JP2015193534A5 - - Google Patents
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- Publication number
- JP2015193534A5 JP2015193534A5 JP2015077433A JP2015077433A JP2015193534A5 JP 2015193534 A5 JP2015193534 A5 JP 2015193534A5 JP 2015077433 A JP2015077433 A JP 2015077433A JP 2015077433 A JP2015077433 A JP 2015077433A JP 2015193534 A5 JP2015193534 A5 JP 2015193534A5
- Authority
- JP
- Japan
- Prior art keywords
- silicon carbide
- reaction
- sintered silicon
- member according
- region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 34
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 34
- 230000003746 surface roughness Effects 0.000 claims description 4
- 238000005259 measurement Methods 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims 4
- 239000010703 silicon Substances 0.000 claims 4
- 238000010304 firing Methods 0.000 claims 2
- 239000002245 particle Substances 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015077433A JP6512401B2 (ja) | 2014-03-28 | 2015-04-06 | 反応焼結炭化珪素部材 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014068728 | 2014-03-28 | ||
| JP2014068728 | 2014-03-28 | ||
| JP2015077433A JP6512401B2 (ja) | 2014-03-28 | 2015-04-06 | 反応焼結炭化珪素部材 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014220991A Division JP5729517B1 (ja) | 2014-03-28 | 2014-10-30 | 反応焼結炭化珪素部材 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015193534A JP2015193534A (ja) | 2015-11-05 |
| JP2015193534A5 true JP2015193534A5 (enExample) | 2017-12-07 |
| JP6512401B2 JP6512401B2 (ja) | 2019-05-15 |
Family
ID=53437945
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014220991A Active JP5729517B1 (ja) | 2014-03-28 | 2014-10-30 | 反応焼結炭化珪素部材 |
| JP2015077433A Active JP6512401B2 (ja) | 2014-03-28 | 2015-04-06 | 反応焼結炭化珪素部材 |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014220991A Active JP5729517B1 (ja) | 2014-03-28 | 2014-10-30 | 反応焼結炭化珪素部材 |
Country Status (2)
| Country | Link |
|---|---|
| EP (1) | EP2924506B1 (enExample) |
| JP (2) | JP5729517B1 (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6449680B2 (ja) * | 2015-02-26 | 2019-01-09 | 京セラ株式会社 | セラミック接合体およびセラミック流路体ならびにこれを備える熱交換器 |
| JP6206613B1 (ja) * | 2016-06-29 | 2017-10-04 | Toto株式会社 | セラミック構造体及び半導体製造装置用構造部材 |
| JP6643483B2 (ja) * | 2016-07-27 | 2020-02-12 | 京セラ株式会社 | セラミック接合体 |
| KR20190048811A (ko) | 2017-10-31 | 2019-05-09 | 한국세라믹기술원 | 우수한 열전도도 및 열내구성을 가지는 탄화규소 소결체의 제조방법 |
| JP7531316B2 (ja) * | 2019-06-11 | 2024-08-09 | 日本特殊陶業株式会社 | ＳｉＣ焼結部材の製造方法 |
| US11584694B2 (en) | 2021-01-19 | 2023-02-21 | Ii-Vi Delaware, Inc. | Silicon carbide body with localized diamond reinforcement |
| US20240392170A2 (en) * | 2022-11-01 | 2024-11-28 | Ii-Vi Delaware, Inc. | Diamond-containing adhesive for joining reaction-bonded silicon-carbide parts |
| US12338187B2 (en) | 2023-01-17 | 2025-06-24 | Ii-Vi Delaware, Inc. | Multi-component device and method of making a multi-component device |
| KR102772143B1 (ko) * | 2023-10-05 | 2025-02-25 | 솔믹스 주식회사 | 반도체 소자 제조 장치 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001261459A (ja) * | 2000-03-23 | 2001-09-26 | Toshiba Ceramics Co Ltd | 炭化ケイ素セラミックス接合体およびその製造方法 |
| JP4261130B2 (ja) * | 2002-06-18 | 2009-04-30 | 株式会社東芝 | シリコン／炭化ケイ素複合材料 |
| JP4870454B2 (ja) * | 2006-03-15 | 2012-02-08 | 太平洋セメント株式会社 | 中空構造を有するセラミックス接合体 |
| JP5322382B2 (ja) * | 2006-11-30 | 2013-10-23 | 株式会社東芝 | セラミックス複合部材とその製造方法 |
| DE102009034166A1 (de) * | 2008-08-11 | 2010-02-18 | Carl Zeiss Smt Ag | Kontaminationsarme optische Anordnung |
| JP5305938B2 (ja) | 2009-01-20 | 2013-10-02 | キヤノン株式会社 | 露光装置、光源装置及びデバイス製造方法 |
| JP5324945B2 (ja) * | 2009-01-30 | 2013-10-23 | 太平洋セメント株式会社 | 炭化珪素接合体及びその製造方法 |
| JP5773331B2 (ja) * | 2010-05-27 | 2015-09-02 | Toto株式会社 | セラミックス接合体の製造方法 |
| EP2963002A4 (en) * | 2013-02-27 | 2016-10-26 | Kyocera Corp | CERAMICLY CONNECTED BODY AND CHANNEL BODY |
-
2014
- 2014-10-30 JP JP2014220991A patent/JP5729517B1/ja active Active
-
2015
- 2015-03-23 EP EP15160410.5A patent/EP2924506B1/en active Active
- 2015-04-06 JP JP2015077433A patent/JP6512401B2/ja active Active