JP2008261750A5 - - Google Patents

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Publication number
JP2008261750A5
JP2008261750A5 JP2007105146A JP2007105146A JP2008261750A5 JP 2008261750 A5 JP2008261750 A5 JP 2008261750A5 JP 2007105146 A JP2007105146 A JP 2007105146A JP 2007105146 A JP2007105146 A JP 2007105146A JP 2008261750 A5 JP2008261750 A5 JP 2008261750A5
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JP
Japan
Prior art keywords
pressure
main surface
receiving portion
sensor according
pressure receiving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2007105146A
Other languages
English (en)
Japanese (ja)
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JP2008261750A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007105146A priority Critical patent/JP2008261750A/ja
Priority claimed from JP2007105146A external-priority patent/JP2008261750A/ja
Publication of JP2008261750A publication Critical patent/JP2008261750A/ja
Publication of JP2008261750A5 publication Critical patent/JP2008261750A5/ja
Withdrawn legal-status Critical Current

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JP2007105146A 2007-04-12 2007-04-12 圧力センサおよび圧力センサ用ダイヤフラム Withdrawn JP2008261750A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007105146A JP2008261750A (ja) 2007-04-12 2007-04-12 圧力センサおよび圧力センサ用ダイヤフラム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007105146A JP2008261750A (ja) 2007-04-12 2007-04-12 圧力センサおよび圧力センサ用ダイヤフラム

Publications (2)

Publication Number Publication Date
JP2008261750A JP2008261750A (ja) 2008-10-30
JP2008261750A5 true JP2008261750A5 (enExample) 2010-05-20

Family

ID=39984333

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007105146A Withdrawn JP2008261750A (ja) 2007-04-12 2007-04-12 圧力センサおよび圧力センサ用ダイヤフラム

Country Status (1)

Country Link
JP (1) JP2008261750A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010186824A (ja) * 2009-02-10 2010-08-26 Epson Toyocom Corp 基板の加工方法、部品の製造方法、圧力センサ用ダイヤフラム板及び圧力センサの製造方法、並びに圧力センサ
US9146164B2 (en) * 2013-03-07 2015-09-29 Sensata Technologies, Inc. Pressure transducer substrate with self alignment feature
JP6555214B2 (ja) 2016-08-25 2019-08-07 株式会社デンソー 圧力センサ

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63281033A (ja) * 1987-05-13 1988-11-17 Daiwa Shinku Kogyosho:Kk 圧力検出装置
JPH0298174A (ja) * 1988-10-04 1990-04-10 Fujikura Ltd 半導体圧力センサ
JP2573309Y2 (ja) * 1992-06-16 1998-05-28 沖電気工業株式会社 半導体圧力センサ
JP2004132913A (ja) * 2002-10-11 2004-04-30 Toyo Commun Equip Co Ltd 感圧素子、及びこれを用いた圧力センサ

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