JP2015123443A - Pattern forming method, pattern printing method, pattern forming system, and pattern printing system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a pattern forming technology which can form a desired pattern layer with a small amount of coating liquid, and provide a pattern printing technology which can print a pattern at low cost by using the pattern forming technology.SOLUTION: A pattern forming method includes: a coating process of forming a primary pattern layer by discharging a coating liquid from a nozzle relatively moving with respect to a surface of a flat-plate-like carrier onto a surface of the carrier; a first transfer process of transferring a part of the primary pattern layer to a projected part by mutually adhering the carrier and a plate closely in a state that a transfer surface of the plate with the projected part formed is faced to the surface of the carrier with the primary pattern layer formed; a first separating process of separating the mutually adhered carrier and plate and forming a secondary pattern layer on one of the carrier and plate.

Description

  The present invention forms a desired pattern by peeling the plate and the carrier after the transfer surface of the plate on which the convex portions are formed and the surface of the carrier such as a blanket to which the coating liquid is applied. And a pattern printing technique for printing a pattern on the surface of a substrate using the pattern forming technique.

  As an example of the pattern forming technique and the pattern printing technique described above, for example, Patent Document 1 describes an invention in which a metal thin film having a desired pattern is printed on a substrate. In the invention described in Patent Document 1, after applying ink on a flat plate blanket, the flat plate blanket and a plate provided with convex portions in a predetermined pattern are brought into contact with each other. As a result, a portion of the ink on the flat blanket that corresponds to the convex portion can be selectively transferred onto the plate (first transfer step). And the flat plate blanket and plate | plate which were mutually contacted are isolate | separated, and both are peeled (1st peeling process). As a result, the ink remains on the flat blanket in the region that has not been transferred by the plate, and a reverse pattern is obtained by inverting the pattern of the convex portion. Thus, a desired pattern is formed on the flat blanket.

  Further, the flat blanket carrying the pattern and the substrate are brought into contact with each other so that the ink remaining on the flat blanket, that is, the patterned ink layer, is transferred onto the substrate (second transfer step). . Subsequently, the flat plate blanket and the substrate that are in contact with each other are separated (second peeling step). Thereby, the ink layer on the flat blanket is printed on the substrate.

Japanese Unexamined Patent Publication No. 2011-216917

  In the invention described in Patent Document 1 described above, ink is applied to the entire surface of the flat blanket. For this reason, by performing the first transfer step and the first peeling step, the ink layer applied on the entire surface of the flat blanket is patterned and used for printing. On the other hand, it is difficult to reuse the ink transferred to the plate, and it is currently removed from the plate and discarded. As described above, the prior art does not always use ink efficiently, and a technique for suppressing ink consumption is desired. In particular, when manufacturing electronic devices such as semiconductor devices, liquid crystal displays, and organic EL (electroluminescence) displays by performing the above transfer / peeling process, a relatively expensive coating solution such as ink is often used. Liquid consumption reduction technology is one of the important issues.

  This invention is made in view of the said subject, The pattern formation technique which can form a desired pattern layer with few coating liquids, and the pattern which can print a pattern at low cost using the said pattern formation technique The purpose is to provide printing technology.

  A first aspect of the present invention is a pattern forming method, in which a primary pattern layer is formed by discharging a coating liquid toward a surface of a carrier from a nozzle that moves relative to the surface of the flat carrier. With the coating step and the transfer surface of the plate on which the convex portions are formed facing the surface of the carrier on which the primary pattern layer is formed, the carrier and the plate are brought into close contact with each other to project part of the primary pattern layer. And a first peeling step of peeling the carrier and the plate in close contact with each other to form a secondary pattern layer on one of the carrier and the plate. .

  A second aspect of the present invention is a pattern printing method, comprising: a pattern forming step of forming a secondary pattern layer by the pattern forming method; and a printing step of transferring and forming the secondary pattern layer on a substrate. It is characterized by that.

  According to a third aspect of the present invention, there is provided a pattern formation system, wherein a primary pattern layer is formed on a surface of a carrier by moving a nozzle for discharging a coating liquid relative to the surface of the flat carrier. A part of the primary pattern layer is formed by bringing the carrier and the plate into close contact with each other in a state where the transfer surface of the plate on which the convex portions are formed is opposed to the surface of the carrier on which the primary pattern layer is formed. And a peeling means for peeling the carrier and the plate in close contact with each other to form a secondary pattern layer on one of the carrier and the plate.

  Furthermore, a fourth aspect of the present invention is a pattern printing system, comprising pattern forming means having the same configuration as the pattern forming system, and transferring a secondary pattern layer formed by the pattern forming means onto a printed surface of the substrate. And printing a secondary pattern layer.

  When patterning a carrier coated with a coating solution using a plate, the following method is generally used. That is, after the transfer surface of the plate is brought into close contact with the surface of the carrier on which the coating liquid has been applied and a part of the coating liquid is transferred to the convex portion of the plate, the carrier and the plate are peeled to form the pattern layer. . Therefore, when the pattern layer is formed by the coating liquid remaining on the surface of the carrier, the coating liquid transferred to the plate becomes unnecessary and is discarded. Conversely, when the pattern layer is formed by the coating liquid transferred to the plate, the coating liquid remaining on the carrier becomes unnecessary and is discarded. As described above, there is a coating solution that must be discarded in any case, but the amount of the coating solution to be discarded in the present invention is smaller than that of the prior art. That is, in the prior art, the coating liquid is applied to the entire surface of the carrier, and a part of the coating liquid is transferred to the convex portion of the plate to form the secondary pattern layer. I had to. On the other hand, in the present invention, the primary pattern layer is formed by applying the coating liquid to only a part of the surface of the carrier, and the transfer process is performed within the range of the primary pattern layer. Therefore, the discard amount of the coating liquid is reduced as compared with the prior art.

  As described above, according to the present invention, the secondary pattern layer is formed by performing the transfer process and the peeling process using the plate having the convex portions on the primary pattern layer formed on the surface of the carrier. Therefore, the discard amount of the coating liquid can be suppressed, that is, a desired secondary pattern layer can be formed with a small amount of the coating liquid. Moreover, a pattern can be printed at low cost by using the pattern formation technique.

It is a figure which shows typically the structure and operation | movement of a pattern printing system equipped with 1st Embodiment of the pattern formation system concerning this invention. It is the top view which looked at an example of the coating device employable with a pattern printing system from the upper part. It is the front view which looked at the coating device of Drawing 2 from the front. It is a figure which shows the structure of an ink supply part. It is a figure which shows schematic structure of an example of the transcription | transfer / peeling apparatus employable with the pattern printing system of FIG. It is a figure which shows the principal part of the transcription | transfer / peeling apparatus of FIG. It is an enlarged view which shows the structure of a hand tip in more detail. It is the figure which showed typically the positional relationship of each part of an apparatus in each step of a transfer process. It is the figure which showed typically the positional relationship of each part of an apparatus in each step of a transfer process. It is the figure which showed typically the positional relationship of each part of an apparatus in each step of a transfer process. It is a figure which shows typically the patterning process by the transcription | transfer / peeling apparatus shown in FIG. It is a graph which shows the film thickness characteristic of the striped pattern apply | coated to the surface of a blanket with the coating device of FIG. It is a figure which shows typically the structure and operation | movement of a pattern printing system equipped with 2nd Embodiment of the pattern formation system concerning this invention. It is a figure which shows typically the patterning process in 2nd Embodiment.

