JP2015046572A - 化合物半導体太陽電池 - Google Patents
化合物半導体太陽電池 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 106
- 150000001875 compounds Chemical class 0.000 title claims abstract description 96
- 238000006243 chemical reaction Methods 0.000 claims abstract description 88
- 239000000463 material Substances 0.000 claims abstract description 57
- 239000000758 substrate Substances 0.000 claims abstract description 57
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 claims abstract description 54
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 90
- 239000010410 layer Substances 0.000 description 290
- 229910000673 Indium arsenide Inorganic materials 0.000 description 25
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 25
- 238000010586 diagram Methods 0.000 description 16
- 238000005530 etching Methods 0.000 description 15
- 238000000034 method Methods 0.000 description 15
- 239000000203 mixture Substances 0.000 description 15
- 238000004519 manufacturing process Methods 0.000 description 11
- 239000012535 impurity Substances 0.000 description 10
- 238000010521 absorption reaction Methods 0.000 description 8
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 6
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 5
- 239000011259 mixed solution Substances 0.000 description 5
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 238000001039 wet etching Methods 0.000 description 3
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- 238000001994 activation Methods 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 238000005304 joining Methods 0.000 description 2
- 238000001451 molecular beam epitaxy Methods 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- 230000005641 tunneling Effects 0.000 description 2
- 229910005542 GaSb Inorganic materials 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hcl hcl Chemical compound Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 1
- QOSATHPSBFQAML-UHFFFAOYSA-N hydrogen peroxide;hydrate Chemical compound O.OO QOSATHPSBFQAML-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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Abstract
【解決手段】化合物半導体太陽電池は、第1の基板103と、第1化合物半導体材料で作製され、第1の基板に積層される、1又は複数の第1光電変換セル104と、第1の基板の材料に格子不整合である材料から成る第2化合物半導体材料で作製され、1又は複数の第1光電変換セルの第1の基板とは反対側に配置され、光の入射側となる1又は複数の第2光電変換セル106と、1又は複数の第1光電変換セルのうち最も入射方向側の光電変換セルと、1又は複数の第2光電変換セルのうち最も入射方向とは逆方向に形成される光電変換セルとの間に挟まれるトンネル接合層105と、を有し、各光電変換セルは、光の入射方向の入射側から奥側に向かう順にバンドギャップが小さくなっており、トンネル接合層では、p+型の(Al)GaInAs層と、n+型のInP層とが接合される。
【選択図】図1
Description
[化合物半導体太陽電池の構成]
図1は、実施の形態1の化合物半導体太陽電池100を例示する断面図である。
図5乃至図8を用いて、本実施の形態に係る化合物半導体太陽電池120の製造方法の一例について説明する。
第2の実施の形態では、第1の実施の形態で説明した化合物半導体太陽電池とは異なる構成を有する化合物半導体太陽電池について説明する。
