JP6767474B2 - 増加される寿命を備える容量性マイクロマシン超音波トランスデューサ - Google Patents

増加される寿命を備える容量性マイクロマシン超音波トランスデューサ Download PDF

Info

Publication number
JP6767474B2
JP6767474B2 JP2018506298A JP2018506298A JP6767474B2 JP 6767474 B2 JP6767474 B2 JP 6767474B2 JP 2018506298 A JP2018506298 A JP 2018506298A JP 2018506298 A JP2018506298 A JP 2018506298A JP 6767474 B2 JP6767474 B2 JP 6767474B2
Authority
JP
Japan
Prior art keywords
ultrasonic transducer
micromachine ultrasonic
integrated circuit
micromachine
cell
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2018506298A
Other languages
English (en)
Japanese (ja)
Other versions
JP2018530196A (ja
JP2018530196A5 (enExample
Inventor
ベルナルト ヨセフ サヴォート
ベルナルト ヨセフ サヴォート
リヒャルト エドワート ダフィトセン
リヒャルト エドワート ダフィトセン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips NV filed Critical Koninklijke Philips NV
Publication of JP2018530196A publication Critical patent/JP2018530196A/ja
Publication of JP2018530196A5 publication Critical patent/JP2018530196A5/ja
Application granted granted Critical
Publication of JP6767474B2 publication Critical patent/JP6767474B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2406—Electrostatic or capacitive probes, e.g. electret or cMUT-probes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
    • B06B2201/70—Specific application
    • B06B2201/76—Medical, dental

Landscapes

  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Mechanical Engineering (AREA)
  • Gynecology & Obstetrics (AREA)
  • Biomedical Technology (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Biophysics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Biochemistry (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Medical Informatics (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Micromachines (AREA)
JP2018506298A 2015-08-11 2016-08-04 増加される寿命を備える容量性マイクロマシン超音波トランスデューサ Expired - Fee Related JP6767474B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201562203531P 2015-08-11 2015-08-11
US62/203,531 2015-08-11
EP15183228.4 2015-09-01
EP15183228 2015-09-01
PCT/EP2016/068676 WO2017025438A1 (en) 2015-08-11 2016-08-04 Capacitive micromachined ultrasonic transducers with increased lifetime

Publications (3)

Publication Number Publication Date
JP2018530196A JP2018530196A (ja) 2018-10-11
JP2018530196A5 JP2018530196A5 (enExample) 2019-07-25
JP6767474B2 true JP6767474B2 (ja) 2020-10-14

Family

ID=54072673

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018506298A Expired - Fee Related JP6767474B2 (ja) 2015-08-11 2016-08-04 増加される寿命を備える容量性マイクロマシン超音波トランスデューサ

Country Status (5)

Country Link
US (1) US11097312B2 (enExample)
EP (1) EP3334538A1 (enExample)
JP (1) JP6767474B2 (enExample)
CN (1) CN107921480B (enExample)
WO (1) WO2017025438A1 (enExample)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11039814B2 (en) 2016-12-04 2021-06-22 Exo Imaging, Inc. Imaging devices having piezoelectric transducers
US10648852B2 (en) 2018-04-11 2020-05-12 Exo Imaging Inc. Imaging devices having piezoelectric transceivers
US10656007B2 (en) * 2018-04-11 2020-05-19 Exo Imaging Inc. Asymmetrical ultrasound transducer array
WO2019226547A1 (en) 2018-05-21 2019-11-28 Exo Imaging, Inc. Ultrasonic transducers with q spoiling
EP3590437A1 (en) * 2018-07-02 2020-01-08 Koninklijke Philips N.V. Acoustically transparent window for intraluminal ultrasound imaging device
CN112805843B (zh) 2018-08-01 2024-06-14 艾科索成像公司 用于集成具有混合触点的超声换能器的系统和方法
WO2020082256A1 (zh) * 2018-10-24 2020-04-30 深圳市汇顶科技股份有限公司 超声换能器及其制造方法
CN110508474B (zh) * 2019-07-31 2020-10-27 西安交通大学 一种混合驱动mut单元结构及其参数化激励方法
AU2020344610A1 (en) 2019-09-12 2022-04-07 Exo Imaging, Inc. Increased MUT coupling efficiency and bandwidth via edge groove, virtual pivots, and free boundaries
US11738369B2 (en) * 2020-02-17 2023-08-29 GE Precision Healthcare LLC Capactive micromachined transducer having a high contact resistance part
US11951512B2 (en) 2021-03-31 2024-04-09 Exo Imaging, Inc. Imaging devices having piezoelectric transceivers with harmonic characteristics
US11819881B2 (en) 2021-03-31 2023-11-21 Exo Imaging, Inc. Imaging devices having piezoelectric transceivers with harmonic characteristics
US12486159B2 (en) 2021-06-30 2025-12-02 Exo Imaging, Inc. Micro-machined ultrasound transducers with insulation layer and methods of manufacture
CN115921260A (zh) * 2021-08-13 2023-04-07 上海新微技术研发中心有限公司 基于直流偏置的压电微机械超声换能器系统及调节方法
JP7553054B2 (ja) * 2021-10-21 2024-09-18 硅系半導体科技有限公司 音響誘導型半導体素子及び音響素子集積回路
CN114950925B (zh) * 2022-06-06 2023-05-23 清华大学 柔性可延展微机电系统超声阵列及医用超声诊断设备

