KR20140129047A - 빔 스캐닝 시스템 - Google Patents

빔 스캐닝 시스템 Download PDF

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Publication number
KR20140129047A
KR20140129047A KR1020147023443A KR20147023443A KR20140129047A KR 20140129047 A KR20140129047 A KR 20140129047A KR 1020147023443 A KR1020147023443 A KR 1020147023443A KR 20147023443 A KR20147023443 A KR 20147023443A KR 20140129047 A KR20140129047 A KR 20140129047A
Authority
KR
South Korea
Prior art keywords
probe
lens
angle
detection
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1020147023443A
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English (en)
Korean (ko)
Inventor
앤드류 험프리스
빈 자오
Original Assignee
인피니트시마 리미티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 인피니트시마 리미티드 filed Critical 인피니트시마 리미티드
Publication of KR20140129047A publication Critical patent/KR20140129047A/ko
Withdrawn legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/045—Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Microscoopes, Condenser (AREA)
KR1020147023443A 2012-01-31 2013-01-29 빔 스캐닝 시스템 Withdrawn KR20140129047A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GBGB1201640.8A GB201201640D0 (en) 2012-01-31 2012-01-31 Photothermal probe actuation
GB1201640.8 2012-01-31
PCT/GB2013/050195 WO2013114100A1 (en) 2012-01-31 2013-01-29 Beam scanning system

Publications (1)

Publication Number Publication Date
KR20140129047A true KR20140129047A (ko) 2014-11-06

Family

ID=45876391

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020147023443A Withdrawn KR20140129047A (ko) 2012-01-31 2013-01-29 빔 스캐닝 시스템
KR1020147023440A Withdrawn KR20140129046A (ko) 2012-01-31 2013-01-29 탐침 작동기

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020147023440A Withdrawn KR20140129046A (ko) 2012-01-31 2013-01-29 탐침 작동기

Country Status (6)

Country Link
US (2) US9291641B2 (enExample)
EP (2) EP2810082B1 (enExample)
JP (3) JP6216329B2 (enExample)
KR (2) KR20140129047A (enExample)
GB (1) GB201201640D0 (enExample)
WO (2) WO2013114099A1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200019205A (ko) * 2017-06-28 2020-02-21 인피니트시마 리미티드 스캐닝 프로브 현미경
KR20210022917A (ko) * 2019-08-21 2021-03-04 경북대학교 산학협력단 고속 원자힘 현미경

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GB201201640D0 (en) * 2012-01-31 2012-03-14 Infinitesima Ltd Photothermal probe actuation
DE102013227105A1 (de) * 2013-09-03 2015-03-05 Leica Microsystems Cms Gmbh Mikroskop und akustooptischer Strahlvereiniger für ein Mikroskop
JP6241999B2 (ja) * 2014-02-21 2017-12-06 国立大学法人金沢大学 走査型プローブ顕微鏡用カンチレバー及び走査型プローブ顕微鏡
EP2913681A1 (en) * 2014-02-28 2015-09-02 Infinitesima Limited Probe system with multiple actuation locations
EP2913682A1 (en) * 2014-02-28 2015-09-02 Infinitesima Limited Probe actuation system with feedback controller
JP6769593B2 (ja) 2015-06-12 2020-10-14 インフィニテシマ リミテッド 走査型プローブシステム
JP6996048B2 (ja) 2015-11-01 2022-01-17 ハワード ヒューズ メディカル インスティテュート 広視野高分解能顕微鏡
EP3467458B1 (en) * 2016-06-03 2021-03-31 Shimadzu Corporation Infrared spectrophotometer
GB201610128D0 (en) 2016-06-10 2016-07-27 Infinitesima Ltd Scanning probe system with multiple probes
DE102016221319B4 (de) * 2016-10-28 2025-06-12 Carl Zeiss Smt Gmbh Rastersondenmikroskop und Verfahren zum Erhöhen einer Abtastgeschwindigkeit eines Rastersondenmikroskops im Step-in Abtastmodus
US10352863B1 (en) * 2016-11-23 2019-07-16 Alakai Defense Systems, Inc. Method for optimizing detection of inelastically scattered light from a distant target by measuring the target distance using inelastically scattered light
WO2018109803A1 (ja) * 2016-12-12 2018-06-21 オリンパス株式会社 原子間力顕微鏡
US10302764B2 (en) * 2017-02-03 2019-05-28 Microsoft Technology Licensing, Llc Active illumination management through contextual information
US10107834B2 (en) 2017-03-20 2018-10-23 Infinitesima Limited Measurement system
DE102017205528B4 (de) * 2017-03-31 2021-06-10 Carl Zeiss Smt Gmbh Vorrichtung und Verfahren für ein Rastersondenmikroskop
CN111480082A (zh) * 2017-08-03 2020-07-31 布鲁克纳米公司 用于扫描探针显微镜的热稳定、抗漂移的探针及其制造方法
EP3543712A1 (en) * 2018-03-21 2019-09-25 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Method and system for at least subsurface characterization of a sample
US10768225B1 (en) * 2019-03-08 2020-09-08 Advanced Micro Devices, Inc. Probe placement for laser probing system
JP7197012B2 (ja) 2019-07-11 2022-12-27 日本電信電話株式会社 レーザー光走査装置及びレーザー光走査方法
GB201915539D0 (en) 2019-10-25 2019-12-11 Infinitesima Ltd Method of imaging a surface using a scanning probe mircoscope
US20210333219A1 (en) * 2020-04-27 2021-10-28 Mpi Corporation Method of determining distance between probe and wafer held by wafer probe station
EP4206687B1 (en) 2021-02-03 2025-08-06 Oxford Instruments Asylum Research, Inc. Automated optimization of afm light source positioning

