JP7047317B2 - Manufacturing method and manufacturing equipment for hierarchical structure - Google Patents

Description

The present invention relates to a method and an apparatus for manufacturing a hierarchical structure formed from an ink material.

In order to form a functional structure from an ink material, a first pattern formed by a first material having a main function and a second that fills at least a part of a space portion other than the first pattern. The composition is possible by alternately printing and patterning the second pattern formed by the material of. For example, when forming a hierarchical structure by a conventional plate-based printing method, at least a part of a plate for a pattern made of a main first ink material and a space portion other than the main pattern is filled. A plate for a pattern made of a second ink material is prepared, and a pattern made of each ink material is printed alternately to form a hierarchical structure. Further, when forming a hierarchical structure by a plateless printing method, there is a method using an inkjet. Specifically, the inkjet heads of the first ink material and the second ink material are prepared, and the layers formed by alternately printing the first ink material and the second ink material are stacked and formed. Can be done.

Patent Document 1 proposes a technique using a self-organizing material as a patterning technique that does not rely on an ink patterning device such as a printing plate or an inkjet head. The self-assembled material is a material obtained by copolymerizing two kinds of polymers having different properties, and each of the copolymerizations is regarded as a first material and a second material. In this method, a guide pattern is first formed by general printing or photolithography, a self-assembling material made of the copolymer is formed on the pattern, and then heat treatment is performed to obtain the copolymerized molecules. For example, by changing to a lamellar structure, which is one form of the crystal phase, a line pattern conforming to the guide pattern is formed. This method does not require alignment between the first material and the second material as a pattern forming operation.

Japanese Unexamined Patent Publication No. 2008-36491

However, in the conventional method of printing with or without printing, the inside of the structure printed with a size below the printing resolution limit is in a uniform state made of the printed material, so the size is smaller than the printing resolution. The structure (pattern) of is not allowed inside the print structure.

Further, according to the method of Patent Document 1, it is possible to form a pattern having a size equal to or less than the print resolution limit inside the print pattern. However, in the method of Patent Document 1, the material used for pattern formation is limited to a special self-assembling material such as a block copolymer, and for example, a combination of a metal material and an insulating material is impossible. In addition, there is a problem that the design of the line pattern is also restricted by the structure of the crystal phase that can be taken by the self-organizing material.

As for functional materials, quantum dot technology is known as a technology that can add or improve optical and electrical functions by dividing the material into sizes from 100 nm to 10 nm and aligning them. There was no printing method capable of aligning and patterning the nano-sized materials.

The present invention has been made in view of such a problem, and is equal to or less than the print resolution limit formed by using a plurality of materials without material restrictions inside a primary pattern formed larger than the print resolution limit. It provides a method for manufacturing a hierarchical structure in which a secondary pattern of size is formed and a manufacturing apparatus thereof.

One aspect of the present invention for solving the above problems is a step of forming a secondary three-dimensional structure in which a plurality of thin films are laminated on an intermediate transfer material, and a removal plate for reverse printing corresponding to a predetermined primary pattern. Including a step of removing a part of the secondary three-dimensional structure formed on the intermediate transfer body and a step of transferring a part of the secondary three-dimensional structure remaining on the intermediate transfer body to the base material. In the step of forming the secondary three-dimensional structure, the step of forming an electrostatic latent image corresponding to a predetermined pattern on the intermediate transfer body and the step of charging the mist-ized first ink material to the first polarity to make it static. The step of supplying the intermediate transfer body in which the electro-occurrence image is formed to adhere the first ink material to the region corresponding to a predetermined pattern, and the second ink material different from the mist-ized first ink material. Is charged to a second polarity different from the first polarity and supplied to the intermediate transfer body on which the electrostatic latent image is formed, and the second ink material is applied to at least a part other than the region to which the first ink material is attached. On the first ink material and the second ink material adhered to the intermediate transfer body without charging either the mist-ized first ink material or the second ink material in the step of adhering the ink material. It is a method of manufacturing a layered structure in which a step of forming a coating by supplying the ink to the ink is repeated .

Further, the thin film forming method may be a method of atomizing the ink material and laminating a plurality of thin films on the intermediate transfer body.

Further, the thin film forming method may be an electrophotographic method using a mist developing method.

