JP2015522927A - 電気化学デバイスのマイクロ波急速熱処理 - Google Patents
電気化学デバイスのマイクロ波急速熱処理 Download PDFInfo
- Publication number
- JP2015522927A JP2015522927A JP2015520403A JP2015520403A JP2015522927A JP 2015522927 A JP2015522927 A JP 2015522927A JP 2015520403 A JP2015520403 A JP 2015520403A JP 2015520403 A JP2015520403 A JP 2015520403A JP 2015522927 A JP2015522927 A JP 2015522927A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- cathode
- microwave
- substrate
- annealing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000012545 processing Methods 0.000 title abstract description 22
- 238000000137 annealing Methods 0.000 claims abstract description 66
- 239000000758 substrate Substances 0.000 claims abstract description 58
- 238000004519 manufacturing process Methods 0.000 claims abstract description 24
- 238000000151 deposition Methods 0.000 claims abstract description 23
- 238000010521 absorption reaction Methods 0.000 claims abstract description 17
- 239000010409 thin film Substances 0.000 claims abstract description 16
- 238000000034 method Methods 0.000 claims description 51
- 229910012851 LiCoO 2 Inorganic materials 0.000 claims description 15
- 229910000480 nickel oxide Inorganic materials 0.000 claims description 13
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 claims description 13
- 239000010408 film Substances 0.000 claims description 11
- 229910001416 lithium ion Inorganic materials 0.000 claims description 8
- 239000010406 cathode material Substances 0.000 claims description 7
- 239000007784 solid electrolyte Substances 0.000 claims description 5
- 230000005540 biological transmission Effects 0.000 claims description 4
- 239000002002 slurry Substances 0.000 claims description 3
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims description 2
- 238000005240 physical vapour deposition Methods 0.000 claims description 2
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical group [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 claims 3
- 238000002834 transmittance Methods 0.000 claims 1
- 230000005855 radiation Effects 0.000 abstract description 9
- 230000015572 biosynthetic process Effects 0.000 abstract description 7
- 238000002425 crystallisation Methods 0.000 abstract description 4
- 230000008025 crystallization Effects 0.000 abstract description 4
- 238000000280 densification Methods 0.000 abstract description 3
- 238000005755 formation reaction Methods 0.000 abstract description 3
- 239000010410 layer Substances 0.000 description 108
- 230000008569 process Effects 0.000 description 39
- 239000000463 material Substances 0.000 description 25
- 229910052751 metal Inorganic materials 0.000 description 14
- 239000002184 metal Substances 0.000 description 14
- 238000010438 heat treatment Methods 0.000 description 13
- 230000008021 deposition Effects 0.000 description 11
- 230000035882 stress Effects 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 7
- 239000011253 protective coating Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 239000003792 electrolyte Substances 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 239000011229 interlayer Substances 0.000 description 5
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000009830 intercalation Methods 0.000 description 4
