JP2015073207A5 - - Google Patents
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- Publication number
- JP2015073207A5 JP2015073207A5 JP2013208005A JP2013208005A JP2015073207A5 JP 2015073207 A5 JP2015073207 A5 JP 2015073207A5 JP 2013208005 A JP2013208005 A JP 2013208005A JP 2013208005 A JP2013208005 A JP 2013208005A JP 2015073207 A5 JP2015073207 A5 JP 2015073207A5
- Authority
- JP
- Japan
- Prior art keywords
- region
- electrode
- pitch
- electrode finger
- constant
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 239000000758 substrate Substances 0.000 claims 6
- 239000010408 film Substances 0.000 claims 4
- 230000007423 decrease Effects 0.000 claims 3
- 239000010409 thin film Substances 0.000 claims 3
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013208005A JP2015073207A (ja) | 2013-10-03 | 2013-10-03 | 弾性波共振器 |
| US14/496,207 US9413330B2 (en) | 2013-10-03 | 2014-09-25 | Elastic wave resonator including a constant pitch region with a tapering width |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013208005A JP2015073207A (ja) | 2013-10-03 | 2013-10-03 | 弾性波共振器 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016182500A Division JP6276354B2 (ja) | 2016-09-20 | 2016-09-20 | インタデジタルトランスデューサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2015073207A JP2015073207A (ja) | 2015-04-16 |
| JP2015073207A5 true JP2015073207A5 (https=) | 2016-11-04 |
Family
ID=53015291
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013208005A Pending JP2015073207A (ja) | 2013-10-03 | 2013-10-03 | 弾性波共振器 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US9413330B2 (https=) |
| JP (1) | JP2015073207A (https=) |
Families Citing this family (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015080278A1 (ja) * | 2013-11-29 | 2015-06-04 | 京セラ株式会社 | 弾性波素子、分波器および通信装置 |
| US9837258B2 (en) * | 2015-05-22 | 2017-12-05 | Honeywell International Inc. | Ion trap with variable pitch electrodes |
| JP6445152B2 (ja) | 2016-01-29 | 2018-12-26 | 京セラ株式会社 | 弾性波共振子、弾性波フィルタ、分波器および通信装置 |
| US10308522B2 (en) | 2016-05-31 | 2019-06-04 | Skyworks Solutions, Inc. | High Q modified barium magnesium tantalate for high frequency applications |
| SG11201903365SA (en) | 2016-10-20 | 2019-05-30 | Skyworks Solutions Inc | Elastic wave device with sub-wavelength thick piezoelectric layer |
| KR102291606B1 (ko) * | 2017-09-07 | 2021-08-19 | 가부시키가이샤 무라타 세이사쿠쇼 | 탄성파 장치 |
| US10461720B2 (en) | 2017-09-21 | 2019-10-29 | Snaptrack, Inc. | Acoustic filter |
| JP6791403B2 (ja) * | 2017-12-12 | 2020-11-25 | 株式会社村田製作所 | マルチプレクサ、高周波フロントエンド回路および通信装置 |
| WO2019198594A1 (ja) * | 2018-04-11 | 2019-10-17 | 京セラ株式会社 | 弾性波素子、弾性波フィルタ、分波器および通信装置 |
| SG10201911416RA (en) | 2018-12-03 | 2020-07-29 | Skyworks Solutions Inc | Acoustic Wave Device With Transverse Spurious Mode Suppression |
| US11606078B2 (en) | 2019-07-18 | 2023-03-14 | Skyworks Solutions, Inc. | Acoustic wave resonator with rotated and tilted interdigital transducer electrode |
| US11431319B2 (en) * | 2019-08-22 | 2022-08-30 | Skyworks Solutions, Inc. | Acoustic wave device with varying electrode pitch |
| WO2023282330A1 (ja) * | 2021-07-08 | 2023-01-12 | 株式会社村田製作所 | 弾性波素子、弾性波フィルタ装置およびマルチプレクサ |
| US12483221B2 (en) * | 2021-07-15 | 2025-11-25 | Skyworks Solutions, Inc. | Multilayer piezoelectric substrate device with partially recessed passivation layer |
