JP2015005544A - Cutting apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To surely collect cutting chips without using a drive mechanism.SOLUTION: A cutting apparatus 1 includes: a water case 50 having a first aperture 52a allowing movement of a first holding mechanism 4a and a second aperture 52b allowing movement of a second holding mechanism 4b; a first planar cover 60a and a second planar cover 60b allowing cutting water and cutting chips to flow out from a free end 62 to be the downstream side; a cutting chip guide plate 90 successively inclined from the first holding mechanism 4a side to the second holding mechanism 4b on the downstream side adjacent to the water case 50; and a cutting chip collection box 100 for receiving cutting water and cutting chips guided by the cutting chip guide plate 90 and allowed to flow into the box 100. Therefore, a drive mechanism for treating the cutting chips and the cutting water is made unnecessary and there is no problem causing fault of the drive mechanism or the like due to influence of cutting chips or the like.

Description

  The present invention relates to a cutting device having an end material processing mechanism for processing an end material and the like generated when cutting a workpiece.

  A package substrate called a CSP (Chip Size Package) substrate or a QFN (Quad Flat Non-leaded Package) substrate has a semiconductor package device formed in each region partitioned by lattice-shaped cutting streets formed on the surface thereof. Yes. The package substrate configured as described above is divided into individual semiconductor devices by cutting along a cutting street using a cutting device, and is used by being incorporated in various electric devices such as a mobile phone and a personal computer.

  The cutting apparatus includes at least a chuck table for holding a workpiece (package substrate), a cutting means for cutting the workpiece, and a cutting water injection means for injecting cutting water to the cutting blade. (See Patent Document 1 below). In such a cutting apparatus, when the package substrate is set on the chuck table, the chuck table reciprocates and the cutting of the package substrate is performed by the cutting blade. During cutting of the package substrate, the cutting water spraying means sprays the cutting water to cool the cutting blade and the package substrate. At this time, cutting waste and cutting water including mill ends are scattered in the rotation direction of the cutting blade. For example, in the case of down-cutting in which the cutting blade is rotated in the same direction as the forward movement direction of the chuck table, cutting waste and cutting water are scattered in the forward movement direction of the chuck table.

  In addition, since a cutting material is generated when the package substrate is cut, the cutting device described in Patent Document 1 is provided with a cutting material processing apparatus that processes the cutting material and cutting water. This end material processing device receives scattered cutting waste and cutting water by groove-shaped receiving and conveying members provided on both sides in the forward movement direction of the chuck table, and flows down to the end portion, and is an endless material conveying means. Drop on the belt. Next, the end material is conveyed by the movement of the endless belt and dropped into the end material collecting container. Further, a configuration has also been proposed in which after the end material is received by a receiving member made of a metal plate by an endless belt, the end material on the receiving member is pushed out by a pressing member such as a brush member and dropped into the end material collecting container. Furthermore, a cutting device provided with a drying means for drying the cutting waste collected in the scrap material collecting container has also been proposed (see Patent Document 2 below).

JP 2002-239888 A JP 2007-75963 A

  However, as described above, during cutting, cutting waste and cutting water are scattered in the forward movement direction of the chuck table due to the high-speed rotation of the cutting blade, and a part of the cutting water is sprayed to cause the chuck table forward movement direction. Therefore, there is a problem that failures such as a drive mechanism of an endless belt located in the diffusion direction frequently occur.

  The present invention has been considered in view of the above circumstances, and has a problem to be solved by making it possible to satisfactorily collect cutting waste without using a drive mechanism.

  The present invention provides a first holding mechanism that includes a first chuck table that holds a workpiece, and a second holding mechanism that includes a second chuck table disposed adjacent to the first chuck table. A cutting means to which a cutting blade for cutting the workpiece is mounted, a cutting water supply means for supplying cutting water to the cutting blade, and a first feeding mechanism for feeding the first holding mechanism in the X-axis direction. A machining feed means, a second machining feed means for machining and feeding the second holding mechanism in the X-axis direction, an index feeding means for indexing and feeding the cutting means in the Y-axis direction perpendicular to the X-axis direction, A cutting device in which cutting water supplied to the cutting blade scatters with the rotation of the cutting blade is a downstream side in the machining feed direction, and an opposite side of the downstream side is an upstream side. Positioned above the machining feed means A first opening that allows movement of the first holding mechanism in the machining feed direction and a second opening that is positioned above the second machining feed means and that allows movement of the second holding mechanism in the machining feed direction. A water case having a plurality of openings, and one end that covers the first opening on the downstream side in the processing feed direction of the first holding mechanism and covers the first processing feed means is the first holding mechanism. A first plate-like cover that is fixed and has the other end as a free end and allows cutting water and cutting waste to flow out from the free end side, and the second opening on the downstream side in the processing feed direction of the second holding mechanism. A second plate-like cover that covers one end of the second processing feed means and is fixed to the second holding mechanism and the other end is a free end, and allows cutting water and cutting waste to flow out from the free end side; Disposed adjacent to the downstream side of the water case and the first The cutting water and the cutting waste flowing from the free end side of the plate-like cover and the second plate-like cover are received, and the cutting water and the cutting waste are guided from the first holding mechanism side to the second holding mechanism side. A cutting waste guide plate, and a cutting waste collection box for receiving cutting water and cutting waste guided by the cutting waste guide plate and receiving at least a bottom and having a mesh shape and collecting the cutting waste. The plate is inclined so as to be sequentially lowered from the first holding mechanism side to the second holding mechanism side, and the inclination on the first holding mechanism side is formed larger than the inclination on the second holding mechanism side. It is characterized by being.

  Further, according to the present invention, the first plate-like cover and the second plate-like cover are inclined so as to be sequentially lowered from both sides toward the center in the machining feed direction, and are free from the upstream side to the downstream side. Inclined so as to be gradually lowered toward the end, the cutting water and the cutting waste flow into the cutting waste guide plate without reducing the flow velocity on the free end side.

The cutting apparatus according to the present invention guides cutting water and cutting waste from the first holding mechanism side to the second holding mechanism side downstream of the first holding mechanism and the second holding mechanism of the water case in the processing feed direction. A cutting waste guide plate, a cutting waste guide plate guided by the cutting waste guide plate and receiving cutting water and cutting waste, and at least a bottom portion formed in a mesh shape and a cutting waste collection box for collecting the cutting waste. Thus, there is no problem that the drive mechanism or the like breaks down due to the influence of cutting waste or water.
Further, since the cutting waste guide plate is formed so that the inclination on the first holding mechanism side is larger than the inclination on the second holding mechanism side, cutting water with a low flow rate from the free end of the first plate-like cover or Even if the cutting waste flows out to the cutting waste guide plate on the first holding mechanism side, it smoothly flows downward.
Furthermore, since the cutting waste and cutting water which have flowed out to the cutting waste guide plate on the second holding mechanism side are added with the cutting waste and cutting water flowing from the first holding mechanism side, the flow rate is increased. The cutting water flows into the cutting waste collection box without staying in the middle of the cutting waste guide plate. Therefore, the cutting waste can be recovered well without using a drive mechanism or the like.

  The first plate-like cover and the second plate-like cover provided in the cutting apparatus according to the present invention are arranged such that both sides thereof are sequentially lowered toward the center of the machining feed direction of the first holding mechanism and the second holding mechanism. Since it is inclined and gradually inclined from the upstream side to the downstream side, the first plate even if cutting waste or cutting water falls on any of the inclined portions of the first plate-like cover and the second plate-like cover The cutting waste and the cutting water can be allowed to flow out to the cutting waste guide plate without decelerating at the free end side of the cylindrical cover and the second plate-like cover.

It is a perspective view which shows the structure of a cutting device. It is a disassembled perspective view which shows the structure of a water case and a 1st plate-shaped cover. It is sectional drawing which looked at the structure of the water case, the 1st process feed means, and the 1st plate-shaped cover from the front side. It is a perspective view which shows the state in which the 1st plate-shaped cover was fixed to the 1st holding mechanism 4a, and the 2nd plate-shaped cover was fixed to the 2nd holding mechanism 4b. It is sectional drawing which looked at the structure of the cutting waste guide plate arrange | positioned adjacent to the water case and the cutting waste collection | recovery box from the side surface side.

