JP2015075488A5 - - Google Patents

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Publication number
JP2015075488A5
JP2015075488A5 JP2014204539A JP2014204539A JP2015075488A5 JP 2015075488 A5 JP2015075488 A5 JP 2015075488A5 JP 2014204539 A JP2014204539 A JP 2014204539A JP 2014204539 A JP2014204539 A JP 2014204539A JP 2015075488 A5 JP2015075488 A5 JP 2015075488A5
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JP
Japan
Prior art keywords
measuring device
position measuring
protective cover
measurement
scanning unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2014204539A
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English (en)
Japanese (ja)
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JP6291395B2 (ja
JP2015075488A (ja
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Publication date
Priority claimed from DE102013220196.6A external-priority patent/DE102013220196A1/de
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Publication of JP2015075488A publication Critical patent/JP2015075488A/ja
Publication of JP2015075488A5 publication Critical patent/JP2015075488A5/ja
Application granted granted Critical
Publication of JP6291395B2 publication Critical patent/JP6291395B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2014204539A 2013-10-07 2014-10-03 光学式位置測定装置 Active JP6291395B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102013220196.6A DE102013220196A1 (de) 2013-10-07 2013-10-07 Optische Positionsmesseinrichtung
DE102013220196.6 2013-10-07

Publications (3)

Publication Number Publication Date
JP2015075488A JP2015075488A (ja) 2015-04-20
JP2015075488A5 true JP2015075488A5 (enExample) 2017-11-16
JP6291395B2 JP6291395B2 (ja) 2018-03-14

Family

ID=51541017

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014204539A Active JP6291395B2 (ja) 2013-10-07 2014-10-03 光学式位置測定装置

Country Status (5)

Country Link
US (1) US9482517B2 (enExample)
EP (1) EP2866002B1 (enExample)
JP (1) JP6291395B2 (enExample)
CN (1) CN104515467B (enExample)
DE (1) DE102013220196A1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6533770B2 (ja) * 2016-11-10 2019-06-19 日東電工株式会社 基準器、分光干渉式計測装置、塗布装置、分光干渉式計測装置の計測精度保証方法、及び、塗布膜の製造方法。
CN112539714B (zh) * 2020-06-30 2022-07-26 深圳中科飞测科技股份有限公司 一种偏心检测方法、检测方法、处理方法及检测设备

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB475323A (en) * 1936-05-26 1937-11-17 Genevoise Instr Physique Improvements in and relating to measuring apparatus and machine-tools
DE2060696B2 (de) * 1970-12-10 1972-12-07 Lippke, Paul, 5450 Neuwied Einrichtung zum pruefen von bewegten bahnen aus papier o dgl auf falten, knoten und aehnlichen fehlstellen
KR100493847B1 (ko) * 2003-04-09 2005-06-08 삼성전자주식회사 파티클을 검출하기 위한 장치 및 방법
DE102005043569A1 (de) 2005-09-12 2007-03-22 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
US7602489B2 (en) 2006-02-22 2009-10-13 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7483120B2 (en) 2006-05-09 2009-01-27 Asml Netherlands B.V. Displacement measurement system, lithographic apparatus, displacement measurement method and device manufacturing method
WO2008038752A1 (en) * 2006-09-29 2008-04-03 Nikon Corporation Mobile unit system, pattern forming device, exposing device, exposing method, and device manufacturing method
JP4519832B2 (ja) * 2006-12-28 2010-08-04 株式会社堀場製作所 欠陥検査装置
DE102007023300A1 (de) * 2007-05-16 2008-11-20 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung und Anordnung derselben
US8902402B2 (en) * 2008-12-19 2014-12-02 Nikon Corporation Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method
JP5602420B2 (ja) 2009-12-10 2014-10-08 キヤノン株式会社 変位測定装置、露光装置、及び精密加工機器
DE102011075286A1 (de) * 2011-05-05 2012-11-08 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
DE102011076055A1 (de) * 2011-05-18 2012-11-22 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung

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