| JP2023044392A (ja) * | 2021-09-17 | 2023-03-30 | 株式会社村田製作所 | 弾性波素子、弾性波フィルタ装置およびマルチプレクサ |
| US12525951B2 (en) | 2021-10-01 | 2026-01-13 | Skyworks Solutions, Inc. | Surface acoustic wave device having a trapezoidal electrode |
| US12506464B2 (en) | 2021-12-06 | 2025-12-23 | Skyworks Solutions, Inc. | Multi-band surface acoustic wave filters |
| US20230208385A1 (en) | 2021-12-28 | 2023-06-29 | Skyworks Solutions, Inc. | Acoustic wave device with tilted interdigital transducer electrode |
| US12483226B2 (en) | 2021-12-29 | 2025-11-25 | Skyworks Solutions, Inc. | Acoustic wave device with tilted multilayer interdigital transducer electrode |
| US20230223910A1 (en) | 2022-01-13 | 2023-07-13 | Skyworks Solutions, Inc. | Method of making acoustic wave device with vertically mass loaded multi-layer interdigital transducer electrode for transverse mode suppression |
| US12587171B2 (en) | 2022-03-18 | 2026-03-24 | Skyworks Solutions, Inc. | Passband filter combining two sets of components |
| US12525494B2 (en) | 2022-03-30 | 2026-01-13 | Skyworks Solutions, Inc. | Composited carrier for microphone package |
| US20230327630A1 (en) | 2022-04-08 | 2023-10-12 | Skyworks Solutions, Inc. | Method of manufacture of acoustic wave device with trench portions for transverse mode suppression |
| US12500572B2 (en) | 2022-04-15 | 2025-12-16 | Skyworks Solutions, Inc. | Multiplexer formed on multi-layer piezoelectric substrate and temperature compensated surface acoustic wave device dies |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3614234B2 (ja) * | 1996-03-14 | 2005-01-26 | 沖電気工業株式会社 | 共振器型弾性表面波フィルタ |
| JP3449352B2 (ja) * | 2000-02-07 | 2003-09-22 | 株式会社村田製作所 | 弾性表面波フィルタ |
| JP3863712B2 (ja) * | 2000-09-06 | 2006-12-27 | 株式会社日立製作所 | 弾性表面波共振器 |
| US7679474B2 (en) | 2004-01-09 | 2010-03-16 | Panasonic Corporation | Surface acoustic wave resonator, and surface acoustic wave filter |
| JP2005204042A (ja) * | 2004-01-15 | 2005-07-28 | Seiko Epson Corp | 弾性表面波共振子および弾性表面波フィルタ |
| CN101517894B (zh) * | 2006-09-28 | 2011-12-28 | 株式会社村田制作所 | 弹性波滤波装置 |
| JP2008252678A (ja) * | 2007-03-30 | 2008-10-16 | Tdk Corp | 縦結合共振子型弾性表面波フィルタ |
| JP2009219045A (ja) * | 2008-03-12 | 2009-09-24 | Nippon Dempa Kogyo Co Ltd | 弾性波共振子及び弾性波デバイス |
| JP4900420B2 (ja) * | 2009-05-27 | 2012-03-21 | 株式会社村田製作所 | 弾性波装置 |
| US7939989B2 (en) | 2009-09-22 | 2011-05-10 | Triquint Semiconductor, Inc. | Piston mode acoustic wave device and method providing a high coupling factor |
| US8294331B2 (en) | 2009-09-22 | 2012-10-23 | Triquint Semiconductor, Inc. | Acoustic wave guide device and method for minimizing trimming effects and piston mode instabilities |
| JP5356194B2 (ja) * | 2009-11-30 | 2013-12-04 | 太陽誘電株式会社 | フィルタ、分波器、通信モジュール |
| WO2011161987A1 (ja) * | 2010-06-22 | 2011-12-29 | 株式会社村田製作所 | ラダー型弾性波フィルタ装置及び分波器 |
| CN102684639B (zh) * | 2011-03-07 | 2016-08-17 | 特里奎恩特半导体公司 | 使微调影响和活塞波型不稳定性最小化的声波导器件和方法 |
| JP5697751B2 (ja) * | 2011-03-25 | 2015-04-08 | スカイワークス・パナソニック フィルターソリューションズ ジャパン株式会社 | 高次横モード波を抑制した弾性波デバイス |
-
2013
- 2013-10-03 JP JP2013208005A patent/JP2015073207A/ja active Pending
-
2014
- 2014-09-25 US US14/496,207 patent/US9413330B2/en active Active
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