JP2015165222A5 - - Google Patents

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Publication number
JP2015165222A5
JP2015165222A5 JP2014040485A JP2014040485A JP2015165222A5 JP 2015165222 A5 JP2015165222 A5 JP 2015165222A5 JP 2014040485 A JP2014040485 A JP 2014040485A JP 2014040485 A JP2014040485 A JP 2014040485A JP 2015165222 A5 JP2015165222 A5 JP 2015165222A5
Authority
JP
Japan
Prior art keywords
substrate
pressure
reference pressure
diaphragm portion
surface side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2014040485A
Other languages
English (en)
Japanese (ja)
Other versions
JP2015165222A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2014040485A priority Critical patent/JP2015165222A/ja
Priority claimed from JP2014040485A external-priority patent/JP2015165222A/ja
Priority to DE112015001099.8T priority patent/DE112015001099T5/de
Priority to US15/111,494 priority patent/US9983081B2/en
Priority to PCT/JP2015/001017 priority patent/WO2015133101A1/ja
Publication of JP2015165222A publication Critical patent/JP2015165222A/ja
Publication of JP2015165222A5 publication Critical patent/JP2015165222A5/ja
Pending legal-status Critical Current

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JP2014040485A 2014-03-03 2014-03-03 圧力センサ Pending JP2015165222A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2014040485A JP2015165222A (ja) 2014-03-03 2014-03-03 圧力センサ
DE112015001099.8T DE112015001099T5 (de) 2014-03-03 2015-02-27 Drucksensor
US15/111,494 US9983081B2 (en) 2014-03-03 2015-02-27 Pressure sensor
PCT/JP2015/001017 WO2015133101A1 (ja) 2014-03-03 2015-02-27 圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014040485A JP2015165222A (ja) 2014-03-03 2014-03-03 圧力センサ

Publications (2)

Publication Number Publication Date
JP2015165222A JP2015165222A (ja) 2015-09-17
JP2015165222A5 true JP2015165222A5 (enExample) 2016-02-18

Family

ID=54054919

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014040485A Pending JP2015165222A (ja) 2014-03-03 2014-03-03 圧力センサ

Country Status (4)

Country Link
US (1) US9983081B2 (enExample)
JP (1) JP2015165222A (enExample)
DE (1) DE112015001099T5 (enExample)
WO (1) WO2015133101A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10190931B2 (en) * 2014-09-03 2019-01-29 Cometnetwork Co., Ltd. Differential pressure sensor
JP6385553B1 (ja) * 2017-12-13 2018-09-05 三菱電機株式会社 半導体圧力センサ
JP7268630B2 (ja) * 2020-03-30 2023-05-08 三菱電機株式会社 半導体圧力センサ及びその製造方法
JP7388568B2 (ja) * 2020-08-28 2023-11-29 株式会社村田製作所 センサ装置
JP7486457B2 (ja) * 2021-04-01 2024-05-17 三菱電機株式会社 半導体圧力センサ及び半導体圧力センサの製造方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4790192A (en) * 1987-09-24 1988-12-13 Rosemount Inc. Silicon side by side coplanar pressure sensors
JPH0447244A (ja) 1990-06-14 1992-02-17 Mitsubishi Electric Corp 半導体圧力センサ
JPH0536992A (ja) 1991-07-31 1993-02-12 Nippondenso Co Ltd 半導体圧力検出装置
JP4542397B2 (ja) 2004-09-02 2010-09-15 キヤノンアネルバ株式会社 静電容量型圧力センサの製造方法
JP2010151469A (ja) 2008-12-24 2010-07-08 Denso Corp センサチップおよびその製造方法並びに圧力センサ
US8393222B2 (en) * 2010-02-27 2013-03-12 Codman Neuro Sciences Sárl Apparatus and method for minimizing drift of a piezo-resistive pressure sensor due to progressive release of mechanical stress over time
JP5293655B2 (ja) 2010-03-16 2013-09-18 株式会社デンソー ウェハレベルパッケージ構造体、センサエレメント、センサデバイス、及びそれらの製造方法

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