  A cutting apparatus 1 shown in FIG. 1 has a base 2, and a portal column 3 is erected on the upper part of the base 2. The upper part of the base 2 is provided with a first holding mechanism 4a for holding a workpiece and a first processing feeding means 10a for processing and feeding the first holding mechanism 4a in the X-axis direction. Further, a second holding mechanism 4b is provided adjacent to the first holding mechanism 4a, and a second processing feed means 10b for processing and feeding the second holding mechanism 4b in the X-axis direction.

  The first holding mechanism 4a includes at least a first chuck table 5 that holds a workpiece and a jig 6 that includes a plurality of suction ports according to individual devices of the workpiece. The structure is fixed to the upper surface of the first chuck table 5. Similarly to the first holding mechanism 4a, the second holding mechanism 4b has at least a second chuck table 7 and a jig 8, and the jig 8 is mounted on the upper surface of the second chuck table 7. It is the composition which was put.

  The first processing feed means 10a is configured to move the ball screw 11 extending in the X-axis direction, a motor 12 connected to one end of the ball screw, a pair of guide rails 13 extending parallel to the ball screw 11, and the first chuck table 5 downward. And at least a movable table 14 supported from the outside. A pair of guide rails 13 are in sliding contact with the lower part of the moving table 14, and the ball screw 11 is screwed into a nut formed at the center of the moving table 14. When the ball screw 11 is rotated by being driven by the motor 12, the first holding mechanism 4a can be moved in the X-axis direction together with the movable table 14. The second process feed means 10b has the same configuration as the first process feed means 10a.

  The cutting device 1 includes a first cutting means 20a for cutting the workpiece held on the first chuck table 5, and a cutting on the workpiece held on the second chuck table 7. 2nd cutting means 20b which performs is arranged. The first cutting means 20a includes a spindle 21 having an axis in the Y-axis direction, a cutting blade 22 attached to the tip of the spindle 21 for cutting a workpiece, and a cutting water supply for supplying cutting water to the cutting blade 22 Means 23 at least. The second cutting means 20b has the same configuration as that of the first cutting means 20a, and the cutting blade 22 constituting the first cutting means 20a and the cutting blade 22 constituting the second cutting means 20b. Are facing in the Y-axis direction.

  The portal column 3 includes a first indexing means 30a for indexing and feeding the first cutting means 20a in the Y-axis direction perpendicular to the X-axis direction, and a second cutting means 20b perpendicular to the X-axis direction. And second index feeding means 30b for indexing and feeding in the Y-axis direction. The first index feed means 30a and the second index feed means 30b are each composed of a ball screw 31 extending in the Y-axis direction, a motor 32 connected to each ball screw 31, a guide rail 33 extending in parallel with the ball screw 31, And a moving plate 34 that moves the first cutting means 20a and the second cutting means 20b in the Y-axis direction. A pair of guide rails 33 is in sliding contact with the side of the moving table 34, and the ball screw 31 is screwed to a nut formed at the center of the moving table 34. When the ball screw 31 is rotated by being driven by the motor 32. The first cutting means 20a and the second cutting means 20b can be moved in the Y-axis direction together with the moving table 34. Further, the moving table 34 constituting the first indexing and feeding means 30a is connected to the first lifting and lowering means 40a for raising and lowering the first cutting means 20a in the Z-axis direction, thereby constituting the second indexing and feeding means 30b. The moving table 34 is connected to second elevating means 40b for elevating the second cutting means 20b in the Z-axis direction.

  As shown in FIGS. 2 and 3, the cutting apparatus 1 includes a water case 50 that receives cutting water used when cutting a workpiece and cutting waste generated during cutting. Although the water case 50 is not shown in FIG. 1, the first process feed means 10a and the second process feed so as to cover the entire first process feed means 10a and the second process feed means 10b. It is disposed above the feeding means 10b. The upper surface of the water case 50 is a first bottom portion 51 through which the cutting water ejected from the cutting water supply means 23 shown in FIG. Further, the water case 50 is formed by the first opening 52a and the second process feed means 10b that allow the first holding mechanism 4a to move in the process feed direction (X-axis direction) by the first process feed means 10a. The second holding mechanism 4b has a second opening 52b that allows movement in the machining feed direction (X-axis direction).

  As shown in FIG. 2, a frame 53 having a rising portion 54 for preventing water from entering the first opening 52 a and the second opening 52 b is disposed on the first bottom 51. Has been. Further, a pair of rails 55 extending in the X-axis direction are laid on the first bottom portion 51 so as to sandwich the side portion of the frame body 53. A bottom portion outside the rail 55 serves as a second bottom portion 56. The cutting water, cutting waste, and the like that have fallen on the second bottom portion 56 can be swept away by, for example, flowing the jet water 9.