Family Cites Families (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR900008393B1 (ko) * 1986-10-02 1990-11-17 미츠비시 덴키 가부시키가이샤 인버터장치의 과전류보호회로
US6283919B1 (en) 1996-11-26 2001-09-04 Atl Ultrasound Ultrasonic diagnostic imaging with blended tissue harmonic signals
US6458083B1 (en) 1996-11-26 2002-10-01 Koninklijke Philips Electronics N.V. Ultrasonic harmonic imaging with adaptive image formation
US5997479A (en) 1998-05-28 1999-12-07 Hewlett-Packard Company Phased array acoustic systems with intra-group processors
US6530885B1 (en) 2000-03-17 2003-03-11 Atl Ultrasound, Inc. Spatially compounded three dimensional ultrasonic images
US6443901B1 (en) 2000-06-15 2002-09-03 Koninklijke Philips Electronics N.V. Capacitive micromachined ultrasonic transducers
US6443896B1 (en) 2000-08-17 2002-09-03 Koninklijke Philips Electronics N.V. Method for creating multiplanar ultrasonic images of a three dimensional object
US6468216B1 (en) 2000-08-24 2002-10-22 Kininklijke Philips Electronics N.V. Ultrasonic diagnostic imaging of the coronary arteries
JP2005123376A (ja) * 2003-10-16 2005-05-12 Toshiba Corp 半導体装置及びその製造方法
JP2007527285A (ja) * 2004-02-27 2007-09-27 ジョージア テック リサーチ コーポレイション 多要素電極ｃｍｕｔ素子及び製作方法
US7403764B2 (en) * 2004-11-30 2008-07-22 Turner Terry R RF power delivery diagnostic system
US7293462B2 (en) * 2005-01-04 2007-11-13 General Electric Company Isolation of short-circuited sensor cells for high-reliability operation of sensor array
ATE553603T1 (de) * 2006-05-22 2012-04-15 Audio Pixels Ltd Direkt-digitallautsprechervorrichtung mit einer gewünschten richtcharakteristik
MY151910A (en) * 2006-05-22 2014-07-31 Audio Pixels Holdings Ltd Volume and tone control in direct digital speakers
US8457338B2 (en) * 2006-05-22 2013-06-04 Audio Pixels Ltd. Apparatus and methods for generating pressure waves
JP4885779B2 (ja) * 2007-03-29 2012-02-29 オリンパスメディカルシステムズ株式会社 静電容量型トランスデューサ装置及び体腔内超音波診断システム
CN101677806B (zh) * 2007-06-01 2013-03-27 皇家飞利浦电子股份有限公司 轻重量无线超声探头
JP5335807B2 (ja) * 2007-11-21 2013-11-06 オーディオ ピクセルズ リミテッド 改良型スピーカ装置およびそれと連携した有用な方法
JP5628178B2 (ja) 2008-09-16 2014-11-19 コーニンクレッカ フィリップス エヌ ヴェ 容量性マイクロマシン超音波トランスデューサ
EP2351381B1 (en) * 2008-10-02 2018-02-21 Audio Pixels Ltd. Actuator apparatus with comb-drive component and methods useful for manufacturing and operating same
US8431420B2 (en) * 2009-01-16 2013-04-30 Hitachi Medical Corporation Manufacturing method of ultrasonic probe and ultrasonic probe
JP5317826B2 (ja) * 2009-05-19 2013-10-16 キヤノン株式会社 容量型機械電気変換素子の製造方法
JP5404365B2 (ja) 2009-12-16 2014-01-29 キヤノン株式会社 電気機械変換装置及びその製造方法
CA2792741C (en) * 2010-03-11 2019-01-22 Audio Pixels Ltd. Electrostatic parallel plate actuators whose moving elements are driven only by electrostatic force and methods useful in conjunction therewith
US9425708B2 (en) * 2010-11-26 2016-08-23 Audio Pixels Ltd. Apparatus and methods for individual addressing and noise reduction in actuator arrays
US9261890B2 (en) * 2011-02-25 2016-02-16 Ut-Battelle, Llc Power flow control using distributed saturable reactors
US9242274B2 (en) * 2011-10-11 2016-01-26 The Board Of Trustees Of The Leland Stanford Junior University Pre-charged CMUTs for zero-external-bias operation
WO2013059749A1 (en) * 2011-10-20 2013-04-25 The Regents Of The University Of California Hollow supports and anchors for mechanical resonators
KR101894393B1 (ko) 2011-12-28 2018-09-04 삼성전자주식회사 초음파 변환기 구조물, 초음파 변환기 및 초음파 변환기의 제조 방법
JP6329491B2 (ja) 2012-03-13 2018-05-23 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 荷電電圧源を有する容量性マイクロマシン加工超音波トランスデューサ装置
DK2856769T3 (en) * 2012-05-25 2018-10-22 Audio Pixels Ltd SYSTEM, PROCEDURE AND COMPUTER PROGRAM PRODUCT TO CONTROL A GROUP OF ACTUATOR SYSTEMS FOR CREATING A PHYSICAL EFFECT
KR101919013B1 (ko) * 2012-09-13 2019-02-08 삼성전자주식회사 미세가공 초음파 변환기 어레이
JP5889165B2 (ja) * 2012-11-14 2016-03-22 ジーイー・メディカル・システムズ・グローバル・テクノロジー・カンパニー・エルエルシー 超音波プローブ及び超音波診断装置
US9654890B2 (en) * 2012-12-27 2017-05-16 Audio Pixels Ltd. System and method for testing
JP5855050B2 (ja) * 2013-07-10 2016-02-09 キヤノン株式会社 トランスデューサ、被検体情報取得装置
AU2014293274B2 (en) * 2013-07-23 2018-11-01 Butterfly Network, Inc. Interconnectable ultrasound transducer probes and related methods and apparatus
US9899047B2 (en) * 2013-10-10 2018-02-20 Seagate Technology Llc Bond pad sharing for powering a multiplicity of electrical components
WO2015126498A2 (en) * 2013-12-02 2015-08-27 The Regents Of The University Of California Micromechanical frequency divider
WO2015086413A1 (en) * 2013-12-12 2015-06-18 Koninklijke Philips N.V. Monolithically integrated three electrode cmut device