- 230000002687 intercalation Effects 0.000 description 4
- 229910052744 lithium Inorganic materials 0.000 description 4
- 238000001035 drying Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910012305 LiPON Inorganic materials 0.000 description 2
- 229910019142 PO4 Inorganic materials 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 230000002776 aggregation Effects 0.000 description 2
- 238000004220 aggregation Methods 0.000 description 2
- ACKHWUITNXEGEP-UHFFFAOYSA-N aluminum cobalt(2+) nickel(2+) oxygen(2-) Chemical compound [O-2].[Al+3].[Co+2].[Ni+2] ACKHWUITNXEGEP-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- WYEMLYFITZORAB-UHFFFAOYSA-N boscalid Chemical compound C1=CC(Cl)=CC=C1C1=CC=CC=C1NC(=O)C1=CC=CN=C1Cl WYEMLYFITZORAB-UHFFFAOYSA-N 0.000 description 2
- CXULZQWIHKYPTP-UHFFFAOYSA-N cobalt(2+) manganese(2+) nickel(2+) oxygen(2-) Chemical compound [O--].[O--].[O--].[Mn++].[Co++].[Ni++] CXULZQWIHKYPTP-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000011888 foil Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- GELKBWJHTRAYNV-UHFFFAOYSA-K lithium iron phosphate Chemical compound [Li+].[Fe+2].[O-]P([O-])([O-])=O GELKBWJHTRAYNV-UHFFFAOYSA-K 0.000 description 2
- 229910002102 lithium manganese oxide Inorganic materials 0.000 description 2
- VLXXBCXTUVRROQ-UHFFFAOYSA-N lithium;oxido-oxo-(oxomanganiooxy)manganese Chemical compound [Li+].[O-][Mn](=O)O[Mn]=O VLXXBCXTUVRROQ-UHFFFAOYSA-N 0.000 description 2
- 229910001092 metal group alloy Inorganic materials 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000010450 olivine Substances 0.000 description 2
- 229910052609 olivine Inorganic materials 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 235000021317 phosphate Nutrition 0.000 description 2
- 150000003013 phosphoric acid derivatives Chemical class 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 230000002829 reductive effect Effects 0.000 description 2
- 239000011029 spinel Substances 0.000 description 2
- 229910052596 spinel Inorganic materials 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 230000003685 thermal hair damage Effects 0.000 description 2
- 238000000427 thin-film deposition Methods 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 229910018119 Li 3 PO 4 Inorganic materials 0.000 description 1
- 238000001237 Raman spectrum Methods 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000011358 absorbing material Substances 0.000 description 1
- 239000011149 active material Substances 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 1
- 150000001342 alkaline earth metals Chemical class 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 229910052752 metalloid Inorganic materials 0.000 description 1
- 150000002738 metalloids Chemical class 0.000 description 1
- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- 229910052756 noble gas Inorganic materials 0.000 description 1
- 238000000399 optical microscopy Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920000052 poly(p-xylylene) Polymers 0.000 description 1