Further, in another aspect of the present invention, an electrostatic latent image forming portion that forms an electrostatic latent image corresponding to a predetermined pattern on an intermediate transfer body and a mistized first ink material have a first polarity. A first charged mist particle supply unit that is charged and supplied to an intermediate transfer body on which an electrostatic latent image is formed to adhere a first ink material to a region corresponding to a predetermined pattern, and a mist-ized first unit. A second ink material different from the ink material of No. 1 is charged to a second polarity different from the first polarity and supplied to an intermediate transfer body on which an electrostatic latent image is formed, and the first ink material adheres. The second charged mist particle supply unit for adhering the second ink material to at least a part other than the formed region and the mist-ized first ink material or the second ink material are intermediate without being charged. An uncharged mist particle supply unit that is supplied onto the first ink material and the second ink material that adhere to the transfer body to form a coating, and a first that adheres to the intermediate transfer body corresponding to a predetermined pattern. A layered structure manufacturing apparatus including the ink material and the second ink material of the above, and a transfer printing unit for transferring a part of the structure composed of the coating to a base material to form a layered structure. ..

Further, the intermediate transfer member may have a drum shape.

Further, the intermediate transfer body may further include a plate-shaped intermediate transfer body, a charged mist particle supply unit, a non-charged mist particle supply unit, and a transfer unit capable of transporting the intermediate transfer body to the transfer printing unit.

According to the present invention, a layer in which a secondary pattern having a size equal to or less than the print resolution limit formed by using a plurality of materials without material restrictions is formed inside a primary pattern formed larger than the print resolution limit. Providing Keizo method of structure and its manufacturing equipment

Schematic diagram of a hierarchical structure manufactured by using the manufacturing method according to the embodiment of the present invention. A process diagram of a method for manufacturing a hierarchical structure according to an embodiment of the present invention. The figure explaining the formation process of the secondary structure b in the manufacturing method of the hierarchical structure which concerns on one Embodiment of this invention. Schematic diagram of the manufacturing apparatus of the hierarchical structure which concerns on one Embodiment of this invention Schematic diagram of the manufacturing apparatus of the hierarchical structure which concerns on one Embodiment of this invention

Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a schematic cross-sectional view of a hierarchical structure printed matter a200 and a hierarchical structure printed matter b300, which are hierarchical structures manufactured by using the manufacturing method according to the embodiment of the present invention.

As shown in FIG. 1, the hierarchical structure printed matter a200 and the hierarchical structure printed matter b300 have a primary pattern 100 formed on the printed matter base material 115 and a secondary pattern formed inside the primary pattern 100. The secondary pattern is formed from at least two or more materials. As shown in FIG. 1, the secondary pattern of the layered structure printed matter a200 is a layered structure in which a plurality of films having a film thickness of 10 nm or more and 1000 nm or less formed by using the constituent material x101 and the constituent material y102 are laminated. Further, the secondary pattern of the layered structure printed matter b300 is a layered structure in which a plurality of films having a line width of 10 nm or more and 1000 nm or less formed by using the constituent material x101 and the constituent material y102 are laminated.

Although the primary pattern 100 will be described later, it is a printing pattern that can be formed by reverse printing or microcontact printing, which are existing printing techniques. As shown in FIG. 1, the primary pattern 100 of the layered structure printed matter a200 is a layered structure in which layers composed of two different types of constituent materials x101 and y102 are laminated as an internal structure. Further, the primary pattern 100 of the layered structure printed matter b300 is a layered structure in which layers having an arbitrary pattern formed by using two different types of constituent materials x101 and y102 are laminated. As described above, the hierarchical structure printed matter a200 and the hierarchical structure printed matter b300 differ only in the method for forming the hierarchical structure, and the layered structure (secondary pattern) is formed inside the primary pattern 100 using two kinds of materials. The place where it is done is the same. Further, the secondary pattern of the hierarchical structure printed matter a200 and the hierarchical structure printed matter b300 is a layer structure or a pattern structure having a film thickness equal to or less than the resolution limit of the primary pattern formed by the existing printing technique. With the existing printing technology, the resolution is limited by the production limit of the plate, and it is difficult to print with a resolution of 1000 nm or less. There is no clear standard for the resolution limit of printing, but when forming a pattern made of functional materials by printing, the resolution limit is where the adjacent pattern comes into contact with an unintended part or the pattern itself is not continuous. It becomes.

According to the hierarchical structure printed matter a200 and the hierarchical structure printed matter b300 of FIG. 1, for example, when the constituent material x101 is used as a conductive material and the constituent material y102 is used as an insulating material for two types of materials, in the hierarchical structure printed matter a200, the pattern itself is a capacitor. With the structure, the hierarchical structure printed matter b300 can form a three-dimensional conductive pattern circuit. When the constituent material x101 is a quantum dot material and the constituent material y102 is a space material, a device pattern having a primary pattern 100 shape is arranged, and a device of three-dimensionally aligned quantum dots can be formed inside the pattern.

