JP2015149382A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP2015149382A JP2015149382A JP2014021142A JP2014021142A JP2015149382A JP 2015149382 A JP2015149382 A JP 2015149382A JP 2014021142 A JP2014021142 A JP 2014021142A JP 2014021142 A JP2014021142 A JP 2014021142A JP 2015149382 A JP2015149382 A JP 2015149382A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 136
- 230000005533 two-dimensional electron gas Effects 0.000 claims description 10
- 230000007257 malfunction Effects 0.000 abstract description 8
- 239000010410 layer Substances 0.000 description 72
- 230000003071 parasitic effect Effects 0.000 description 26
- 239000003990 capacitor Substances 0.000 description 16
- 239000000463 material Substances 0.000 description 15
- 230000004048 modification Effects 0.000 description 6
- 238000012986 modification Methods 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 239000010936 titanium Substances 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910002601 GaN Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- -1 nitride compound Chemical class 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/0843—Source or drain regions of field-effect devices
- H01L29/0847—Source or drain regions of field-effect devices of field-effect transistors with insulated gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
- H01L29/41725—Source or drain electrodes for field effect devices
- H01L29/41775—Source or drain electrodes for field effect devices characterised by the proximity or the relative position of the source or drain electrode and the gate electrode, e.g. the source or drain electrode separated from the gate electrode by side-walls or spreading around or above the gate electrode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
- H01L29/7786—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/2003—Nitride compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42356—Disposition, e.g. buried gate electrode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42356—Disposition, e.g. buried gate electrode
- H01L29/4236—Disposition, e.g. buried gate electrode within a trench, e.g. trench gate electrode, groove gate electrode
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Junction Field-Effect Transistors (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Abstract
Description
10:半導体積層体
12:電子走行層
14:電子供給層
16:ソース領域
22:ドレイン電極
24:ゲート絶縁膜
25:絶縁ゲート部
26:ゲート電極
28:ソース電極
Claims (6)
- 半導体積層体と、
前記半導体積層体上に設けられているドレイン電極と、
前記半導体積層体上に設けられており、前記ドレイン電極から離れて配置されているソース電極と、
前記半導体積層体上に設けられており、前記ドレイン電極と前記ソース電極の間に配置されている絶縁ゲート部と、を備えており、
前記半導体積層体は、
第1半導体層と、
前記第1半導体層上に設けられており、前記第1半導体層とは異なるバンドギャップを有する第2半導体層と、を有しており、
前記ドレイン電極と前記絶縁ゲート部の間において、前記第1半導体層と前記第2半導体層のヘテロ接合面に2次元電子ガス層が発生するように構成されており、
前記絶縁ゲート部の一部が、前記ソース電極と同電位となる部分に対向するように構成されている半導体装置。 - 前記半導体積層体は、前記ソース電極に電気的に接続されているn型のソース領域をさらに有しており、
前記絶縁ゲート部の一部が、前記ソース領域に対向する請求項1に記載の半導体装置。 - 前記絶縁ゲート部は、前記第2半導体層を貫通して前記第1半導体層に達するリセス型である請求項2に記載の半導体装置。
- 前記ソース領域は、リセス型の前記絶縁ゲート部の側面に接する請求項3に記載の半導体装置。
- 前記絶縁ゲート部の一部が、前記ソース電極上に延びている請求項1に記載の半導体装置。
- 前記絶縁ゲート部は、前記第2半導体層を貫通して前記第1半導体層に達するリセス型である請求項5に記載の半導体装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014021142A JP6007927B2 (ja) | 2014-02-06 | 2014-02-06 | 半導体装置 |
US14/601,776 US9337267B2 (en) | 2014-02-06 | 2015-01-21 | Semiconductor device |
CN201510055472.1A CN104835834B (zh) | 2014-02-06 | 2015-02-03 | 半导体器件 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014021142A JP6007927B2 (ja) | 2014-02-06 | 2014-02-06 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015149382A true JP2015149382A (ja) | 2015-08-20 |
JP6007927B2 JP6007927B2 (ja) | 2016-10-19 |
Family
ID=53755527
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014021142A Expired - Fee Related JP6007927B2 (ja) | 2014-02-06 | 2014-02-06 | 半導体装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US9337267B2 (ja) |
JP (1) | JP6007927B2 (ja) |
CN (1) | CN104835834B (ja) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008147593A (ja) * | 2006-12-13 | 2008-06-26 | Toyota Central R&D Labs Inc | Mis構造を内蔵するhemt |
JP2010045073A (ja) * | 2008-08-08 | 2010-02-25 | Furukawa Electric Co Ltd:The | 電界効果トランジスタおよび電界効果トランジスタの製造方法 |
JP2012231108A (ja) * | 2011-04-25 | 2012-11-22 | Samsung Electro-Mechanics Co Ltd | 窒化物半導体素子及びその製造方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5055737B2 (ja) | 2005-09-30 | 2012-10-24 | サンケン電気株式会社 | 2次元キャリアガス層を有する電界効果トランジスタ |
US8519438B2 (en) * | 2008-04-23 | 2013-08-27 | Transphorm Inc. | Enhancement mode III-N HEMTs |
JP2010219117A (ja) | 2009-03-13 | 2010-09-30 | Toshiba Corp | 半導体装置 |
JP5857415B2 (ja) * | 2011-02-24 | 2016-02-10 | 富士通株式会社 | 半導体装置の製造方法 |
-
2014
- 2014-02-06 JP JP2014021142A patent/JP6007927B2/ja not_active Expired - Fee Related
-
2015
- 2015-01-21 US US14/601,776 patent/US9337267B2/en active Active
- 2015-02-03 CN CN201510055472.1A patent/CN104835834B/zh not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008147593A (ja) * | 2006-12-13 | 2008-06-26 | Toyota Central R&D Labs Inc | Mis構造を内蔵するhemt |
JP2010045073A (ja) * | 2008-08-08 | 2010-02-25 | Furukawa Electric Co Ltd:The | 電界効果トランジスタおよび電界効果トランジスタの製造方法 |
JP2012231108A (ja) * | 2011-04-25 | 2012-11-22 | Samsung Electro-Mechanics Co Ltd | 窒化物半導体素子及びその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
CN104835834A (zh) | 2015-08-12 |
JP6007927B2 (ja) | 2016-10-19 |
CN104835834B (zh) | 2018-02-09 |
US20150221759A1 (en) | 2015-08-06 |
US9337267B2 (en) | 2016-05-10 |
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