CN113940002B - 弹性波装置、高频前端电路以及通信装置 - Google Patents

弹性波装置、高频前端电路以及通信装置

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Publication number
CN113940002B
CN113940002B CN202080042328.3A CN202080042328A CN113940002B CN 113940002 B CN113940002 B CN 113940002B CN 202080042328 A CN202080042328 A CN 202080042328A CN 113940002 B CN113940002 B CN 113940002B
Authority
CN
China
Prior art keywords
piezoelectric layer
elastic wave
wave device
support substrate
filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202080042328.3A
Other languages
English (en)
Chinese (zh)
Other versions
CN113940002A (zh
Inventor
岩本英树
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of CN113940002A publication Critical patent/CN113940002A/zh
Application granted granted Critical
Publication of CN113940002B publication Critical patent/CN113940002B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02551—Characteristics of substrate, e.g. cutting angles of quartz substrates
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02228—Guided bulk acoustic wave devices or Lamb wave devices having interdigital transducers situated in parallel planes on either side of a piezoelectric layer
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02559—Characteristics of substrate, e.g. cutting angles of lithium niobate or lithium-tantalate substrates
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/6433—Coupled resonator filters
    • H03H9/6483—Ladder SAW filters

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
CN202080042328.3A 2019-07-05 2020-06-25 弹性波装置、高频前端电路以及通信装置 Active CN113940002B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019-126540 2019-07-05
JP2019126540 2019-07-05
PCT/JP2020/025013 WO2021006055A1 (ja) 2019-07-05 2020-06-25 弾性波装置、高周波フロントエンド回路及び通信装置

Publications (2)

Publication Number Publication Date
CN113940002A CN113940002A (zh) 2022-01-14
CN113940002B true CN113940002B (zh) 2025-10-28

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202080042328.3A Active CN113940002B (zh) 2019-07-05 2020-06-25 弹性波装置、高频前端电路以及通信装置

Country Status (5)

Country Link
US (1) US12009799B2 (https=)
JP (1) JP7510416B2 (https=)
KR (1) KR102749040B1 (https=)
CN (1) CN113940002B (https=)
WO (1) WO2021006055A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102844652B1 (ko) * 2023-07-14 2025-08-11 (주)와이솔 스퓨리어스의 여진이 억제된 표면탄성파 소자

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018070369A1 (ja) * 2016-10-11 2018-04-19 京セラ株式会社 弾性波装置
WO2018097016A1 (ja) * 2016-11-25 2018-05-31 国立大学法人東北大学 弾性波デバイス
JP2019080313A (ja) * 2017-10-23 2019-05-23 コーボ ユーエス，インコーポレイティド 誘導ｓａｗデバイスのための水晶方位

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007028538A (ja) * 2005-07-21 2007-02-01 Tdk Corp 弾性表面波装置
JP2013102418A (ja) * 2011-10-18 2013-05-23 Nippon Dempa Kogyo Co Ltd 弾性表面波素子及び電子部品
WO2015012005A1 (ja) * 2013-07-25 2015-01-29 日本碍子株式会社 複合基板及びその製法
JP6274223B2 (ja) * 2013-12-26 2018-02-07 株式会社村田製作所 弾性波装置及びフィルタ装置
WO2017013968A1 (ja) * 2015-07-17 2017-01-26 株式会社村田製作所 弾性波装置
US10084427B2 (en) * 2016-01-28 2018-09-25 Qorvo Us, Inc. Surface acoustic wave device having a piezoelectric layer on a quartz substrate and methods of manufacturing thereof
KR102194752B1 (ko) * 2016-09-02 2020-12-23 가부시키가이샤 무라타 세이사쿠쇼 탄성파 필터 장치, 고주파 프론트엔드 회로 및 통신 장치
US10924085B2 (en) 2016-10-17 2021-02-16 Qorvo Us, Inc. Guided acoustic wave device
WO2018180647A1 (ja) * 2017-03-31 2018-10-04 株式会社村田製作所 フィルタ装置、高周波モジュール、および通信装置
JP2019036963A (ja) * 2017-08-18 2019-03-07 スカイワークス ソリューションズ, インコーポレイテッドSkyworks Solutions, Inc. キャリアアグリゲーションシステム用の弾性表面波デバイスを備えたフィルタ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018070369A1 (ja) * 2016-10-11 2018-04-19 京セラ株式会社 弾性波装置
WO2018097016A1 (ja) * 2016-11-25 2018-05-31 国立大学法人東北大学 弾性波デバイス
JP2019080313A (ja) * 2017-10-23 2019-05-23 コーボ ユーエス，インコーポレイティド 誘導ｓａｗデバイスのための水晶方位

Also Published As

Publication number Publication date
KR20220008345A (ko) 2022-01-20
JP7510416B2 (ja) 2024-07-03
JPWO2021006055A1 (https=) 2021-01-14
US12009799B2 (en) 2024-06-11
CN113940002A (zh) 2022-01-14
KR102749040B1 (ko) 2025-01-02
WO2021006055A1 (ja) 2021-01-14
US20220131517A1 (en) 2022-04-28

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