(Method of forming a hierarchical structure)
Next, an example of a method for forming the hierarchical structure printed matter a200 and the hierarchical structure printed matter b300 will be described with reference to FIG. FIG. 2A shows a process diagram of a method for manufacturing the layered structure printed matter a200. Further, FIG. 2B shows a process diagram of a method for manufacturing the layered structure printed matter b300.

First, a method of forming the secondary structure a120 of the hierarchical structure printed matter a200 will be described. First, layers containing the constituent materials x101 and the constituent materials y102 are alternately formed and laminated on the intermediate transfer body 105 to form the secondary structure a120. As the material of the intermediate transfer body 105, it holds the constituent material x101 and the constituent material y102, which are ink materials, has appropriate solvent absorption, and receives inquiries about the ink material from the printing substrate 115, which is a plate or a printing medium. The material is not particularly limited as long as it is a material in which ink transfer is preferably performed at the time. It is possible to use materials used in printing techniques that have an offset process, such as polydimethylsiloxane (PDMS).

To form the secondary structure a120, existing film forming methods (thin film forming methods) such as mist coat, spin coat, and gravure coat can be used. It is preferable to use a mist coat method that can adjust the amount of solvent evaporation from the ink material at the time of film formation. In the mist coat method, since the film can be formed in a state close to dry, it is possible to prevent the film coated earlier from being invaded by the ink coated later, so that a hierarchical structure can be easily formed. The secondary structure a120 is formed on the intermediate transfer body 105 by alternately forming a film using the constituent material x101 and the constituent material y102. As a method for forming the secondary structure b130 of the layered structure printed matter b300, a thin film forming method incorporating an electrophotographic mist development method can be used. The method for forming this secondary structure b130 will be described later.

The secondary structure a120 or secondary structure b130 formed on the intermediate transfer body 105 can be transferred and printed as the primary pattern 100 on the printing substrate 115 by using reverse printing or microcontact printing. Specifically, in reverse printing or microcontact printing, the secondary structure a120 and the secondary structure b130 are used as the inking film in the initial step, and the secondary structure a120 and the secondary structure a120 are used on the printing substrate 115. The primary pattern 100 obtained by cutting out a part of the secondary structure b130 is transferred and printed. By printing the primary pattern 100 from the secondary structure a120 and the secondary structure b130 in this way, the hierarchical structure printed matter a200 and the hierarchical structure printed matter b300 having the secondary pattern are formed inside the primary pattern 100.

As a method for forming the primary pattern 100, reverse printing is exemplified as a negative printing method, and microcontact printing is exemplified as a positive printing method. However, the secondary structures 120 and 130 are formed on the intermediate transfer body 105. The method is not limited to the above printing method as long as it can cut out a pattern from a film and transfer it to a printing medium to form a printed matter.

(Method of forming secondary structure b130)
A method for forming the secondary structure b130 of the hierarchical structure printed matter b300 will be described with reference to FIG. FIG. 3 is a diagram illustrating a step of forming a secondary structure b130 of the hierarchical structure printed matter b300 shown in FIG.

In this method, first, an electrostatic latent image 131 having a negative pattern consisting of positive charges is formed on the intermediate transfer body 105, and a material x mist particles 132 charged with the same polarity are conveyed to the electrostatic latent image. Spray on 131. As a result, the material x mist particles 132 adhere to the portion of the electrostatic latent image 131 other than the positive charge, and a positive pattern is formed by reverse development of negative / positive (FIG. 3A).

Next, the negatively charged material y mist charged particles 133 are sprayed onto the formed positive pattern. As a result, the negative electrode material y mist particles 133 are attracted to and adhere to the positive charge of the electrostatic latent image 131 in the portion other than the positive pattern developed by the material x mist particles 132 ((b) in FIG. 3). As a result, the negative electrode material y mist particles 133 adhere to the portion other than the portion to which the positive pattern mist particles 132 adhere.

Next, the entire surface of the uncharged material y mist particles 134 made of the material y is coated on the formed pattern ((c) in FIG. 3). As a result, the unit structure 135 is formed ((d) in FIG. 3). The material x may be used for the coating.

