CN104515467B - 光学的位置测量装置 - Google Patents

光学的位置测量装置 Download PDF

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Publication number
CN104515467B
CN104515467B CN201410525165.0A CN201410525165A CN104515467B CN 104515467 B CN104515467 B CN 104515467B CN 201410525165 A CN201410525165 A CN 201410525165A CN 104515467 B CN104515467 B CN 104515467B
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China
Prior art keywords
protective cover
measurer
measurement device
scanning
air
Prior art date
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CN201410525165.0A
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English (en)
Chinese (zh)
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CN104515467A (zh
Inventor
沃尔夫冈·霍尔扎普费尔
约尔格·德雷谢尔
马库斯·迈斯纳
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Dr Johannes Heidenhain GmbH
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Dr Johannes Heidenhain GmbH
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Publication of CN104515467A publication Critical patent/CN104515467A/zh
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0403—Mechanical elements; Supports for optical elements; Scanning arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Optical Transform (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
CN201410525165.0A 2013-10-07 2014-10-08 光学的位置测量装置 Active CN104515467B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102013220196.6A DE102013220196A1 (de) 2013-10-07 2013-10-07 Optische Positionsmesseinrichtung
DE102013220196.6 2013-10-07

Publications (2)

Publication Number Publication Date
CN104515467A CN104515467A (zh) 2015-04-15
CN104515467B true CN104515467B (zh) 2018-07-24

Family

ID=51541017

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201410525165.0A Active CN104515467B (zh) 2013-10-07 2014-10-08 光学的位置测量装置

Country Status (5)

Country Link
US (1) US9482517B2 (enExample)
EP (1) EP2866002B1 (enExample)
JP (1) JP6291395B2 (enExample)
CN (1) CN104515467B (enExample)
DE (1) DE102013220196A1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6533770B2 (ja) * 2016-11-10 2019-06-19 日東電工株式会社 基準器、分光干渉式計測装置、塗布装置、分光干渉式計測装置の計測精度保証方法、及び、塗布膜の製造方法。
CN112539714B (zh) * 2020-06-30 2022-07-26 深圳中科飞测科技股份有限公司 一种偏心检测方法、检测方法、处理方法及检测设备

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB475323A (en) * 1936-05-26 1937-11-17 Genevoise Instr Physique Improvements in and relating to measuring apparatus and machine-tools
DE102007062020A1 (de) * 2006-12-28 2008-07-03 Horiba Ltd. Defektprüfeinrichtung
CN101688795A (zh) * 2007-05-16 2010-03-31 约翰尼斯海登海恩博士股份有限公司 光学位置测量装置
EP2520906A1 (de) * 2011-05-05 2012-11-07 Dr. Johannes Heidenhain GmbH Optische Positionsmesseinrichtung
CN102788553A (zh) * 2011-05-18 2012-11-21 约翰尼斯海登海恩博士股份有限公司 光学位置测量装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2060696B2 (de) * 1970-12-10 1972-12-07 Lippke, Paul, 5450 Neuwied Einrichtung zum pruefen von bewegten bahnen aus papier o dgl auf falten, knoten und aehnlichen fehlstellen
KR100493847B1 (ko) * 2003-04-09 2005-06-08 삼성전자주식회사 파티클을 검출하기 위한 장치 및 방법
DE102005043569A1 (de) 2005-09-12 2007-03-22 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
US7602489B2 (en) 2006-02-22 2009-10-13 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7483120B2 (en) 2006-05-09 2009-01-27 Asml Netherlands B.V. Displacement measurement system, lithographic apparatus, displacement measurement method and device manufacturing method
WO2008038752A1 (en) * 2006-09-29 2008-04-03 Nikon Corporation Mobile unit system, pattern forming device, exposing device, exposing method, and device manufacturing method
US8902402B2 (en) * 2008-12-19 2014-12-02 Nikon Corporation Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method
JP5602420B2 (ja) 2009-12-10 2014-10-08 キヤノン株式会社 変位測定装置、露光装置、及び精密加工機器

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB475323A (en) * 1936-05-26 1937-11-17 Genevoise Instr Physique Improvements in and relating to measuring apparatus and machine-tools
DE102007062020A1 (de) * 2006-12-28 2008-07-03 Horiba Ltd. Defektprüfeinrichtung
CN101688795A (zh) * 2007-05-16 2010-03-31 约翰尼斯海登海恩博士股份有限公司 光学位置测量装置
EP2520906A1 (de) * 2011-05-05 2012-11-07 Dr. Johannes Heidenhain GmbH Optische Positionsmesseinrichtung
CN102788553A (zh) * 2011-05-18 2012-11-21 约翰尼斯海登海恩博士股份有限公司 光学位置测量装置

Also Published As

Publication number Publication date
EP2866002A1 (de) 2015-04-29
US20150098093A1 (en) 2015-04-09
EP2866002B1 (de) 2016-01-13
DE102013220196A1 (de) 2015-04-09
US9482517B2 (en) 2016-11-01
JP6291395B2 (ja) 2018-03-14
JP2015075488A (ja) 2015-04-20
CN104515467A (zh) 2015-04-15

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