- 239000011112 polyethylene naphthalate Substances 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000010411 postconditioning Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000001552 radio frequency sputter deposition Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 238000010079 rubber tapping Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000001429 visible spectrum Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/04—Processes of manufacture in general
- H01M4/0402—Methods of deposition of the material
- H01M4/0421—Methods of deposition of the material involving vapour deposition
- H01M4/0423—Physical vapour deposition
- H01M4/0426—Sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/04—Processes of manufacture in general
- H01M4/0471—Processes of manufacture in general involving thermal treatment, e.g. firing, sintering, backing particulate active material, thermal decomposition, pyrolysis
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/05—Accumulators with non-aqueous electrolyte
- H01M10/052—Li-accumulators
- H01M10/0525—Rocking-chair batteries, i.e. batteries with lithium insertion or intercalation in both electrodes; Lithium-ion batteries
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/13—Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
- H01M4/139—Processes of manufacture
- H01M4/1391—Processes of manufacture of electrodes based on mixed oxides or hydroxides, or on mixtures of oxides or hydroxides, e.g. LiCoOx
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/36—Selection of substances as active materials, active masses, active liquids
- H01M4/48—Selection of substances as active materials, active masses, active liquids of inorganic oxides or hydroxides
- H01M4/52—Selection of substances as active materials, active masses, active liquids of inorganic oxides or hydroxides of nickel, cobalt or iron
- H01M4/525—Selection of substances as active materials, active masses, active liquids of inorganic oxides or hydroxides of nickel, cobalt or iron of mixed oxides or hydroxides containing iron, cobalt or nickel for inserting or intercalating light metals, e.g. LiNiO2, LiCoO2 or LiCoOxFy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M6/00—Primary cells; Manufacture thereof
- H01M6/40—Printed batteries, e.g. thin film batteries
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/05—Accumulators with non-aqueous electrolyte
- H01M10/058—Construction or manufacture
- H01M10/0585—Construction or manufacture of accumulators having only flat construction elements, i.e. flat positive electrodes, flat negative electrodes and flat separators
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Secondary Cells (AREA)
- Battery Electrode And Active Subsutance (AREA)
- Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
- Cell Electrode Carriers And Collectors (AREA)
Abstract
Description
本出願は、その全てが参照により本明細書に援用される、2008年5月21日に出願された米国特許出願番号第12/124,918号の一部継続出願である。
112が、それぞれ形成される。Li層110は、蒸発又はスパッタリングプロセスを用いて形成することができる。Li層110は、少しから数ミクロン又はそれ以上のミクロン厚(又はカソード層の厚さに応じて他の厚さ)でありえ、PC層112は、3〜5μmの範囲、及び層を構成する材料に応じて、それ以上でありうる。PC層112は、パリレン(又は他のポリマー系材料)、金属又は誘電体のマルチレイヤでありうる。Li層とPC層の形成の間、該部分は、アルゴンガス又は乾燥室条件などの、不活性又は適度に不活性な環境に保たれなければならない。
Claims (15)
- 電気化学デバイスを製造する方法であって、
基板の上に前記電気化学デバイスの層を堆積すること、及び
前記層をマイクロ波アニールすること、を含み、前記マイクロ波アニールは、前記層内での優先的マイクロ波エネルギー吸収を伴うアニール条件を選択することを含む、方法。 - 前記電気化学デバイスが厚膜バッテリである、請求項1に記載の方法。
- 前記厚膜バッテリはリチウムイオンバッテリであり、前記層はスラリとして堆積されるリチウムイオンカソードであり、並びに、前記マイクロ波アニールは前記カソードを乾燥させ及び形成する、請求項2に記載の方法。
- 前記電気化学デバイスは薄膜バッテリであり、前記層はカソード層であり、前記マイクロ波アニールは前記カソード層を結晶化し、及び前記カソード層はカソード電流コレクタの上に堆積され、前記カソード電流コレクタは前記基板の上に堆積される、請求項1に記載の方法。
- 前記カソード層は、物理的気相堆積により堆積されるLiCoO2層である、請求項4に記載の方法。
- 前記電気化学デバイスはエレクトロクロミックデバイスであり、前記層は上部透明導電性酸化物(TCO)層であり、及び前記マイクロ波アニールは前記上部TCO層の光透過率及び電気伝導率を改善し、並びに前記上部TCO層は、下部TCO層、カソード、固体電解質及びアノードを含むエレクトロクロミックデバイススタックの上に堆積される、請求項1に記載の方法。
- 前記上部TCO層は、スパッタ堆積されるインジウムスズ酸化物(ITO)層である、請求項6に記載の方法。
- 前記電気化学デバイスはエレクトロクロミックデバイスであり、前記層は、ニッケル酸化物を含む電極であり、前記マイクロ波アニールは前記電極を形成する、請求項1に記載の方法。
- 電気化学デバイスを形成する装置であって、
電気化学デバイス層を基板の上に堆積する第一のシステム、及び、前記デバイス層をマイクロ波アニールする第二のシステム、を備え、前記第二のシステムは、前記層内での優先的マイクロ波エネルギー吸収を提供するように構成される、装置。 - 前記装置はクラスタツール装置である、請求項9に記載の装置。
- 前記電気化学デバイスは薄膜バッテリであり、前記第一のシステムは、基板の上に形成されるカソード電流コレクタの上にカソード層を堆積させるように構成されるシステムであり、前記第二のシステムは、前記カソード層を結晶化させるように構成される、請求項9に記載の装置。
- 前記電気化学デバイスはエレクトロクロミックデバイスであり、前記第一のシステムは、前記基板の上のエレクトロクロミックデバイススタックの上に上部透明導電性酸化物(TCO)層を堆積させるように構成されるシステムであり、前記スタックは下部TCO層、カソード、固体電解質及びアノードを含み、並びに、前記第二のシステムは、前記上部TCO層の光透過率及び電気伝導率を改善するように構成される、請求項9に記載の装置。
- 前記電気化学デバイスはエレクトロクロミックデバイスであり、前記第一のシステムは、前記基板の上のエレクトロクロミックデバイススタックの上にニッケル酸化物電極を堆積させるように構成されるシステムであり、前記スタックは、前記基板の上に形成される下部TCO層、電極、及び固体電解質を含み、並びに、前記第二のシステムは、前記ニッケル酸化物電極を形成するように構成され、前記ニッケル酸化物電極は、ニッケル酸化物を含む電極である、請求項9に記載の装置。
- 前記電気化学デバイスはエレクトロクロミックデバイスであり、前記第一のシステムは、前記基板の上のエレクトロクロミックデバイススタックの上にニッケル酸化物電極を堆積させるように構成されるシステムであり、前記スタックは下部TCO層を含み、及び、前記第二のシステムは、前記ニッケル酸化物電極を形成するように構成され、並びに、前記ニッケル酸化物電極は、ニッケル酸化物を含む電極である、請求項9に記載の装置。
- 前記電気化学デバイスはリチウムイオンバッテリであり、前記第一のシステムは、カソード材料の層をスラリとして堆積させるように構成されるシステムであり、並びに、前記第二のシステムは、カソード材料の前記層を乾燥させ及び形成するように構成される、請求項9に記載の装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/533,927 US9136569B2 (en) | 2008-05-21 | 2012-06-26 | Microwave rapid thermal processing of electrochemical devices |
US13/533,927 | 2012-06-26 | ||
PCT/US2013/047632 WO2014004518A1 (en) | 2012-06-26 | 2013-06-25 | Microwave rapid thermal processing of electrochemical devices |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018001879A Division JP2018092939A (ja) | 2012-06-26 | 2018-01-10 | 電気化学デバイスのマイクロ波急速熱処理 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2015522927A true JP2015522927A (ja) | 2015-08-06 |
JP2015522927A5 JP2015522927A5 (ja) | 2016-08-18 |
JP6276259B2 JP6276259B2 (ja) | 2018-02-07 |
Family
ID=49783796
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015520403A Expired - Fee Related JP6276259B2 (ja) | 2012-06-26 | 2013-06-25 | 電気化学デバイスのマイクロ波急速熱処理 |
JP2018001879A Pending JP2018092939A (ja) | 2012-06-26 | 2018-01-10 | 電気化学デバイスのマイクロ波急速熱処理 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018001879A Pending JP2018092939A (ja) | 2012-06-26 | 2018-01-10 | 電気化学デバイスのマイクロ波急速熱処理 |
Country Status (6)
Country | Link |
---|---|
EP (2) | EP3379635A1 (ja) |
JP (2) | JP6276259B2 (ja) |
KR (1) | KR20150032312A (ja) |
CN (2) | CN107256945A (ja) |
TW (2) | TWI610367B (ja) |
WO (1) | WO2014004518A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9007674B2 (en) | 2011-09-30 | 2015-04-14 | View, Inc. | Defect-mitigation layers in electrochromic devices |
EP3761112B1 (en) * | 2014-04-22 | 2024-03-27 | View, Inc. | Particle removal during fabrication of electrochromic devices |
