JP2018530196A5 - - Google Patents

Download PDF

Info

Publication number
JP2018530196A5
JP2018530196A5 JP2018506298A JP2018506298A JP2018530196A5 JP 2018530196 A5 JP2018530196 A5 JP 2018530196A5 JP 2018506298 A JP2018506298 A JP 2018506298A JP 2018506298 A JP2018506298 A JP 2018506298A JP 2018530196 A5 JP2018530196 A5 JP 2018530196A5
Authority
JP
Japan
Prior art keywords
micromachined
ultrasound transducer
integrated circuit
transducer array
coupled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2018506298A
Other languages
English (en)
Japanese (ja)
Other versions
JP6767474B2 (ja
JP2018530196A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/EP2016/068676 external-priority patent/WO2017025438A1/en
Publication of JP2018530196A publication Critical patent/JP2018530196A/ja
Publication of JP2018530196A5 publication Critical patent/JP2018530196A5/ja
Application granted granted Critical
Publication of JP6767474B2 publication Critical patent/JP6767474B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2018506298A 2015-08-11 2016-08-04 増加される寿命を備える容量性マイクロマシン超音波トランスデューサ Expired - Fee Related JP6767474B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201562203531P 2015-08-11 2015-08-11
US62/203,531 2015-08-11
EP15183228.4 2015-09-01
EP15183228 2015-09-01
PCT/EP2016/068676 WO2017025438A1 (en) 2015-08-11 2016-08-04 Capacitive micromachined ultrasonic transducers with increased lifetime

Publications (3)

Publication Number Publication Date
JP2018530196A JP2018530196A (ja) 2018-10-11
JP2018530196A5 true JP2018530196A5 (enExample) 2019-07-25
JP6767474B2 JP6767474B2 (ja) 2020-10-14

Family

ID=54072673

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018506298A Expired - Fee Related JP6767474B2 (ja) 2015-08-11 2016-08-04 増加される寿命を備える容量性マイクロマシン超音波トランスデューサ

Country Status (5)

Country Link
US (1) US11097312B2 (enExample)
EP (1) EP3334538A1 (enExample)
JP (1) JP6767474B2 (enExample)
CN (1) CN107921480B (enExample)
WO (1) WO2017025438A1 (enExample)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11039814B2 (en) 2016-12-04 2021-06-22 Exo Imaging, Inc. Imaging devices having piezoelectric transducers
US10648852B2 (en) 2018-04-11 2020-05-12 Exo Imaging Inc. Imaging devices having piezoelectric transceivers
US10656007B2 (en) * 2018-04-11 2020-05-19 Exo Imaging Inc. Asymmetrical ultrasound transducer array
WO2019226547A1 (en) 2018-05-21 2019-11-28 Exo Imaging, Inc. Ultrasonic transducers with q spoiling
EP3590437A1 (en) * 2018-07-02 2020-01-08 Koninklijke Philips N.V. Acoustically transparent window for intraluminal ultrasound imaging device
CN112805843B (zh) 2018-08-01 2024-06-14 艾科索成像公司 用于集成具有混合触点的超声换能器的系统和方法
WO2020082256A1 (zh) * 2018-10-24 2020-04-30 深圳市汇顶科技股份有限公司 超声换能器及其制造方法
CN110508474B (zh) * 2019-07-31 2020-10-27 西安交通大学 一种混合驱动mut单元结构及其参数化激励方法
AU2020344610A1 (en) 2019-09-12 2022-04-07 Exo Imaging, Inc. Increased MUT coupling efficiency and bandwidth via edge groove, virtual pivots, and free boundaries
US11738369B2 (en) * 2020-02-17 2023-08-29 GE Precision Healthcare LLC Capactive micromachined transducer having a high contact resistance part
US11951512B2 (en) 2021-03-31 2024-04-09 Exo Imaging, Inc. Imaging devices having piezoelectric transceivers with harmonic characteristics
US11819881B2 (en) 2021-03-31 2023-11-21 Exo Imaging, Inc. Imaging devices having piezoelectric transceivers with harmonic characteristics
US12486159B2 (en) 2021-06-30 2025-12-02 Exo Imaging, Inc. Micro-machined ultrasound transducers with insulation layer and methods of manufacture
CN115921260A (zh) * 2021-08-13 2023-04-07 上海新微技术研发中心有限公司 基于直流偏置的压电微机械超声换能器系统及调节方法
JP7553054B2 (ja) * 2021-10-21 2024-09-18 硅系半導体科技有限公司 音響誘導型半導体素子及び音響素子集積回路
CN114950925B (zh) * 2022-06-06 2023-05-23 清华大学 柔性可延展微机电系统超声阵列及医用超声诊断设备

