JP2015073207A - 弾性波共振器 - Google Patents

弾性波共振器 Download PDF

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Publication number
JP2015073207A
JP2015073207A JP2013208005A JP2013208005A JP2015073207A JP 2015073207 A JP2015073207 A JP 2015073207A JP 2013208005 A JP2013208005 A JP 2013208005A JP 2013208005 A JP2013208005 A JP 2013208005A JP 2015073207 A JP2015073207 A JP 2015073207A
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JP
Japan
Prior art keywords
electrode
region
electrode finger
pitch
wave resonator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2013208005A
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English (en)
Japanese (ja)
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JP2015073207A5 (https=
Inventor
英仁 清水
Hideto Shimizu
英仁 清水
中村　弘幸
Hiroyuki Nakamura
弘幸 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Skyworks Filter Solutions Japan Co Ltd
Original Assignee
Skyworks Panasonic Filter Solutions Japan Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Skyworks Panasonic Filter Solutions Japan Co Ltd filed Critical Skyworks Panasonic Filter Solutions Japan Co Ltd
Priority to JP2013208005A priority Critical patent/JP2015073207A/ja
Priority to US14/496,207 priority patent/US9413330B2/en
Publication of JP2015073207A publication Critical patent/JP2015073207A/ja
Publication of JP2015073207A5 publication Critical patent/JP2015073207A5/ja
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14517—Means for weighting
    • H03H9/1452—Means for weighting by finger overlap length, apodisation
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02834—Means for compensation or elimination of undesirable effects of temperature influence
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position
    • H03H9/14564—Shifted fingers transducers
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position
    • H03H9/14573—Arrow type transducers
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position
    • H03H9/14576—Transducers whereby only the last fingers have different characteristics with respect to the other fingers, e.g. different shape, thickness or material, split finger
    • H03H9/14582—Transducers whereby only the last fingers have different characteristics with respect to the other fingers, e.g. different shape, thickness or material, split finger the last fingers having a different pitch
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02992—Details of bus bars, contact pads or other electrical connections for finger electrodes

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP2013208005A 2013-10-03 2013-10-03 弾性波共振器 Pending JP2015073207A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2013208005A JP2015073207A (ja) 2013-10-03 2013-10-03 弾性波共振器
US14/496,207 US9413330B2 (en) 2013-10-03 2014-09-25 Elastic wave resonator including a constant pitch region with a tapering width

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013208005A JP2015073207A (ja) 2013-10-03 2013-10-03 弾性波共振器

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2016182500A Division JP6276354B2 (ja) 2016-09-20 2016-09-20 インタデジタルトランスデューサ

Publications (2)

Publication Number Publication Date
JP2015073207A true JP2015073207A (ja) 2015-04-16
JP2015073207A5 JP2015073207A5 (https=) 2016-11-04

Family

ID=53015291

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013208005A Pending JP2015073207A (ja) 2013-10-03 2013-10-03 弾性波共振器

Country Status (2)

Country Link
US (1) US9413330B2 (https=)
JP (1) JP2015073207A (https=)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2015080278A1 (ja) * 2013-11-29 2017-03-16 京セラ株式会社 弾性波素子、分波器および通信装置
WO2019117133A1 (ja) * 2017-12-12 2019-06-20 株式会社村田製作所 マルチプレクサ、高周波フロントエンド回路および通信装置
US10389391B2 (en) 2016-01-29 2019-08-20 Kyocera Corporation Acoustic wave resonator, acoustic wave filter, multiplexer, and communication apparatus
WO2019198594A1 (ja) * 2018-04-11 2019-10-17 京セラ株式会社 弾性波素子、弾性波フィルタ、分波器および通信装置
JPWO2019049893A1 (ja) * 2017-09-07 2020-10-08 株式会社村田製作所 弾性波装置
WO2023282330A1 (ja) * 2021-07-08 2023-01-12 株式会社村田製作所 弾性波素子、弾性波フィルタ装置およびマルチプレクサ

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9837258B2 (en) * 2015-05-22 2017-12-05 Honeywell International Inc. Ion trap with variable pitch electrodes
US10308522B2 (en) 2016-05-31 2019-06-04 Skyworks Solutions, Inc. High Q modified barium magnesium tantalate for high frequency applications
CN109891612A (zh) 2016-10-20 2019-06-14 天工方案公司 具有亚波长厚度的压电层的弹性波器件
US10461720B2 (en) 2017-09-21 2019-10-29 Snaptrack, Inc. Acoustic filter
SG10201911416RA (en) * 2018-12-03 2020-07-29 Skyworks Solutions Inc Acoustic Wave Device With Transverse Spurious Mode Suppression
US11606078B2 (en) 2019-07-18 2023-03-14 Skyworks Solutions, Inc. Acoustic wave resonator with rotated and tilted interdigital transducer electrode
US11431319B2 (en) * 2019-08-22 2022-08-30 Skyworks Solutions, Inc. Acoustic wave device with varying electrode pitch
US12483221B2 (en) * 2021-07-15 2025-11-25 Skyworks Solutions, Inc. Multilayer piezoelectric substrate device with partially recessed passivation layer
JP2023044392A (ja) * 2021-09-17 2023-03-30 株式会社村田製作所 弾性波素子、弾性波フィルタ装置およびマルチプレクサ
US12525951B2 (en) 2021-10-01 2026-01-13 Skyworks Solutions, Inc. Surface acoustic wave device having a trapezoidal electrode
US12438519B2 (en) 2021-12-06 2025-10-07 Skyworks Solutions, Inc. Methods of manufacturing multi-band surface acoustic wave filters
US20230208385A1 (en) 2021-12-28 2023-06-29 Skyworks Solutions, Inc. Acoustic wave device with tilted interdigital transducer electrode
US12483226B2 (en) 2021-12-29 2025-11-25 Skyworks Solutions, Inc. Acoustic wave device with tilted multilayer interdigital transducer electrode
US12470199B2 (en) 2022-01-13 2025-11-11 Skyworks Solutions, Inc. Acoustic wave device with vertically mass loaded multi-layer interdigital transducer electrode for transverse mode suppression
US12587171B2 (en) 2022-03-18 2026-03-24 Skyworks Solutions, Inc. Passband filter combining two sets of components
US20230343659A1 (en) 2022-03-30 2023-10-26 Skyworks Solutions, Inc. Integrated device package with opening in carrier
US12542524B2 (en) 2022-04-08 2026-02-03 Skyworks Solutions, Inc. Acoustic wave device with trench portions and narrow interdigital transducer tip portions for transverse mode suppression
US20230344411A1 (en) 2022-04-15 2023-10-26 Skyworks Solutions, Inc. Multiplexer with dies of different acoustic velocity

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005204042A (ja) * 2004-01-15 2005-07-28 Seiko Epson Corp 弾性表面波共振子および弾性表面波フィルタ
WO2008038481A1 (en) * 2006-09-28 2008-04-03 Murata Manufacturing Co., Ltd. Acoustic wave filter
JP2008252678A (ja) * 2007-03-30 2008-10-16 Tdk Corp 縦結合共振子型弾性表面波フィルタ
JP2009219045A (ja) * 2008-03-12 2009-09-24 Nippon Dempa Kogyo Co Ltd 弾性波共振子及び弾性波デバイス
JP2010278646A (ja) * 2009-05-27 2010-12-09 Murata Mfg Co Ltd 弾性波装置
JP2011114826A (ja) * 2009-11-30 2011-06-09 Taiyo Yuden Co Ltd フィルタ、分波器、通信モジュール
JP2012138964A (ja) * 2004-01-09 2012-07-19 Panasonic Corp 弾性表面波共振子及びこれを用いた弾性表面波フィルタ
JP2012186808A (ja) * 2011-03-07 2012-09-27 Triquint Semiconductor Inc トリミング効果とピストンモードでの不安定性を最小化する音響波導波装置および方法
WO2012132238A1 (en) * 2011-03-25 2012-10-04 Panasonic Corporation Acoustic wave device with reduced higher order transverse modes