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US8087288B1 (en) * 1993-08-17 2012-01-03 Bruker Nano, Inc. Scanning stylus atomic force microscope with cantilever tracking and optical access
US5581082A (en) * 1995-03-28 1996-12-03 The Regents Of The University Of California Combined scanning probe and scanning energy microscope
US5861550A (en) 1997-10-14 1999-01-19 Raymax Technology, Incorporated Scanning force microscope
US6330824B1 (en) 1999-02-19 2001-12-18 The University Of North Carolina At Chapel Hill Photothermal modulation for oscillating mode atomic force microscopy in solution
JP2000266658A (ja) * 1999-03-16 2000-09-29 Seiko Instruments Inc マルチプローブ及び走査型プローブ顕微鏡
JP2002005810A (ja) * 2000-06-16 2002-01-09 Canon Inc プローブ及びその製造方法、表面観察装置、露光装置、情報処理装置
JP2003134853A (ja) * 2001-10-24 2003-05-09 Minolta Co Ltd 電気機械変換素子を使用した駆動装置及びその応用装置
US7230719B2 (en) * 2003-12-02 2007-06-12 National University Of Singapore High sensitivity scanning probe system
JP2005331509A (ja) * 2004-04-19 2005-12-02 Japan Science & Technology Agency 固有振動可変型のカンチレバーによる測定対象物の計測方法および装置
US7358822B2 (en) 2005-01-21 2008-04-15 Cornell Research Foundation, Inc. MEMS oscillator drive
JP2006329973A (ja) * 2005-04-28 2006-12-07 Hitachi Ltd 走査プローブ顕微鏡およびこれを用いた試料観察方法およびデバイス製造方法
EP1898204B1 (en) * 2005-05-31 2018-09-12 National University Corporation Kanazawa University Scanning probe microscope and cantilever drive device
JP4810251B2 (ja) * 2006-02-16 2011-11-09 キヤノン株式会社 原子間力顕微鏡
US7748260B2 (en) 2006-07-12 2010-07-06 Veeco Instruments Inc. Thermal mechanical drive actuator, thermal probe and method of thermally driving a probe
US7770231B2 (en) 2007-08-02 2010-08-03 Veeco Instruments, Inc. Fast-scanning SPM and method of operating same
JP2009128139A (ja) * 2007-11-22 2009-06-11 Hitachi Ltd 走査プローブ顕微鏡及び走査プローブ顕微鏡用探針ユニット
WO2009147450A1 (en) 2008-06-06 2009-12-10 Infinitesima Ltd Probe detection system
CA2825038A1 (en) 2011-01-31 2012-08-09 Infinitesima Limited Adaptive mode scanning probe microscope
GB201201640D0 (en) * 2012-01-31 2012-03-14 Infinitesima Ltd Photothermal probe actuation

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200019205A (ko) * 2017-06-28 2020-02-21 인피니트시마 리미티드 스캐닝 프로브 현미경
KR20210022917A (ko) * 2019-08-21 2021-03-04 경북대학교 산학협력단 고속 원자힘 현미경

Also Published As

Publication number Publication date
JP2015505617A (ja) 2015-02-23
US9222958B2 (en) 2015-12-29
US20150013035A1 (en) 2015-01-08
JP6495406B2 (ja) 2019-04-03
JP6224009B2 (ja) 2017-11-01
WO2013114100A1 (en) 2013-08-08
JP6216329B2 (ja) 2017-10-18
EP2810083B1 (en) 2020-08-19
KR20140129046A (ko) 2014-11-06
US9291641B2 (en) 2016-03-22
EP2810083A1 (en) 2014-12-10
EP2810082A1 (en) 2014-12-10
GB201201640D0 (en) 2012-03-14
JP2018021930A (ja) 2018-02-08
JP2015505616A (ja) 2015-02-23
US20150020244A1 (en) 2015-01-15
EP2810082B1 (en) 2020-03-18
WO2013114099A1 (en) 2013-08-08

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Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20140821

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
PC1203 Withdrawal of no request for examination
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid