JP2018530196A5 - - Google Patents

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Publication number
JP2018530196A5
JP2018530196A5 JP2018506298A JP2018506298A JP2018530196A5 JP 2018530196 A5 JP2018530196 A5 JP 2018530196A5 JP 2018506298 A JP2018506298 A JP 2018506298A JP 2018506298 A JP2018506298 A JP 2018506298A JP 2018530196 A5 JP2018530196 A5 JP 2018530196A5
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JP
Japan
Prior art keywords
micromachined
ultrasound transducer
integrated circuit
transducer array
coupled
Prior art date
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Application number
JP2018506298A
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English (en)
Japanese (ja)
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JP2018530196A (ja
JP6767474B2 (ja
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Priority claimed from PCT/EP2016/068676 external-priority patent/WO2017025438A1/en
Publication of JP2018530196A publication Critical patent/JP2018530196A/ja
Publication of JP2018530196A5 publication Critical patent/JP2018530196A5/ja
Application granted granted Critical
Publication of JP6767474B2 publication Critical patent/JP6767474B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2018506298A 2015-08-11 2016-08-04 増加される寿命を備える容量性マイクロマシン超音波トランスデューサ Expired - Fee Related JP6767474B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201562203531P 2015-08-11 2015-08-11
US62/203,531 2015-08-11
EP15183228 2015-09-01
EP15183228.4 2015-09-01
PCT/EP2016/068676 WO2017025438A1 (en) 2015-08-11 2016-08-04 Capacitive micromachined ultrasonic transducers with increased lifetime

Publications (3)

Publication Number Publication Date
JP2018530196A JP2018530196A (ja) 2018-10-11
JP2018530196A5 true JP2018530196A5 (enExample) 2019-07-25
JP6767474B2 JP6767474B2 (ja) 2020-10-14

Family

ID=54072673

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018506298A Expired - Fee Related JP6767474B2 (ja) 2015-08-11 2016-08-04 増加される寿命を備える容量性マイクロマシン超音波トランスデューサ

Country Status (5)

Country Link
US (1) US11097312B2 (enExample)
EP (1) EP3334538A1 (enExample)
JP (1) JP6767474B2 (enExample)
CN (1) CN107921480B (enExample)
WO (1) WO2017025438A1 (enExample)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11039814B2 (en) 2016-12-04 2021-06-22 Exo Imaging, Inc. Imaging devices having piezoelectric transducers
US10656007B2 (en) 2018-04-11 2020-05-19 Exo Imaging Inc. Asymmetrical ultrasound transducer array
US10648852B2 (en) 2018-04-11 2020-05-12 Exo Imaging Inc. Imaging devices having piezoelectric transceivers
EP3797412B1 (en) 2018-05-21 2024-10-09 Exo Imaging Inc. Ultrasonic transducers with q spoiling
EP3590437A1 (en) * 2018-07-02 2020-01-08 Koninklijke Philips N.V. Acoustically transparent window for intraluminal ultrasound imaging device
JP7515182B2 (ja) 2018-08-01 2024-07-12 エコー イメージング，インク． ハイブリッド端子を備えた超音波トランスデューサの統合のためのシステムおよび方法
CN109561876A (zh) * 2018-10-24 2019-04-02 深圳市汇顶科技股份有限公司 超声换能器及其制造方法
CN110508474B (zh) * 2019-07-31 2020-10-27 西安交通大学 一种混合驱动mut单元结构及其参数化激励方法
KR20250069990A (ko) 2019-09-12 2025-05-20 엑소 이미징, 인크. 에지 홈, 가상 피봇, 및 자유 경계를 통한 증가된 mut 커플링 효율성 및 대역폭
US11738369B2 (en) * 2020-02-17 2023-08-29 GE Precision Healthcare LLC Capactive micromachined transducer having a high contact resistance part
US12636680B2 (en) 2021-03-31 2026-05-26 Exo Imaging, Inc. Imaging devices having piezoelectric transceivers with harmonic characteristics
US11819881B2 (en) 2021-03-31 2023-11-21 Exo Imaging, Inc. Imaging devices having piezoelectric transceivers with harmonic characteristics
US11951512B2 (en) 2021-03-31 2024-04-09 Exo Imaging, Inc. Imaging devices having piezoelectric transceivers with harmonic characteristics
US12486159B2 (en) 2021-06-30 2025-12-02 Exo Imaging, Inc. Micro-machined ultrasound transducers with insulation layer and methods of manufacture
CN115921260A (zh) * 2021-08-13 2023-04-07 上海新微技术研发中心有限公司 基于直流偏置的压电微机械超声换能器系统及调节方法
JP7553054B2 (ja) * 2021-10-21 2024-09-18 硅系半導体科技有限公司 音響誘導型半導体素子及び音響素子集積回路
CN114950925B (zh) * 2022-06-06 2023-05-23 清华大学 柔性可延展微机电系统超声阵列及医用超声诊断设备
CN117310003A (zh) * 2023-11-09 2023-12-29 中国直升机设计研究所 用于直升机桨叶超声检测的阵列式柔性探头及使用方法
CN121540271B (zh) * 2026-01-16 2026-03-20 中国海洋大学 一种差分式串联水声芯片阵列结构及芯片

