using a surface treatment apparatus (sputtering web coater) 50 shown in FIG. 1, a long resin film (long heat-resistant resin film) 52 is manufactured by Toray DuPont Co., Ltd. having a width of 500 mm, a length of 1000 m, and a thickness of 25 μm. A heat-resistant polyimide film “Kapton (registered trademark)” was used.

  The cooling can roll 56 has a diameter of 800 mm and a width of 800 mm, and the surface of the cooling can roll main body is hard chrome plated.

  The front feed roll 55 is constituted by an IH (induction heating) type heating roll, and has a diameter of 150 mm and an effective width of 500 mm. The circumferential speed of the front feed roll 55 is rotated at a speed that is 0.1% slower than the circumferential speed of the cooling can roll 56 that is the reference speed. Further, heat-resistant fluororubber is wound on the surface of the heating roll, and a periodic groove body (widening mechanism) is formed on the surface of the heat-resistant fluororubber as shown in FIG. .

  The groove depth of the periodic groove body is 0.2 mm, the groove width is 0.2 mm, the pitch is 1 mm, and the opening angle (lead angle) of the V-shaped tip is set to 70 °.

  The metal film formed on the heat-resistant polyimide film (long heat-resistant resin film) 52 is formed by forming a Cu film on the Ni—Cr film as a seed layer, and the magnetron sputtering target 57. A Ni—Cr target was used for the magnet, a Cu target was used for the magnetron sputter targets 58, 59 and 60, and 300 sccm of argon gas was introduced. The power applied to each cathode was controlled by power control.

  Moreover, the tension | tensile_strength of the said unwinding roll 51 and the winding roll 64 was 100N. The heat-resistant polyimide film (long heat-resistant resin film) 52 was set on the unwinding roll 51, and the tip of the heat-resistant polyimide film 50 was attached to the winding roll 64 via the cooling can roll 56. .

The decompression chamber (vacuum chamber) was evacuated to 5 Pa with a plurality of dry pumps, and further evacuated to 3 × 10 ⁻³ Pa using a plurality of turbo molecular pumps and cryocoils.

  Then, after setting the conveyance speed of the heat-resistant polyimide film (long heat-resistant resin film) 52, argon gas is introduced into each of the magnetron sputter cathodes 57, 58, 59, and 60, and electric power is applied to form a seed layer. The Ni-Cr film to be formed and the Cu film to be formed on the Ni-Cr film were started.

[Example 1]
Using a surface treatment apparatus (sputtering web coater) 50 in which a front feed roll 55 in which a periodic groove (widening mechanism) is formed on the heat resistant fluororubber surface covering the outer peripheral surface of the heating roll is used, and the front feed A heat-resistant polyimide film (long heat-resistant resin film) 52 is wound around a cooling can roll 56 via a roll 55 and heat-resistant by magnetron sputter cathodes 57, 58, 59, 60 disposed in the vicinity of the cooling can roll 56. Sputtering film formation is performed on the surface of the conductive polyimide film (long heat-resistant resin film) 52, and the front side where the heat-resistant polyimide film (long heat-resistant resin film) 52 is carried out to the rear feed roll 61 after the film formation is completed. On the cooling can roll 56 of this type, heat resistance by sputtering film formation with thermal load is applied. It was observed the presence of wrinkles imide film (elongated heat-resistant resin film) 52 from the observation window visually.

  The case where the temperature of the heating roll constituting the front feed roll 55 is set to 20 ° C. corresponds to the explanatory diagram of FIG. 5, and the temperature of the heating roll constituting the front feed roll 55 is set to 110 ° C. The case shown corresponds to the explanatory diagram of FIG.

  Further, a Ni—Cr layer is formed using one Ni—Cr target constituting the magnetron sputtering cathode 57, and the film thickness is 10 nm. In addition, a Cu film is formed using three Cu targets constituting the magnetron sputtering cathodes 58, 59, 60, and the film thickness is 100 nm.