EP3213364A4 (en) * | 2014-10-31 | 2018-05-02 | Applied Materials, Inc. | Integration of laser processing with deposition of electrochemical device layers |
KR102488802B1 (ko) * | 2014-12-19 | 2023-01-13 | 뷰, 인크. | 부스 바 하에 있는 전기변색 디바이스에서의 결함들을 완화시키는 방법 |
CN109686915A (zh) * | 2018-12-26 | 2019-04-26 | 蜂巢能源科技有限公司 | 锂离子电池正极片及制备方法、锂离子电池 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005141981A (ja) * | 2003-11-05 | 2005-06-02 | Bridgestone Corp | 結晶性ito膜、ito膜の結晶化方法、透明導電性フィルム、タッチパネル及び色素増感型太陽電池 |
US20110048614A1 (en) * | 2009-08-27 | 2011-03-03 | Veerasamy Vijayen S | Electrochromic devices, assemblies incorporating electrochromic devices, and/or methods of making the same |
US20110129594A1 (en) * | 2009-09-22 | 2011-06-02 | Byung-Sung Kwak | Thin-film battery methods for complexity reduction |
JP2011521433A (ja) * | 2008-05-21 | 2011-07-21 | アプライド マテリアルズ インコーポレイテッド | 薄膜電池及びその製造方法 |
JP2012022858A (ja) * | 2010-07-14 | 2012-02-02 | Tokyo Electric Power Co Inc:The | 電極の製造方法 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4239355A1 (de) * | 1992-11-24 | 1994-05-26 | Leybold Ag | Transparentes Substrat mit einem transparenten Schichtsystem und Verfahren zur Herstellung eines solchen Schichtsystems |
US5995271A (en) | 1997-10-07 | 1999-11-30 | Optical Coating Laboratory, Inc. | Protective coating materials for electrochromic devices |
US6172322B1 (en) * | 1997-11-07 | 2001-01-09 | Applied Technology, Inc. | Annealing an amorphous film using microwave energy |
DE19815611A1 (de) * | 1998-04-07 | 1999-10-14 | Riedel De Haen Gmbh | Verfahren zur Herstellung von Lithium-Metall-Oxiden |
TW442992B (en) * | 1998-10-06 | 2001-06-23 | Toshiba Battery | Separator used for battery, its manufacturing method and alkaline secondary battery installed with the separator |
EP1297380B1 (en) * | 2000-05-04 | 2008-11-26 | Schott Donnelly LLC | Method of making an electrochromic panel |
JP4479221B2 (ja) * | 2003-11-05 | 2010-06-09 | 株式会社ブリヂストン | 薄膜の処理方法 |
JP4779321B2 (ja) * | 2004-08-20 | 2011-09-28 | 株式会社Ihi | 薄膜のマイクロ波加熱方法 |
JP5095412B2 (ja) * | 2004-12-08 | 2012-12-12 | シモーフィックス,インコーポレーテッド | LiCoO2の堆積 |
US20060141138A1 (en) * | 2004-12-29 | 2006-06-29 | 3M Innovative Properties Company | Microwave annealing of membranes for use in fuel cell assemblies |
US20070175020A1 (en) * | 2006-01-27 | 2007-08-02 | Matsushita Electric Industrial Co., Ltd. | Method for producing solid state battery |
JP2009048778A (ja) * | 2007-08-13 | 2009-03-05 | Kawai Musical Instr Mfg Co Ltd | 透明導電層の形成方法及び積層構造体の形成方法 |
TWI547999B (zh) | 2007-09-17 | 2016-09-01 | Dsgi公司 | 微波退火半導體材料的系統及方法 |
JP2010283339A (ja) * | 2009-05-02 | 2010-12-16 | Semiconductor Energy Lab Co Ltd | 光電変換装置及びその作製方法 |
WO2011100487A2 (en) * | 2010-02-12 | 2011-08-18 | Applied Materials, Inc. | HYDROTHERMAL SYNTHESIS OF LiFePO4 NANOPARTICLES |
-
2013
- 2013-06-25 EP EP18171517.8A patent/EP3379635A1/en not_active Withdrawn
- 2013-06-25 KR KR20157002147A patent/KR20150032312A/ko not_active Application Discontinuation
- 2013-06-25 EP EP13808436.3A patent/EP2865042B1/en not_active Not-in-force
- 2013-06-25 JP JP2015520403A patent/JP6276259B2/ja not_active Expired - Fee Related
- 2013-06-25 CN CN201710248875.7A patent/CN107256945A/zh active Pending
- 2013-06-25 CN CN201380032074.7A patent/CN104396081B/zh not_active Expired - Fee Related