第3の実施の形態では、第1の実施の形態で説明した化合物半導体太陽電池とは異なる構成を有する化合物半導体太陽電池について説明する。
第4の実施の形態では、第1の実施の形態で説明した化合物半導体太陽電池とは異なる構成を有する化合物半導体太陽電池について説明する。
第5の実施の形態では、第1の実施の形態で説明した化合物半導体太陽電池とは異なる構成を有する化合物半導体太陽電池について説明する。
第6の実施の形態では、第1の実施の形態で説明した化合物半導体太陽電池とは異なる構成を有する化合物半導体太陽電池について説明する。
104 GaInPAsセル
105 トンネル接合層
105a p+型のGaInAs層
105b n+型のInP層
105c p+型のGaAs層
108 GaInPセル
104a、106a、108a 窓層
Claims (12)
- 第1の基板と、
第1化合物半導体材料で作製され、前記第1の基板に積層される、1又は複数の第1光電変換セルと、
第1の基板の材料に格子不整合である材料から成る第2化合物半導体材料で作製され、前記1又は複数の第1光電変換セルの前記第1の基板とは反対側に配置され、光の入射側となる1又は複数の第2光電変換セルと、
前記1又は複数の第1光電変換セルのうち最も入射方向側の光電変換セルと、1又は複数の第2光電変換セルのうち最も入射方向とは逆方向に形成される光電変換セルとの間に挟まれるトンネル接合層と、を有し、
各光電変換セルは、光の入射方向の入射側から奥側に向かう順にバンドギャップが小さくなっており、
前記トンネル接合層では、p+型の(Al)GaInAs層と、n+型のInP層とが接合する
化合物半導体太陽電池。 - 第1の基板と、
第1化合物半導体材料で作製され、前記第1の基板に積層される、1又は複数の第1光電変換セルと、
第1の基板の材料に格子不整合である材料から成る第2化合物半導体材料で作製され、前記1又は複数の第1光電変換セルの前記第1の基板とは反対側に配置され、光の入射側となる1又は複数の第2光電変換セルと、
前記1又は複数の第1光電変換セルのうち最も入射方向側の光電変換セルと、1又は複数の第2光電変換セルのうち最も入射方向とは逆方向に形成される光電変換セルとの間に挟まれるトンネル接合層と、を有し、
各光電変換セルは、光の入射方向の入射側から奥側に向かう順にバンドギャップが小さくなっており、
前記トンネル接合層では、p+型の(Al)GaInAs層と、InPに対して引っ張り歪を有するn+型のGaInP層又はn+型のGa(In)PSb層とが接合する
化合物半導体太陽電池。 - 前記n+型のGaInP層又はn+型のGa(In)PSb層のバンドギャップは、
前記1又は複数の第2光電変換セルのうち最も入射方向の奥側の光電変換セルのバンドギャップ以上である
請求項2に記載の化合物半導体太陽電池。 - 前記1又は複数の第2光電変換セルのうち、前記入射方向の最も奥に位置する光電変換セルと、前記p+型の(Al)GaInAs層との間に、p+型の(Al)GaAs層が形成される
請求項1乃至3の何れか一項記載の化合物半導体太陽電池。 - 前記p+型の(Al)GaInAs層の格子定数は、InPの格子定数よりGaAsの格子定数に近い
請求項1乃至4の何れか一項記載の化合物半導体太陽電池。 - 前記n+型のGaInP層又はn+Ga(In)PSb層の格子定数は、GaAsの格子定数よりInPの格子定数に近い
請求項2乃至5の何れか一項記載の化合物半導体太陽電池。
- 前記1又は複数の第1光電変換セルのうち最も入射方向側の前記光電変換セルは、窓層を備え、
前記入射方向側で前記トンネル接合層と接する前記窓層のバンドギャップは、前記1又は複数の第2光電変換セルのうち最も入射方向の奥側の光電変換セルのバンドギャップ以上である
請求項1乃至6の何れか一項記載の化合物半導体太陽電池。 - 前記窓層は、GaInP、GaPSb、GaInPSb、AlInAs、AlGaInAs、AlAsSb、AlGaAsSb、AlPSb、AlGaPSb、AlPSb、AlInPSbの中のいずれか一つの材料を含む
請求項7記載の化合物半導体太陽電池。 - 前記1又は複数の第2光電変換セルのうち、前記入射方向の最も奥に位置する光電変換セルは、GaAsに対して圧縮歪を有するGaInAs材料を含む
請求項1乃至8の何れか一項記載の化合物半導体太陽電池。 - 前記光電変換セルは、GaAs格子整合系材料、又は、InP格子整合系材料を含む
請求項1乃至8の何れか一項記載の化合物半導体太陽電池。 - 前記光電変換セルを、少なくとも3つ以上備え、各前記光電変換セルは、光学的に直列接続する
請求項1乃至10の何れか一項記載の化合物半導体太陽電池。 - 前記第1の基板は、InP基板であり、InP格子整合系材料からなる光電変換セルは複数である
請求項2乃至9の何れか一項記載の化合物半導体太陽電池。
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Families Citing this family (9)
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JP6248623B2 (ja) | 2013-02-18 | 2017-12-20 | 株式会社リコー | 反応材及びケミカルヒートポンプ |
JP6582591B2 (ja) | 2014-07-11 | 2019-10-02 | 株式会社リコー | 化合物半導体太陽電池、及び、化合物半導体太陽電池の製造方法 |
US20170084771A1 (en) * | 2015-09-21 | 2017-03-23 | The Boeing Company | Antimonide-based high bandgap tunnel junction for semiconductor devices |
CN106449848B (zh) * | 2016-10-28 | 2017-09-29 | 上海空间电源研究所 | 一种含有复合多光子腔的多结太阳电池 |
CN108735848B (zh) * | 2017-04-17 | 2020-09-01 | 中国科学院苏州纳米技术与纳米仿生研究所 | 多结叠层激光光伏电池及其制作方法 |
