JP6291395B2 - 光学式位置測定装置 - Google Patents

光学式位置測定装置 Download PDF

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Publication number
JP6291395B2
JP6291395B2 JP2014204539A JP2014204539A JP6291395B2 JP 6291395 B2 JP6291395 B2 JP 6291395B2 JP 2014204539 A JP2014204539 A JP 2014204539A JP 2014204539 A JP2014204539 A JP 2014204539A JP 6291395 B2 JP6291395 B2 JP 6291395B2
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JP
Japan
Prior art keywords
protective cover
measuring device
position measuring
measurement
air
Prior art date
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Active
Application number
JP2014204539A
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English (en)
Japanese (ja)
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JP2015075488A5 (enExample
JP2015075488A (ja
Inventor
ヴォルフガング・ホルツアップフェル
イェルク・ドレシャー
マルクス・マイスナー
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
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Dr Johannes Heidenhain GmbH
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Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Publication of JP2015075488A publication Critical patent/JP2015075488A/ja
Publication of JP2015075488A5 publication Critical patent/JP2015075488A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0403—Mechanical elements; Supports for optical elements; Scanning arrangements

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Optical Transform (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP2014204539A 2013-10-07 2014-10-03 光学式位置測定装置 Active JP6291395B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102013220196.6A DE102013220196A1 (de) 2013-10-07 2013-10-07 Optische Positionsmesseinrichtung
DE102013220196.6 2013-10-07

Publications (3)

Publication Number Publication Date
JP2015075488A JP2015075488A (ja) 2015-04-20
JP2015075488A5 JP2015075488A5 (enExample) 2017-11-16
JP6291395B2 true JP6291395B2 (ja) 2018-03-14

Family

ID=51541017

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014204539A Active JP6291395B2 (ja) 2013-10-07 2014-10-03 光学式位置測定装置

Country Status (5)

Country Link
US (1) US9482517B2 (enExample)
EP (1) EP2866002B1 (enExample)
JP (1) JP6291395B2 (enExample)
CN (1) CN104515467B (enExample)
DE (1) DE102013220196A1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6533770B2 (ja) * 2016-11-10 2019-06-19 日東電工株式会社 基準器、分光干渉式計測装置、塗布装置、分光干渉式計測装置の計測精度保証方法、及び、塗布膜の製造方法。
CN112539714B (zh) * 2020-06-30 2022-07-26 深圳中科飞测科技股份有限公司 一种偏心检测方法、检测方法、处理方法及检测设备

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB475323A (en) * 1936-05-26 1937-11-17 Genevoise Instr Physique Improvements in and relating to measuring apparatus and machine-tools
DE2060696B2 (de) * 1970-12-10 1972-12-07 Lippke, Paul, 5450 Neuwied Einrichtung zum pruefen von bewegten bahnen aus papier o dgl auf falten, knoten und aehnlichen fehlstellen
KR100493847B1 (ko) * 2003-04-09 2005-06-08 삼성전자주식회사 파티클을 검출하기 위한 장치 및 방법
DE102005043569A1 (de) 2005-09-12 2007-03-22 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
US7602489B2 (en) 2006-02-22 2009-10-13 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7483120B2 (en) 2006-05-09 2009-01-27 Asml Netherlands B.V. Displacement measurement system, lithographic apparatus, displacement measurement method and device manufacturing method
WO2008038752A1 (en) * 2006-09-29 2008-04-03 Nikon Corporation Mobile unit system, pattern forming device, exposing device, exposing method, and device manufacturing method
JP4519832B2 (ja) * 2006-12-28 2010-08-04 株式会社堀場製作所 欠陥検査装置
DE102007023300A1 (de) * 2007-05-16 2008-11-20 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung und Anordnung derselben
US8902402B2 (en) * 2008-12-19 2014-12-02 Nikon Corporation Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method
JP5602420B2 (ja) 2009-12-10 2014-10-08 キヤノン株式会社 変位測定装置、露光装置、及び精密加工機器
DE102011075286A1 (de) * 2011-05-05 2012-11-08 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
DE102011076055A1 (de) * 2011-05-18 2012-11-22 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung

Also Published As

Publication number Publication date
EP2866002A1 (de) 2015-04-29
US20150098093A1 (en) 2015-04-09
EP2866002B1 (de) 2016-01-13
DE102013220196A1 (de) 2015-04-09
CN104515467B (zh) 2018-07-24
US9482517B2 (en) 2016-11-01
JP2015075488A (ja) 2015-04-20
CN104515467A (zh) 2015-04-15

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