A. Overall Configuration of Pattern Printing System FIG. 1 is a diagram schematically showing the configuration and operation of a pattern printing system equipped with a first embodiment of a pattern forming system according to the present invention. The pattern printing system 1 includes a coating device 100, a transfer / peeling device 200, and a heating device 900, and executes a process for manufacturing a substrate for an organic EL display. Further, in the pattern printing system 1, although not shown, the blanket BL, the plate PP, and the substrate SB are transported between the various stockers that respectively accommodate the blanket BL, the plate PP, and the substrate SB, and each stocker and the apparatus. A transfer robot is provided. In the pattern printing system 1, the blanket BL, the plate PP, and the substrate SB are conveyed to each apparatus as indicated by the arrows in the figure, while the coating process (S1), the first transfer process (S2), and the first peeling process. (S3), a second transfer step (S4), a second peeling step (S5), and a baking step (S6) are performed. Thereby, a desired pattern layer composed of the coating liquid is printed on the surface of the substrate SB. Note that FIG. 1 is a schematic diagram for helping understanding of each process, and the number, dimensions, and intervals of each part are exaggerated, and these do not represent the actual number or dimensions. Hereinafter, after describing the configuration and schematic operation of the coating apparatus 100 and the transfer / peeling apparatus 200, which are the main components of the pattern printing system 1, each process executed in the pattern printing system 1 will be described in detail.

B. Coating device 100
FIG. 2 is a plan view of an example of a coating apparatus that can be used in the pattern printing system, and FIG. 3 is a front view of the coating apparatus of FIG. 2 viewed from the front. Here, the XY plane represents a horizontal plane and the Z axis represents a vertical axis. More specifically, the (+ Z) direction represents a vertically upward direction. The coating apparatus 100 is for coating a coating solution on the surface of a rectangular flat plate blanket BL. Here, an ink containing a volatile solvent (in this embodiment, an aromatic organic solvent) and an organic EL material as a light-emitting material is applied as a coating liquid.

  The coating apparatus 100 mainly includes a stage 110 that holds the blanket BL horizontally, a stage moving mechanism 120 that moves the stage 110, and a coating head 130 that applies ink to the upper surface of the blanket BL held by the stage 110. And ink supply units 132R, 132G, and 132B for supplying ink to the coating head 130, and a head moving mechanism 150 that moves the coating head 130. In addition, the coating apparatus 100 includes a control unit (not shown) that controls each part of the apparatus.

  The stage 110 has a flat outer shape with a plane size larger than the plane size of the blanket BL. The stage 110 can hold and hold the blanket BL in a horizontal posture on its upper surface. A plurality of suction holes (not shown) are formed on the upper surface of the stage 110. These suction holes are connected to a vacuum pump (not shown) or the like, and the blanket BL is adsorbed and firmly held on the upper surface of the stage 110 by the operation of the vacuum pump. Furthermore, a heating mechanism (not shown) using a heater is disposed inside the stage 110, and the blanket BL placed on the stage 110 can be heated to a predetermined temperature.

  The stage moving mechanism 120 horizontally moves the stage 110 in a predetermined direction (that is, the Y direction in FIG. 2) parallel to the main surface of the blanket BL. The stage moving mechanism 120 includes a rotation mechanism 124 that rotates the stage 110 with a motor, a support plate 123 that rotatably supports the stage 110, a base 121 that horizontally supports the support plate 123, and a base 121 that moves in the Y direction. And a Y scanning mechanism 122 that is moved to The rotation mechanism 124 and the Y scanning mechanism 122 move the stage 110 in accordance with a movement instruction from the control unit.

  The Y scanning mechanism 122 includes a linear motor 1221 attached to the lower surface of the base 121 that supports the support plate 123 from below, and a pair of guide rails 1222 extending in the Y direction. For this reason, when the linear motor 1221 is actuated in accordance with a movement command from the control unit, the base 121 and the stage 110 move in the Y direction along the guide rail 1222.

  The coating head 130 includes a plurality of nozzles 131. In this embodiment, three nozzles 131 are provided to eject inks of three different colors, but the number of nozzles is not limited to this, and can be set as appropriate according to the ink to be applied. It is.

  The coating head 130 continuously ejects ink containing an organic EL material toward the surface of the blanket BL held on the stage 110. That is, the coating head 130 is a discharge unit for discharging ink from the nozzle 131 in a liquid column state. The plurality of nozzles 131 are arranged substantially linearly apart from each other in a direction parallel to the surface of the blanket BL and perpendicular to the Y direction (that is, in the X direction perpendicular to the Y direction in FIG. 2). In this embodiment, the distance between the two adjacent nozzles 131 in the Y direction is the coating region CR of the blanket BL (indicated by a broken line in FIG. 2). The line pattern to be applied is adjusted to be equal to three times the pitch in the Y direction.

  FIG. 4 is a diagram illustrating the configuration of the ink supply unit. The ink supply unit is a mechanism for supplying ink containing an organic EL material to the coating head 130 and is provided independently for each color. That is, ink supply units 132R, 132G, and 132B are provided corresponding to the red ink, the green ink, and the blue ink, respectively. However, the ink supply units 132R, 132G, and 132B have the same configuration except that the ink stored in the container 1321 is different. In other words, each ink supply section 132 is provided with a container 1321 for storing ink that functions as an ink storage section, and one end of a liquid supply pipe 1322 is connected to the container 1321 as shown in FIG. Yes. The liquid supply pipe 1322 is provided with a pump 1323, a mass flow controller 1324, a pressure gauge 1325, and a filter 1326 in order from the container 1321 side (toward the other end). The end of the liquid supply pipe 1322 opposite to the container 1321 is connected to the corresponding color nozzle 131.

  Returning to FIG. 2, the description will be continued. The head moving mechanism 150 is disposed in the vicinity of both ends of the pair of guide portions 151, the slider 152 that is slidable with respect to the guide portions 151, and the pair of guide portions 151, and faces the Z-axis direction. A pair of pulleys 153 that can rotate around an axis and an endless synchronous belt 154 wound around the pulley 153 are provided. Between the two guide portions 151 shown in FIG. 2, two pulleys 153 on which an annular synchronous belt 154 is hung are provided in the vicinity of both ends of the guide portion 151. The slider 152 is fixed to the synchronization belt 154, and the coating head 130 is attached to the (−Y) side slider 152. For this reason, in the head moving mechanism 150, when a motor (not shown) connected to one pulley 153 operates upon receiving a movement command from the control unit, the synchronous belt 154 rotates clockwise or counterclockwise, The head 130 moves at high speed and smoothly in the (−X) direction or the (+ X) direction.

  Each time the movement of the coating head 130 in the X direction is completed, the stage 110 that holds the blanket BL is moved in the Y direction, thereby applying ink to the coating region CR on the surface of the blanket BL. When the coating head 130 is scanned in the X direction, acceleration or deceleration is completed in the vicinity of the liquid receiving unit 112. Above the blanket BL, the coating head 130 is, for example, at a constant speed of about 3 to 5 m per second. Moving. The liquid receiving unit 112 described here is a mechanism for receiving ink ejected from the nozzle 131 and is disposed on both sides of the stage 110 in the reciprocating direction (X direction) of the coating head 130. The reason for providing these is to continuously eject ink from the coating head 130 even while the blanket BL is not being coated (while waiting), and since a porous member is provided in the coating head 130, coating is performed. The ink ejected from the head 130 is prevented from splashing around.

  The coating apparatus 100 includes a pair of left and right imaging units 111 for imaging and detecting an alignment mark (not shown) formed on the blanket BL. Each of the pair of imaging units 111 is provided with a CCD camera. Then, based on the position of the alignment mark detected by the imaging unit 111, the control unit performs alignment of the blanket BL.

  The control unit controls the operation of each unit included in the coating apparatus 100 while executing various arithmetic processes. For example, a CPU (Central Processing Unit) that performs various arithmetic processes, a storage unit that stores a boot program, and the like The computer includes a display that performs various displays, a keyboard, an input unit such as a mouse, a data communication unit having a data communication function via a LAN, and the like. When the computer operates according to a program installed in the computer, the computer controls each part of the coating apparatus 100 to apply ink to the surface of the blanket BL in a pattern designated by the operator as described below. Then, the primary pattern layer L1 (see FIGS. 11 and 14 described later) is formed.

  When the unused blanket BL is conveyed to the coating apparatus 100 and held on the stage 110 as indicated by an arrow AR1 in FIG. 1, the imaging unit 111 images the alignment mark and the stage based on the output from the imaging unit 111 The moving mechanism 120 is driven, and the blanket BL moves and rotates to move to the application start position. Then, ink discharge is started from the plurality of nozzles 131, and the head moving mechanism 150 is further controlled to move the coating head 130 in the X direction (ie, from the (−X) side to the (+ X) side in FIG. 2). Main scanning) starts. Accordingly, the coating head 130 continuously discharges in the X direction at a constant speed while ejecting ink from each of the plurality of nozzles 131 toward the main surface of the blanket BL continuously (without interruption) at a constant flow rate. And the ink is applied in stripes to the application region CR of the blanket BL.