Family Cites Families (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR900008393B1 (ko) * 1986-10-02 1990-11-17 미츠비시 덴키 가부시키가이샤 인버터장치의 과전류보호회로
US6283919B1 (en) 1996-11-26 2001-09-04 Atl Ultrasound Ultrasonic diagnostic imaging with blended tissue harmonic signals
US6458083B1 (en) 1996-11-26 2002-10-01 Koninklijke Philips Electronics N.V. Ultrasonic harmonic imaging with adaptive image formation
US5997479A (en) 1998-05-28 1999-12-07 Hewlett-Packard Company Phased array acoustic systems with intra-group processors
US6530885B1 (en) 2000-03-17 2003-03-11 Atl Ultrasound, Inc. Spatially compounded three dimensional ultrasonic images
US6443901B1 (en) 2000-06-15 2002-09-03 Koninklijke Philips Electronics N.V. Capacitive micromachined ultrasonic transducers
US6443896B1 (en) 2000-08-17 2002-09-03 Koninklijke Philips Electronics N.V. Method for creating multiplanar ultrasonic images of a three dimensional object
US6468216B1 (en) 2000-08-24 2002-10-22 Kininklijke Philips Electronics N.V. Ultrasonic diagnostic imaging of the coronary arteries
JP2005123376A (ja) * 2003-10-16 2005-05-12 Toshiba Corp 半導体装置及びその製造方法
JP2007527285A (ja) * 2004-02-27 2007-09-27 ジョージア テック リサーチ コーポレイション 多要素電極ｃｍｕｔ素子及び製作方法
US7403764B2 (en) * 2004-11-30 2008-07-22 Turner Terry R RF power delivery diagnostic system
US7293462B2 (en) * 2005-01-04 2007-11-13 General Electric Company Isolation of short-circuited sensor cells for high-reliability operation of sensor array
ATE553603T1 (de) * 2006-05-22 2012-04-15 Audio Pixels Ltd Direkt-digitallautsprechervorrichtung mit einer gewünschten richtcharakteristik
MY151910A (en) * 2006-05-22 2014-07-31 Audio Pixels Holdings Ltd Volume and tone control in direct digital speakers
US8457338B2 (en) * 2006-05-22 2013-06-04 Audio Pixels Ltd. Apparatus and methods for generating pressure waves
JP4885779B2 (ja) * 2007-03-29 2012-02-29 オリンパスメディカルシステムズ株式会社 静電容量型トランスデューサ装置及び体腔内超音波診断システム
CN101677806B (zh) * 2007-06-01 2013-03-27 皇家飞利浦电子股份有限公司 轻重量无线超声探头
JP5335807B2 (ja) * 2007-11-21 2013-11-06 オーディオ ピクセルズ リミテッド 改良型スピーカ装置およびそれと連携した有用な方法
JP5628178B2 (ja) 2008-09-16 2014-11-19 コーニンクレッカ フィリップス エヌ ヴェ 容量性マイクロマシン超音波トランスデューサ
EP2351381B1 (en) * 2008-10-02 2018-02-21 Audio Pixels Ltd. Actuator apparatus with comb-drive component and methods useful for manufacturing and operating same
US8431420B2 (en) * 2009-01-16 2013-04-30 Hitachi Medical Corporation Manufacturing method of ultrasonic probe and ultrasonic probe
JP5317826B2 (ja) * 2009-05-19 2013-10-16 キヤノン株式会社 容量型機械電気変換素子の製造方法
JP5404365B2 (ja) 2009-12-16 2014-01-29 キヤノン株式会社 電気機械変換装置及びその製造方法
CA2792741C (en) * 2010-03-11 2019-01-22 Audio Pixels Ltd. Electrostatic parallel plate actuators whose moving elements are driven only by electrostatic force and methods useful in conjunction therewith