Also Published As

Publication number Publication date
CN107921480A (zh) 2018-04-17
US20180229268A1 (en) 2018-08-16
EP3334538A1 (en) 2018-06-20
JP2018530196A (ja) 2018-10-11
WO2017025438A1 (en) 2017-02-16
US11097312B2 (en) 2021-08-24
CN107921480B (zh) 2020-08-11

Similar Documents

Publication Publication Date Title
JP6767474B2 (ja) 増加される寿命を備える容量性マイクロマシン超音波トランスデューサ
US10555722B2 (en) Catheter transducer with staggered columns of micromachined ultrasonic transducers
JP6482558B2 (ja) モノリシックに集積された三電極ｃｍｕｔ装置
JP7216550B2 (ja) 広帯域超音波トランスジューサ
CN108348217B (zh) 超声换能器阵列、探头和系统
JP2017528178A (ja) 超音波トランスデューサ装置及びアセンブリ、同軸ワイヤアセンブリ、超音波プローブ並びに超音波イメージングシステム
US12246347B2 (en) Capacitive micro-machined ultrasound transducer (CMUT) devices and control methods
JP7268223B2 (ja) 増大された患者安全性を持つ容量性マイクロマシン超音波トランスデューサ
JP2017528032A (ja) ピッチ均一性を有したタイル状ｃｍｕｔダイ
JP7427027B2 (ja) 容量性微細加工超音波トランスデューサ（ｃｍｕｔ）デバイス
US11117165B2 (en) Capacitive micromachined ultrasonic transducers with overcurrent protection
WO2019038242A1 (en) ULTRASONIC TRANSDUCER ARRAY, DEVICE AND SYSTEM

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20190621

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20190621

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20200811

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20200827

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20200917

R150 Certificate of patent or registration of utility model

Ref document number: 6767474

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

LAPS Cancellation because of no payment of annual fees