JP2015505617A5 - - Google Patents
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- JP2015505617A5 JP2015505617A5 JP2014555308A JP2014555308A JP2015505617A5 JP 2015505617 A5 JP2015505617 A5 JP 2015505617A5 JP 2014555308 A JP2014555308 A JP 2014555308A JP 2014555308 A JP2014555308 A JP 2014555308A JP 2015505617 A5 JP2015505617 A5 JP 2015505617A5
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- JP
- Japan
- Prior art keywords
- probe
- lens
- angle
- incidence
- optical axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 claims 44
- 238000000034 method Methods 0.000 claims 16
- 238000001514 detection method Methods 0.000 claims 12
- 230000005855 radiation Effects 0.000 claims 10
- 230000003287 optical effect Effects 0.000 claims 7
- 230000000694 effects Effects 0.000 claims 2
- 230000001678 irradiating effect Effects 0.000 claims 2
- 239000000463 material Substances 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GBGB1201640.8A GB201201640D0 (en) | 2012-01-31 | 2012-01-31 | Photothermal probe actuation |
| GB1201640.8 | 2012-01-31 | ||
| PCT/GB2013/050195 WO2013114100A1 (en) | 2012-01-31 | 2013-01-29 | Beam scanning system |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017193953A Division JP6495406B2 (ja) | 2012-01-31 | 2017-10-04 | ビーム走査システム |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015505617A JP2015505617A (ja) | 2015-02-23 |
| JP2015505617A5 true JP2015505617A5 (enExample) | 2016-03-17 |
| JP6224009B2 JP6224009B2 (ja) | 2017-11-01 |
Family
ID=45876391
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014555307A Active JP6216329B2 (ja) | 2012-01-31 | 2013-01-29 | プローブ作動 |
| JP2014555308A Active JP6224009B2 (ja) | 2012-01-31 | 2013-01-29 | ビーム走査システム |
| JP2017193953A Expired - Fee Related JP6495406B2 (ja) | 2012-01-31 | 2017-10-04 | ビーム走査システム |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014555307A Active JP6216329B2 (ja) | 2012-01-31 | 2013-01-29 | プローブ作動 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017193953A Expired - Fee Related JP6495406B2 (ja) | 2012-01-31 | 2017-10-04 | ビーム走査システム |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US9291641B2 (enExample) |
| EP (2) | EP2810082B1 (enExample) |
| JP (3) | JP6216329B2 (enExample) |
| KR (2) | KR20140129047A (enExample) |
| GB (1) | GB201201640D0 (enExample) |
| WO (2) | WO2013114099A1 (enExample) |
Families Citing this family (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB201201640D0 (en) * | 2012-01-31 | 2012-03-14 | Infinitesima Ltd | Photothermal probe actuation |
| DE102013227105A1 (de) * | 2013-09-03 | 2015-03-05 | Leica Microsystems Cms Gmbh | Mikroskop und akustooptischer Strahlvereiniger für ein Mikroskop |
| JP6241999B2 (ja) * | 2014-02-21 | 2017-12-06 | 国立大学法人金沢大学 | 走査型プローブ顕微鏡用カンチレバー及び走査型プローブ顕微鏡 |
| EP2913681A1 (en) * | 2014-02-28 | 2015-09-02 | Infinitesima Limited | Probe system with multiple actuation locations |
| EP2913682A1 (en) * | 2014-02-28 | 2015-09-02 | Infinitesima Limited | Probe actuation system with feedback controller |
| JP6769593B2 (ja) | 2015-06-12 | 2020-10-14 | インフィニテシマ リミテッド | 走査型プローブシステム |
| JP6996048B2 (ja) | 2015-11-01 | 2022-01-17 | ハワード ヒューズ メディカル インスティテュート | 広視野高分解能顕微鏡 |
| EP3467458B1 (en) * | 2016-06-03 | 2021-03-31 | Shimadzu Corporation | Infrared spectrophotometer |
| GB201610128D0 (en) | 2016-06-10 | 2016-07-27 | Infinitesima Ltd | Scanning probe system with multiple probes |
| DE102016221319B4 (de) * | 2016-10-28 | 2025-06-12 | Carl Zeiss Smt Gmbh | Rastersondenmikroskop und Verfahren zum Erhöhen einer Abtastgeschwindigkeit eines Rastersondenmikroskops im Step-in Abtastmodus |
| US10352863B1 (en) * | 2016-11-23 | 2019-07-16 | Alakai Defense Systems, Inc. | Method for optimizing detection of inelastically scattered light from a distant target by measuring the target distance using inelastically scattered light |
| WO2018109803A1 (ja) * | 2016-12-12 | 2018-06-21 | オリンパス株式会社 | 原子間力顕微鏡 |
| US10302764B2 (en) * | 2017-02-03 | 2019-05-28 | Microsoft Technology Licensing, Llc | Active illumination management through contextual information |
| US10107834B2 (en) | 2017-03-20 | 2018-10-23 | Infinitesima Limited | Measurement system |
| DE102017205528B4 (de) * | 2017-03-31 | 2021-06-10 | Carl Zeiss Smt Gmbh | Vorrichtung und Verfahren für ein Rastersondenmikroskop |