  Then, the coating head 130 moves to above the liquid receiving unit 112 that is the standby position, whereby a stripe pattern is formed with ink. In addition, the entire surface including the (−X) side and (+ X) side non-application regions (and the (+ Y) side and (−Y) side non-application regions) as required) of the application region CR in FIG. It may be applied.

When the coating head 130 moves to the standby position, the stage moving mechanism 120 is driven, and the blanket BL moves with the stage 110 in the (+ Y) direction (that is, the Y direction) by a distance equal to three times the pitch. At this time, in the coating head 130, ink is continuously discharged from the plurality of nozzles 131 toward the liquid receiving unit 112.

  When the movement of the blanket BL in the Y direction ends, it is confirmed by the control unit whether or not the blanket BL and the stage 110 have moved to the application end position. If the application head 130 has not moved to the application end position, the application head 130 moves in the (−X) direction (that is, the X direction) from the (+ X) side of the blanket BL while ejecting ink from the plurality of nozzles 131. Thus, ink is applied to the linear region on the blanket BL. Thereafter, it is confirmed whether or not the blanket BL has moved in the Y direction to the application end position.

  In the coating apparatus 100, each time the movement of the coating head 130 in the X direction is completed until the stage 110 and the blanket BL are positioned at the coating end position, the blanket BL is relatively moved in the Y direction (that is, the coating head). 130 is repeated in the X direction and the step movement of the blanket BL to the (+ Y) side is repeated), whereby ink is applied in stripes in the application region CR of the blanket BL to form the line pattern PT1. . In this manner, the nozzle 131 and the blanket BL move relative to each other while the ink is continuously ejected from the nozzle 131, so that the primary pattern layer L1 including the striped pattern PT1 is formed on the surface of the blanket BL.

  Then, when the blanket BL moves to the application end position, the ejection of ink from the plurality of nozzles 131 is stopped, and the application of ink to the blanket BL by the application device 100 ends. The blanket BL that has been applied by the coating apparatus 100 is conveyed to the transfer apparatus 200 as indicated by an arrow AR2 in FIG.

C. Transfer / peeling device 200
FIG. 5 is a diagram showing a schematic configuration of an example of a transfer / peeling apparatus that can be employed in the pattern printing system of FIG. FIG. 6 is a view showing a main part of the transfer / peeling apparatus of FIG. In order to uniformly indicate directions in the following drawings, XYZ orthogonal coordinate axes are set as shown in FIG. Here, the XY plane represents a horizontal plane and the Z axis represents a vertical axis. More specifically, the (+ Z) direction represents a vertically upward direction.

  This transfer / peeling device 200 is a device for bringing two plate-like bodies carried in a separated state into close contact with each other and then separating them again, and a primary pattern layer carried on the surface of the blanket BL. A patterning process for patterning L1 with the plate PP to form a secondary pattern layer having a reverse pattern of the convex pattern formed on the plate PP and a printing process for printing the secondary pattern layer on the substrate SB are executed. Details of the patterning process and the printing process will be described later.

  This transfer / peeling device 200 is mounted on a base portion 11 attached to a housing to hold a blanket BL, a transfer roller block 5 attached to the base portion 11, and an upper portion thereof. And an upper holding block 7 that holds the plate PP and the substrate SB (hereinafter collectively referred to as “plate PP or the like”). In FIG. 5, the casing is not shown to show the internal structure of the apparatus. Although not shown, in addition to these blocks, the transfer / peeling apparatus 200 includes a control block for controlling the blocks.

  The lower holding block 3 has a structure in which a plurality of lifting hand units are arranged on the alignment stage 30 in the X direction and the Y direction. More specifically, a plurality (six in this example) of lifting / lowering hand units 310, 320, 330, 340, 350, 360 are arranged in the Y direction along the (+ X) side end of the alignment stage 30. ing. The same number of lifting hand units 315, 325, 335, 345, 355, 365 are arranged in the Y direction along the (−X) side end of the alignment stage 30.

  Each lifting hand unit has the same structure. For example, the elevating hand unit 310 has an upper portion extending in the horizontal direction and an upper surface contacting the lower surface of the blanket BL so that the hand 311 supports the blanket BL from below, and supports the hand 311 and the vertical direction (Z direction). And a hand elevating mechanism 312 that elevates and lowers. The hand elevating mechanism 312 elevates and lowers the hand 311 according to a control signal from a hand elevating control unit (not shown) provided in the control block.

  The same applies to the other elevating hand units. Here, the hands provided in the elevating hand units 315, 320, 325, 330, 335, 340, 345, 350, 355, 360, 365 are respectively denoted by reference numerals 316, 321, 326. , 331, 336, 341, 346, 351, 356, 361, 366. In addition, reference numerals 317, 322, 327, 332, 337, 342, 347, respectively are attached to the hand lifting mechanisms provided in the lifting hand units 315, 320, 325, 330, 335, 340, 345, 350, 355, 360, 365. 352, 357, 362, 367 are attached.

  The lifting / lowering hand units 310, 320, 330, 340, 350, and 360 disposed at the (+ X) side end of the alignment stage 30 respectively turn the tip of the hand toward the (−X) side, and ( -X) The elevating hand units 315, 325, 335, 345, 355, and 365 arranged at the side end portions are respectively installed with the tips of the hands facing the (+ X) side. That is, the elevating hand unit arranged at the (+ X) side end and the elevating hand unit arranged at the (−X) side end are arranged facing each other with the hand facing inward.

  The elevating hand units 310 and 315 arranged at the most (−Y) side at the (+ X) side end and the (−X) side end of the alignment stage 30 are arranged at the same position in the Y direction. Therefore, the hand 311 of the lifting hand unit 310 and the hand 316 of the lifting hand unit 315 are at the same position in the Y direction. Further, these hands 311 and 316 are always positioned at the same height (Z direction position) and are moved up and down integrally by a control signal from the hand lift control unit. That is, the pair of lifting hand units 311 and 315 having the same position in the Y direction forms a hand unit pair (first hand unit pair) 31.

  Similarly, the lifting hand units 320 and 325 having the same position in the Y direction are the second hand unit pair 32, the lifting hand units 330 and 335 are the third hand unit pair 33, and the lifting hand units 340 and 345 are the fourth. The hand unit pair 34, the lifting hand units 350 and 355 form a fifth hand unit pair 35, and the lifting hand units 360 and 365 form a sixth hand unit pair 36, respectively.

  By positioning the hands 311 to 366 provided in the elevating hand units 310 to 365 at the same height, the hands 311 to 366 can integrally hold the blanket BL in a horizontal posture. A pair of hands included in each pair of hand units (for example, a pair of hands 311 and 316 in the hand unit pair 31) are always at the same height, but between different hand unit pairs, It is possible to control the heights of the hands contained therein independently of each other. FIG. 6 shows a state where the hands 321 and 326 of the second hand unit pair 32 are positioned below the other hands as an example.

  In the following description, a pair of hands included in the Nth hand unit pair (N = 1 to 6) is referred to as an “Nth hand pair”. That is, the pair of hands 311 and 316 included in the first hand unit pair 31 is referred to as a “first hand pair” and denoted by reference numeral 301. Similarly, the pair of hands 321 and 326 included in the second hand unit pair 32 are the second hand pair 302, and the pair of hands 331 and 336 included in the third hand unit pair 33 are the third hand pair 303. The pair of hands 341, 346 included in the fourth hand unit pair 34 is the fourth hand pair 304, the pair of hands 351, 356 included in the fifth hand unit pair 35 is the fifth hand pair 305, The pair of hands 361 and 366 included in the six-hand pair unit 36 will be referred to as a sixth hand pair 306, respectively. In addition, an aggregate of these hand pairs 301 to 306 is collectively referred to as a “blanket holding mechanism” and denoted by reference numeral 300.

