JP2015524555A5 - - Google Patents

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JP2015524555A5
JP2015524555A5 JP2015520409A JP2015520409A JP2015524555A5 JP 2015524555 A5 JP2015524555 A5 JP 2015524555A5 JP 2015520409 A JP2015520409 A JP 2015520409A JP 2015520409 A JP2015520409 A JP 2015520409A JP 2015524555 A5 JP2015524555 A5 JP 2015524555A5
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angle
measurement
scanning
resolved
test pattern
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JP2015524555A (ja
JP6353831B2 (ja
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JP2015520409A 2012-06-26 2013-06-25 角度分解反射率測定における走査および回折の光計測からのアルゴリズム的除去 Active JP6353831B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201261664477P 2012-06-26 2012-06-26
US61/664,477 2012-06-26
US201361764435P 2013-02-13 2013-02-13
US61/764,435 2013-02-13
PCT/US2013/047691 WO2014004564A1 (en) 2012-06-26 2013-06-25 Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology

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JP2018111107A Division JP6628835B2 (ja) 2012-06-26 2018-06-11 角度分解反射率測定における走査および回折の光計測からのアルゴリズム的除去

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JP2015524555A JP2015524555A (ja) 2015-08-24
JP2015524555A5 true JP2015524555A5 (https=) 2016-08-04
JP6353831B2 JP6353831B2 (ja) 2018-07-04

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JP2015520409A Active JP6353831B2 (ja) 2012-06-26 2013-06-25 角度分解反射率測定における走査および回折の光計測からのアルゴリズム的除去
JP2018111107A Active JP6628835B2 (ja) 2012-06-26 2018-06-11 角度分解反射率測定における走査および回折の光計測からのアルゴリズム的除去
JP2019219052A Active JP7046898B2 (ja) 2012-06-26 2019-12-03 角度分解反射率測定における走査および回折の光計測からのアルゴリズム的除去

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JP2019219052A Active JP7046898B2 (ja) 2012-06-26 2019-12-03 角度分解反射率測定における走査および回折の光計測からのアルゴリズム的除去

Country Status (6)

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US (3) US9958385B2 (https=)
EP (1) EP2865003A1 (https=)
JP (3) JP6353831B2 (https=)
KR (3) KR102330743B1 (https=)
TW (2) TWI629448B (https=)
WO (1) WO2014004564A1 (https=)

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