Next, the secondary structure b130 can be obtained by repeatedly forming the unit structure 135 (FIG. 3 (e)). The secondary structure b130 thus formed can be transferred from the intermediate transfer body 105 to the printing substrate 115 as described above.

In the explanation using FIG. 3, the negative electrostatic latent image is the reverse development of the positive development, but the same result can be obtained by the positive development with the mist particles of opposite polarity in the positive electrostatic latent image. Further, as long as the combination can be developed, there is no particular problem even if the charging polarities of the electrostatic latent image and the mist charged particles are reversed.

(Manufacturing equipment for hierarchical structure)
FIG. 4 is a schematic diagram of a hierarchical structure manufacturing apparatus 301 for realizing the method shown in FIG. In the layered structure manufacturing apparatus 301, the secondary structure b130 is formed through each step by rotating the intermediate transfer body drum 302, which is a drum-shaped intermediate transfer body. Each process will be described below.

First, the apparatus 301 for manufacturing the hierarchical structure rotates the intermediate transfer body drum 302 in the direction of the arrow, and causes the electrostatic latent image forming machine 303 to generate an electrostatic latent image on at least a part of the intermediate transfer body drum 302. Form.

Next, the material x that has been converted into mist by the mist generator 304 and charged to have a positive electrode property is supplied to the mist developing head 306. Then, the mist developing head 306 supplies the supplied mist particles to the rotating intermediate transfer drum 302 in which the electrostatic latent image is formed. As a result, a desired positive pattern is developed on the intermediate transfer member drum 302 on which the electrostatic latent image is formed. The mist generator 304 and the mist developing head 306 correspond to the "first charged mist particle supply unit" in the claim.

Next, the material y, which is converted into mist by the mist generator 305 and charged with a polarity different from that of the material x, is supplied to the mist developing head 307. Then, the mist developing head 307 supplies the supplied mist particles onto the positive pattern of the rotating intermediate transfer drum 302. As a result, a pattern developed by the material y is formed on the intermediate transfer body drum 302 in addition to the portion developed by the material x. The mist generator 305 and the mist developing head 307 correspond to the "second charged mist particle supply unit" of the claim.

Next, the mist-ized material y is supplied to the mist coat head 308 by the mist generator 305. Then, the mist coat head 308 supplies the supplied mist particles as uncharged mist particles on the pattern of the rotating intermediate transfer drum 302. This makes it possible to overcoat the pattern portion developed in the previous step. As a result, the unit structure 135 is formed on the intermediate transfer drum 302. The mist generator 305 and the mist head 308 correspond to the "uncharged mist particle supply unit" in the claim.

Then, in the layered structure manufacturing apparatus 301, for example, the intermediate transfer drum 302 is rotated at a predetermined angle in the direction opposite to the direction of the arrow, and then rotated again in the direction of the arrow. Is repeated to stack the unit structure 135. As a result, the secondary structure b130 can be formed on the intermediate transfer body drum 302.

The secondary structure b130 formed on the intermediate transfer body drum 302 in this way is transferred to the printing plate 500. When positive printing (microcontact printing) is used, the hierarchical structure b300 is formed by transferring the secondary structure b130 transferred to the printing plate 500 to a printing substrate 115 (not shown). When negative printing (reverse printing) is used, unnecessary portions are removed from the secondary structure b130 with a printing plate 500, and the secondary structure b130 remaining on the intermediate transfer drum 302 is transferred to a printing substrate 115 (not shown). By doing so, the hierarchical structure b300 is formed.

Further, once the unit structure 135 is repeatedly transferred from the intermediate transfer body drum 302 to the intermediate transfer body 105 (not shown) as the secondary transfer body, the secondary structure b130 is obtained, and the printing plate 500 is used to obtain a printing group (not shown). It is also possible to obtain a hierarchical structure printed body b300 by transfer printing on the material 115.

The ink material remaining on the intermediate transfer body drum 302 is removed by the cleaning machine 311 after rotating the intermediate transfer body drum 302 in the direction of the arrow. After that, the charge of the intermediate transfer member drum 302 is removed by the static elimination device 312, and the printing process is completed.

As the material x and the material y, which are ink materials used in the layered structure manufacturing apparatus 301, various forms of ink such as a dissolved type dissolved in a solvent and a dispersed type in which material particles are dispersed in a solvent can be used. Any form of ink may be used as long as physically finely divided mist droplets can be formed from the ink. Further, in the layered structure manufacturing apparatus 301, a laminated body can be formed by combining two types of materials, a pattern forming and a space material for filling a space portion. For example, a three-dimensional circuit can be formed by combining conductive ink as the material x and insulating ink as the material y, or a metamaterial structure can be formed by combining the material x and the material y with materials having different refractive indexes. It becomes possible to do. In the layered structure manufacturing apparatus 301, the combination of materials is not limited, and can be appropriately selected according to the purpose.

(Mist particles)
The mist particles are literally made into a mist state by physically subdividing the ink material into droplet particles having a predetermined size or less. As a result, the descent due to gravity is slowed down, so that the material can move in the gas phase state by mist formation. The state of mist formation is not a gas but a fine liquid, and although the material is subdivided, it does not change as an ink material. This means that the subdivided ink material can be patterned without relying on printing technology or ink flow. Further, it is different in principle from the vapor deposition method in which the material is evaporated, gasified, and then adhered to the substrate.

Further, since there is no escape route for electric charges in the mist state, electric charges are maintained regardless of the ink material, so that it is possible to handle conductive materials and insulating materials without distinction. The polarity of charging can also be freely selected.

Examples of the method for converting the ink material into mist include an air flow method, an ultrasonic method, and an electrospray method. The air flow method is a method used for spraying or spraying, in which air is flowed to the liquid surface to physically peel off the material from the liquid surface to form droplets and form mist. The ultrasonic method is a method of stimulating an ink liquid with ultrasonic waves to form droplets from the liquid surface. The electrospray method is a method in which a potential is applied to a spray nozzle to form charged droplets. Rayleigh dispersion is generated by the action of a repulsive force caused by the same polar charge from the droplet formation, and the droplets generated from the nozzle are sequentially generated. This is a mist-forming method for forming subdivided droplets. The former two methods can form mist with a micro-order diameter, and the electrospray method can form a mist with a nano-order diameter. In the layered structure manufacturing apparatus 301, the mist forming method can be selected according to the desired pattern formation.

As a method of charging the mist particles, there are a method of providing a corona charger in the path of the mist generator and the mist developing head, or a method of charging the mist particles while reflecting the mist particles while applying an electric potential to the reflector which also serves as an electrode. Known techniques used in the mist development method for electrophotographic can be used. Further, the electrospray method, which is one of the above-mentioned mist-forming methods, is a method in which mist particles can be charged at the same time as mist-forming by a spray nozzle. In the present invention, since it is necessary to form charged mist particles, it is possible to form a finer laminated body by using a simple device using the electrospray method.

(Layered structure forming device)
FIG. 5 shows an outline of a hierarchical structure manufacturing apparatus 401 using an electrospray as one of the embodiments of the present invention. The hierarchical structure manufacturing apparatus 401 will be briefly described with reference to FIG. In the layered structure manufacturing apparatus 401, the plate-shaped intermediate transfer body 105 mounted on the transport belt 405 passes through the inside to form the secondary structure b130 through each step.

First, the layered structure manufacturing apparatus 401 forms an electrostatic latent image on the intermediate transfer body 105 by the electrostatic latent image forming machine 303 while transporting the intermediate transfer body 105 in the direction of the arrow by the transfer belt 405.

Next, while moving the intermediate transfer body 105 directly under the electrospray nozzle 403, the mist particles of the material x charged to the first polarity from the electrospray nozzle 403 are adjusted to the polarity of the electrostatic latent image 131 (not shown). The discharged electrostatic latent image 131 is developed. The electrospray nozzle 403 corresponds to the "first charged mist particle supply unit" of the claim.

Next, while moving the intermediate transfer member 105 directly under the electrospray nozzle 404, the material x is sprayed with the mist particles of the charged material y by applying a potential having a polarity different from that of the material x from the electrospray nozzle 404. The portion other than the region developed in 1 is developed with the material y. The electrospray nozzle 404 corresponds to the "second charged mist particle supply unit" of the claim.

Next, while moving the intermediate transfer member 105 directly under the mist coat head 308, the mist coat head 308 coats the entire surface of the pattern portion developed in the previous step with the mist particles of the uncharged material y (overcoat). )do. As a result, the unit structure 135 is formed on the intermediate transfer body 105.

Next, the layered structure manufacturing apparatus 401 moves the intermediate transfer body 105 in the direction opposite to the direction of the arrow by, for example, the transport belt 309, from the electrostatic latent image forming step to the entire surface coating step. This is done again to stack the unit structure 135. By repeating this, the secondary structure b130 can be formed on the intermediate transfer body 105.

