JP2015520358A5 - - Google Patents

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Publication number
JP2015520358A5
JP2015520358A5 JP2015502150A JP2015502150A JP2015520358A5 JP 2015520358 A5 JP2015520358 A5 JP 2015520358A5 JP 2015502150 A JP2015502150 A JP 2015502150A JP 2015502150 A JP2015502150 A JP 2015502150A JP 2015520358 A5 JP2015520358 A5 JP 2015520358A5
Authority
JP
Japan
Prior art keywords
reference beam
image plane
object beam
inspection apparatus
plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2015502150A
Other languages
English (en)
Japanese (ja)
Other versions
JP2015520358A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/EP2013/051932 external-priority patent/WO2013143723A1/en
Publication of JP2015520358A publication Critical patent/JP2015520358A/ja
Publication of JP2015520358A5 publication Critical patent/JP2015520358A5/ja
Pending legal-status Critical Current

Links

JP2015502150A 2012-03-29 2013-01-31 小型自蔵式ホログラフィ及び干渉計デバイス Pending JP2015520358A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261617348P 2012-03-29 2012-03-29
US61/617,348 2012-03-29
PCT/EP2013/051932 WO2013143723A1 (en) 2012-03-29 2013-01-31 Compact self-contained holographic and interferometric apparatus

Publications (2)

Publication Number Publication Date
JP2015520358A JP2015520358A (ja) 2015-07-16
JP2015520358A5 true JP2015520358A5 (enExample) 2016-03-17

Family

ID=47633062

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015502150A Pending JP2015520358A (ja) 2012-03-29 2013-01-31 小型自蔵式ホログラフィ及び干渉計デバイス

Country Status (5)

Country Link
US (1) US20150085291A1 (enExample)
JP (1) JP2015520358A (enExample)
NL (1) NL2010215A (enExample)
TW (1) TW201339537A (enExample)
WO (1) WO2013143723A1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6286546B2 (ja) * 2013-07-30 2018-02-28 ドルビー ラボラトリーズ ライセンシング コーポレイション 非機械的ミラービームステアリングを備えたプロジェクタ表示システム
WO2016030205A1 (en) * 2014-08-28 2016-03-03 Vrije Universiteit Amsterdam Inspection apparatus, inspection method and manufacturing method
NL2021848A (en) 2018-04-09 2018-11-06 Stichting Vu Holographic metrology apparatus.
EP3825752A1 (de) * 2019-11-20 2021-05-26 Siemens Aktiengesellschaft Kompaktes common path interferometer

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001165634A (ja) * 1999-12-09 2001-06-22 Fujitsu Ltd 表面形状測定装置
US20040130762A1 (en) * 2002-09-12 2004-07-08 Thomas Clarence E. Optical acquisition systems for direct-to-digital holography and holovision
US8184298B2 (en) * 2008-05-21 2012-05-22 The Board Of Trustees Of The University Of Illinois Spatial light interference microscopy and fourier transform light scattering for cell and tissue characterization
JP5201580B2 (ja) * 2008-06-06 2013-06-05 新オプトウエア株式会社 ホログラム作成装置及びホログラムプリンタ
US8120781B2 (en) * 2008-11-26 2012-02-21 Zygo Corporation Interferometric systems and methods featuring spectral analysis of unevenly sampled data
JP2012530929A (ja) * 2009-06-22 2012-12-06 エーエスエムエル ネザーランズ ビー．ブイ． オブジェクト検査システムおよび方法
US8559014B2 (en) * 2009-09-25 2013-10-15 Hwan J. Jeong High-resolution, common-path interferometric imaging systems and methods
US9360423B2 (en) * 2011-07-01 2016-06-07 Canon Kabushiki Kaisha Optical system for a holographic microscope including a spatial filter
US9164479B2 (en) * 2011-09-16 2015-10-20 University Of Massachusetts Systems and methods of dual-plane digital holographic microscopy
US9557549B2 (en) * 2011-12-09 2017-01-31 Massachusetts Institute Of Technology Systems and methods for self-referenced quantitative phase microscopy

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