Family Cites Families (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR900008393B1 (ko) * 1986-10-02 1990-11-17 미츠비시 덴키 가부시키가이샤 인버터장치의 과전류보호회로
US6283919B1 (en) 1996-11-26 2001-09-04 Atl Ultrasound Ultrasonic diagnostic imaging with blended tissue harmonic signals
US6458083B1 (en) 1996-11-26 2002-10-01 Koninklijke Philips Electronics N.V. Ultrasonic harmonic imaging with adaptive image formation
US5997479A (en) 1998-05-28 1999-12-07 Hewlett-Packard Company Phased array acoustic systems with intra-group processors
US6530885B1 (en) 2000-03-17 2003-03-11 Atl Ultrasound, Inc. Spatially compounded three dimensional ultrasonic images
US6443901B1 (en) 2000-06-15 2002-09-03 Koninklijke Philips Electronics N.V. Capacitive micromachined ultrasonic transducers
US6443896B1 (en) 2000-08-17 2002-09-03 Koninklijke Philips Electronics N.V. Method for creating multiplanar ultrasonic images of a three dimensional object
US6468216B1 (en) 2000-08-24 2002-10-22 Kininklijke Philips Electronics N.V. Ultrasonic diagnostic imaging of the coronary arteries
JP2005123376A (ja) * 2003-10-16 2005-05-12 Toshiba Corp 半導体装置及びその製造方法
US8008835B2 (en) * 2004-02-27 2011-08-30 Georgia Tech Research Corporation Multiple element electrode cMUT devices and fabrication methods
US7403764B2 (en) * 2004-11-30 2008-07-22 Turner Terry R RF power delivery diagnostic system
US7293462B2 (en) * 2005-01-04 2007-11-13 General Electric Company Isolation of short-circuited sensor cells for high-reliability operation of sensor array
SG171693A1 (en) * 2006-05-22 2011-06-29 Audio Pixels Ltd Volume and tone control in direct digital speakers
ATE553603T1 (de) * 2006-05-22 2012-04-15 Audio Pixels Ltd Direkt-digitallautsprechervorrichtung mit einer gewünschten richtcharakteristik
US8457338B2 (en) * 2006-05-22 2013-06-04 Audio Pixels Ltd. Apparatus and methods for generating pressure waves
JP4885779B2 (ja) * 2007-03-29 2012-02-29 オリンパスメディカルシステムズ株式会社 静電容量型トランスデューサ装置及び体腔内超音波診断システム
RU2502470C2 (ru) * 2007-06-01 2013-12-27 Конинклейке Филипс Электроникс, Н.В. Облегченный беспроводной ультразвуковой датчик
CN104506974B (zh) * 2007-11-21 2018-06-05 奥迪欧彼塞尔斯有限公司 致动器装置和致动系统
RU2511671C2 (ru) 2008-09-16 2014-04-10 Конинклейке Филипс Электроникс Н.В. Емкостной микрообработанный ультразвуковой преобразователь
US8755556B2 (en) * 2008-10-02 2014-06-17 Audio Pixels Ltd. Actuator apparatus with comb-drive component and methods useful for manufacturing and operating same
US8431420B2 (en) * 2009-01-16 2013-04-30 Hitachi Medical Corporation Manufacturing method of ultrasonic probe and ultrasonic probe
JP5317826B2 (ja) * 2009-05-19 2013-10-16 キヤノン株式会社 容量型機械電気変換素子の製造方法
JP5404365B2 (ja) 2009-12-16 2014-01-29 キヤノン株式会社 電気機械変換装置及びその製造方法
AU2011225673B2 (en) * 2010-03-11 2014-04-17 Audio Pixels Ltd. Electrostatic parallel plate actuators whose moving elements are driven only by electrostatic force and methods useful in conjunction therewith
WO2012070042A1 (en) * 2010-11-26 2012-05-31 Audio Pixels Ltd. Apparatus and methods for individual addressing and noise reduction in actuator arrays
WO2012128882A2 (en) * 2011-02-25 2012-09-27 Ut-Battelle, Llc Power flow control using distributed saturable reactors
US9242274B2 (en) * 2011-10-11 2016-01-26 The Board Of Trustees Of The Leland Stanford Junior University Pre-charged CMUTs for zero-external-bias operation
WO2013059749A1 (en) * 2011-10-20 2013-04-25 The Regents Of The University Of California Hollow supports and anchors for mechanical resonators
KR101894393B1 (ko) 2011-12-28 2018-09-04 삼성전자주식회사 초음파 변환기 구조물, 초음파 변환기 및 초음파 변환기의 제조 방법
JP6329491B2 (ja) 2012-03-13 2018-05-23 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 荷電電圧源を有する容量性マイクロマシン加工超音波トランスデューサ装置
US9880533B2 (en) * 2012-05-25 2018-01-30 Audio Pixels Ltd. System, a method and a computer program product for controlling a group of actuator arrays for producing a physical effect
KR101919013B1 (ko) * 2012-09-13 2019-02-08 삼성전자주식회사 미세가공 초음파 변환기 어레이
JP5889165B2 (ja) * 2012-11-14 2016-03-22 ジーイー・メディカル・システムズ・グローバル・テクノロジー・カンパニー・エルエルシー 超音波プローブ及び超音波診断装置
US9654890B2 (en) * 2012-12-27 2017-05-16 Audio Pixels Ltd. System and method for testing
JP5855050B2 (ja) * 2013-07-10 2016-02-09 キヤノン株式会社 トランスデューサ、被検体情報取得装置
AU2014293274B2 (en) * 2013-07-23 2018-11-01 Butterfly Network, Inc. Interconnectable ultrasound transducer probes and related methods and apparatus
US9899047B2 (en) * 2013-10-10 2018-02-20 Seagate Technology Llc Bond pad sharing for powering a multiplicity of electrical components
WO2015126498A2 (en) * 2013-12-02 2015-08-27 The Regents Of The University Of California Micromechanical frequency divider
CN105828962B (zh) * 2013-12-12 2019-07-23 皇家飞利浦有限公司 单片集成的三电极cmut设备

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