Although not shown in FIG. 5, the hierarchical structure manufacturing apparatus 401 forms the secondary structure b130 on the intermediate transfer body 105, and then prints the secondary structure b130 by reverse printing, microcontact printing, or the like. Transfer printing is performed on the printing substrate 115. As a result, the hierarchical structure printed matter b300 is formed.

The intermediate transfer body 105 or the intermediate transfer body drum 302 and the electrostatic latent image forming machine 303 are a combination of a photoconductor, a corona charger, and a laser exposure machine used in a general electrophotographic method, or an intermediate transfer body 105. Alternatively, a method of using a dielectric material for the intermediate transfer body drum 302 to directly pattern the electric charge by a cathode ray beam, a method of directly forming a charge pattern by triboelectric charging or potential application by a needle-shaped contact method, an intermediate transfer body 105 or an intermediate. A method of forming a piezoelectric charging pattern by a heating pattern using a piezoelectric material for the transfer body drum 302 can be used. These combinations are not limited in the layered structure manufacturing devices 301 and 401, and can be appropriately selected according to the polarity and resolution of the target electrostatic latent image. Depending on the combination, nano-order electrostatic latent image formation is also possible.

The layered structure manufacturing devices 301 and 401 may appropriately add a drying step of drying the layered structure printed matter b300 once formed. The drying method is not particularly limited, but a known ink drying method can be used.

A complex structure will be described. So far, the explanation has been made by taking a combination of two kinds of materials as an example, but if necessary, a secondary pattern may be formed by a combination of three or more kinds of materials. To configure the hierarchical structure manufacturing equipment, simply connect the material film forming equipment consisting of the mist particle supply equipment (mist generator, mist developing head, electrospray nozzle, etc.) in tandem for each material type. good. In addition, the combination of the material and the pattern composition up to the above is the first layer, the combination of the other material and the different pattern is the second layer, and similarly, the third layer, and so on. It is also possible to construct a laminated body of the hierarchical pattern of.

As described above, according to the present invention, the secondary pattern can be formed inside the primary pattern at a size equal to or smaller than the printing resolution of the primary pattern formed by using the existing printing technique. In addition, there are few restrictions on the material compared to the photolithography process, making it possible to impart structural functionality by printing. Furthermore, by making multiple materials into a hierarchical structure, it is possible to print more complicated functional patterns.

The present invention can be applied to the manufacture of a three-dimensional conductive pattern circuit and quantum dot technology.

100 Primary pattern 101 Constituent material x
102 constituent material y
115 Printed matter 200 Hierarchical printed matter a
300 Hierarchical printed matter b
105 Intermediate transcript 120 Secondary structure a
130 secondary structure b
131 Electrostatic latent image 132 Material x mist particles (+)
133 Material y Mist charged particles (-)
134 Material y mist particles (uncharged)
135 Unit structure 301 Hierarchical structure manufacturing equipment 302 Intermediate transfer drum 303 Electrostatic latent image forming machine 304 Material x mist generator 305 Material y mist generator 306 Mist developing head (material x)
307 Mist development head (material y)
308 Mist coat head (material y)
311 Cleaning machine 312 Static eliminator 401 Hierarchical structure manufacturing equipment 403 Electrospray nozzle (material x)
404 Electrospray nozzle (material y)
405 Conveyance belt 500 Printing plate

Claims (1)

The secondary three-dimensional structure formed on the intermediate transfer body by a step of forming a secondary three-dimensional structure in which a plurality of thin films are laminated on the intermediate transfer body and a removal plate for reverse printing corresponding to a predetermined primary pattern. The process of removing a part of the body and
The step including transferring a part of the secondary three-dimensional structure remaining on the intermediate transfer body to the base material is included.
In the step of forming the secondary three-dimensional structure,
A step of forming an electrostatic latent image corresponding to a predetermined pattern on the intermediate transfer body, and
The mist-ized first ink material is charged to the first polarity and supplied to the intermediate transfer body on which the electrostatic latent image is formed, and the first ink material is applied to a region corresponding to the predetermined pattern. And the process of adhering
A second ink material different from the mist-ized first ink material is charged to a second polarity different from the first polarity and supplied to the intermediate transfer body on which the electrostatic latent image is formed. The step of adhering the second ink material to at least a part other than the region to which the first ink material is attached, and the step of adhering the second ink material.
The mist-ized first ink material and the second ink material are supplied onto the first ink material and the second ink material adhering to the intermediate transfer body without being charged. A method for manufacturing a hierarchical structure , in which the steps of forming a coating and the process of forming a coating are repeated .

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