JP2016002599A - 研磨パッドのバリ取り装置 - Google Patents
研磨パッドのバリ取り装置 Download PDFInfo
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- JP2016002599A JP2016002599A JP2014122046A JP2014122046A JP2016002599A JP 2016002599 A JP2016002599 A JP 2016002599A JP 2014122046 A JP2014122046 A JP 2014122046A JP 2014122046 A JP2014122046 A JP 2014122046A JP 2016002599 A JP2016002599 A JP 2016002599A
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- 238000005498 polishing Methods 0.000 title claims abstract description 79
- 239000007788 liquid Substances 0.000 claims abstract description 47
- 238000006073 displacement reaction Methods 0.000 claims abstract description 13
- 238000001514 detection method Methods 0.000 claims abstract description 5
- 238000010586 diagram Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000001172 regenerating effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
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Abstract
【解決手段】研磨パッドPの表面に対し相対的に移動して研磨パッドPの表面に切削形成された研磨液保持溝P1を検出する溝検出用のレーザ変位計61と、研磨液保持溝P1の溝幅に亘る刃先を備え、研磨液保持溝P1に沿って移動させられて当該保持溝P1の開口縁に生じたバリBを切除するエンドミル621と、レーザ変位計61の検出信号に基づいて研磨パッドP上に形成された研磨液保持溝P1の形状を取得する制御装置7と、取得された研磨液保持溝P1の形状に基づいてエンドミル621を研磨液保持溝P1に沿って移動駆動する駆動モータ32,42,52とを備える。
【選択図】 図2
Description
Claims (3)
- 研磨パッドの表面に対し相対的に移動して当該研磨パッドの表面に切削形成された研磨液保持溝を検出する溝検出手段と、前記研磨液保持溝の溝幅に亘る刃先を備え、前記研磨液保持溝に沿って移動させられて当該保持溝の開口縁に生じたバリを切除する刃物体と、前記溝検出手段の検出信号に基づいて前記研磨パッド上に形成された前記研磨液保持溝の形状を取得する溝形状取得手段と、取得された前記研磨液保持溝の形状に基づいて前記刃物体を前記研磨液保持溝に沿って移動駆動する駆動手段とを備える研磨パッドのバリ取り装置。
- 前記溝検出手段としてレーザ変位計を使用した請求項1に記載の研磨パッドのバリ取り装置。
- 前記刃物体としてエンドミルを使用した請求項1又は2に記載の研磨パッドのバリ取り装置。
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JP2014122046A JP6418798B2 (ja) | 2014-06-13 | 2014-06-13 | 研磨パッドのバリ取り装置 |
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JP2014122046A JP6418798B2 (ja) | 2014-06-13 | 2014-06-13 | 研磨パッドのバリ取り装置 |
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JP2016002599A true JP2016002599A (ja) | 2016-01-12 |
JP6418798B2 JP6418798B2 (ja) | 2018-11-07 |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017116011A (ja) * | 2015-12-25 | 2017-06-29 | 愛三工業株式会社 | 流量制御弁 |
CN108161664A (zh) * | 2018-02-11 | 2018-06-15 | 鹰普航空零部件(无锡)有限公司 | 一种激光扫描打磨系统及方法 |
US10337622B2 (en) | 2015-12-25 | 2019-07-02 | Aisan Kogyo Kabushiki Kaisha | Eccentric valve |
CN110076464A (zh) * | 2019-05-24 | 2019-08-02 | 中国科学院宁波材料技术与工程研究所 | 姿态可控激光铣削复合抛光同步加工的方法 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH091435A (ja) * | 1995-06-16 | 1997-01-07 | Daido Steel Sheet Corp | ばり取り具を備えた切断装置 |
JPH09225701A (ja) * | 1996-02-15 | 1997-09-02 | Daishowa Seiki Co Ltd | 面取り工具 |
JPH09300188A (ja) * | 1996-05-10 | 1997-11-25 | Nippon Telegr & Teleph Corp <Ntt> | バリ取り方法及び装置 |
JPH10151509A (ja) * | 1996-11-21 | 1998-06-09 | Daido Steel Co Ltd | バリ除去方法 |
JP2001198795A (ja) * | 2000-01-12 | 2001-07-24 | Mitsubishi Materials Corp | 研磨装置 |
JP2003062708A (ja) * | 2001-06-13 | 2003-03-05 | Sumitomo Electric Ind Ltd | 非晶質カーボン被覆工具およびその製造方法 |
JP2003170318A (ja) * | 2001-12-03 | 2003-06-17 | Fujikin Inc | シール端面加工方法 |
JP2004017227A (ja) * | 2002-06-18 | 2004-01-22 | Matsushita Electric Ind Co Ltd | 微細バリ除去装置 |
-
2014
- 2014-06-13 JP JP2014122046A patent/JP6418798B2/ja active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH091435A (ja) * | 1995-06-16 | 1997-01-07 | Daido Steel Sheet Corp | ばり取り具を備えた切断装置 |
JPH09225701A (ja) * | 1996-02-15 | 1997-09-02 | Daishowa Seiki Co Ltd | 面取り工具 |
JPH09300188A (ja) * | 1996-05-10 | 1997-11-25 | Nippon Telegr & Teleph Corp <Ntt> | バリ取り方法及び装置 |
JPH10151509A (ja) * | 1996-11-21 | 1998-06-09 | Daido Steel Co Ltd | バリ除去方法 |
JP2001198795A (ja) * | 2000-01-12 | 2001-07-24 | Mitsubishi Materials Corp | 研磨装置 |
JP2003062708A (ja) * | 2001-06-13 | 2003-03-05 | Sumitomo Electric Ind Ltd | 非晶質カーボン被覆工具およびその製造方法 |
JP2003170318A (ja) * | 2001-12-03 | 2003-06-17 | Fujikin Inc | シール端面加工方法 |
JP2004017227A (ja) * | 2002-06-18 | 2004-01-22 | Matsushita Electric Ind Co Ltd | 微細バリ除去装置 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017116011A (ja) * | 2015-12-25 | 2017-06-29 | 愛三工業株式会社 | 流量制御弁 |
US10337622B2 (en) | 2015-12-25 | 2019-07-02 | Aisan Kogyo Kabushiki Kaisha | Eccentric valve |
US10982772B2 (en) | 2015-12-25 | 2021-04-20 | Aisan Kogyo Kabushiki Kaisha | Eccentric valve |
CN108161664A (zh) * | 2018-02-11 | 2018-06-15 | 鹰普航空零部件(无锡)有限公司 | 一种激光扫描打磨系统及方法 |
CN108161664B (zh) * | 2018-02-11 | 2023-08-22 | 鹰普航空科技有限公司 | 一种激光扫描打磨系统及方法 |
CN110076464A (zh) * | 2019-05-24 | 2019-08-02 | 中国科学院宁波材料技术与工程研究所 | 姿态可控激光铣削复合抛光同步加工的方法 |
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