US9425708B2 (en) * 2010-11-26 2016-08-23 Audio Pixels Ltd. Apparatus and methods for individual addressing and noise reduction in actuator arrays
US9261890B2 (en) * 2011-02-25 2016-02-16 Ut-Battelle, Llc Power flow control using distributed saturable reactors
US9242274B2 (en) * 2011-10-11 2016-01-26 The Board Of Trustees Of The Leland Stanford Junior University Pre-charged CMUTs for zero-external-bias operation
WO2013059749A1 (en) * 2011-10-20 2013-04-25 The Regents Of The University Of California Hollow supports and anchors for mechanical resonators
KR101894393B1 (ko) 2011-12-28 2018-09-04 삼성전자주식회사 초음파 변환기 구조물, 초음파 변환기 및 초음파 변환기의 제조 방법
JP6329491B2 (ja) 2012-03-13 2018-05-23 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 荷電電圧源を有する容量性マイクロマシン加工超音波トランスデューサ装置
DK2856769T3 (en) * 2012-05-25 2018-10-22 Audio Pixels Ltd SYSTEM, PROCEDURE AND COMPUTER PROGRAM PRODUCT TO CONTROL A GROUP OF ACTUATOR SYSTEMS FOR CREATING A PHYSICAL EFFECT
KR101919013B1 (ko) * 2012-09-13 2019-02-08 삼성전자주식회사 미세가공 초음파 변환기 어레이
JP5889165B2 (ja) * 2012-11-14 2016-03-22 ジーイー・メディカル・システムズ・グローバル・テクノロジー・カンパニー・エルエルシー 超音波プローブ及び超音波診断装置
US9654890B2 (en) * 2012-12-27 2017-05-16 Audio Pixels Ltd. System and method for testing
JP5855050B2 (ja) * 2013-07-10 2016-02-09 キヤノン株式会社 トランスデューサ、被検体情報取得装置
AU2014293274B2 (en) * 2013-07-23 2018-11-01 Butterfly Network, Inc. Interconnectable ultrasound transducer probes and related methods and apparatus
US9899047B2 (en) * 2013-10-10 2018-02-20 Seagate Technology Llc Bond pad sharing for powering a multiplicity of electrical components
WO2015126498A2 (en) * 2013-12-02 2015-08-27 The Regents Of The University Of California Micromechanical frequency divider
WO2015086413A1 (en) * 2013-12-12 2015-06-18 Koninklijke Philips N.V. Monolithically integrated three electrode cmut device

Similar Documents

Publication Publication Date Title
JP2018530196A5 (enExample)
JP2017516428A5 (enExample)
TWI555977B (zh) 感測器裝置
US10124338B2 (en) Microbubble generator device, systems and method to fabricate
US9319800B2 (en) Electro acoustic transducer
JP2016518739A5 (enExample)
JP2015181159A5 (enExample)
JP2015066203A5 (enExample)
JP2018501650A5 (enExample)
TW200701222A (en) Thin film fuse phase change ram and manufacturing method
RU2016134736A (ru) Магниторезистивное запоминающее устройство
JP2017028252A5 (ja) トランジスタ
US10629546B2 (en) Semiconductor device
JP2007013120A5 (enExample)
JP2018133433A5 (enExample)
US10249643B2 (en) Hard copied semiconductor device having a resistance-variable non-volatile element
JP2013062529A5 (enExample)
JP2013073929A5 (enExample)
JP2015187720A5 (ja) 表示装置の作製方法
JP2011166128A5 (enExample)
JP2015204612A5 (enExample)
JP2015084412A5 (ja) 半導体装置
JP2017069420A5 (enExample)
US9502647B2 (en) Resistive random-access memory (RRAM) with a low-K porous layer
JP2013197496A5 (enExample)