DE102017005950A1 (de) * | 2017-06-21 | 2018-12-27 | Azur Space Solar Power Gmbh | Solarzellenstapel |
CN107482069A (zh) * | 2017-07-10 | 2017-12-15 | 宋亮 | 一种多结化合物太阳能电池及其生产工艺 |
DE102020001185A1 (de) | 2020-02-25 | 2021-08-26 | Azur Space Solar Power Gmbh | Stapelförmige monolithische aufrecht-metamorphe lll-V-Mehrfachsolarzelle |
CN113690335B (zh) * | 2021-10-26 | 2022-03-08 | 南昌凯迅光电股份有限公司 | 一种改善型三结砷化镓太阳电池及其制作方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010171374A (ja) * | 2008-12-26 | 2010-08-05 | Kyocera Corp | 太陽電池 |
WO2010130421A1 (de) * | 2009-05-11 | 2010-11-18 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Tunneldioden aus spannungskompensierten verbindungshalbleiterschichten |
JP2011077293A (ja) * | 2009-09-30 | 2011-04-14 | Asahi Kasei Electronics Co Ltd | 多接合型太陽電池 |
US20120125392A1 (en) * | 2010-11-19 | 2012-05-24 | The Boeing Company | TYPE-II HIGH BANDGAP TUNNEL JUNCTIONS OF InP LATTICE CONSTANT FOR MULTIJUNCTION SOLAR CELLS |
WO2012074596A1 (en) * | 2010-12-03 | 2012-06-07 | The Boeing Company | Direct wafer bonding |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5183779A (en) * | 1991-05-03 | 1993-02-02 | The United States Of America As Represented By The Secretary Of The Navy | Method for doping GaAs with high vapor pressure elements |
US5679963A (en) | 1995-12-05 | 1997-10-21 | Sandia Corporation | Semiconductor tunnel junction with enhancement layer |
US5769964A (en) * | 1996-08-29 | 1998-06-23 | The United States Of America As Reprresented By The United States Department Of Energy | Bulk single crystal ternary substrates for a thermophotovoltaic energy conversion system |
US8173891B2 (en) * | 2002-05-21 | 2012-05-08 | Alliance For Sustainable Energy, Llc | Monolithic, multi-bandgap, tandem, ultra-thin, strain-counterbalanced, photovoltaic energy converters with optimal subcell bandgaps |
US7071407B2 (en) * | 2002-10-31 | 2006-07-04 | Emcore Corporation | Method and apparatus of multiplejunction solar cell structure with high band gap heterojunction middle cell |
US7294868B2 (en) * | 2004-06-25 | 2007-11-13 | Finisar Corporation | Super lattice tunnel junctions |
US11211510B2 (en) * | 2005-12-13 | 2021-12-28 | The Boeing Company | Multijunction solar cell with bonded transparent conductive interlayer |
US20130139877A1 (en) * | 2007-09-24 | 2013-06-06 | Emcore Solar Power, Inc. | Inverted metamorphic multijunction solar cell with gradation in doping in the window layer |
US8299351B2 (en) * | 2009-02-24 | 2012-10-30 | Hong Kong Applied Science And Technology Research Institute Co., Ltd. | Epitaxial growth of III-V compounds on (111) silicon for solar cells |