  As shown in FIG. 6, out of the six hand unit pairs 31 to 36, the center hand unit pairs 32 to 35 excluding those located at both ends in the Y direction are included in these hand unit pairs. The arrangement is such that the hands 321 to 356 are dispersedly arranged in an area corresponding to the planar size of the plate PP or the like. In the present embodiment, the plane sizes of the plate PP and the substrate SB are the same. On the other hand, for the hand unit pairs 31 and 36 located at both ends in the Y direction, the hands 311, 316, 361, and 366 included in these hand unit pairs abut on the lower surface near the end of the blanket BL in the Y direction. Placed in position.

  The alignment stage 30 is supported by a plurality of alignment mechanisms 37 attached to the base portion 11. The alignment mechanism 37 is a movable mechanism composed of, for example, a cross roller bearing. A plurality of alignment mechanisms 37 cooperate in response to a control signal from an alignment control unit (not shown) of the control block, thereby aligning the alignment stage 30 in the XY plane (horizontal plane) and around the Z axis (vertical axis). It can be moved with.

  The alignment stage 30 is further provided with two alignment cameras 381 and 382 attached to a column member (not shown) erected from the base portion 11. The alignment cameras 381 and 382 are installed upward and image an alignment mark formed in advance on the blanket BL. The alignment control unit detects the position of the blanket BL from the imaging results of the alignment cameras 381 and 382, and operates the alignment mechanism 37 as necessary to adjust the position of the blanket BL in the apparatus.

  Further, the transfer roller block 5 is further provided on the base portion 11. The transfer roller block 5 includes a guide rail 51 fixed to the base portion 11 and extending in the Y direction, and a roller unit 50 configured to be movable in the Y direction along the guide rail 51.

  The roller unit 50 includes a cylindrical transfer roller (roller member) 501 extending in the X direction, a support frame 502 that rotatably supports both ends of the transfer roller 501 in the X direction, and a substantially X direction of the support frame 502. A support leg 503 that extends downward in the center part, and a base part 504 that supports the support leg 503 and is engaged with the guide rail 51 and moves in the Y direction are provided. The dimension of the support leg 503 in the X direction is smaller than the distance between the tips of the hands constituting each hand pair. Although not shown, the base portion 504 includes a lifting mechanism that lifts and lowers the support legs 503. As the support leg 503 is moved up and down, the transfer roller 501 supported by the support leg 503 moves in the Z direction, and moves toward and away from the blanket BL held by the blanket holding mechanism 300. The movement of the base portion 504 in the Y direction along the guide rail 51 and the elevation of the support leg 503 by the base portion 504 are controlled by a roller driving portion (not shown) provided in the control block.

  On the other hand, the upper holding block 7 includes an upper stage 71 whose lower surface is a holding plane having substantially the same plane size as the plate PP and the like, and a stage elevating mechanism 72 that raises and lowers the upper stage 71 in the vertical direction (Z direction). Yes. Although not shown, at least one of a suction hole, a suction groove, and a suction pad is provided on the lower surface of the upper stage 71 as a mechanism for sucking and holding the plate PP or the like. A negative pressure supplied from a negative pressure supply unit (not shown) provided in the cylinder is applied via a control valve (not shown). Therefore, the upper stage 71 can hold the upper surface of the plate PP or the like on the lower surface thereof.

  The stage elevating mechanism 72 raises and lowers the upper stage 71 in response to a control signal from an upper stage control unit (not shown) of the control block, and a proximity position that is close to and faces the upper surface of the blanket BL held by the blanket holding mechanism 300. The plate PP or the like held on the upper stage 71 is moved between the blanket BL and a separated position that is largely separated upward.

  FIG. 7 is an enlarged view showing the structure of the tip of the hand in more detail. Here, the structure of the hand 311 will be described representatively, but the structure of each of the hands 311 to 366 is the same as described above. As shown in FIG. 7A, at the front end portion of the hand 311 extending along the X direction, the upper surface 311a is flattened to become a contact surface that contacts the lower surface of the blanket BL, and has a different opening diameter. There are various types of through holes. More specifically, the hand 311 is provided with a plurality of first through holes 311b having a relatively large opening diameter at regular intervals in the X direction. Each of the through holes 311b has an upper end 313a such as silicon rubber. A suction pad 313 formed by an elastic member is inserted. Each suction pad 313 is connected to a negative pressure supply unit via a control valve V2 of the control unit.

  Each suction pad 313 can be integrally moved up and down by a drive mechanism (not shown), and the upper end 313a of the suction pad 313 is below the upper surface (contact surface) 311a of the hand 311 as shown in FIG. 7C, the upper end 313a of the suction pad 313 can move between the suction position where the upper end 313a of the hand 311 advances upward as shown in FIG. When the suction pad 313 is positioned at the suction position, the blanket BL can be strongly sucked and held by the suction pad 313 by the negative pressure supplied from the negative pressure supply unit.

  On the other hand, the other through hole 311c is a through hole having an opening diameter smaller than that of the through hole 311b, and is provided between the through holes 311b arranged at equal intervals in the X direction as described above. The through hole 311c is connected to the negative pressure supply unit via the control valve V3 of the control block. For this reason, when a negative pressure is supplied to each through-hole 311c, it functions as a suction hole that sucks the lower surface of the blanket BL. The force for sucking the blanket BL is weaker than that of the suction pad 313.

  In this manner, the hand 311 is provided with the through-hole 311c functioning as an adsorption hole and the adsorption pad 313, and the negative pressure supply to each is independently performed, whereby the adsorption force of the blanket BL by the hand 311 is multistage. It is possible to set.

  Next, the operation of the transfer / peeling apparatus 200 configured as described above will be described. As described above, the transfer / peeling apparatus 200 performs a patterning process and a printing process. Hereinafter, although the patterning process will be described, the operation of the printing process is basically the same.

  8 to 10 are diagrams schematically showing the positional relationship of each part of the apparatus at each stage of the transfer process. In FIGS. 8 to 10, in order to clarify the positional relationship between the respective parts, the dimensions and intervals of the respective parts are exaggerated, and these do not represent actual dimensional relationships.

  The transport robot transports the plate PP having the convex portion PJ for patterning into the transfer / peeling apparatus 200 (arrow AR3 in FIG. 1), and places the transfer surface on which the convex portion PJ is formed downward on the upper stage 71. Load it. Following this, the transfer robot transfers the blanket BL carrying the primary pattern layer L1 formed by the coating apparatus 100 into the transfer / peeling apparatus 200 (arrow AR2 in FIG. 1), and the first pattern layer L1. Is loaded into the blanket holding mechanism 300 with the carrying surface facing upward. At this time, the suction pad 313 of each hand is in the retracted position shown in FIG. 7B, and the blanket BL is sucked and held by the negative pressure applied to the through hole 311c. The order of loading may be reversed, but the first pattern layer L1 on the blanket BL may be damaged when the plate PP is loaded by carrying in the blanket BL carrying the primary pattern layer L1 on the upper surface later. It is possible to avoid a problem that a foreign object falls.

  FIG. 8A shows a state after the plate PP and the blanket BL are carried into the apparatus. At the time of loading, the upper stage 71 is positioned at a position that is largely separated upward from the blanket holding mechanism 300, and thereby the plate PP is loaded through a space that is wide open between the upper stage 71 and the blanket holding mechanism 300. can do. On the other hand, when the blanket BL is carried in, the hand pairs 301 to 306 are positioned at the raised positions, so that the carrying hand of the carrying robot that supports the lower surface of the blanket BL can be carried in. Further, by setting each hand pair to the same height, the blanket BL can be held in a horizontal posture.

  When the plate PP and the blanket BL are thus carried in, the upper stage 71 is lowered so that the plate PP and the blanket BL are brought close to each other with a predetermined gap therebetween. For this purpose, it is desirable to measure the thickness of the plate PP and blanket BL prior to loading. As shown in FIG. 8B, the gap G between the plate PP and the blanket BL adjusted at this time is, for example, about several hundred μm.

