JP2015192028A - 炭化珪素半導体装置およびその製造方法 - Google Patents
炭化珪素半導体装置およびその製造方法 Download PDFInfo
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- JP2015192028A JP2015192028A JP2014068302A JP2014068302A JP2015192028A JP 2015192028 A JP2015192028 A JP 2015192028A JP 2014068302 A JP2014068302 A JP 2014068302A JP 2014068302 A JP2014068302 A JP 2014068302A JP 2015192028 A JP2015192028 A JP 2015192028A
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Abstract
【解決手段】炭化珪素基板10を形成する工程は、エピタキシャル成長により第1導電型を有する第1不純物領域12を形成する工程と、第1不純物領域12に対してイオン注入を行うことより、第1導電型とは異なる第2導電型を有し、かつ周期的に配置された埋込領域17を形成する工程と、第1不純物領域12と埋込領域17とに接し、第2導電型を有し、かつ埋込領域17よりも低い不純物濃度を有する第2不純物領域13をエピタキシャル成長により形成する工程とを含む。第2不純物領域13と第3不純物領域14とを貫通して第1不純物領域12に至る側部SWと、側部SWと連接する底部BTとを有し、かつ埋込領域17と同じ周期で配置されたトレンチTRが形成される。
【選択図】図1
Description
最初に本発明の実施態様を列記して説明する。
[本発明の実施形態の詳細]
以下、図面に基づいて本発明の実施の形態について説明する。なお、以下の図面において同一または相当する部分には同一の参照番号を付しその説明は繰返さない。また、本明細書中の結晶学的記載においては、個別方位を[]、集合方位を<>、個別面を()、集合面を{}でそれぞれ示している。また、負の指数については、結晶学上、”−”(バー)を数字の上に付けることになっているが、本明細書中では、数字の前に負の符号を付けている。
まず、本発明の実施の形態1に係る炭化珪素半導体装置としてのMOSFETの構成について説明する。
次に、本発明の実施の形態2に係る炭化珪素半導体装置としてのMOSFETの構成について説明する。実施の形態2に係るMOSFETは、埋込領域17がトレンチTRの底部BTに接している点において実施の形態1に係るMOSFETと異なっており、他の構成は、実施の形態1に係るMOSFETと同様である。そのため、同一または相当する部分には同一の参照番号を付しその説明は繰返さない。
次に、本発明の実施の形態3に係る炭化珪素半導体装置としてのMOSFETの構成について説明する。実施の形態3に係るMOSFETは、第1不純物領域12が、第1領域12aと、第2領域12bと、第3領域12cとを有している点において実施の形態1に係るMOSFETと異なっており、他の構成は、実施の形態1に係るMOSFETと同様である。そのため、同一または相当する部分には同一の参照番号を付しその説明は繰返さない。
次に、本発明の実施の形態4に係る炭化珪素半導体装置としてのIGBT(Insulated Gate Bipolar Transistor)の構成について説明する。実施の形態4に係るIGBTは、第1不純物領域12の厚みが100μm程度と厚く、第1不純物領域12の不純物濃度が5×1014cm-3以上1×1015cm-3以下程度であり、裏面電極に接してp型エピタキシャル層を有し、p型エピタキシャル層に接してキャリア注入領域を有する点において実施の形態1に係るMOSFETと異なっており、他の構成は、実施の形態1に係るMOSFETとほぼ同様である。そのため、同一または相当する部分には同一の参照番号を付しその説明は繰返さない。
炭化珪素基板10は、第1不純物領域12と、ベース領域13と、エミッタ領域14と、コンタクト領域18と、p型エピタキシャル層29と、キャリア注入領域28とを主に有している。第1不純物領域12の厚みは、たとえば100μm程度である。第1不純物領域12は、たとえば窒素などのn型不純物を含み、n型を有する。第1不純物領域12が含む窒素などの不純物の濃度は、たとえば5×1014cm-3以上1×1015cm-3以下程度である。
5 炭化珪素エピタキシャル層
10 炭化珪素基板
10a 第1の主面
10b 第2の主面
11 炭化珪素単結晶基板
12 第1不純物領域
12a 第1領域
12b 第2領域
12c 第3領域
13 第2不純物領域(ベース領域)
13a 端部
14 第3不純物領域(ソース領域、エミッタ領域)
15 ゲート絶縁膜
16 ソース電極(エミッタ電極)
17 埋込領域
17a 第1埋込領域
17b 第2埋込領域
18 コンタクト領域
19 ソース配線(エミッタ配線)
20 ドレイン電極(コレクタ電極)
21 層間絶縁膜
22 バッファ層
24 保護膜
27 ゲート電極
28 キャリア注入領域
29 第2導電型エピタキシャル層(p型エピタキシャル層)
31,33,34 イオン注入マスク
32 スルー膜
35 エッチングマスク
40 半導体チップ
41 ガードリング
BT 底部
CH チャネル領域
CR 角部
SW 側部
SW1 第1側部(面)
SW2 第2側部
TR トレンチ
a1 オフ方向
a11 面内オフ方向
a21 方向
d1,d2 不純物濃度
Claims (13)
