DE102013220196A1 - Optische Positionsmesseinrichtung - Google Patents

Optische Positionsmesseinrichtung Download PDF

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Publication number
DE102013220196A1
DE102013220196A1 DE102013220196.6A DE102013220196A DE102013220196A1 DE 102013220196 A1 DE102013220196 A1 DE 102013220196A1 DE 102013220196 A DE102013220196 A DE 102013220196A DE 102013220196 A1 DE102013220196 A1 DE 102013220196A1
Authority
DE
Germany
Prior art keywords
measuring device
protective hood
position measuring
material measure
protective
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE102013220196.6A
Other languages
German (de)
English (en)
Inventor
Wolfgang Holzapfel
Jörg Drescher
Markus Meissner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
Original Assignee
Dr Johannes Heidenhain GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Priority to DE102013220196.6A priority Critical patent/DE102013220196A1/de
Priority to EP14185044.6A priority patent/EP2866002B1/de
Priority to JP2014204539A priority patent/JP6291395B2/ja
Priority to US14/508,473 priority patent/US9482517B2/en
Priority to CN201410525165.0A priority patent/CN104515467B/zh
Publication of DE102013220196A1 publication Critical patent/DE102013220196A1/de
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0403—Mechanical elements; Supports for optical elements; Scanning arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Optical Transform (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
DE102013220196.6A 2013-10-07 2013-10-07 Optische Positionsmesseinrichtung Withdrawn DE102013220196A1 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE102013220196.6A DE102013220196A1 (de) 2013-10-07 2013-10-07 Optische Positionsmesseinrichtung
EP14185044.6A EP2866002B1 (de) 2013-10-07 2014-09-17 Optische Positionsmesseinrichtung
JP2014204539A JP6291395B2 (ja) 2013-10-07 2014-10-03 光学式位置測定装置
US14/508,473 US9482517B2 (en) 2013-10-07 2014-10-07 Optical position-measuring device
CN201410525165.0A CN104515467B (zh) 2013-10-07 2014-10-08 光学的位置测量装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102013220196.6A DE102013220196A1 (de) 2013-10-07 2013-10-07 Optische Positionsmesseinrichtung

Publications (1)

Publication Number Publication Date
DE102013220196A1 true DE102013220196A1 (de) 2015-04-09

Family

ID=51541017

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102013220196.6A Withdrawn DE102013220196A1 (de) 2013-10-07 2013-10-07 Optische Positionsmesseinrichtung

Country Status (5)

Country Link
US (1) US9482517B2 (enExample)
EP (1) EP2866002B1 (enExample)
JP (1) JP6291395B2 (enExample)
CN (1) CN104515467B (enExample)
DE (1) DE102013220196A1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6533770B2 (ja) * 2016-11-10 2019-06-19 日東電工株式会社 基準器、分光干渉式計測装置、塗布装置、分光干渉式計測装置の計測精度保証方法、及び、塗布膜の製造方法。
CN112539714B (zh) * 2020-06-30 2022-07-26 深圳中科飞测科技股份有限公司 一种偏心检测方法、检测方法、处理方法及检测设备

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1762828A2 (de) 2005-09-12 2007-03-14 Dr. Johannes Heidenhain GmbH Optische Positionsmesseinrichtung zur Erfassung der Position zweier zueinander beweglicher Teile in zwei Bewegungsrichtungen

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB475323A (en) * 1936-05-26 1937-11-17 Genevoise Instr Physique Improvements in and relating to measuring apparatus and machine-tools
DE2060696B2 (de) * 1970-12-10 1972-12-07 Lippke, Paul, 5450 Neuwied Einrichtung zum pruefen von bewegten bahnen aus papier o dgl auf falten, knoten und aehnlichen fehlstellen
KR100493847B1 (ko) * 2003-04-09 2005-06-08 삼성전자주식회사 파티클을 검출하기 위한 장치 및 방법
US7602489B2 (en) 2006-02-22 2009-10-13 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7483120B2 (en) 2006-05-09 2009-01-27 Asml Netherlands B.V. Displacement measurement system, lithographic apparatus, displacement measurement method and device manufacturing method
KR101360507B1 (ko) * 2006-09-29 2014-02-07 가부시키가이샤 니콘 이동체 시스템, 패턴 형성 장치, 노광 장치 및 노광 방법, 그리고 디바이스 제조 방법
JP4519832B2 (ja) * 2006-12-28 2010-08-04 株式会社堀場製作所 欠陥検査装置
DE102007023300A1 (de) * 2007-05-16 2008-11-20 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung und Anordnung derselben
US8902402B2 (en) * 2008-12-19 2014-12-02 Nikon Corporation Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method
JP5602420B2 (ja) 2009-12-10 2014-10-08 キヤノン株式会社 変位測定装置、露光装置、及び精密加工機器
DE102011075286A1 (de) * 2011-05-05 2012-11-08 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
DE102011076055A1 (de) * 2011-05-18 2012-11-22 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1762828A2 (de) 2005-09-12 2007-03-14 Dr. Johannes Heidenhain GmbH Optische Positionsmesseinrichtung zur Erfassung der Position zweier zueinander beweglicher Teile in zwei Bewegungsrichtungen

Also Published As

Publication number Publication date
US9482517B2 (en) 2016-11-01
CN104515467A (zh) 2015-04-15
US20150098093A1 (en) 2015-04-09
EP2866002A1 (de) 2015-04-29
JP6291395B2 (ja) 2018-03-14
EP2866002B1 (de) 2016-01-13
JP2015075488A (ja) 2015-04-20
CN104515467B (zh) 2018-07-24

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Legal Events

Date Code Title Description
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee