JP2015159112A5 - - Google Patents
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- Publication number
- JP2015159112A5 JP2015159112A5 JP2015033311A JP2015033311A JP2015159112A5 JP 2015159112 A5 JP2015159112 A5 JP 2015159112A5 JP 2015033311 A JP2015033311 A JP 2015033311A JP 2015033311 A JP2015033311 A JP 2015033311A JP 2015159112 A5 JP2015159112 A5 JP 2015159112A5
- Authority
- JP
- Japan
- Prior art keywords
- detector
- sample
- vector field
- charged particle
- scanning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 claims 14
- 239000002245 particle Substances 0.000 claims 11
- 230000005540 biological transmission Effects 0.000 claims 3
- 238000001514 detection method Methods 0.000 claims 2
- 230000005484 gravity Effects 0.000 claims 2
- 230000010354 integration Effects 0.000 claims 2
- 230000000295 complement effect Effects 0.000 claims 1
- YPHMISFOHDHNIV-FSZOTQKASA-N cycloheximide Chemical compound C1[C@@H](C)C[C@H](C)C(=O)[C@@H]1[C@H](O)CC1CC(=O)NC(=O)C1 YPHMISFOHDHNIV-FSZOTQKASA-N 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 claims 1
- 238000001914 filtration Methods 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP14156356.9A EP2911180A1 (en) | 2014-02-24 | 2014-02-24 | Method of examining a sample in a charged-particle microscope |
| EP14156356.9 | 2014-02-24 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015159112A JP2015159112A (ja) | 2015-09-03 |
| JP2015159112A5 true JP2015159112A5 (enExample) | 2016-11-24 |
| JP6051245B2 JP6051245B2 (ja) | 2016-12-27 |
Family
ID=50189504
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015033311A Active JP6051245B2 (ja) | 2014-02-24 | 2015-02-23 | 荷電粒子顕微鏡内で試料を検査する方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US9312098B2 (enExample) |
| EP (2) | EP2911180A1 (enExample) |
| JP (1) | JP6051245B2 (enExample) |
| CN (1) | CN104865276B (enExample) |
Families Citing this family (34)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ATE466349T1 (de) | 1998-08-14 | 2010-05-15 | 3M Innovative Properties Co | Rfid-leser |
| EP3070732A1 (en) * | 2015-03-18 | 2016-09-21 | Fei Company | Apparatus and method of performing spectroscopy in a transmission charged-particle microscope |
| US10170274B2 (en) * | 2015-03-18 | 2019-01-01 | Battelle Memorial Institute | TEM phase contrast imaging with image plane phase grating |
| US10109453B2 (en) | 2015-03-18 | 2018-10-23 | Battelle Memorial Institute | Electron beam masks for compressive sensors |
| EP3082150B1 (en) | 2015-04-15 | 2017-07-19 | FEI Company | Method and scanning transmission type charged-particle microscope for performing tomographic imaging |
| CN104865282B (zh) * | 2015-04-30 | 2017-07-04 | 安泰科技股份有限公司 | 一种表征非晶合金微观结构的方法 |
| JP6425096B2 (ja) * | 2015-05-14 | 2018-11-21 | 国立大学法人 東京大学 | 電子顕微鏡および測定方法 |
| EP3106862B1 (en) | 2015-06-18 | 2019-01-16 | FEI Company | Method of ptychographic imaging |
| FR3049348B1 (fr) * | 2016-03-23 | 2023-08-11 | Commissariat Energie Atomique | Procede de caracterisation d’une particule dans un echantillon |
| US10580614B2 (en) | 2016-04-29 | 2020-03-03 | Battelle Memorial Institute | Compressive scanning spectroscopy |
| JP6702807B2 (ja) * | 2016-06-14 | 2020-06-03 | 日本電子株式会社 | 電子顕微鏡および画像取得方法 |
| US10685759B2 (en) * | 2017-01-16 | 2020-06-16 | Fei Company | Statistical analysis in X-ray imaging |
| DE102017106984B4 (de) * | 2017-03-31 | 2022-02-10 | Carl Zeiss Microscopy Gmbh | Lichtmikroskop und Verfahren zum Betreiben eines Lichtmikroskops mit optimierter Beleuchtungsgeometrie |
| US10295677B2 (en) | 2017-05-08 | 2019-05-21 | Battelle Memorial Institute | Systems and methods for data storage and retrieval |