  As shown in FIGS. 2 and 3, the cutting device 1 has a first plate-like cover 60 a that causes cutting water, cutting waste, and the like to flow downstream in the processing feed direction (X-axis direction) of the first holding mechanism 4 a. It has. Here, the downstream side refers to a side on which cutting water supplied to the cutting blade 22 at the time of cutting scatters as the cutting blade 22 rotates. Further, the direction facing the downstream side and the opposite side is the upstream side.

  As shown in FIG. 2, the first plate-like cover 60 a includes a first surface 63 and a second surface 64 that are gradually inclined downward toward the center in the machining feed direction (X-axis direction), and a first surface. 63 and a central inclined surface 65 formed between the second surface 64 and the second surface 64. The central inclined surface 65 is gradually inclined downward from the upstream side to the downstream side.

  A pair of rails 66 facing the pair of rails 55 laid on the water case 50 and extending in the X-axis direction are formed inside the first plate-shaped cover 60a. The rail 66 is slidable with the rail 55.

  As shown in FIG. 2, the first plate-like cover 60 a may be configured to have a brush 67 at the free end 62. The brush 67 can sweep away the cutting waste and the like dropped on the first bottom 51 of the water case 50 to the downstream side.

  As shown in FIG. 3, the first plate-like cover 60a can fix one end 61 to the first holding mechanism 4a. The other end of the first plate-like cover 60a on the downstream side is a free end 62 that is not fixed to a mechanism or the like. The first plate-like cover 60a configured as described above can cover and use the first opening 52a on the downstream side and the first processing feed means 10a. The first plate-like cover 60a allows the cutting water and the cutting waste flowing from the upstream side to the downstream side in the first plate-like cover 60a to flow out from the free end 62 side.

  As shown in FIG. 4, the second plate-like cover 60b that allows cutting water, cutting waste, and the like to flow downstream in the processing feed direction (X-axis direction) of the second holding mechanism 4b is the first plate-like cover 60a. Are arranged in parallel with each other. The second plate cover 60b has the same configuration as the first plate cover 60a.

  As shown in FIGS. 3 and 4, the first opening 52 a on the upstream side in the processing feed direction (X-axis direction) of the first holding mechanism 4 a is covered, and the upper portion of the first processing feed means 10 a is covered. In this way, the first bellows cover 70a is provided. In addition, the second holding mechanism 4b covers the second opening 52b on the upstream side in the processing feed direction (X-axis direction) and covers the second processing feed means 10b so as to cover the second bellows cover. 70b is arranged in parallel with the first bellows cover 70a.

  As shown in FIG. 4, the 1st end material receiving part 80a which receives cutting water, cutting waste, etc. is arrange | positioned so that the 1st chuck table 5 of the 1st holding mechanism 4a may be surrounded. The first end material receiving portion 80a has an opening 81 that opens toward the downstream side in the machining feed direction, and is configured to communicate with the central inclined surface 65 of the first plate-like cover 60a via the opening 81. It has become. Further, a second end material receiving portion 80b is disposed so as to surround the second chuck table 7 of the second holding mechanism 4, and similarly, the second end material receiving portion 80b is processed and fed. It has the structure which has the opening part 81 opened toward a direction downstream side, and was connected to the central inclined surface 65 of the 2nd plate-shaped cover 60b via the opening part 81. FIG.

  A cutting waste guide plate 90 is provided adjacent to the downstream side of the water case 50 further downstream of the free ends 62 of the first plate-like cover 60a and the second plate-like cover 60b. As shown in FIG. 5, the cutting waste guide plate 90 is inclined so as to be gradually lowered from the first holding mechanism 4 a side to the second holding mechanism 4 b side, and the front portion of the first plate-like cover 60 a. The first inclined surface 91 located at the front and the second inclined surface 92 located at the front portion of the second plate-shaped cover 60b. The inclination of the first inclined surface 91 is larger than the inclination of the second inclined surface 92.