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Publication number Priority date Publication date Assignee Title
JP3614234B2 (ja) * 1996-03-14 2005-01-26 沖電気工業株式会社 共振器型弾性表面波フィルタ
JP3449352B2 (ja) * 2000-02-07 2003-09-22 株式会社村田製作所 弾性表面波フィルタ
JP3863712B2 (ja) * 2000-09-06 2006-12-27 株式会社日立製作所 弾性表面波共振器
US8294331B2 (en) 2009-09-22 2012-10-23 Triquint Semiconductor, Inc. Acoustic wave guide device and method for minimizing trimming effects and piston mode instabilities
US7939989B2 (en) 2009-09-22 2011-05-10 Triquint Semiconductor, Inc. Piston mode acoustic wave device and method providing a high coupling factor
JP5397477B2 (ja) * 2010-06-22 2014-01-22 株式会社村田製作所 ラダー型弾性波フィルタ装置及び分波器

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012138964A (ja) * 2004-01-09 2012-07-19 Panasonic Corp 弾性表面波共振子及びこれを用いた弾性表面波フィルタ
JP2005204042A (ja) * 2004-01-15 2005-07-28 Seiko Epson Corp 弾性表面波共振子および弾性表面波フィルタ
WO2008038481A1 (en) * 2006-09-28 2008-04-03 Murata Manufacturing Co., Ltd. Acoustic wave filter
JP2008252678A (ja) * 2007-03-30 2008-10-16 Tdk Corp 縦結合共振子型弾性表面波フィルタ
JP2009219045A (ja) * 2008-03-12 2009-09-24 Nippon Dempa Kogyo Co Ltd 弾性波共振子及び弾性波デバイス
JP2010278646A (ja) * 2009-05-27 2010-12-09 Murata Mfg Co Ltd 弾性波装置
JP2011114826A (ja) * 2009-11-30 2011-06-09 Taiyo Yuden Co Ltd フィルタ、分波器、通信モジュール
JP2012186808A (ja) * 2011-03-07 2012-09-27 Triquint Semiconductor Inc トリミング効果とピストンモードでの不安定性を最小化する音響波導波装置および方法
WO2012132238A1 (en) * 2011-03-25 2012-10-04 Panasonic Corporation Acoustic wave device with reduced higher order transverse modes

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2015080278A1 (ja) * 2013-11-29 2017-03-16 京セラ株式会社 弾性波素子、分波器および通信装置
US10389391B2 (en) 2016-01-29 2019-08-20 Kyocera Corporation Acoustic wave resonator, acoustic wave filter, multiplexer, and communication apparatus
JPWO2019049893A1 (ja) * 2017-09-07 2020-10-08 株式会社村田製作所 弾性波装置
WO2019117133A1 (ja) * 2017-12-12 2019-06-20 株式会社村田製作所 マルチプレクサ、高周波フロントエンド回路および通信装置
JPWO2019117133A1 (ja) * 2017-12-12 2020-07-27 株式会社村田製作所 マルチプレクサ、高周波フロントエンド回路および通信装置
US10958247B2 (en) 2017-12-12 2021-03-23 Murata Manufacturing Co., Ltd. Multiplexer, high-frequency front-end circuit, and communication device
WO2019198594A1 (ja) * 2018-04-11 2019-10-17 京セラ株式会社 弾性波素子、弾性波フィルタ、分波器および通信装置
JPWO2019198594A1 (ja) * 2018-04-11 2021-04-15 京セラ株式会社 弾性波素子、弾性波フィルタ、分波器および通信装置
JP7433216B2 (ja) 2018-04-11 2024-02-19 京セラ株式会社 弾性波素子、弾性波フィルタ、分波器および通信装置
WO2023282330A1 (ja) * 2021-07-08 2023-01-12 株式会社村田製作所 弾性波素子、弾性波フィルタ装置およびマルチプレクサ

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Publication number Publication date
US9413330B2 (en) 2016-08-09
US20160056791A1 (en) 2016-02-25

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