JP2015079861A - 表示装置 - Google Patents
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- JP2015079861A JP2015079861A JP2013216298A JP2013216298A JP2015079861A JP 2015079861 A JP2015079861 A JP 2015079861A JP 2013216298 A JP2013216298 A JP 2013216298A JP 2013216298 A JP2013216298 A JP 2013216298A JP 2015079861 A JP2015079861 A JP 2015079861A
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- 239000010408 film Substances 0.000 claims abstract description 192
- 239000011347 resin Substances 0.000 claims abstract description 115
- 229920005989 resin Polymers 0.000 claims abstract description 115
- 229910052814 silicon oxide Inorganic materials 0.000 claims abstract description 90
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 89
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 34
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 34
- 239000010409 thin film Substances 0.000 claims abstract description 8
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- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
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- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
- H01L27/1262—Multistep manufacturing methods with a particular formation, treatment or coating of the substrate
- H01L27/1266—Multistep manufacturing methods with a particular formation, treatment or coating of the substrate the substrate on which the devices are formed not being the final device substrate, e.g. using a temporary substrate
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- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1218—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition or structure of the substrate
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- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1222—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
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- H01L29/66007—Multistep manufacturing processes
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- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66742—Thin film unipolar transistors
- H01L29/6675—Amorphous silicon or polysilicon transistors
- H01L29/66757—Lateral single gate single channel transistors with non-inverted structure, i.e. the channel layer is formed before the gate
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- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78684—Thin film transistors, i.e. transistors with a channel being at least partly a thin film having a semiconductor body comprising semiconductor materials of Group IV not being silicon, or alloys including an element of the group IV, e.g. Ge, SiN alloys, SiC alloys
Abstract
【解決手段】表示装置は、樹脂層10表面上に形成された下地絶縁層11と、下地絶縁層11を介して樹脂層10表面の上方に形成された薄膜トランジスタと、を備える。下地絶縁層11は、第1シリコン酸化膜1と、第1シリコン酸化膜1の上方に形成されたシリコン窒化膜2と、シリコン窒化膜2の上方に形成された第2シリコン酸化膜3の3層積層構造を含む。
【選択図】図2
Description
樹脂層表面上に形成された下地絶縁層と、
前記下地絶縁層を介して前記樹脂層表面の上方に形成された薄膜トランジスタと、を備え、
前記下地絶縁層は、第1シリコン酸化膜と、前記第1シリコン酸化膜の上方に形成されたシリコン窒化膜と、前記シリコン窒化膜の上方に形成された第2シリコン酸化膜の3層積層構造を含む。
表示装置は、ガラス基板又は樹脂層の上方にTFT(薄膜トランジスタ)を形成する等して形成される。ガラス基板又は樹脂層と、TFTとの間にはアンダーコート層が設けられている。アンダーコート層は、TFTの汚染(ガラス基板又は樹脂層からTFTへの不純物の拡散)を防止するためである。また、アンダーコート層は、下地絶縁層であり、TFTと電気的に隔離されている。
特長:イオンブロッキング性に優れているためTFTの汚染を防止することができる。