- 2013-06-25 WO PCT/US2013/047632 patent/WO2014004518A1/en active Application Filing
- 2013-06-26 TW TW106113776A patent/TWI610367B/zh not_active IP Right Cessation
- 2013-06-26 TW TW102122743A patent/TWI587398B/zh not_active IP Right Cessation
-
2018
- 2018-01-10 JP JP2018001879A patent/JP2018092939A/ja active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005141981A (ja) * | 2003-11-05 | 2005-06-02 | Bridgestone Corp | 結晶性ito膜、ito膜の結晶化方法、透明導電性フィルム、タッチパネル及び色素増感型太陽電池 |
JP2011521433A (ja) * | 2008-05-21 | 2011-07-21 | アプライド マテリアルズ インコーポレイテッド | 薄膜電池及びその製造方法 |
US20110048614A1 (en) * | 2009-08-27 | 2011-03-03 | Veerasamy Vijayen S | Electrochromic devices, assemblies incorporating electrochromic devices, and/or methods of making the same |
US20110129594A1 (en) * | 2009-09-22 | 2011-06-02 | Byung-Sung Kwak | Thin-film battery methods for complexity reduction |
JP2012022858A (ja) * | 2010-07-14 | 2012-02-02 | Tokyo Electric Power Co Inc:The | 電極の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JP6276259B2 (ja) | 2018-02-07 |
TWI587398B (zh) | 2017-06-11 |
JP2018092939A (ja) | 2018-06-14 |
EP2865042A4 (en) | 2016-03-02 |
WO2014004518A1 (en) | 2014-01-03 |
KR20150032312A (ko) | 2015-03-25 |
CN104396081A (zh) | 2015-03-04 |
TWI610367B (zh) | 2018-01-01 |
CN104396081B (zh) | 2017-05-10 |
EP3379635A1 (en) | 2018-09-26 |
TW201729297A (zh) | 2017-08-16 |
EP2865042B1 (en) | 2018-05-16 |
CN107256945A (zh) | 2017-10-17 |
TW201409576A (zh) | 2014-03-01 |
EP2865042A1 (en) | 2015-04-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US9828669B2 (en) | Microwave rapid thermal processing of electrochemical devices | |
JP2018092939A (ja) | 電気化学デバイスのマイクロ波急速熱処理 | |
JP6580197B2 (ja) | リチウム含有薄膜層状構造を製造するための蒸着方法 | |
US6632563B1 (en) | Thin film battery and method of manufacture | |
TWI441937B (zh) | 形成用於電解質薄膜之濺鍍靶材的方法 | |
EP1825545B1 (en) | Deposition of licoo2 | |
US20140030449A1 (en) | Electrochemical device fabrication process with low temperature anneal | |
KR101612057B1 (ko) | 박막 전지 및 이를 제조하기 위한 방법 | |
US20170149093A1 (en) | Configurations of solid state thin film batteries | |
JP5129530B2 (ja) | LiCoO2の堆積 | |
KR20140031313A (ko) | 리튬 함유 유리 세라믹 재료의 적어도 하나의 영역을 포함하는, 리튬 전지용 고체 전해질 및 제조 방법. | |
KR20160105867A (ko) | 비정질 리튬-함유 화합물들을 제조하기 위한 기상 증착 방법 | |
Park et al. | LiCoO2 thin film cathode fabrication by rapid thermal annealing for micro power sources | |
KR20110112067A (ko) | 음극 성능이 개선된 박막전지 및 이의 제조방법 | |
TW201717462A (zh) | 電化學元件中的黏著性增進 | |
JP2005093372A (ja) | 電気化学素子とその製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20160624 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20160624 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20170412 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20170418 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20170713 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20170808 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20171018 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20171212 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20180111 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6276259 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
LAPS | Cancellation because of no payment of annual fees |