- 第1の主面と、前記第1の主面と反対側の第2の主面とを有する炭化珪素基板を形成する工程を備え、
前記炭化珪素基板を形成する工程は、
エピタキシャル成長により第1導電型を有する第1不純物領域を形成する工程と、
前記第1不純物領域に対してイオン注入を行うことより、前記第1導電型とは異なる第2導電型を有し、かつ周期的に配置された埋込領域を形成する工程と、
前記第1不純物領域と前記埋込領域とに接し、前記第2導電型を有し、かつ前記埋込領域よりも低い不純物濃度を有する第2不純物領域をエピタキシャル成長により形成する工程と、
前記第1導電型を有し、かつ前記第2不純物領域によって前記第1不純物領域から隔てられる第3不純物領域を形成する工程とを含み、さらに、
前記第2不純物領域と前記第3不純物領域とを貫通して前記第1不純物領域に至る側部と、前記側部と連接する底部とを有し、かつ前記埋込領域と同じ周期で配置されたトレンチを形成する工程と、
前記トレンチの前記側部において、前記第1不純物領域と、前記第2不純物領域と、前記第3不純物領域とに接するゲート絶縁膜を形成する工程を備えた、炭化珪素半導体装置の製造方法。 - 前記トレンチを形成する工程において、前記トレンチの前記側部が前記埋込領域から前記第1不純物領域によって離間されるように前記トレンチが形成され、
前記第1の主面と平行な方向における、前記トレンチの前記側部と、前記側部に対向する前記埋込領域の側面との距離は0.2μm以上5μm以下である、請求項1に記載の炭化珪素半導体装置の製造方法。 - 前記トレンチを形成する工程において、前記埋込領域が前記トレンチの前記底部に露出するように前記トレンチが形成される、請求項1に記載の炭化珪素半導体装置の製造方法。
- 前記第1の主面と平行な方向における、前記トレンチの前記底部の幅は、前記埋込領域の幅よりも大きい、請求項3に記載の炭化珪素半導体装置の製造方法。
- 前記第1の主面の法線方向における前記トレンチの深さは、0.3μm以上3μm以下であり、かつ前記第1の主面と平行な方向における前記トレンチの幅よりも小さい、請求項1〜請求項4のいずれか1項に記載の炭化珪素半導体装置の製造方法。
- 前記炭化珪素基板の前記第1の主面は、{0001}面からオフ方向にオフした面であり、
前記トレンチの前記側部は、前記オフ方向に垂直であり、かつ前記第1の主面の法線方向と垂直な面方位を有する面を含む、請求項1〜請求項5のいずれか1項に記載の炭化珪素半導体装置の製造方法。 - 前記埋込領域を形成する工程は、前記第1の主面の法線方向から、前記オフ方向に垂直であり、かつ前記第1の主面に平行な方向に対して2°以上10°以下傾いた方向にイオン注入が行われる、請求項1〜請求項6のいずれか1項に記載の炭化珪素半導体装置の製造方法。
- 前記トレンチを形成する工程において、前記第1の主面の法線方向から見て、前記トレンチの前記底部の角部が前記埋込領域に重なるように前記トレンチが形成される、請求項1〜請求項7のいずれか1項に記載の炭化珪素半導体装置の製造方法。
- 前記炭化珪素基板を形成する工程は、前記第2の主面側から前記第1不純物領域に対してイオン注入を行うことにより、前記第2導電型を有し、周期的に配置されたキャリア注入領域を形成する工程をさらに含む、請求項1〜請求項8のいずれか1項に記載の炭化珪素半導体装置の製造方法。
- 第1の主面と、前記第1の主面と反対側の第2の主面とを有する炭化珪素基板を備え、
前記炭化珪素基板は、第1導電型を有する第1不純物領域と、前記第1不純物領域と接し、かつ前記第1導電型とは異なる第2導電型を有する第2不純物領域と、前記第1導電型を有し、前記第2不純物領域によって前記第1不純物領域から隔てられた第3不純物領域と、前記第2導電型を有し、前記第2不純物領域よりも高い不純物濃度を有し、かつ前記第2の主面側の前記第2不純物領域の端部の一部から前記第2の主面に向かって延在する埋込領域と含み、
前記炭化珪素基板の前記第1の主面には、前記第1の主面と連接する側部と、前記側部と連接する底部とを有するトレンチが形成されており、さらに、
前記トレンチの前記側部において、前記第1不純物領域と、前記第2不純物領域と、前記第3不純物領域とに接し、かつ前記トレンチの前記底部において前記第1不純物領域と接するゲート絶縁膜とを備え、
前記埋込領域における、前記第2不純物領域の不純物濃度の4倍の不純物濃度を有する位置の中で前記第2不純物領域に最も近い位置から、前記第2不純物領域と前記埋込領域との境界部までの、前記第1の主面の法線方向に沿った距離は0.3μm以下である、炭化珪素半導体装置。 - 前記第1の主面の法線方向から見て、前記トレンチの前記底部の角部は、前記埋込領域と重なるように配置されている、請求項10に記載の炭化珪素半導体装置。
- 前記第1不純物領域は、前記第2不純物領域と接する第1領域と、前記第1領域と接し、前記第1領域から見て前記第2不純物領域と反対側に位置し、かつ前記第1領域よりも高い不純物濃度を有する第2領域と、前記第2領域と接し、前記第2領域から見て前記第1領域と反対側に位置し、かつ前記第2領域よりも低い不純物濃度を有する第3領域とを有する、請求項10または請求項11に記載の炭化珪素半導体装置。
- 前記炭化珪素基板は、前記第2導電型を有し、前記第2の主面を構成し、かつ前記第1不純物領域に接して設けられた第2導電型エピタキシャル層と、前記第2導電型を有し、前記第2導電型エピタキシャル層と前記第1不純物領域とに接し、前記第2導電型エピタキシャル層よりも高い不純物濃度を有し、かつ周期的に設けられたキャリア注入領域とをさらに含む、請求項10〜請求項12のいずれか1項に記載の炭化珪素半導体装置。
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