難点:SiNX膜の直上にSi層が形成されている場合、TFTの電気的特性に悪影響が及び、TFTのスイッチング素子としての使用が困難となる場合がある。Si層を多結晶化する際、SiNX膜の構成要素の窒素原子(余剰窒素)がSi層中に供給されるためである。上記のことは、N型ドーパントと同じ働きがあるため、Si層に電子を排出する機能を不所望に持たせてしまう。言い換えると、Si層の中で、窒素原子がドナーとして働いてしまい、電流を流したくないとき、電流を流し易くなってしまう。さらに言い換えると、Si層のチャネル領域を高抵抗にしなければならない状況においても、チャネル領域を流れるリーク電流が増大してしまう。
特長1:Si層との親和性に優れている。
特長2:不純物ドーピングの際の影響が小さい。
特長3:SiNX膜からSi層中への窒素原子(余剰窒素)の供給を防止することができる。
難点:TFTの汚染の防止への寄与が乏しい。
この場合、アンダーコート層と、a−Si(アモルファスシリコン)層とは同一機会にされることが多い。例えば、ガラス基板の温度が400℃程度となる同一CVD反応室内で、供給ガスの切替えのみで、ガラス基板上に、SiNX膜、SiO2膜、及びa−Si層の3層が連続的に順に形成される。SiNX膜は、SiH4ガスとNH3ガスとの混合ガスのプラズマ分解によりガラス基板上に形成される。SiO2膜は、SiH4ガスとN2Oガスとの混合ガスのプラズマ分解によりSiNX膜上に形成される。a−Si層は、SiH4ガスのプラズマ分解によりSiO2膜上に形成される。以降は、通常の低温p−Siを利用するTFTの製造工程を経る。
(1)ガラス基板の替わりに、プラスチック基板(樹脂基板)を用いる。
そこで、本発明の実施形態においては、この課題の原因を解明し、この課題を解決することにより、可撓性及び製品信頼性に優れた表示装置を得ることができるものである。次に、本発明の実施形態の課題解決のため、上記着想を具体化する手段について説明する。
図2に示すように、下地絶縁層11は、樹脂層10の表面上に形成されている。下地絶縁層11は、第1シリコン酸化膜1と、シリコン窒化膜2と、第2シリコン酸化膜3の3層積層構造を含んでいる。この実施形態において、下地絶縁層11は、上記3層でのみ形成されている。
図2に示すように、まず、支持基板としてのガラス基板100を用意する。続いて、ガラス基板100を洗浄(ブラシ洗浄)する。次いで、ワニス状の組成物であるポリイミド前駆体化合物をスリットコーター等の成膜装置を用いて5〜30μmの厚さでガラス基板100上に塗布(スリット塗布)した後、480℃で1時間、加熱処理することによって硬化させ、樹脂層10を形成する。
これにより、本実施形態に係る有機EL表示装置DAが製造される。
上記のことから、可撓性及び製品信頼性に優れた有機EL表示装置DAを得ることができる。
図3及び図2に示すように、この実施形態において、実施例1乃至4の有機EL表示装置DAについて説明する。
実施例1の有機EL表示装置DAは、上記第1の実施形態に係る有機EL表示装置DAと同様に形成されている。なお、第1シリコン酸化膜1の厚みは50nmである。
実施例2の有機EL表示装置DAは、第1シリコン酸化膜1の厚み以外、上記第1の実施形態に係る有機EL表示装置DAと同様に形成されている。なお、第1シリコン酸化膜1の厚みは10nmである。
実施例3の有機EL表示装置DAは、第1シリコン酸化膜1の厚み以外、上記第1の実施形態に係る有機EL表示装置DAと同様に形成されている。なお、第1シリコン酸化膜1の厚みは30nmである。
実施例4の有機EL表示装置DAは、第1シリコン酸化膜1の厚み以外、上記第1の実施形態に係る有機EL表示装置DAと同様に形成されている。なお、第1シリコン酸化膜1の厚みは100nmである。
図4に示すように、冶具200は、一対の棒201、202を備えている。棒201、202は、所定の間隔を置いて平行に設けられている。棒201、202の断面形状は円(真円)である。棒201、202の間隔は、調整可能であり、上記被評価物を固定する状態に調整されたり、棒201、202の間に上記被評価物を通すことのできる状態に調整されたりでき得る。また、棒201、202としては、直径の異なる複数種類の棒を取り替えて使用することができる。ここでは、棒201、202の直径を2Rとする。
上記のことから、可撓性及び製品信頼性に優れた有機EL表示装置DAを得ることができる。
図5に示すように、有機EL表示装置DAは、上述した第1の実施形態と同様に形成されている。有機EL表示装置DAを製造する際、第1シリコン酸化膜1が樹脂層10を完全に覆うように形成されている。なお、図示しないが、第1シリコン酸化膜1だけではなく、第1シリコン酸化膜1、シリコン窒化膜2及び第2シリコン酸化膜3の全てが樹脂層10を完全に覆うように形成されている。第1シリコン酸化膜1の周縁部は、ガラス基板100上に位置し、ガラス基板100に接着されている。第1シリコン酸化膜1の外周縁がガラス基板100の外周縁に所定の間隔(例えば、数mm)を置くように、第1シリコン酸化膜1がガラス基板100上に設けられている。
第1シリコン酸化膜1の周縁部は、ガラス基板100上に位置している。SiO2は、ガラスとの密着性に優れている。このため、製造工程中における、ガラス基板100から樹脂層10の不所望な剥離を低減することができる。
第1シリコン酸化膜1は、その外周縁が、ガラス基板100の外周縁に所定の間隔を置くように形成されている。このため、ガラス基板100の外周縁、又はその近傍まで第1シリコン酸化膜1等を形成した場合に生じ易くなる第1シリコン酸化膜1等の剥離物(塵)の発生を低減することができる。
また、第2シリコン酸化膜3の厚みが500nmを超えてもよい。但し、第1シリコン酸化膜1を厚くするほど、成膜の長期化を招き、厚みの均一性が失われる結果となる。
Claims (6)
- 樹脂層表面上に形成された下地絶縁層と、
前記下地絶縁層を介して前記樹脂層表面の上方に形成された薄膜トランジスタと、を備え、
前記下地絶縁層は、第1シリコン酸化膜と、前記第1シリコン酸化膜の上方に形成されたシリコン窒化膜と、前記シリコン窒化膜の上方に形成された第2シリコン酸化膜の3層積層構造を含む表示装置。 - 前記下地絶縁層において、前記樹脂層に接する層は前記第1シリコン酸化膜である請求項1に記載の表示装置。
- 前記下地絶縁層において、前記薄膜トランジスタの活性層に接する層は前記第2シリコン酸化膜である請求項1に記載の表示装置。
- 前記薄膜トランジスタの活性層は、ポリシリコンで形成されている請求項1に記載の表示装置。
- 前記第1シリコン酸化膜の厚みは、10nm以上100nm以下である請求項1に記載の表示装置。
- 前記第2シリコン酸化膜の厚みは、100nm以上500nm以下である請求項1に記載の表示装置。
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CN201410553294.0A CN104576654B (zh) | 2013-10-17 | 2014-10-17 | 显示装置 |
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JP2018205568A (ja) * | 2017-06-06 | 2018-12-27 | 株式会社ジャパンディスプレイ | 表示装置及びその製造方法 |
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