JP2015080894A5 - - Google Patents

Download PDF

Info

Publication number
JP2015080894A5
JP2015080894A5 JP2013219505A JP2013219505A JP2015080894A5 JP 2015080894 A5 JP2015080894 A5 JP 2015080894A5 JP 2013219505 A JP2013219505 A JP 2013219505A JP 2013219505 A JP2013219505 A JP 2013219505A JP 2015080894 A5 JP2015080894 A5 JP 2015080894A5
Authority
JP
Japan
Prior art keywords
recording head
head substrate
insulating member
etching
substrate according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2013219505A
Other languages
English (en)
Japanese (ja)
Other versions
JP6298269B2 (ja
JP2015080894A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2013219505A priority Critical patent/JP6298269B2/ja
Priority claimed from JP2013219505A external-priority patent/JP6298269B2/ja
Priority to US14/507,959 priority patent/US9061500B2/en
Publication of JP2015080894A publication Critical patent/JP2015080894A/ja
Publication of JP2015080894A5 publication Critical patent/JP2015080894A5/ja
Application granted granted Critical
Publication of JP6298269B2 publication Critical patent/JP6298269B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2013219505A 2013-10-22 2013-10-22 記録ヘッド用基板、その製造方法、記録ヘッド、および記録装置 Expired - Fee Related JP6298269B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2013219505A JP6298269B2 (ja) 2013-10-22 2013-10-22 記録ヘッド用基板、その製造方法、記録ヘッド、および記録装置
US14/507,959 US9061500B2 (en) 2013-10-22 2014-10-07 Printhead substrate, method of manufacturing the same, printhead, and printing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013219505A JP6298269B2 (ja) 2013-10-22 2013-10-22 記録ヘッド用基板、その製造方法、記録ヘッド、および記録装置

Publications (3)

Publication Number Publication Date
JP2015080894A JP2015080894A (ja) 2015-04-27
JP2015080894A5 true JP2015080894A5 (enExample) 2016-09-23
JP6298269B2 JP6298269B2 (ja) 2018-03-20

Family

ID=52825816

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013219505A Expired - Fee Related JP6298269B2 (ja) 2013-10-22 2013-10-22 記録ヘッド用基板、その製造方法、記録ヘッド、および記録装置

Country Status (2)

Country Link
US (1) US9061500B2 (enExample)
JP (1) JP6298269B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20150092581A (ko) * 2014-02-05 2015-08-13 삼성전자주식회사 배선 구조물 및 그 형성 방법
JP7163134B2 (ja) * 2018-10-18 2022-10-31 キヤノン株式会社 液体吐出ヘッド、液体吐出ヘッドの製造方法および液体吐出装置
JP7767880B2 (ja) * 2021-11-30 2025-11-12 セイコーエプソン株式会社 液体吐出ヘッドおよび液体吐出装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7244370B2 (en) 2003-08-05 2007-07-17 Canon Kabushiki Kaisha Method for producing circuit substrate
JP5222005B2 (ja) * 2008-04-09 2013-06-26 キヤノン株式会社 記録ヘッドの製造方法

Similar Documents

Publication Publication Date Title
JP2011099757A5 (enExample)
JP2017502522A5 (enExample)
JP2012202786A5 (enExample)
JP2012196960A5 (enExample)
CN106132568B (zh) Cmut设备、制造方法及包括该设备的装置
JP2015080894A5 (enExample)
JP2018508751A (ja) 導電性及び／又は分極性粒子を検出するセンサ、センサシステム、センサを作動させる方法、このタイプのセンサを製造する方法及びこのタイプのセンサの使用
WO2014007603A2 (en) A method of fabricating a gas sensor
JP2012096350A5 (enExample)
JP2015536622A5 (enExample)
JP2016210070A5 (enExample)
JP2014124923A5 (enExample)
JP2012164942A5 (enExample)
EP3160751B1 (en) Fluid ejection structure
US20110234365A1 (en) Chip resistor having low resistance and method for manufacturing the same
JP2007001004A5 (enExample)
JP2013173262A5 (enExample)
JP2004216875A5 (enExample)
KR101910197B1 (ko) 반도체 장치의 제조 방법
US9944513B2 (en) Micro-electro-mechanical device having low thermal expansion difference
JP2004216876A5 (enExample)
JP6562375B1 (ja) 金属板抵抗器およびその製造方法
JP5222005B2 (ja) 記録ヘッドの製造方法
US9061500B2 (en) Printhead substrate, method of manufacturing the same, printhead, and printing apparatus
JP2006130885A5 (enExample)