| JP6962757B2 (ja) * | 2017-09-15 | 2021-11-05 | 日本電子株式会社 | 測定方法および電子顕微鏡 |
| US10446366B1 (en) * | 2018-02-13 | 2019-10-15 | Fei Company | Imaging technique in scanning transmission charged particle microscopy |
| EP3531439B1 (en) * | 2018-02-22 | 2020-06-24 | FEI Company | Intelligent pre-scan in scanning transmission charged particle microscopy |
| EP3534391B1 (en) * | 2018-03-01 | 2020-11-04 | FEI Company | Discriminative imaging technique in scanning transmission charged particle microscopy |
| CN108680344B (zh) * | 2018-05-23 | 2020-04-03 | 中国科学技术大学 | 一种含百纳米尺寸通孔的光学高分辨率测试靶的制造方法 |
| IL310722B2 (en) * | 2018-07-13 | 2025-07-01 | Asml Netherlands Bv | SEM image enhancement systems and methods |
| JP7193694B2 (ja) * | 2018-07-26 | 2022-12-21 | 国立研究開発法人理化学研究所 | 電子顕微鏡およびそれを用いた試料観察方法 |
| DE102018007455B4 (de) * | 2018-09-21 | 2020-07-09 | Carl Zeiss Multisem Gmbh | Verfahren zum Detektorabgleich bei der Abbildung von Objekten mittels eines Mehrstrahl-Teilchenmikroskops, System sowie Computerprogrammprodukt |
| CN109239915A (zh) * | 2018-09-29 | 2019-01-18 | 南京理工大学 | 一种产生汉堡包型聚焦光场的方法 |
| DE102019101155A1 (de) * | 2019-01-17 | 2020-07-23 | Carl Zeiss Microscopy Gmbh | Verfahren zum Betreiben eines Teilchenstrahlsystems, Teilchenstrahlsystem und Computerprogrammprodukt |
| JP7008650B2 (ja) * | 2019-02-01 | 2022-01-25 | 日本電子株式会社 | 荷電粒子線システム及び走査電子顕微鏡を用いた試料測定方法 |
| US10607811B1 (en) | 2019-02-28 | 2020-03-31 | Fei Company | Multi-beam scanning transmission charged particle microscope |
| EP3719831A1 (en) | 2019-04-05 | 2020-10-07 | ASML Netherlands B.V. | Systems and methods for image enhancement for a multi-beam charged-particle inspection system |
| US11460419B2 (en) | 2020-03-30 | 2022-10-04 | Fei Company | Electron diffraction holography |
| US11404241B2 (en) | 2020-03-30 | 2022-08-02 | Fei Company | Simultaneous TEM and STEM microscope |
| CN116438622A (zh) * | 2020-07-09 | 2023-07-14 | 牛津仪器纳米技术工具有限公司 | 使用多个检测器的材料分析 |
| US11211223B1 (en) * | 2020-08-25 | 2021-12-28 | Fei Company | System and method for simultaneous phase contrast imaging and electron energy-loss spectroscopy |
| EP4024037A1 (en) * | 2020-12-30 | 2022-07-06 | FEI Company | Parallel image segmentation and spectral acquisition |
| JP7642524B2 (ja) * | 2021-12-24 | 2025-03-10 | 株式会社日立製作所 | 干渉走査透過型電子顕微鏡 |
| JP2025507253A (ja) | 2022-02-09 | 2025-03-18 | イエダ リサーチ アンド ディベロップメント カンパニー リミテッド | 走査データからのサンプルの構造データの抽出のためのシステムおよび方法 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL7804037A (nl) * | 1978-04-17 | 1979-10-19 | Philips Nv | Elektronenmikroskoop met ongedifferentieerde fase- beeldvorming. |
| JPH11307029A (ja) * | 1998-04-24 | 1999-11-05 | Hitachi Ltd | 透過型電子顕微鏡 |
| US20070194225A1 (en) * | 2005-10-07 | 2007-08-23 | Zorn Miguel D | Coherent electron junction scanning probe interference microscope, nanomanipulator and spectrometer with assembler and DNA sequencing applications |
| EP2063450A1 (en) * | 2007-11-21 | 2009-05-27 | FEI Company | Method for obtaining a scanning transmission image of a sample in a particle-optical apparatus |
| EP2584362A1 (en) * | 2011-10-18 | 2013-04-24 | FEI Company | Scanning method for scanning a sample with a probe |
| EP2624278B1 (en) * | 2012-01-31 | 2014-07-30 | Hitachi High-Technologies Corporation | Phase plate |
-
2014
- 2014-02-24 EP EP14156356.9A patent/EP2911180A1/en not_active Withdrawn
-
2015
- 2015-02-23 US US14/629,387 patent/US9312098B2/en active Active
- 2015-02-23 EP EP15156053.9A patent/EP2866245B1/en active Active
- 2015-02-23 JP JP2015033311A patent/JP6051245B2/ja active Active
- 2015-02-25 CN CN201510087134.6A patent/CN104865276B/zh active Active
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