  Subsequently, after performing alignment adjustment for aligning the plate PP and the blanket BL, the transfer roller 501 of the transfer roller block 5 is positioned at a predetermined initial position. As shown in FIG. 8B, the initial position of the transfer roller 501 is a position spaced downward from the blanket BL in the vertical direction, and the first hand pair 301 and the second hand pair 302 in the Y direction. Is the position directly below the (−Y) side end of the plate PP. The transfer roller 501 may be in this position from the beginning, or may be configured to be retracted from the blanket holding mechanism 300 when the blanket BL or the like is carried in and moved to the initial position after the carry-in.

  Then, the transfer roller 501 is moved upward to come into contact with the lower surface of the blanket BL, and as shown in FIG. 8C, the blanket BL is pushed toward the plate PP and brought into contact with the plate PP. On the lower surface of the blanket BL, the position where the transfer roller 501 contacts at this time is referred to as “contact start position”. When a pattern (symbol PT1 in FIG. 1) is carried on the blanket BL, the pattern adheres to the convex portion PJ of the plate PP. Next, while the transfer roller 501 is in contact with the blanket BL, the transfer roller 501 starts to move in the (+ Y) direction, and then advances in the (+ Y) direction at a constant speed. As a result, the region where the blanket BL and the plate PP abut expands in the (+ Y) direction.

  The (+ Y) side as viewed from the transfer roller 501 is referred to as the front or downstream side in the traveling direction in which the transfer roller 501 travels. Further, the (−Y) side as viewed from the transfer roller 501 is referred to as the rear or upstream side in the traveling direction of the transfer roller 501.

  Subsequently, the suction pad of the first hand pair 301 located on the upstream side of the transfer roller 501 is raised to the suction position shown in FIG. 7C, and the negative pressure from the negative pressure supply unit is supplied and suction by the suction pad is performed. And the descent of the first hand pair 301 is started. When the hand pair 301 is lowered while the blanket BL is strongly adsorbed by the adsorption pad, the (−Y) side end portion of the blanket BL is pulled downward. Accordingly, the blanket BL and the plate PP are gradually separated from the (−Y) side end portion of the plate PP, and separation of both is started.

  Thereafter, the transfer roller 501 advances in the (+ Y) direction, but in front of it, each hand pair 302 to 306 supports the lower surface of the blanket BL and interferes with the advance of the transfer roller 501. In order to avoid this, each pair of hands is lowered as the transfer roller 501 advances, and is retracted to a retracted position that does not interfere with the transfer roller 501. Specifically:

  Corresponding to each of the Nth hand pairs (N = 2 to 5), the position of the transfer roller 501 that defines the timing at which the hand pair should start to descend is predetermined as the descending start position. This descent start position means that if the transfer roller 501 moving in the (+ Y) direction reaches the descent start position, the descent of the Nth hand pair is started before the transfer roller 501 arrives. In addition, the Nth hand pair can be retracted to a retracted position where it does not interfere with the transfer roller 501.

  Each hand pair has a function of holding the blanket BL in a horizontal position by abutting the blanket BL from below and maintaining a constant gap G with the plate PP. Therefore, if the timing of lowering the hand pair is too early, the blanket BL is bent and gap variation occurs. In order to avoid this, it is desirable that the lowering start position is as close as possible to the hand pair within a range where interference between the transfer roller 501 and the hand pair does not occur.

  When the transfer roller 501 reaches the lowering start position set in this way, the lowering of the N-th hand pair corresponding to the lowering start position is started. The suction by the suction holes provided in the hand pair is canceled immediately before the descent starts. As a result, it is possible to prevent the blanket BL from flexing following the lowering of the hand pair. In the suction by the suction pad using the elastic member, there is a time delay from when the negative pressure supply is stopped until the suction is completely released, and thus the hand pair may be lowered with the blanket BL being sucked. However, this problem can be avoided by using adsorption by the adsorption holes.

  FIG. 9A shows a state where the second hand pair 302 is lowered to the retracted position. The retreat position is a position in the Z direction of the hand such that the upper surface of the hand is below the lower surface of the support frame 502 of the transfer roller 501. Since the hands 521 and 526 constituting the second hand pair 302 are arranged with their tips separated from each other in the X direction, the support leg 503 of the transfer roller 501 can move through the gap between the hands. The transfer roller 501 and its support frame 502 pass above the hand. Therefore, interference between the transfer roller 501 and the second hand pair 302 is avoided.

  Thus, by retracting the second hand pair 302, the transfer roller 501 can further move in the (+ Y) direction. After the transfer roller 501 passes, the second hand pair 302 rises again and re-contacts the lower surface of the blanket BL. With the rise, the suction pads of the hands 321 and 326 of the second hand pair 302 advance to the suction position, and negative pressure supply from the negative pressure supply unit 92 is started. As a result, the second hand pair 302 that re-contacts the lower surface of the blanket BL sucks the blanket BL more strongly than before the separation by the suction pad. After the suction by the suction pad is started, the second hand pair 302 starts to descend again. As a result, the blanket BL is further lowered downward on the upstream side of the transfer roller 501, and the peeling from the plate PP further proceeds.

  The same applies to the hand pairs arranged further downstream. That is, by repeating the above process until the transfer roller 501 reaches the end position set on the (+ Y) side of the (+ Y) side end of the plate PP, each of the hand pairs 303 to 305 has the transfer roller 501 At the timing of approaching the descent start position set corresponding to the hand pair, it is separated from the lower surface of the blanket BL and descends to the retreat position. Then, after passing through the transfer roller 501, it rises again to attract the blanket BL, and then moves downward again. The hand pair after descending may reach a position sufficiently separated downward from the plate PP, and may remain at that position after the peeling of the blanket BL by the hand pair located further downstream is started.

  FIG. 9B shows a state in which the second hand pair 302 rises toward the blanket BL after passing through the transfer roller 501, while the third hand pair 303 is lowered to the retracted position due to the approach of the transfer roller 501. ing. 9C, the transfer roller 501 passes through the position of the third hand pair 303, and the third hand pair 303 rises toward the blanket BL, while the fourth hand pair in front of the transfer roller 501. Reference numeral 304 denotes a state in which the descent to the retracted position has started. In FIG. 9C, symbol θ represents the upstream end of the contact area where the transfer roller 501 and the blanket BL are in contact, that is, the boundary between the peeled area and the non-peeled area. Indicates the angle formed by.

  In FIG. 10A, the fourth hand pair 304 after passing through the transfer roller 501 starts to rise, while the fifth hand pair 305 descends toward the retracted position, and the third hand pair 303 sucks the blanket BL. It shows a state of descending. Further, FIG. 10B shows a state in which the transfer roller 501 has passed the position of the fifth hand pair 305 and has reached the vicinity of the (+ Y) side end of the plate PP. In this state, the pattern transfer from the blanket BL to the plate PP is almost completed.

  As shown in FIG. 10C, when the transfer roller 501 reaches the end of the plate PP on the (+ Y) side or further to the end position on the (+ Y) side, the contact of the blanket BL and the entire plate PP Peeling is complete. In order to maintain the posture of the blanket BL until the transfer roller 501 reaches the (+ Y) side end portion of the plate PP, the first position where the blanket BL is supported on the (+ Y) side further than the (+ Y) side end portion of the plate PP. Six hand pairs 306 are required.

  When the transfer roller 501 reaches the end position, the movement of the transfer roller 501 is stopped and the transfer roller 501 is moved downward to be separated from the blanket BL. Here, on the lower surface of the blanket BL, a position where the transfer roller 501 comes into contact last is referred to as a “contact end position”. Furthermore, each hand pair 301-306 is positioned at the same height.

  At this time, the blanket BL is completely separated from the plate PP and is supported by the respective hand pairs 301 to 306 of the blanket support mechanism 300. Note that when the patterning by the plate PP is completed, the suction by the suction pad of the hand pair is continued to prepare for the printing process on the substrate SB. On the other hand, the upper stage 71 is separated upward, and the patterned plate PP is unloaded and collected. Here, the case where the patterning process by the plate PP is executed has been described. However, when the printing process to the substrate SB is performed, the suction by the suction pad of the hand pair is canceled and the suction pad is moved back to the retracted position. . Then, the substrate SB on which the secondary pattern layer is formed by the transport robot is transported to the heating device 900 and baked to cure the secondary pattern layer, and the blanket BL used in the printing process is collected in the recovery device (not shown). Take it out.