WO2010113361A1 (ja) * | 2009-04-03 | 2010-10-07 | シャープ株式会社 | 照明装置、表示装置、及びテレビ受信装置 |
CN101950774A (zh) * | 2010-08-17 | 2011-01-19 | 中国科学院苏州纳米技术与纳米仿生研究所 | 四结GaInP/GaAs/InGaAsP/InGaAs太阳电池的制作方法 |
KR101344910B1 (ko) * | 2011-07-04 | 2013-12-26 | 네이버 주식회사 | 클라우드를 기반으로 서비스 간의 문서를 연결하는 시스템 및 방법 |
US20130048063A1 (en) | 2011-08-26 | 2013-02-28 | The Government Of The United States Of America, As Represented By The Secretary Of The Navy | Multijunction Solar Cells Lattice Matched to InP Using Sb-Containing Alloys |
US8884157B2 (en) | 2012-05-11 | 2014-11-11 | Epistar Corporation | Method for manufacturing optoelectronic devices |
US20140001509A1 (en) | 2012-06-27 | 2014-01-02 | Epistar Corporation | Optoelectronic semiconductor device and the manufacturing method thereof |
US11646388B2 (en) | 2012-09-14 | 2023-05-09 | The Boeing Company | Group-IV solar cell structure using group-IV or III-V heterostructures |
JP2014123712A (ja) | 2012-11-26 | 2014-07-03 | Ricoh Co Ltd | 太陽電池の製造方法 |
US9252297B2 (en) | 2012-12-04 | 2016-02-02 | Epistar Corporation | Optoelectronic device and the manufacturing method thereof |
US20160005911A1 (en) | 2013-03-14 | 2016-01-07 | Ricoh Company, Ltd. | Compound semiconductor photovoltaic cell and manufacturing method of the same |
CN103219414B (zh) * | 2013-04-27 | 2016-12-28 | 中国科学院苏州纳米技术与纳米仿生研究所 | GaInP/GaAs/InGaAsP/InGaAs四结级联太阳电池的制作方法 |
-
2014
- 2014-06-09 JP JP2014118296A patent/JP6550691B2/ja active Active
- 2014-07-25 EP EP14178623.6A patent/EP2833413A3/en not_active Withdrawn
- 2014-07-29 US US14/445,249 patent/US20150034153A1/en not_active Abandoned
- 2014-07-30 CN CN201410541385.2A patent/CN104393086B/zh active Active
-
2017
- 2017-04-10 US US15/483,633 patent/US10490684B2/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010171374A (ja) * | 2008-12-26 | 2010-08-05 | Kyocera Corp | 太陽電池 |
WO2010130421A1 (de) * | 2009-05-11 | 2010-11-18 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Tunneldioden aus spannungskompensierten verbindungshalbleiterschichten |
JP2011077293A (ja) * | 2009-09-30 | 2011-04-14 | Asahi Kasei Electronics Co Ltd | 多接合型太陽電池 |
US20120125392A1 (en) * | 2010-11-19 | 2012-05-24 | The Boeing Company | TYPE-II HIGH BANDGAP TUNNEL JUNCTIONS OF InP LATTICE CONSTANT FOR MULTIJUNCTION SOLAR CELLS |
WO2012074596A1 (en) * | 2010-12-03 | 2012-06-07 | The Boeing Company | Direct wafer bonding |
Non-Patent Citations (1)
Title |
---|
GUTER,W. ET AL.: "Current-matched triple-junction solar cell reaching 41.1% conversion efficiency under concentrated s", APPLIED PHYSICS LETTERS, vol. 94, JPN7018000721, 1 June 2009 (2009-06-01), pages 223504 - 1, ISSN: 0003906198 * |
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