  In addition, the film conveyance speed is “4 m / min”, which is a relatively small heat load acting on the heat-resistant polyimide film (long heat-resistant resin film) 52, and the heat-resistant polyimide film (long heat-resistant resin film). Two types of “8 m / min” having a relatively large heat load acting on 52 were set. When the film transport speed is “8 m / min”, twice the power is applied to each sputtering cathode to obtain the desired film thickness compared to when the film transport speed is “4 m / min”. (Ie, the thermal load acting on the film is doubled).

  When the film conveyance speed is “8 m / min”, the total applied power to the sputtering cathode is “65 kW”. The temperature of the heat-resistant polyimide film (long heat-resistant resin film) 52 at the time of sputtering film formation when the total power “65 kW” is applied to the sputtering cathode is conveyed at “8 m / min” (film temperature at the time of film formation). ) Was measured with a thermocouple attached to the film surface, it was confirmed to be 110 ° C.

(Set temperature of front feed roll and cooling can roll)
As shown in Table 1 below, the temperature of the heating roll constituting the pre-feed roll 55 is six types of 20 ° C., 40 ° C., 60 ° C., 80 ° C., 110 ° C., 120 ° C., and the roll of the cooling can roll 56 The temperature is set to 20 ° C. and 60 ° C.

(Presence or absence of wrinkles)
From Table 1, the following is confirmed.

(1) When the heat load acting on the film is relatively small and the “conveying speed is 4 m / min”, the heat-resistant polyimide film (long heat-resistant resin film) is used regardless of the set temperature of the front feed roll and cooling can roll. ) It was confirmed that no wrinkles occurred at 52.

(2) When the heat load acting on the film is doubled and the “conveying speed is 8 m / min”, when the temperature of the front feed roll is 20 ° C., 40 ° C., 60 ° C., heat resistant polyimide film (long heat resistance Resin film) 52 is wrinkled, but only a slight wrinkle is confirmed when the temperature of the front feed roll is 80 ° C., and no wrinkle is generated when the temperature of the front feed roll is 110 ° C. or 120 ° C. Was confirmed.

[Comparative Example 1]
Using a surface treatment device (sputtering web coater) 50 incorporating a front feed roll 55 composed of a rubber (heat-resistant fluororubber) roll in which no periodic groove (width expanding mechanism) is formed on the outer peripheral surface, and The heat-resistant polyimide film (long heat-resistant resin film) 52 is wound on the cooling can roll 56 via the front feed roll 55, and the magnetron sputter cathodes 57, 58, 59, which are arranged in the vicinity of the cooling can roll 56, 60, sputtering film formation is performed on the surface of the heat-resistant polyimide film (long heat-resistant resin film) 52, and after the film formation is completed, the heat-resistant polyimide film (long heat-resistant resin film) 52 is carried out to the rear feed roll 61. On the cooling can roll 56 on the near side of It was observed the presence of wrinkles in the heat polyimide film (a long heat-resistant resin film) 52 from the observation window visually.

  The case where the temperature of the heating roll constituting the front feed roll 55 is set to 20 ° C. corresponds to the explanatory diagram of FIG. 3, and the temperature of the heating roll constituting the front feed roll 55 is set to 110 ° C. The case shown corresponds to the explanatory diagram of FIG.

  Further, a Ni—Cr layer is formed using one Ni—Cr target constituting the magnetron sputtering cathode 57, and the film thickness is 10 nm. In addition, a Cu film is formed using three Cu targets constituting the magnetron sputtering cathodes 58, 59, 60, and the film thickness is 100 nm.

  In addition, the film conveyance speed is “4 m / min”, which is a relatively small heat load acting on the heat-resistant polyimide film (long heat-resistant resin film) 52, and the heat-resistant polyimide film (long heat-resistant resin film). Two types of “8 m / min” having a relatively large heat load acting on 52 were set. When the film transport speed is “8 m / min”, twice the power is applied to each sputtering cathode to obtain the desired film thickness compared to when the film transport speed is “4 m / min”. (Ie, the thermal load acting on the film is doubled).

  When the film conveyance speed is “8 m / min”, the total applied power to the sputtering cathode is “65 kW”.

(Set temperature of front feed roll and cooling can roll)
As shown in Table 2 below, the temperature of the heating roll constituting the pre-feed roll 55 is six types of 20 ° C., 40 ° C., 60 ° C., 80 ° C., 110 ° C., 120 ° C., and the roll of the cooling can roll 56 The temperature is set to 20 ° C. and 60 ° C.

(Presence or absence of wrinkles)
From Table 2, the following is confirmed.

(1) When the heat load acting on the film is relatively small and the “conveying speed is 4 m / min”, the heat-resistant polyimide film (long heat-resistant resin film) is used regardless of the set temperature of the front feed roll and cooling can roll. ) It was confirmed that no wrinkles occurred at 52.

(2) When the heat load acting on the film is doubled and the “conveying speed is 8 m / min”, the temperature of the front feed roll is 20 ° C. (refer to the explanatory diagram of FIG. 3), 40 ° C., 60 ° C. Even if the temperature of the front feed roll is 80 ° C., 110 ° C. (see FIG. 4), 120 ° C. It was confirmed that wrinkles were generated in the heat-resistant polyimide film (long heat-resistant resin film) 52 even though a heating roll was used as the roll 55.

[Comparative Example 2]
A surface treatment apparatus (sputtering web coater) 50 incorporating a front feed roll 55 composed of a metal roll having no periodic groove (width expanding mechanism) formed on the outer peripheral surface is used, and the front feed roll 55 is A heat-resistant polyimide film (long heat-resistant resin film) 52 is wound around the cooling can roll 56 through the magnetron sputter cathodes 57, 58, 59, 60 disposed in the vicinity of the cooling can roll 56. (Long heat-resistant resin film) 52 Sputtering film formation is performed on the surface, and after the film formation is completed, the cooling canon on the near side where the heat-resistant polyimide film (long heat-resistant resin film) 52 is carried out to the rear feed roll 61 Heat resistant polyimide film by sputtering film formation with heat load on roll 56 Was visually observed whether a wrinkle-free (long heat-resistant resin film) 52 from the observation window.

  The case where the temperature of the metal roll constituting the front feed roll 55 is set to 20 ° C. corresponds to the explanatory diagram of FIG.

  Further, a Ni—Cr layer is formed using one Ni—Cr target constituting the magnetron sputtering cathode 57, and the film thickness is 10 nm. In addition, a Cu film is formed using three Cu targets constituting the magnetron sputtering cathodes 58, 59, 60, and the film thickness is 100 nm.

  In addition, the film conveyance speed is “4 m / min”, which is a relatively small heat load acting on the heat-resistant polyimide film (long heat-resistant resin film) 52, and the heat-resistant polyimide film (long heat-resistant resin film). Two types of “8 m / min” having a relatively large heat load acting on 52 were set. When the film transport speed is “8 m / min”, twice the power is applied to each sputtering cathode to obtain the desired film thickness compared to when the film transport speed is “4 m / min”. (Ie, the thermal load acting on the film is doubled).

  When the film conveyance speed is “8 m / min”, the total applied power to the sputtering cathode is “65 kW”.

(Set temperature of front feed roll and cooling can roll)
As shown in Table 3 below, the temperature of the heating roll constituting the pre-feed roll 55 is six types of 20 ° C., 40 ° C., 60 ° C., 80 ° C., 110 ° C., 120 ° C., and the roll of the cooling can roll 56 The temperature is set to 20 ° C. and 60 ° C.

(Presence or absence of wrinkles)
From Table 3, the following is confirmed.

(1) When the heat load acting on the film is relatively small and the “conveying speed is 4 m / min”, the heat-resistant polyimide film (long heat-resistant resin film) is used regardless of the set temperature of the front feed roll and cooling can roll. ) It was confirmed that no wrinkles occurred at 52.

(2) When the heat load acting on the film is doubled and the “conveying speed is 8 m / min”, the temperature of the front feed roll is 20 ° C. (refer to the explanatory diagram in FIG. 2), 40 ° C., 60 ° C. When the temperature of the front feed roll is 80 ° C., 110 ° C., 120 ° C., a heating roll is used for the front feed roll 55. However, it was confirmed that wrinkles were generated in the heat-resistant polyimide film (long heat-resistant resin film) 52.

  According to the surface treatment apparatus and the surface treatment method for a long body according to the present invention, the cooling can roll is changed to a special shape such as a crown shape or an inverted crown shape, or an electron beam impact heating device or an expand roll is added. Because it is possible to avoid the occurrence of wrinkles of the long body due to the surface treatment with thermal load without providing an extra space in the apparatus for arranging the target member or adopting a complicated apparatus structure, The present invention has industrial applicability applied as a method for producing a copper-clad laminated resin film (heat-resistant resin film with a metal film) used for flexible wiring boards such as liquid crystal televisions and mobile phones.

10 Long resin film (long body)
11 Front feed roll 12 Cooling can roll 13, 14, 15, 16 Magnetron sputtering cathode 17 50 Surface treatment device (sputtering web coater)
51 Unwinding roll 52 Long resin film (long heat-resistant resin film) (long body)
53 Free roll 54 Tension sensor roll 55 Front feed roll 56 Cooling can roll 57, 58, 59, 60 Magnetron sputtering cathode 61 Rear feed roll 62 Tension sensor roll 63 Free roll 64 Winding roll 70 Long resin film (long body)
71 Front feed roll 72 Cooling can roll 73, 74, 75, 76 Magnetron sputtering cathode 77 mm 80 Long resin film (long body)
81 Front feed roll 82 Cooling can roll 83, 84, 85, 86 Magnetron sputtering cathode 87 ８８ 88 ９０ 90 Long resin film (long body)
91 Front feed roll (equipped with widening mechanism)
92 Cooling can roll 93, 94, 95, 96 Magnetron sputtering cathode 97 皺 100 Long resin film (long body)
101 Front feed roll (equipped with widening mechanism)
102 Cooling can roll 103, 104, 105, 106 Magnetron sputtering cathode 110 Heating roll 110a Peripheral line 110b Periodic groove

Claims (15)

