JP2015528589A - 偏光紫外線分離素子 - Google Patents
偏光紫外線分離素子 Download PDFInfo
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- 238000000926 separation method Methods 0.000 claims abstract description 32
- 230000010287 polarization Effects 0.000 claims description 27
- 238000002834 transmittance Methods 0.000 claims description 25
- 239000000463 material Substances 0.000 claims description 21
- 239000010936 titanium Substances 0.000 claims description 16
- 230000001678 irradiating effect Effects 0.000 claims description 14
- 239000002905 metal composite material Substances 0.000 claims description 13
- 229910052719 titanium Inorganic materials 0.000 claims description 12
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 11
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 10
- 239000000126 substance Substances 0.000 claims description 10
- 229910052804 chromium Inorganic materials 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 229910052759 nickel Inorganic materials 0.000 claims description 7
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- 229910052787 antimony Inorganic materials 0.000 claims description 4
- 229910052796 boron Inorganic materials 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 229910052742 iron Inorganic materials 0.000 claims description 4
- 229910052758 niobium Inorganic materials 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 229910052718 tin Inorganic materials 0.000 claims description 4
- 229910052720 vanadium Inorganic materials 0.000 claims description 4
- 150000002739 metals Chemical class 0.000 claims description 3
- 239000012528 membrane Substances 0.000 claims 1
- 239000004973 liquid crystal related substance Substances 0.000 abstract description 21
- 230000001747 exhibiting effect Effects 0.000 abstract description 3
- 150000001875 compounds Chemical class 0.000 description 33
- 239000002131 composite material Substances 0.000 description 9
- -1 cinnamate compound Chemical class 0.000 description 8
- 239000003989 dielectric material Substances 0.000 description 7
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 230000008033 biological extinction Effects 0.000 description 4
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- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
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- 229920001200 poly(ethylene-vinyl acetate) Polymers 0.000 description 2
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- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 238000007142 ring opening reaction Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- 238000007106 1,2-cycloaddition reaction Methods 0.000 description 1
- YGYCECQIOXZODZ-UHFFFAOYSA-N 4415-87-6 Chemical compound O=C1OC(=O)C2C1C1C(=O)OC(=O)C12 YGYCECQIOXZODZ-UHFFFAOYSA-N 0.000 description 1
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- 238000005618 Fries rearrangement reaction Methods 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 229920000106 Liquid crystal polymer Polymers 0.000 description 1
- 239000004977 Liquid-crystal polymers (LCPs) Substances 0.000 description 1
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- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 125000002178 anthracenyl group Chemical group C1(=CC=CC2=CC3=CC=CC=C3C=C12)* 0.000 description 1
- 150000001491 aromatic compounds Chemical class 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
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- ZYGHJZDHTFUPRJ-UHFFFAOYSA-N benzo-alpha-pyrone Natural products C1=CC=C2OC(=O)C=CC2=C1 ZYGHJZDHTFUPRJ-UHFFFAOYSA-N 0.000 description 1
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- SWXVUIWOUIDPGS-UHFFFAOYSA-N diacetone alcohol Natural products CC(=O)CC(C)(C)O SWXVUIWOUIDPGS-UHFFFAOYSA-N 0.000 description 1
- 125000000664 diazo group Chemical group [N-]=[N+]=[*] 0.000 description 1
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- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 229910001507 metal halide Inorganic materials 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
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- ZUOUZKKEUPVFJK-UHFFFAOYSA-N phenylbenzene Natural products C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 1
- 238000011907 photodimerization Methods 0.000 description 1
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- 229920000548 poly(silane) polymer Polymers 0.000 description 1
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- 239000010453 quartz Substances 0.000 description 1
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
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- PJANXHGTPQOBST-UHFFFAOYSA-N stilbene Chemical class C=1C=CC=CC=1C=CC1=CC=CC=C1 PJANXHGTPQOBST-UHFFFAOYSA-N 0.000 description 1
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- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
- G02B27/283—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
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- G—PHYSICS
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- G02B5/00—Optical elements other than lenses
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/208—Filters for use with infrared or ultraviolet radiation, e.g. for separating visible light from infrared and/or ultraviolet radiation
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
- G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
- G02B5/3058—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state comprising electrically conductive elements, e.g. wire grids, conductive particles
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
- G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
- G02B5/3075—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state for use in the UV
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/16—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using polarising devices, e.g. for obtaining a polarised beam
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- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
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- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
- G02F1/133788—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation
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Abstract
Description
R=Tc/Tp
P=Tc/T
TixMyO2
(a+bi)2=n1 2×(1−W/P)+n2 2×W/P
偏光度D=(Tc−Tp)/(Tc+Tp)
(c+di)2=n1 2×n2 2/((1−W/P)×n2 2+W×n1 2/P)
(a+bi)2=n1 2×(1−W/P)+n2 2×W/P
(c+di)2=n1 2×n2 2/((1−W/P)×n2 2+W×n1 2/P)
石英ガラス層をアセトンとIPA(Isopropyl alcohol)に20分ずつ超音波洗浄し、表面の異物を除去した。その後、上記石英ガラス層に電子−ビーム蒸着(E−Beam Evaporation)方式を通じて酸素雰囲気下でTi及びNiを共蒸着させて下記化学式2で表示される金属複合酸化物の層を約100nmの厚さで形成した。次いで、で蒸着層上にMicro Resist社のmr−8010rを100nm厚さでスピンコーティングした後、95℃で1分間ベークした。次に、インプリンティングマスターを利用してインプリント工程を行った。インプリント時にプレス(Press)の温度は、160℃であり、40barで3分間維持した後、2分間クーリング(cooling)し、100℃で脱着(Demold)した。その後、ICP RIE装置を利用して上記金属複合酸化物の層を乾式エッチングした。その後、有機溶媒としてアセトンを利用してインプリント用レジストを除去し、凸部の幅Wは、約70nmであり、ピッチPは、約150nmである偏光分離素子を製造した。
TixNiyO2
実施例1と同一の方式で製造を行い、Ti及びCrを共蒸着させて下記化学式4で表示される金属複合酸化物の凸部を含み、高さが約100nmであり、幅が約70nmであり、ピッチが約150nmである偏光分離素子を製造した。
TixCryO2
実施例1と同一の方式でTiO2よりなる凸部によって形成されたパターンを含む偏光分離素子を製造した。
上記数式1によって計算される各実施例及び比較例のRは、透過率測定装置を利用して250nmから1nmまで偏光度が0.99の偏光板を製造されたサンプルに重なって配置した後、サンプルの透過率を測定する方式で評価し、その結果を下記表1に記載した。
各実施例及び比較例の物質に対して100nmの厚さで試験片を作製し、通常的に使用される透過度機器を使用して測定し、透過度の測定結果は、下記表2に記載した。
2 光吸収層
2a 凸部
2b 凹部
10、101、102 光照射手段
20 集光板
30 偏光紫外線分離素子
40 マスク
50 被照射体
60 被照射体が保持される装置
Claims (15)
- 基材層と;チタン金属複合酸化物を含み、前記基材層上に互いに平行に形成されているストライプ形状の凸部と;を含む偏光紫外線分離素子。
- 下記数式1によって計算されるRが2以上である、請求項1に記載の偏光紫外線分離素子:
[数式1]
R=Tc/Tp
前記数式1で、Tcは、前記ストライプ形状の前記凸部と直交する方向に偏光された250nm〜350nmの波長の光の上記偏光紫外線分離素子に対する透過度であり、Tpは、前記凸部と平行な方向に偏光された250nm〜350nmの波長の光の前記偏光紫外線分離素子に対する透過度である。 - 下記数式2によって計算されるPが0.2〜0.5である、請求項1または請求項2に記載の偏光紫外線分離素子:
[数式2]
P=Tc/T
前記数式2で、Tは、前記偏光紫外線分離素子に照射される250nm〜350nmの波長の光の強さであり、Tcは、前記照射された光のうち前記偏光紫外線分離素子を透過した前記ストライプ形状の前記凸部と直交する方向に偏光された250nm〜350nmの波長の光の強さである。 - 前記チタン金属複合酸化物は、350nmの波長領域での透過度が10%未満である、請求項1から請求項3のいずれか一項に記載の偏光紫外線分離素子。
- 前記チタン金属複合酸化物は、チタン及びNi、Cr、Cu、Fe、B、V、Nb、Sb、Sn、Si及びAlから選択された1つ以上の第2金属を含む酸化物である、請求項1から請求項4のいずれか一項に記載の偏光紫外線分離素子。
- 前記第2金属の酸化物内での比率は1〜20mol%である、請求項5に記載の偏光紫外線分離素子。
- 前記チタン金属複合酸化物は、下記化学式1で表示される、請求項1から請求項6のいずれか一項に記載の偏光紫外線分離素子:
[化学式1]
TixMyO2
前記化学式1で、Mは、Ni、Cr、Cu、Fe、B、V、Nb、Sb、Sn、Si、またはAlであり、yは0.01〜0.2であり、xとyの和(x+y)は1である。 - 互いに平行に形成された前記ストライプ形状の前記凸部のピッチは、50nm〜200nmである、請求項1から請求項7のいずれか一項に記載の偏光紫外線分離素子。
- 前記凸部のピッチPに対する前記凸部の幅Wの比率W/Pが0.2〜0.8である、請求項8に記載の偏光紫外線分離素子。
- 凸部の高さは、20nm〜300nmである、請求項1から請求項9のいずれか一項に記載の偏光紫外線分離素子。
- 被照射体が保持される装置と;請求項1に記載の偏光紫外線分離素子と;を含む光照射装置。
- 前記被照射体が保持される装置と前記偏光紫外線分離素子との間に配向マスクをさらに含む、請求項11に記載の光照射装置。
- 前記偏光紫外線分離素子に紫外線を照射することができる紫外線光源をさらに含む、請求項11または請求項12に記載の装置。
- 請求項11から請求項13のいずれか一項に記載の装置の前記被照射体が保持される装置に前記被照射体を保持し、前記偏光紫外線分離素子を通して上記被照射体に光を照射する方法。
- 請求項11から請求項13のいずれか一項に記載の装置の前記被照射体が保持される装置に光配向膜を保持し、前記偏光紫外線分離素子を通して上記光配向膜に直線偏光された光を照射する、整列された光配向膜の製造方法。
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