JPWO2021006055A5 - - Google Patents
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- Publication number
- JPWO2021006055A5 JPWO2021006055A5 JP2021530593A JP2021530593A JPWO2021006055A5 JP WO2021006055 A5 JPWO2021006055 A5 JP WO2021006055A5 JP 2021530593 A JP2021530593 A JP 2021530593A JP 2021530593 A JP2021530593 A JP 2021530593A JP WO2021006055 A5 JPWO2021006055 A5 JP WO2021006055A5
- Authority
- JP
- Japan
- Prior art keywords
- support substrate
- axis
- litao
- temperature characteristic
- silicon oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019126540 | 2019-07-05 | ||
| JP2019126540 | 2019-07-05 | ||
| PCT/JP2020/025013 WO2021006055A1 (ja) | 2019-07-05 | 2020-06-25 | 弾性波装置、高周波フロントエンド回路及び通信装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2021006055A1 JPWO2021006055A1 (https=) | 2021-01-14 |
| JPWO2021006055A5 true JPWO2021006055A5 (https=) | 2022-03-17 |
| JP7510416B2 JP7510416B2 (ja) | 2024-07-03 |
Family
ID=74115210
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021530593A Active JP7510416B2 (ja) | 2019-07-05 | 2020-06-25 | 弾性波装置、高周波フロントエンド回路及び通信装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US12009799B2 (https=) |
| JP (1) | JP7510416B2 (https=) |
| KR (1) | KR102749040B1 (https=) |
| CN (1) | CN113940002B (https=) |
| WO (1) | WO2021006055A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102844652B1 (ko) * | 2023-07-14 | 2025-08-11 | (주)와이솔 | 스퓨리어스의 여진이 억제된 표면탄성파 소자 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007028538A (ja) * | 2005-07-21 | 2007-02-01 | Tdk Corp | 弾性表面波装置 |
| JP2013102418A (ja) * | 2011-10-18 | 2013-05-23 | Nippon Dempa Kogyo Co Ltd | 弾性表面波素子及び電子部品 |
| WO2015012005A1 (ja) * | 2013-07-25 | 2015-01-29 | 日本碍子株式会社 | 複合基板及びその製法 |
| JP6274223B2 (ja) * | 2013-12-26 | 2018-02-07 | 株式会社村田製作所 | 弾性波装置及びフィルタ装置 |
| WO2017013968A1 (ja) * | 2015-07-17 | 2017-01-26 | 株式会社村田製作所 | 弾性波装置 |
| US10084427B2 (en) * | 2016-01-28 | 2018-09-25 | Qorvo Us, Inc. | Surface acoustic wave device having a piezoelectric layer on a quartz substrate and methods of manufacturing thereof |
| KR102194752B1 (ko) * | 2016-09-02 | 2020-12-23 | 가부시키가이샤 무라타 세이사쿠쇼 | 탄성파 필터 장치, 고주파 프론트엔드 회로 및 통신 장치 |
| CN110063024B (zh) * | 2016-10-11 | 2024-01-19 | 京瓷株式会社 | 弹性波装置 |
| US10924085B2 (en) | 2016-10-17 | 2021-02-16 | Qorvo Us, Inc. | Guided acoustic wave device |
| US11258427B2 (en) * | 2016-11-25 | 2022-02-22 | Tohoku University | Acoustic wave devices |
| WO2018180647A1 (ja) * | 2017-03-31 | 2018-10-04 | 株式会社村田製作所 | フィルタ装置、高周波モジュール、および通信装置 |
| JP2019036963A (ja) * | 2017-08-18 | 2019-03-07 | スカイワークス ソリューションズ, インコーポレイテッドSkyworks Solutions, Inc. | キャリアアグリゲーションシステム用の弾性表面波デバイスを備えたフィルタ |
| US11206007B2 (en) * | 2017-10-23 | 2021-12-21 | Qorvo Us, Inc. | Quartz orientation for guided SAW devices |
-
2020
- 2020-06-25 KR KR1020217041248A patent/KR102749040B1/ko active Active
- 2020-06-25 CN CN202080042328.3A patent/CN113940002B/zh active Active
- 2020-06-25 WO PCT/JP2020/025013 patent/WO2021006055A1/ja not_active Ceased
- 2020-06-25 JP JP2021530593A patent/JP7510416B2/ja active Active
-
2022
- 2022-01-04 US US17/567,918 patent/US12009799B2/en active Active
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