JP2015211077A5 - - Google Patents

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Publication number
JP2015211077A5
JP2015211077A5 JP2014090406A JP2014090406A JP2015211077A5 JP 2015211077 A5 JP2015211077 A5 JP 2015211077A5 JP 2014090406 A JP2014090406 A JP 2014090406A JP 2014090406 A JP2014090406 A JP 2014090406A JP 2015211077 A5 JP2015211077 A5 JP 2015211077A5
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JP
Japan
Prior art keywords
metal layer
hole
layer
forming
substrate body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2014090406A
Other languages
English (en)
Japanese (ja)
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JP6251629B2 (ja
JP2015211077A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2014090406A priority Critical patent/JP6251629B2/ja
Priority claimed from JP2014090406A external-priority patent/JP6251629B2/ja
Priority to US14/687,126 priority patent/US9318351B2/en
Publication of JP2015211077A publication Critical patent/JP2015211077A/ja
Publication of JP2015211077A5 publication Critical patent/JP2015211077A5/ja
Application granted granted Critical
Publication of JP6251629B2 publication Critical patent/JP6251629B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2014090406A 2014-04-24 2014-04-24 配線基板及び配線基板の製造方法 Active JP6251629B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2014090406A JP6251629B2 (ja) 2014-04-24 2014-04-24 配線基板及び配線基板の製造方法
US14/687,126 US9318351B2 (en) 2014-04-24 2015-04-15 Wiring substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014090406A JP6251629B2 (ja) 2014-04-24 2014-04-24 配線基板及び配線基板の製造方法

Publications (3)

Publication Number Publication Date
JP2015211077A JP2015211077A (ja) 2015-11-24
JP2015211077A5 true JP2015211077A5 (enExample) 2017-02-16
JP6251629B2 JP6251629B2 (ja) 2017-12-20

Family

ID=54335479

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014090406A Active JP6251629B2 (ja) 2014-04-24 2014-04-24 配線基板及び配線基板の製造方法

Country Status (2)

Country Link
US (1) US9318351B2 (enExample)
JP (1) JP6251629B2 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3216050B1 (en) 2014-11-05 2021-09-08 Corning Incorporated Bottom-up electrolytic via plating method
US9666507B2 (en) * 2014-11-30 2017-05-30 United Microelectronics Corp. Through-substrate structure and method for fabricating the same
JP7307898B2 (ja) * 2017-03-24 2023-07-13 大日本印刷株式会社 貫通電極基板及びその製造方法
US10917966B2 (en) * 2018-01-29 2021-02-09 Corning Incorporated Articles including metallized vias
US20190357364A1 (en) * 2018-05-17 2019-11-21 At&S Austria Technologie & Systemtechnik Aktiengesellschaft Component Carrier With Only Partially Filled Thermal Through-Hole
WO2020138221A1 (ja) * 2018-12-26 2020-07-02 京セラ株式会社 配線基板、電子装置及び電子モジュール
CN113711347A (zh) * 2019-04-15 2021-11-26 大日本印刷株式会社 贯通电极基板、电子单元、贯通电极基板的制造方法以及电子单元的制造方法
JP2022147360A (ja) * 2021-03-23 2022-10-06 凸版印刷株式会社 多層配線基板およびその製造方法
JP7746684B2 (ja) * 2021-05-11 2025-10-01 大日本印刷株式会社 貫通電極基板
WO2025047765A1 (ja) * 2023-08-30 2025-03-06 京セラ株式会社 印刷配線板及びビルドアップ印刷配線板
CN120015732B (zh) * 2025-02-14 2025-11-14 无锡缶英微电子科技有限公司 一种硅电容器

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3810659B2 (ja) * 2001-08-28 2006-08-16 日本メクトロン株式会社 ヴィアホールの充填方法
US6853046B2 (en) * 2002-09-24 2005-02-08 Hamamatsu Photonics, K.K. Photodiode array and method of making the same
JP4098673B2 (ja) 2003-06-19 2008-06-11 新光電気工業株式会社 半導体パッケージの製造方法
JP2007005404A (ja) * 2005-06-21 2007-01-11 Matsushita Electric Works Ltd 半導体基板への貫通配線の形成方法
JP4552770B2 (ja) * 2005-06-21 2010-09-29 パナソニック電工株式会社 半導体基板への貫通配線の形成方法
US8330256B2 (en) * 2008-11-18 2012-12-11 Seiko Epson Corporation Semiconductor device having through electrodes, a manufacturing method thereof, and an electronic apparatus
JP2013077807A (ja) * 2011-09-13 2013-04-25 Hoya Corp 基板製造方法および配線基板の製造方法

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