  A cutting waste collection box 100 that can move up and down is provided at the lower end of the cutting waste guide plate 90, and the cutting waste collection box 100 is placed inside the box placement unit 110. The cutting waste collection box 100 has a mesh portion 101 having at least a bottom formed in a mesh shape so that the cutting waste is caught by the mesh portion 101. A slope 111 is formed inside the box placement unit 110, and the cutting waste collection box 100 is easily brought into the box placement unit 110 when the cutting waste collection box 100 comes into contact with the slope 111. A discharge port 112 is formed in the lower part of the box mounting part 110, and the cutting water that has passed through the mesh part 101 can be discharged to the outside.

  Next, an operation example of the cutting apparatus 1 will be described. In the cutting apparatus 1, the two cutting blades 22 are always rotating, and cutting water is constantly ejected from the two cutting water supply means 23. The package substrate P shown in FIG. 1 is an example of a workpiece, and is, for example, a CSP substrate or a QFN substrate. The package substrate P is partitioned by scheduled cutting lines S provided in a lattice shape on the surface thereof to form a plurality of regions, and a device D is formed in each region. On the package substrate P, two device portions F on which a plurality of devices D are formed are formed, and an extra connecting member C is formed outside the device portion F. The device portion F is divided into individual devices D. The surplus connecting member C is cut off in advance. The package substrate P is transported to the first holding mechanism 4a and the second holding mechanism 4b. In addition, when the 1st holding mechanism 4a and the 2nd holding mechanism 4b operate | move similarly, the 1st holding mechanism 4a side shall be demonstrated.

  As shown in FIG. 1, after the package substrate P is sucked and held by the jig 6 placed on the first chuck table 5, the moving table 14 of the first processing feed means 10a is moved in the X-axis direction. While the spindle 21 constituting the first cutting means 20a rotates to rotate the cutting blade 22, the first raising / lowering means 40a lowers the cutting blade 22 until it contacts the package substrate P. Then, two boundaries between the device portion F and the surplus coupling member C are first cut by the two cutting blades 22 that rotate. Thereafter, the first indexing and feeding means 30a rotates the ball screw 31 to index and feed the cutting blade 22 along with the guide plate 34 in the Y-axis direction, and in the same way, the boundary between the device portion F and the surplus coupling member C. Cut the other two. Further, after the first chuck table 5 is rotated 90 degrees, the two boundaries between the device D and the surplus coupling member C are similarly cut, and the surplus coupling member C is removed. Thereafter, cutting is performed along all the planned cutting lines S facing the X-axis direction. Next, by rotating the first chuck table 5 by 90 degrees, the planned cutting line S that has been oriented in the Y-axis direction is directed in the X-axis direction, the same operation is repeated, and the cutting blade 22 performs the X-axis direction. The device part F is divided into individual devices D by cutting along all the planned cutting lines S facing the surface. In parallel with the processing of the package substrate P transported and held by the first holding mechanism 4a by the first cutting means 2a, the second cutting means 2b is similarly transported to the second holding mechanism 4b. Processing of the held package substrate P is also performed.

  During the cutting of the package substrate P, the first cutting means 20a and the second cutting means 20b always supply cutting water toward the cutting blade 22 by the cutting water supply means 23. As shown in FIG. 3, when the cutting blade 22 constituting the first cutting means 20a and the second cutting means 20b is rotated in the direction of the arrow A, for example, when cutting the package substrate P, cutting waste together with cutting water is generated. As the cutting blade 22 rotates, it scatters to the downstream side and falls to the water case 50 and the end material receiving portion 80a shown in FIG. Note that the cutting waste includes, for example, cutting waste from the package substrate, end material of the surplus coupling member C, bonding material such as a bonding material, and abrasive grains dropped from the grindstone.

  When cutting waste or cutting water falls on the first bottom portion 51 of the water case 50 shown in FIG. 2, the brush portion 67 causes the first holding mechanism 4 a to move downstream in the processing feed direction. The cutting waste and cutting water can be swept out toward the cutting waste guide plate 90. Further, when cutting waste or cutting water falls on the second bottom portion 56 of the water case 50, for example, the cutting waste 9 is directed toward the cutting waste guide plate 90 by flowing the spout water 9 to the second bottom portion 56. And cutting water can be washed away.