| GB201710294D0 (en) * | 2017-06-28 | 2017-08-09 | Infinitesima Ltd | Scanning probe microscope |
| CN111480082A (zh) * | 2017-08-03 | 2020-07-31 | 布鲁克纳米公司 | 用于扫描探针显微镜的热稳定、抗漂移的探针及其制造方法 |
| EP3543712A1 (en) * | 2018-03-21 | 2019-09-25 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Method and system for at least subsurface characterization of a sample |
| US10768225B1 (en) * | 2019-03-08 | 2020-09-08 | Advanced Micro Devices, Inc. | Probe placement for laser probing system |
| JP7197012B2 (ja) | 2019-07-11 | 2022-12-27 | 日本電信電話株式会社 | レーザー光走査装置及びレーザー光走査方法 |
| KR102236590B1 (ko) * | 2019-08-21 | 2021-04-06 | 경북대학교 산학협력단 | 고속 원자힘 현미경 |
| GB201915539D0 (en) | 2019-10-25 | 2019-12-11 | Infinitesima Ltd | Method of imaging a surface using a scanning probe mircoscope |
| US20210333219A1 (en) * | 2020-04-27 | 2021-10-28 | Mpi Corporation | Method of determining distance between probe and wafer held by wafer probe station |
| EP4206687B1 (en) | 2021-02-03 | 2025-08-06 | Oxford Instruments Asylum Research, Inc. | Automated optimization of afm light source positioning |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8087288B1 (en) * | 1993-08-17 | 2012-01-03 | Bruker Nano, Inc. | Scanning stylus atomic force microscope with cantilever tracking and optical access |
| US5581082A (en) * | 1995-03-28 | 1996-12-03 | The Regents Of The University Of California | Combined scanning probe and scanning energy microscope |
| US5861550A (en) | 1997-10-14 | 1999-01-19 | Raymax Technology, Incorporated | Scanning force microscope |
| US6330824B1 (en) | 1999-02-19 | 2001-12-18 | The University Of North Carolina At Chapel Hill | Photothermal modulation for oscillating mode atomic force microscopy in solution |
| JP2000266658A (ja) * | 1999-03-16 | 2000-09-29 | Seiko Instruments Inc | マルチプローブ及び走査型プローブ顕微鏡 |
| JP2002005810A (ja) * | 2000-06-16 | 2002-01-09 | Canon Inc | プローブ及びその製造方法、表面観察装置、露光装置、情報処理装置 |
| JP2003134853A (ja) * | 2001-10-24 | 2003-05-09 | Minolta Co Ltd | 電気機械変換素子を使用した駆動装置及びその応用装置 |
| US7230719B2 (en) * | 2003-12-02 | 2007-06-12 | National University Of Singapore | High sensitivity scanning probe system |
| JP2005331509A (ja) * | 2004-04-19 | 2005-12-02 | Japan Science & Technology Agency | 固有振動可変型のカンチレバーによる測定対象物の計測方法および装置 |
| US7358822B2 (en) | 2005-01-21 | 2008-04-15 | Cornell Research Foundation, Inc. | MEMS oscillator drive |
| JP2006329973A (ja) * | 2005-04-28 | 2006-12-07 | Hitachi Ltd | 走査プローブ顕微鏡およびこれを用いた試料観察方法およびデバイス製造方法 |
| EP1898204B1 (en) * | 2005-05-31 | 2018-09-12 | National University Corporation Kanazawa University | Scanning probe microscope and cantilever drive device |
| JP4810251B2 (ja) * | 2006-02-16 | 2011-11-09 | キヤノン株式会社 | 原子間力顕微鏡 |
| US7748260B2 (en) | 2006-07-12 | 2010-07-06 | Veeco Instruments Inc. | Thermal mechanical drive actuator, thermal probe and method of thermally driving a probe |
| US7770231B2 (en) | 2007-08-02 | 2010-08-03 | Veeco Instruments, Inc. | Fast-scanning SPM and method of operating same |
| JP2009128139A (ja) * | 2007-11-22 | 2009-06-11 | Hitachi Ltd | 走査プローブ顕微鏡及び走査プローブ顕微鏡用探針ユニット |
| WO2009147450A1 (en) | 2008-06-06 | 2009-12-10 | Infinitesima Ltd | Probe detection system |
| CA2825038A1 (en) | 2011-01-31 | 2012-08-09 | Infinitesima Limited | Adaptive mode scanning probe microscope |
| GB201201640D0 (en) * | 2012-01-31 | 2012-03-14 | Infinitesima Ltd | Photothermal probe actuation |
-
2012
- 2012-01-31 GB GBGB1201640.8A patent/GB201201640D0/en not_active Ceased
-
2013
- 2013-01-29 EP EP13705228.8A patent/EP2810082B1/en active Active
- 2013-01-29 WO PCT/GB2013/050194 patent/WO2013114099A1/en not_active Ceased
- 2013-01-29 WO PCT/GB2013/050195 patent/WO2013114100A1/en not_active Ceased
- 2013-01-29 US US14/375,552 patent/US9291641B2/en active Active
- 2013-01-29 JP JP2014555307A patent/JP6216329B2/ja active Active
- 2013-01-29 KR KR1020147023443A patent/KR20140129047A/ko not_active Withdrawn
- 2013-01-29 EP EP13707024.9A patent/EP2810083B1/en active Active
- 2013-01-29 US US14/375,622 patent/US9222958B2/en active Active
- 2013-01-29 KR KR1020147023440A patent/KR20140129046A/ko not_active Withdrawn
- 2013-01-29 JP JP2014555308A patent/JP6224009B2/ja active Active
-
2017
- 2017-10-04 JP JP2017193953A patent/JP6495406B2/ja not_active Expired - Fee Related
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