JP2015502665A5 - - Google Patents

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Publication number
JP2015502665A5
JP2015502665A5 JP2014545145A JP2014545145A JP2015502665A5 JP 2015502665 A5 JP2015502665 A5 JP 2015502665A5 JP 2014545145 A JP2014545145 A JP 2014545145A JP 2014545145 A JP2014545145 A JP 2014545145A JP 2015502665 A5 JP2015502665 A5 JP 2015502665A5
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JP
Japan
Prior art keywords
radiation
radiation source
sensor arrangement
incident
reflector
Prior art date
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Application number
JP2014545145A
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English (en)
Japanese (ja)
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JP2015502665A (ja
JP6125525B2 (ja
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Priority claimed from PCT/EP2012/071688 external-priority patent/WO2013083335A2/en
Publication of JP2015502665A publication Critical patent/JP2015502665A/ja
Publication of JP2015502665A5 publication Critical patent/JP2015502665A5/ja
Application granted granted Critical
Publication of JP6125525B2 publication Critical patent/JP6125525B2/ja
Active legal-status Critical Current
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JP2014545145A 2011-12-06 2012-11-02 放射源 Active JP6125525B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201161567436P 2011-12-06 2011-12-06
US61/567,436 2011-12-06
US201261702481P 2012-09-18 2012-09-18
US61/702,481 2012-09-18
PCT/EP2012/071688 WO2013083335A2 (en) 2011-12-06 2012-11-02 Radiation source

Publications (3)

Publication Number Publication Date
JP2015502665A JP2015502665A (ja) 2015-01-22
JP2015502665A5 true JP2015502665A5 (enExample) 2015-12-17
JP6125525B2 JP6125525B2 (ja) 2017-05-10

Family

ID=47146381

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014545145A Active JP6125525B2 (ja) 2011-12-06 2012-11-02 放射源

Country Status (3)

Country Link
US (1) US9500953B2 (enExample)
JP (1) JP6125525B2 (enExample)
WO (1) WO2013083335A2 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2601298Y2 (ja) 1993-11-05 1999-11-15 株式会社ウロコ製作所 ベニヤレース用チャック
US8681427B2 (en) * 2012-05-31 2014-03-25 Cymer, Inc. System and method for separating a main pulse and a pre-pulse beam from a laser source
DE102012217120A1 (de) 2012-09-24 2014-03-27 Trumpf Laser- Und Systemtechnik Gmbh EUV-Strahlungserzeugungsvorrichtung und Betriebsverfahren dafür
US9678431B2 (en) * 2015-03-16 2017-06-13 Taiwan Semiconductor Manufacturing Company, Ltd. EUV lithography system and method with optimized throughput and stability
JP7324751B2 (ja) * 2017-11-29 2023-08-10 エーエスエムエル ネザーランズ ビー．ブイ． レーザビームモニタリングシステム
NL2023633A (en) * 2018-09-25 2020-04-30 Asml Netherlands Bv Laser system for target metrology and alteration in an euv light source
NL2024323A (en) 2018-12-18 2020-07-07 Asml Netherlands Bv Sacrifical device for protecting an optical element in a path of a high-power laser beam
US10991544B2 (en) * 2019-05-29 2021-04-27 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Charged particle beam device, objective lens module, electrode device, and method of inspecting a specimen
JP7426299B2 (ja) * 2020-06-26 2024-02-01 ギガフォトン株式会社 極端紫外光生成システム及び電子デバイスの製造方法
US11340531B2 (en) 2020-07-10 2022-05-24 Taiwan Semiconductor Manufacturing Company, Ltd. Target control in extreme ultraviolet lithography systems using aberration of reflection image
EP4307842A1 (en) * 2022-07-11 2024-01-17 ASML Netherlands B.V. Metrology and control system
EP4568425A1 (en) * 2023-12-05 2025-06-11 ASML Netherlands B.V. Laser powered plasma based euv generation system

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4917014B2 (ja) 2004-03-10 2012-04-18 サイマー インコーポレイテッド Ｅｕｖ光源
US7087914B2 (en) 2004-03-17 2006-08-08 Cymer, Inc High repetition rate laser produced plasma EUV light source
JP4932592B2 (ja) * 2007-05-14 2012-05-16 株式会社小松製作所 極端紫外光源装置
US8445876B2 (en) * 2008-10-24 2013-05-21 Gigaphoton Inc. Extreme ultraviolet light source apparatus
JP5368261B2 (ja) 2008-11-06 2013-12-18 ギガフォトン株式会社 極端紫外光源装置、極端紫外光源装置の制御方法
US8138487B2 (en) * 2009-04-09 2012-03-20 Cymer, Inc. System, method and apparatus for droplet catcher for prevention of backsplash in a EUV generation chamber
US8173985B2 (en) * 2009-12-15 2012-05-08 Cymer, Inc. Beam transport system for extreme ultraviolet light source

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