D. Pattern Formation and Pattern Printing Operation Next, each process executed by the pattern printing system 1 configured as described above will be described with reference to FIGS. 1, 11, and 12. FIG. FIG. 11 is a diagram schematically showing a patterning process by the transfer / peeling apparatus shown in FIG. In the figure (and FIG. 14 described later), the characteristics of the pattern PT1 constituting the primary pattern layer L1 formed by the coating apparatus 100 are clearly shown and the relationship between the primary pattern layer L1 and the secondary pattern layer L2 is shown. In order to clarify the above, some of the dimensions and intervals of each part are exaggerated, and these do not represent actual dimensional relationships. This also applies to embodiments described later.

  In the pattern printing system 1, a transport robot (not shown) loads an unused blanket BL into the coating apparatus 100 as shown by an arrow AR 1 in FIG. Then, ink is applied in a stripe shape to form a line pattern PT1 on the surface of the blanket BL. Thus, the primary pattern layer L1 made of the stripe pattern PT1 is formed on the surface of the blanket BL (application step S1). The blanket BL is transported from the coating apparatus 100 to the transfer / peeling apparatus 200 by a transport robot as indicated by an arrow AR2 in FIG. 1, and loaded onto the blanket holding mechanism 300 with the support surface supporting the first pattern layer L1 facing upward. To do. In this embodiment, the coating apparatus 100 forms a stripe pattern PT1 that is slightly wider than the stripe pattern PT2 (see FIG. 11C) that is finally printed on the substrate SB. This is in consideration of the film thickness characteristic of the pattern PT1 formed by the coating apparatus 100.

  FIG. 12 is a graph showing the film thickness characteristics of a striped pattern applied to the surface of the blanket by the coating apparatus of FIG. 2, and FIG. 12 (a) shows the film thickness profile of the vertical cross-sectional shape of the pattern PT1. (B) has shown the film thickness profile of the cross-sectional shape of pattern PT1. In each graph, the horizontal axis indicates the position, and the vertical axis indicates the film thickness. As can be seen from these graphs, the peripheral edge of the pattern PT1 has a shoulder shape, and the uniformity of the film thickness is not ensured. On the other hand, in a region that advances a certain distance from the peripheral portion to the central portion, the variation in film thickness is suppressed to 5% or less, indicating excellent film thickness uniformity. Therefore, in the present embodiment, as shown in FIG. 11, the secondary pattern layer L2 is formed by using the plate PP in which the convex portions PJ are formed in advance in a pattern corresponding to the pattern PT1 using the transfer / peeling apparatus 200. Yes. More specifically, the patterning process is performed as follows.

  As shown by an arrow AR3 in FIG. 1, the plate PP is carried into the transfer / peeling device 200, and the plate PP is held by the upper stage 71 with the transfer surface on which the convex portion PJ is formed facing downward, and the first pattern layer The blanket BL is held by the blanket holding mechanism 300 with the carrying surface carrying L1 facing upward (FIG. 11A). Then, the gap between the plate PP and the blanket BL is adjusted to a predetermined gap G with the convex portion PJ and the first pattern layer L1 facing each other. Subsequently, the plate PP and the blanket BL are aligned.

In the present embodiment, three pairs of convex portions PJ provided at a predetermined distance Da in the Y direction with respect to the transfer surface of the plate PP are provided at a pitch Db in the Y direction. Here, the interval Da and the pitch Db are set according to the dimensions of each part of the pattern PT1. That is, if the Y direction size of the peripheral portion of the pattern PT1, that is, the shoulder portion PT1s is the width Ws, and the Y direction size of the pattern PT1 is the width Wt, the central portion of the pattern PT1, that is, the flat portion PT1f having a uniform film thickness. The width Wf in the Y direction is
Wf = Wt−2 × Ws
It becomes. Therefore, in the present embodiment, the distance Da between the pair of convex portions PJ is Da = Wf = Wt−2 × Ws.
Is set.

  Further, in the Y direction, the pitch Db of the convex portion PJ pair is matched with the pitch Dc of the pattern PT1. Furthermore, the width Wj of each convex part PJ in the Y direction is set wider than the width Ws of the shoulder part PT1s in the Y direction. Therefore, by adjusting the alignment between the plate PP and the blanket BL as described above, the lower surface of the convex portion PJ faces the shoulder portion PT1s of the corresponding pattern PT1, and the space sandwiched between the pair of convex portions PJ. Are opposed to the flat portion PT1f of the corresponding pattern PT1.

  Then, after the alignment adjustment is performed, as shown in FIG. 11B, the transfer operation of the transfer roller 501 and the movement operation of the hand pair are linked as described above. And a portion of the primary pattern layer L1, that is, the shoulder portion PT1s is transferred to the lower surface of the convex portion PJ (primary transfer step S2). Further, following this transfer operation, as shown in FIG. 11C, the blanket BL and the plate PP which are in close contact with each other are peeled off, and the ink constituting the shoulder portion PT1s is transferred from the blanket BL to the convex portion PJ. (First peeling step S3). As a result, only the flat portion PT1f remains on the surface of the blanket BL, and this becomes a new pattern PT2, which constitutes the secondary pattern layer L2.

  When the patterning process is completed for the entire plate PP, the suction of the blanket BL by the suction pad of the hand pair is continued, while the upper stage 71 is separated upward and the patterned PP is carried out and collected. Note that the recovered plate PP may be reused after being subjected to a cleaning process, or may be discarded as it is.

  After unloading the plate PP, the substrate SB is carried into the transfer / peeling device 200 as shown by an arrow AR4 in FIG. 1, and the substrate SB is held by the upper stage 71 with the printing surface on which the pattern is to be printed facing downward. . Thereby, the printing surface faces the secondary pattern layer L2 carried on the surface of the blanket BL. Then, similar to the patterning process, gap adjustment, alignment, transfer, and peeling are performed. That is, the gap between the substrate SB and the blanket BL is adjusted to a predetermined gap G while the printing surface and the secondary pattern layer L2 are opposed to each other. Subsequently, the substrate SB and the blanket BL are aligned. The blanket BL and the substrate SB are brought into close contact with each other by the movement operation of the transfer roller 501 and the movement operation of the hand pair, and the pattern PT2 (flat portion PT1f) constituting the secondary pattern layer L2 is placed on the lower surface (covered) of the substrate SB. Transfer to the printing surface (secondary transfer step S4). Further, following this transfer operation, the blanket BL and the substrate SB which are in close contact with each other are peeled off, and the pattern PT2 is transferred from the blanket BL to the printing surface of the substrate SB (second peeling step S5). As a result, the secondary pattern layer L2 is printed on the substrate SB.

  When the printing process is completed for the entire substrate SB, the suction of the blanket BL by the suction pad of the hand pair is released, and it is carried out of the transfer / peeling device 200 and recovered by the recovery device. On the other hand, the upper stage 71 is transported to the heating device 900 as indicated by an arrow AR5 in FIG. 1 while being spaced apart upward and printed with the secondary pattern layer L2, and the substrate SB is baked by the heating device 900. Then, the pattern PT2 constituting the secondary pattern layer L2 is cured (baking step S6). And after a baking process, it carries out from the heating apparatus 900, and conveys to the following process apparatus.

E. As described above, according to the first embodiment, after the ink is applied to the surface of the blanket BL to form the primary pattern layer L1, the primary pattern layer L1 is patterned using the plate PP to form the secondary pattern. Layer L2 is formed. Therefore, a part of the pattern PT1 (shoulder portion PT1s) constituting the primary pattern layer L1 is not necessary and is subject to destruction, but the invention described in Patent Document 1 in which ink is applied to the entire surface of the blanket BL and then patterned. The amount of ink to be discarded can be suppressed as compared to. That is, the desired secondary pattern layer L2 can be formed with a smaller amount of ink. Further, by suppressing the ink consumption in this way, the manufacturing cost of the substrate SB having the secondary pattern layer L2 can be reduced.

  In the first embodiment, the nozzle 131 and the blanket BL are moved relative to each other while the ink is continuously ejected from the nozzle 131 in a liquid column shape, thereby forming the pattern PT1 on the surface of the blanket BL. For this reason, the pattern PT1 is excellent in film thickness uniformity, and the film thickness of the pattern PT2 (PT1f) obtained by patterning the pattern PT1 is also uniform. In particular, since the shoulder part PT1s of the pattern PT1 is removed by the first transfer process (S2) and the first peeling process (S3) and the secondary pattern layer L2 is formed only by the flat part PT1f, a high-quality secondary pattern is obtained. Layer L2 can be formed.

  As described above, in this embodiment, the patterning process including the coating step (S1), the first transfer step (S2), and the first peeling step (S3) is the “pattern forming method” and the “pattern forming step” of the present invention. It corresponds to an example. The combination of the second transfer step (S4) and the second peeling step (S5) corresponds to an example of the “printing step” of the present invention, and these are applied to the coating step (S1) and the first transfer step (S2). The combination with the first peeling step (S3) corresponds to an example of the “pattern printing method” of the present invention.

  In the present embodiment, the coating apparatus 100 corresponds to an example of the “coating unit” of the present invention. The transfer / peeling apparatus 200 functions as the “transfer means” and “peeling means” of the present invention. A system combining the coating apparatus 100 and the transfer / peeling apparatus 200 corresponds to an example of the “pattern forming system” and the “pattern forming unit” of the present invention. Of course, instead of the transfer / peeling apparatus 200, a transfer apparatus that performs only the transfer process may be provided as the “transfer means” of the present invention, and a peeling apparatus that performs only the peel process may be provided as the “peeling means” of the present invention. Further, the transfer method and the peeling method using the roller member (in this embodiment, the transfer roller 501) are not limited, and for example, a transfer method employed in the invention described in Patent Document 1 may be used. These points are the same in later embodiments.

F. Others The present invention is not limited to the above-described embodiment, and various modifications other than those described above can be made without departing from the spirit of the present invention. For example, in the first embodiment, as shown in FIG. 1, the transfer / peeling apparatus 200 performs the first transfer step (S2), the first peel step (S3), the second transfer step (S4), and the second peel step ( Although S5) is performed, two transfer / peeling apparatuses are prepared, one of which performs the first transfer process (S2) and the first peel process (S3), and the other performs the second transfer process (S4). ) And the second peeling step (S5). In addition, instead of at least one of the two transfer / peeling devices 200, a transfer device that performs only a transfer process is provided as a “transfer unit” of the present invention, and a peeler that performs only the peel process is a “peeling unit” of the present invention. May be provided.

  In the above embodiment, the secondary pattern layer L2 having the reversal pattern PT2 of the pattern formed on the plate PP is formed on the blanket BL by executing the patterning process by the transfer / peeling apparatus 200. A secondary pattern layer L2 having the same pattern as the pattern of the protrusions PJ formed on the plate PP may be formed on the plate PP. Then, the pattern printing may be performed by transferring the secondary pattern layer L2 from the plate PP to the substrate SB. Hereinafter, a second embodiment of the present invention will be described with reference to FIGS. 13 and 14.

  FIG. 13 is a diagram schematically showing the configuration and operation of a pattern printing system equipped with the second embodiment of the pattern forming system according to the present invention. The second embodiment is greatly different from the first embodiment in that a secondary pattern layer L2 having the same pattern as the convex portion PJ is formed on the plate PP and the plate PP using the plate printing apparatus 400. Is printed on the surface of the substrate SB, and other configurations are basically the same as those of the first embodiment. Accordingly, the same components are denoted by the same reference numerals and description thereof is omitted. The plate printing device 400 is a device that prints ink on the substrate SB by transferring the ink attached to the convex portion PJ to the printing surface of the substrate SB, and its configuration and operation are conventionally known. Therefore, those descriptions are omitted. Hereafter, each process performed with the pattern printing system 1 comprised as mentioned above is demonstrated, referring FIG. 13 and FIG.

  FIG. 14 is a diagram schematically showing a patterning process in the second embodiment. Also in the second embodiment, the patterning process is executed in the same manner as in the first embodiment. That is, a transfer robot (not shown) carries an unused blanket BL into the coating apparatus 100 as shown by an arrow AR1 in FIG. Then, ink is applied in a stripe shape to form a line pattern PT1 on the surface of the blanket BL. Thus, the primary pattern layer L1 made of the stripe pattern PT1 is formed on the surface of the blanket BL (application step S1). The blanket BL is transported from the coating apparatus 100 to the transfer / peeling apparatus 200 by the transport robot as shown by an arrow AR2 in FIG. 13, and loaded onto the blanket holding mechanism 300 with the support surface supporting the first pattern layer L1 facing upward. To do. However, in the second embodiment, the same secondary pattern layer as in the first embodiment is formed, but the secondary pattern layer is formed not on the blanket BL but on the plate PP. For this reason, in the second embodiment, convex portions PJ having a pattern different from that of the first embodiment are provided in advance on the transfer surface of the plate PP. More specifically, as shown in FIG. 14A, convex portions PJ are formed on the transfer surface of the plate PP at the same pitch Db as the pitch Dc of the pattern PT1. Further, the width Wj in the Y direction of each convex portion PJ is made to coincide with the width Wf in the Y direction of the flat portion PT1f in the pattern PT1.

  Next, the gap between the plate PP and the blanket BL is adjusted to a predetermined gap G with the convex portion PJ and the first pattern layer L1 facing each other. Subsequently, the plate PP and the blanket BL are aligned. Accordingly, as shown in FIG. 14A, the convex portions PJ face the flat portions PT1f of the corresponding pattern PT1.

  Then, as described above, by linking the movement operation of the transfer roller 501 and the movement operation of the hand pair, the blanket BL and the plate PP are partially brought into close contact with each other as shown in FIG. A part of the layer L1, that is, the flat portion PT1f is transferred to the lower surface of the convex portion PJ (primary transfer step S2). Further, following this transfer operation, as shown in FIG. 14C, the blanket BL and the plate PP which are in close contact with each other are peeled off, and the ink constituting the flat portion PT1f is transferred from the blanket BL to the convex portion PJ. (First peeling step S3). As a result, only the flat portion PT1f is transferred to the transfer surface of the plate PP, and this becomes a new pattern PT2, which constitutes the secondary pattern layer L2. On the other hand, only the shoulder portion PT1s remains on the surface of the blanket BL.

  When the patterning process is completed for the entire plate PP, the suction of the blanket BL by the suction pad of the hand pair is released, and the upper stage 71 is spaced apart upward, and the patterned PP is indicated by an arrow AR4 in FIG. Then, it is conveyed to the plate printing apparatus 400. The recovered blanket BL may be reused after being subjected to a cleaning process, or may be discarded as it is.

  Before and after the transport of the plate PP having the secondary pattern layer L2 to the plate printing apparatus 400, the substrate SB is carried into the plate printing apparatus 400 as indicated by an arrow AR5 in FIG. Then, the plate printing apparatus 400 transfers the pattern PT2 (flat portion PT1f) constituting the secondary pattern layer L2 to the surface (printed surface) of the substrate SB by bringing the plate PP and the substrate SB into close contact (secondary transfer). Step S4). Further, following this transfer operation, the plate PP and the substrate SB which are in close contact with each other are peeled off, and the pattern PT2 is transferred from the plate PP to the printing surface of the substrate SB (second peeling step S5). As a result, the secondary pattern layer L2 is printed on the substrate SB.

  When the printing process is completed for the entire substrate SB, the plate PP is taken out from the plate printing apparatus 400 and collected by the collection device, and the substrate SB on which the secondary pattern layer L2 is printed is indicated by an arrow AR6 in FIG. The substrate SB is baked by the heating device 900 and the pattern PT2 constituting the secondary pattern layer L2 is cured (baking step S6). And after a baking process, it carries out from the heating apparatus 900, and conveys to the following process apparatus.