The cooling can roll that is rotationally driven, the surface treatment means with a thermal load disposed along the outer peripheral surface of the cooling can roll on the side facing the cooling can roll, and the rotational drive disposed in the vicinity of the cooling can roll A front feed roll is provided in the vacuum chamber, and a long body conveyed by the roll-to-roll method is wound around the outer peripheral surface of the cooling can roll through the front feed roll and in contact with the outer peripheral surface of the cooling can roll. In the surface treatment apparatus for a long body that is surface-treated by the surface treatment means on the surface side of the long body that is not,
The length characterized in that the front feed roll is constituted by a heating roll, and an outer peripheral surface of the heating roll is provided with a widening mechanism that applies tension in the width direction to the long body to be conveyed. Surface treatment equipment for scales.   The heating roll widening mechanism includes a rubber coating covering the outer peripheral surface of the heating roll and an outer peripheral line formed by connecting a central point located substantially in the center in the axial direction on the rubber coating surface. And the rotation direction of the heating roll is the same as the direction in which the V-shaped tip ends are parallel or substantially parallel to each other and extend symmetrically so as to form a V-shape from the base end side toward both ends in the axial direction. The long surface treatment apparatus according to claim 1, comprising a plurality of periodic grooves provided on the outer peripheral surface of the rubber coating.   The elongate body before the surface treatment is preliminarily heated by the front feed roll above the temperature of the elongate body during the surface treatment that is heated by the surface treatment means with thermal load. The long-surface treatment apparatus according to claim 1 or 2.   The surface treatment apparatus for a long body according to any one of claims 1 to 3, wherein the circumferential speed of the front feed roll that is rotationally driven is set slower than the circumferential speed of the cooling can roll that is rotationally driven. .   The surface treatment apparatus for a long body according to any one of claims 1 to 4, wherein the surface treatment means accompanied by a thermal load is constituted by a film formation means by sputtering.   The surface treatment apparatus for elongate bodies according to any one of claims 1 to 4, wherein the surface treatment means accompanied by a thermal load is constituted by surface activation means using corona or plasma. A long body transported by a roll-to-roll system in a vacuum chamber is wound around the outer peripheral surface of a cooling can roll that is driven to rotate via a pre-rotated feed roll and is in contact with the outer peripheral surface of the cooling can roll. In the surface treatment method for a long body, the surface treatment is performed by a surface treatment means with a thermal load arranged along the outer peripheral surface of the cooling can roll on the side facing the cooling can roll with respect to the surface side of the long body that is not ,
The front feed roll arranged near the cooling can roll and on the carry-in side of the long body is composed of a heating roll having a widening mechanism on the outer peripheral surface, and the length before the surface treatment is conveyed. The long body is preliminarily heated by a front feed roll and is carried into the cooling can roll while applying a tension in the width direction to the long body before surface treatment by a width expanding mechanism. Surface treatment method.   The heating roll widening mechanism includes a rubber coating covering the outer peripheral surface of the heating roll and an outer peripheral line formed by connecting a central point located substantially in the center in the axial direction on the rubber coating surface. And the rotation direction of the heating roll is the same as the direction in which the V-shaped tip ends are parallel or substantially parallel to each other and extend symmetrically so as to form a V-shape from the base end side toward both ends in the axial direction. The long surface treatment method according to claim 7, comprising a plurality of periodic grooves provided on an outer peripheral surface of the rubber coating.   9. The elongate body before the surface treatment is preheated by the pre-feed roll above the temperature of the elongate body during the surface treatment that is heated by the surface treatment means with heat load. The surface treatment method of the elongate body as described in 2.   The surface treatment method for a long body according to any one of claims 7 to 9, wherein a peripheral speed of the front feed roll that is rotationally driven is set slower than a peripheral speed of the cooling can roll that is rotationally driven. .   The surface treatment method for a long body according to claim 10, wherein the peripheral speed of the front feed roll is set to be 0.02% to 1% slower than the peripheral speed of the cooling can roll.   The surface treatment method for a long body according to any one of claims 7 to 11, wherein the surface treatment means accompanied by a thermal load is a film formation means by sputtering.   The surface treatment method for a long body according to any one of claims 7 to 11, wherein the surface treatment means accompanied by a thermal load is a corona or plasma surface activation means.   The long body is composed of a long heat-resistant resin film, and the film temperature is higher than the film temperature at the time of film formation of the heat-resistant resin film during film formation in which the temperature is raised by sputtering film formation means with a thermal load. The surface treatment method for a long body according to claim 12, wherein the heat-resistant resin film before the surface treatment is preheated by a pre-feed roll within a range equal to or lower than a temperature obtained by adding 100 ° C to the film temperature. . A long heat-resistant resin film, a base metal layer made of nickel alloy or chromium formed on the surface of the heat-resistant resin film using the surface treatment method for a long body according to claim 14, and a base metal In a method for producing a copper-clad laminated resin film substrate composed of a copper thin film layer formed on the surface of the layer,
Provided with a plurality of sputtering film forming means in the vacuum chamber, using the plurality of sputtering film forming means, a base metal layer made of nickel alloy or chromium on the surface of the heat-resistant resin film, and a copper thin film layer on the surface of the base metal layer A method for producing a copper-clad laminated resin film substrate, characterized in that the film is continuously formed.

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