JP6298269B2 - 記録ヘッド用基板、その製造方法、記録ヘッド、および記録装置 - Google Patents

記録ヘッド用基板、その製造方法、記録ヘッド、および記録装置 Download PDF

Info

Publication number
JP6298269B2
JP6298269B2 JP2013219505A JP2013219505A JP6298269B2 JP 6298269 B2 JP6298269 B2 JP 6298269B2 JP 2013219505 A JP2013219505 A JP 2013219505A JP 2013219505 A JP2013219505 A JP 2013219505A JP 6298269 B2 JP6298269 B2 JP 6298269B2
Authority
JP
Japan
Prior art keywords
recording head
head substrate
insulating member
etching
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2013219505A
Other languages
English (en)
Japanese (ja)
Other versions
JP2015080894A (ja
JP2015080894A5 (enExample
Inventor
チョウドゥリ　エルシャド　アリ
エルシャド アリ チョウドゥリ
隆之 木村
隆之 木村
憲史 牧野
憲史 牧野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2013219505A priority Critical patent/JP6298269B2/ja
Priority to US14/507,959 priority patent/US9061500B2/en
Publication of JP2015080894A publication Critical patent/JP2015080894A/ja
Publication of JP2015080894A5 publication Critical patent/JP2015080894A5/ja
Application granted granted Critical
Publication of JP6298269B2 publication Critical patent/JP6298269B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14153—Structures including a sensor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2013219505A 2013-10-22 2013-10-22 記録ヘッド用基板、その製造方法、記録ヘッド、および記録装置 Expired - Fee Related JP6298269B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2013219505A JP6298269B2 (ja) 2013-10-22 2013-10-22 記録ヘッド用基板、その製造方法、記録ヘッド、および記録装置
US14/507,959 US9061500B2 (en) 2013-10-22 2014-10-07 Printhead substrate, method of manufacturing the same, printhead, and printing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013219505A JP6298269B2 (ja) 2013-10-22 2013-10-22 記録ヘッド用基板、その製造方法、記録ヘッド、および記録装置

Publications (3)

Publication Number Publication Date
JP2015080894A JP2015080894A (ja) 2015-04-27
JP2015080894A5 JP2015080894A5 (enExample) 2016-09-23
JP6298269B2 true JP6298269B2 (ja) 2018-03-20

Family

ID=52825816

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013219505A Expired - Fee Related JP6298269B2 (ja) 2013-10-22 2013-10-22 記録ヘッド用基板、その製造方法、記録ヘッド、および記録装置

Country Status (2)

Country Link
US (1) US9061500B2 (enExample)
JP (1) JP6298269B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20150092581A (ko) * 2014-02-05 2015-08-13 삼성전자주식회사 배선 구조물 및 그 형성 방법
JP7163134B2 (ja) * 2018-10-18 2022-10-31 キヤノン株式会社 液体吐出ヘッド、液体吐出ヘッドの製造方法および液体吐出装置
JP7767880B2 (ja) * 2021-11-30 2025-11-12 セイコーエプソン株式会社 液体吐出ヘッドおよび液体吐出装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7244370B2 (en) 2003-08-05 2007-07-17 Canon Kabushiki Kaisha Method for producing circuit substrate
JP5222005B2 (ja) * 2008-04-09 2013-06-26 キヤノン株式会社 記録ヘッドの製造方法

Also Published As

Publication number Publication date
US20150109370A1 (en) 2015-04-23
US9061500B2 (en) 2015-06-23
JP2015080894A (ja) 2015-04-27

Similar Documents

Publication Publication Date Title
JP6270358B2 (ja) 液体吐出ヘッド
US20060017774A1 (en) Ink jet head substrate, ink jet head, and method of manufacturing an ink jet head substrate
JP6298269B2 (ja) 記録ヘッド用基板、その製造方法、記録ヘッド、および記録装置
US7250113B2 (en) Method for manufacturing liquid ejection head
JP2004148834A (ja) 液滴発生器のダイの加工
JP7112287B2 (ja) 素子基板、記録ヘッド、記録装置、及び素子基板の製造方法
JP2003300320A (ja) 液体吐出装置及びプリンタ
JP5222005B2 (ja) 記録ヘッドの製造方法
US6536877B2 (en) Printer, printer head, and method for fabricating printer head formed with a multilayer wiring pattern
TWI467657B (zh) 於撓性電路電氣連接經電氣隔離列印頭晶粒接地網絡之技術
JP2000108355A (ja) 液体噴射記録装置およびその製造方法
JP2003136491A (ja) 貫通孔を有する構造体、その製造方法及び液体吐出ヘッド
JP2005280179A (ja) インクジェットヘッド用基板およびインクジェットヘッド
US20060284935A1 (en) Inkjet printer head and fabrication method thereof
JP2009006559A (ja) 熱インクジェット記録ヘッド用埋め込み配線の製造方法
CN110406258B (zh) 液体喷头基板、制造液体喷头基板的方法和液体喷头
JP2003136738A (ja) 回路基板及び液体吐出ヘッド、並びにそれらの製造方法
KR100438726B1 (ko) 잉크 젯 프린트 헤드 및 이의 제조 방법
US9975338B2 (en) Method for manufacturing liquid ejection head substrate
JP2005041177A (ja) 発熱抵抗体の製造方法、インクジェット記録ヘッドの製造方法
JP2005041176A (ja) 発熱抵抗体及びその製造方法、並びに、インクジェット記録ヘッド及びその製造方法
US9451692B2 (en) Print element substrate, method of manufacturing the same, printhead and printing apparatus
JP2591115B2 (ja) サーマルヘッド
JP2000158655A (ja) 液体噴射記録装置およびその製造方法
JP2023037261A (ja) 素子基板および記録ヘッド

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20160801

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20160801

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20170426

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20170605

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20170803

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20180126

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20180223

R151 Written notification of patent or utility model registration

Ref document number: 6298269

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151

LAPS Cancellation because of no payment of annual fees