  As described above, also in the second embodiment, the desired secondary pattern layer L2 can be formed on the plate PP with the same effect as the first embodiment, that is, with a small amount of ink, and the secondary pattern layer L2 is provided. The manufacturing cost of the substrate SB can be reduced. Further, the pattern PT2 constituting the secondary pattern layer L2 can be formed with excellent film thickness uniformity, and the substrate SB having the high-quality pattern layer L2 can be manufactured. As described above, in the second embodiment, the plate printing apparatus 400 that executes the second transfer step (S4) and the second peeling step (S5) corresponds to an example of the “printing unit” of the present invention.

  Moreover, in the said embodiment, although the pattern formation system concerning this invention is laid out in the pattern printing system 1, you may lay out a pattern formation system in the form separated and independent from the pattern printing system 1. FIG.

  Moreover, in the said embodiment, although the primary pattern layer L1 and the secondary pattern layer L2 are comprised by the striped pattern, this invention is not limited to the case where a striped pattern is formed. In other words, the present invention is applied to general pattern forming technology for forming an arbitrary shape such as a block shape or an island shape on a carrier or a plate, and pattern printing technology for printing the pattern on a substrate using the technology. can do.

  Moreover, in the said embodiment, although comprised so that a transcription | transfer process and a peeling process may be performed with a transcription | transfer / peeling apparatus, you may perform a transcription | transfer process and a peeling process with a respectively separate apparatus. That is, the transfer may be performed by bringing the carrier and the plate into close contact with each other, and the carrier and the plate that are in close contact with each other may be integrally conveyed to the peeling device, and the peeling step may be performed with the peeling device.

  Furthermore, in the above-described embodiment, the present invention is applied to a pattern formation technique for forming a pattern using an ink containing an organic EL material as a coating liquid, and a technique for printing a pattern formed by the pattern formation technique on a substrate SB for an organic EL display. However, the scope of application of the present invention is not limited to these. That is, the present invention can be applied to general pattern forming technology for forming a desired pattern with a coating liquid and general pattern printing technology for printing the pattern on a substrate using the technology.

  The present invention forms a desired pattern by peeling the plate and the carrier after the transfer surface of the plate on which the convex portions are formed and the surface of the carrier such as a blanket to which the coating liquid is applied. The present invention can be applied to a pattern forming technique to be performed and a pattern printing technique using the pattern forming technique in general.

DESCRIPTION OF SYMBOLS 1 ... Pattern printing system 100 ... Application | coating apparatus (application | coating means, pattern formation means)
200: Transfer / peeling device (transfer means, peeling means, pattern forming means)
400 ... letterpress printing apparatus (printing means)
501: Transfer roller (roller member)
BL ... Blanket (carrier)
L1 ... primary pattern layer L2 ... secondary pattern layer PJ ... convex part PP ... plate PT1 ... pattern PT1f ... flat part (center part of pattern PT1)
PT1s ... shoulder portion (peripheral portion of pattern PT1)
SB ... Board

Claims (13)

A coating step of forming a primary pattern layer by discharging a coating liquid toward the surface of the carrier from a nozzle that moves relative to the surface of the flat carrier;
A part of the primary pattern layer is formed by bringing the carrier and the plate into close contact with each other with the transfer surface of the plate on which the convex portion is formed facing the surface of the carrier on which the primary pattern layer is formed. A first transfer step of transferring the image to the convex portion;
A pattern forming method comprising: a first peeling step of peeling the carrier and the plate that are in close contact with each other to form a secondary pattern layer on one of the carrier and the plate. The pattern forming method according to claim 1,
In the first transfer step, the peripheral portion of the pattern constituting the primary pattern layer is transferred to the convex portion of the plate,
In the first peeling step, the peripheral portion of the pattern transferred to the convex portion is peeled from the surface of the carrier to pattern the primary pattern layer, and the secondary pattern layer is formed on the surface of the carrier. Forming a pattern. The pattern forming method according to claim 1,
In the first transfer step, the central portion of the pattern constituting the primary pattern layer is transferred to the convex portion of the plate,
The pattern forming method of forming the secondary pattern layer on the convex portion of the plate by peeling the central portion of the pattern transferred to the convex portion from the surface of the carrier in the first peeling step. A pattern forming method according to any one of claims 1 to 3,
In the coating step, the primary pattern layer is formed by continuously discharging a coating solution from the nozzle. A pattern forming method according to any one of claims 1 to 4,
In the first transfer step, a pattern forming method of transferring a part of the primary pattern layer in contact with the convex portion by partially pushing the carrier to the plate side. It is a pattern formation method of Claim 5, Comprising:
In the first transfer step, a roller member is brought into contact with the other surface on the opposite side to the one surface that supports the primary pattern layer, and the carrier is partially pushed toward the plate side. A pattern forming method of moving the roller member in a direction parallel to the one surface. A pattern forming step of forming a secondary pattern layer by the pattern forming method according to claim 1;
And a printing step of transferring and forming the secondary pattern layer on a substrate. The pattern printing method according to claim 7,
In the first transfer step of the pattern forming step, the peripheral portion of the pattern constituting the primary pattern layer is transferred to the convex portion of the plate,
In the first peeling step of the pattern forming step, the peripheral portion of the pattern transferred to the convex portion is peeled off from the surface of the carrier and the primary pattern layer is patterned to form the surface of the carrier. Forming the secondary pattern layer on
In the printing step, the support and the substrate are brought into close contact with each other with the surface of the substrate facing the surface of the support on which the secondary pattern layer is formed, and the secondary pattern layer is attached to the substrate. A pattern printing method for executing a second transfer step of transferring to the surface of the substrate and a second peeling step of peeling the carrier and the substrate in close contact with each other to form the secondary pattern layer on the substrate. The pattern printing method according to claim 7,
In the first transfer step of the pattern forming step, the central portion of the pattern constituting the primary pattern layer is transferred to the convex portion of the plate,
In the first peeling step of the pattern forming step, the second pattern layer is formed on the convex portion of the plate by peeling the central portion of the pattern transferred to the convex portion from the surface of the carrier. ,
In the printing step, the plate and the substrate are brought into close contact with each other in a state where the surface of the substrate is opposed to the convex portion of the plate on which the secondary pattern layer is formed. A pattern printing method for performing a second transfer step of transferring to the surface and a second peeling step of peeling the plate and the substrate that are in close contact with each other to form the secondary pattern layer on the substrate. A coating means for forming a primary pattern layer on the surface of the carrier by moving a nozzle for discharging a coating solution relative to the surface of the flat carrier;
The carrier and the plate are brought into close contact with each other with the transfer surface of the plate on which the convex portion is formed facing the surface of the carrier on which the primary pattern layer is formed. Transfer means for transferring a part to the convex part;
A pattern forming system, comprising: a peeling unit that peels the carrier and the plate closely attached to each other to form a secondary pattern layer on one of the carrier and the plate. A pattern forming unit having the same configuration as that of the pattern forming system according to claim 10,
A pattern printing system for printing the secondary pattern layer by transferring the secondary pattern layer formed by the pattern forming means to a printing surface of a substrate. The pattern printing system according to claim 11, wherein the secondary pattern layer is printed using the pattern forming unit.
The transfer means brings the carrier and the substrate into close contact with each other with the printed surface of the substrate facing the surface of the carrier on which the secondary pattern layer is formed. Transfer the next pattern layer to the printing surface,
The pattern printing system in which the peeling means peels the carrier and the substrate that are in close contact with each other and prints a secondary pattern layer on the printing surface. The pattern printing system according to claim 11,
A printing means for printing the secondary pattern layer;
The printing means is configured to bring the plate and the substrate into close contact with each other in a state where the printing surface of the substrate is opposed to the convex portion of the plate on which the secondary pattern layer is formed. A pattern printing system in which a pattern layer is transferred to the printing surface, and the peeling means of the pattern forming means peels the plate and the substrate in close contact with each other to print a secondary pattern layer on the printing surface.