JP2015023079A5 - - Google Patents
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- Publication number
- JP2015023079A5 JP2015023079A5 JP2013148271A JP2013148271A JP2015023079A5 JP 2015023079 A5 JP2015023079 A5 JP 2015023079A5 JP 2013148271 A JP2013148271 A JP 2013148271A JP 2013148271 A JP2013148271 A JP 2013148271A JP 2015023079 A5 JP2015023079 A5 JP 2015023079A5
- Authority
- JP
- Japan
- Prior art keywords
- thickness
- oxide film
- silicon oxide
- layer
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 239000010410 layer Substances 0.000 description 19
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 15
- 229910052814 silicon oxide Inorganic materials 0.000 description 15
- 238000006243 chemical reaction Methods 0.000 description 14
- 239000004065 semiconductor Substances 0.000 description 5
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 101150105133 RRAD gene Proteins 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 229910004261 CaF 2 Inorganic materials 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910021424 microcrystalline silicon Inorganic materials 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Images
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013148271A JP2015023079A (ja) | 2013-07-17 | 2013-07-17 | 放射線撮像装置および放射線撮像表示システム |
| TW103120375A TWI643323B (zh) | 2013-07-17 | 2014-06-12 | Radiation camera and radiographic display system |
| PCT/JP2014/067752 WO2015008630A1 (ja) | 2013-07-17 | 2014-07-03 | 放射線撮像装置および放射線撮像表示システム |
| US14/905,041 US20160163762A1 (en) | 2013-07-17 | 2014-07-03 | Radiation image pickup unit and radiation image pickup display system |
| CN201480039175.1A CN105359272A (zh) | 2013-07-17 | 2014-07-03 | 放射线摄像装置和放射线摄像显示系统 |
| KR1020157037232A KR20160033668A (ko) | 2013-07-17 | 2014-07-03 | 방사선 촬상 장치 및 방사선 촬상 표시 시스템 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013148271A JP2015023079A (ja) | 2013-07-17 | 2013-07-17 | 放射線撮像装置および放射線撮像表示システム |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2015023079A JP2015023079A (ja) | 2015-02-02 |
| JP2015023079A5 true JP2015023079A5 (https=) | 2016-03-31 |
Family
ID=52346099
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013148271A Pending JP2015023079A (ja) | 2013-07-17 | 2013-07-17 | 放射線撮像装置および放射線撮像表示システム |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20160163762A1 (https=) |
| JP (1) | JP2015023079A (https=) |
| KR (1) | KR20160033668A (https=) |
| CN (1) | CN105359272A (https=) |
| TW (1) | TWI643323B (https=) |
| WO (1) | WO2015008630A1 (https=) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI792065B (zh) | 2015-01-30 | 2023-02-11 | 日商半導體能源研究所股份有限公司 | 成像裝置及電子裝置 |
| JP2017143135A (ja) * | 2016-02-09 | 2017-08-17 | 株式会社ジャパンディスプレイ | 薄膜トランジスタ |
| JP2017162852A (ja) * | 2016-03-07 | 2017-09-14 | 株式会社ジャパンディスプレイ | 半導体装置および表示装置 |
| CN109276268A (zh) * | 2018-11-21 | 2019-01-29 | 京东方科技集团股份有限公司 | X射线探测装置及其制造方法 |
| US12150319B2 (en) | 2019-02-08 | 2024-11-19 | Georgia Tech Research Corporation | High sensitivity stable sensors and methods for manufacturing same |
| JP2020129635A (ja) * | 2019-02-12 | 2020-08-27 | 株式会社ジャパンディスプレイ | 半導体装置および半導体装置の製造方法 |
| JP7015959B1 (ja) | 2021-07-29 | 2022-02-03 | 株式会社堀場製作所 | 放射線検出素子の製造方法 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4266656B2 (ja) | 2003-02-14 | 2009-05-20 | キヤノン株式会社 | 固体撮像装置及び放射線撮像装置 |
| US20080042131A1 (en) * | 2006-08-15 | 2008-02-21 | Tpo Displays Corp. | System for displaying images including thin film transistor device and method for fabricating the same |
| JP4420032B2 (ja) * | 2007-01-31 | 2010-02-24 | ソニー株式会社 | 薄膜半導体装置の製造方法 |
| JP4355747B2 (ja) | 2007-03-05 | 2009-11-04 | キヤノン株式会社 | 光電変換装置及び光電変換システム並びにその駆動方法 |
| JP4524699B2 (ja) * | 2007-10-17 | 2010-08-18 | ソニー株式会社 | 表示装置 |
| JP5392545B2 (ja) * | 2009-03-13 | 2014-01-22 | ソニー株式会社 | 表示装置 |
| JP5796760B2 (ja) * | 2009-07-29 | 2015-10-21 | Nltテクノロジー株式会社 | トランジスタ回路 |
| JP5482286B2 (ja) * | 2010-02-25 | 2014-05-07 | ソニー株式会社 | 放射線撮像装置およびその駆動方法 |
| JP2012028617A (ja) * | 2010-07-26 | 2012-02-09 | Sony Corp | 放射線検出装置及び放射線撮像装置 |
| JP2012146805A (ja) * | 2011-01-12 | 2012-08-02 | Sony Corp | 放射線撮像装置、放射線撮像表示システムおよびトランジスタ |
-
2013
- 2013-07-17 JP JP2013148271A patent/JP2015023079A/ja active Pending
-
2014
- 2014-06-12 TW TW103120375A patent/TWI643323B/zh not_active IP Right Cessation
- 2014-07-03 KR KR1020157037232A patent/KR20160033668A/ko not_active Abandoned
- 2014-07-03 US US14/905,041 patent/US20160163762A1/en not_active Abandoned
- 2014-07-03 WO PCT/JP2014/067752 patent/WO2015008630A1/ja not_active Ceased
- 2014-07-03 CN CN201480039175.1A patent/CN105359272A/zh active Pending
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