  On the other hand, when cutting waste or cutting water falls on the end material receiving portion 80a shown in FIG. 4, the cutting waste or cutting water flows from the opening 81 of the end material receiving portion 80a to the central inclined surface 65 of the first plate-like cover 60a. And flows out to the cutting waste guide plate 90 without decelerating on the free end 62 side.

  Further, even if cutting waste or cutting water falls on the first surface 63 or the second surface 64 of the first plate cover 60a shown in FIG. 5, the first surface 63 and the second surface 64 Are inclined toward the center in the machining feed direction (X-axis direction) of the first holding mechanism 4a (toward the central inclined surface 65), and the central inclined surface 65 is a free end that is downstream from the upstream side. Therefore, the cutting waste and the cutting water flow out to the cutting waste guide plate 90 without being decelerated on the free end 62 side.

  Next, when cutting waste or cutting water falls on the first inclined surface 91 of the cutting waste guide plate 90, the cutting waste or the like flows toward the cutting waste collection box 100 through the second inclined surface 92. Go. In addition, when cutting waste or cutting water falls on the second inclined surface 92 of the cutting waste guide plate 90, the first inclined surface 91 has a larger inclination than the second inclined surface 92, and thus the first inclined surface 91. The flow rate increases due to the addition of the cutting waste and the cutting water that have flowed from the bottom, and the flow rate of the cutting waste and the cutting water flows downward without flowing and flows into the cutting waste collection box 100.

  When cutting waste and cutting water flow into the cutting waste collection box 100, the cutting waste is caught at the mesh portion 101 and only the cutting water is discharged from the discharge port 112. In this way, only the cutting waste is recovered by the cutting waste recovery box 100, and when a predetermined amount of cutting waste accumulates in the cutting waste recovery box 100, the operator lifts the cutting waste recovery box 100 from the box mounting portion 110. Dispose of the cutting waste. In this way, a series of machining operations by the cutting device 1 is completed.

As described above, the cutting device 1 is not a driving mechanism or the like at the position adjacent to the water case 50 on the downstream side in the processing feed direction (X-axis direction) of the first holding mechanism 4a and the second holding mechanism 4b. Since the scrap guide plate 90 is provided and the scrap scrap is collected by the scrap guide plate 90, a conventional drive mechanism using a belt or the like is not necessary, and the drive mechanism or the like is broken due to the influence of the scrap or cutting water. there is no problem.
Further, the cutting waste guide plate 90 is formed so that the first inclined surface 91 on the first holding mechanism 4a side has a larger inclination than the second inclined surface 92 on the second holding mechanism 4b side. Even if cutting water or cutting waste having a small flow rate flows out from the free end 62 of the single plate-like cover 60a, it smoothly flows downward. Furthermore, since the cutting waste and cutting water that have fallen on the second inclined surface 92 are added to the cutting waste and cutting water that have flowed from the first inclined surface 91, the flow rate increases. It does not stay in the middle of the guide plate 90 and flows into the cutting waste collection box 100. Therefore, cutting waste can be reliably recovered without using a drive mechanism or the like.

  Further, the first plate-like cover 60a and the second plate-like cover 60b provided in the cutting apparatus 1 are directed toward the center of the machining feed direction (X-axis direction) of the first holding mechanism 4a and the second holding mechanism 4b. The first surface 63 and the second surface 64, which are both sides, are inclined so as to be sequentially lower, and the central inclined surface 65 between the first surface 63 and the second surface 64 is upstream. Since the slant is gradually lowered from the side to the downstream side, the cutting speed and the cutting water are decelerated on the free end 62 side even if they fall on any surface of the first plate-like cover 60a and the second plate-like cover 60b. The cutting waste and the cutting water can flow out to the cutting waste guide plate 90 without any problem.

  In addition, although it was set as the structure provided with two cutting means in the cutting device 1 of the said embodiment, the cutting means may be one and may be provided with three or more.

1: Cutting device 2: Base 3: Column 4a: First holding mechanism 4b: Second holding mechanism 5: First chuck table 6: Jig 7: Second chuck table 8: Jig 9: Ejection Water 10a: First processing feeding means 10b: Second processing feeding means 11: Ball screw 12: Motor 13: Guide rail 14: Moving table 20a: First cutting means 20b: Second cutting means 21: Spindle 22: Cutting blade 23: Cutting water supply means 30a: First index feeding means 30b: Second index feeding means 31: Ball screw 32: Motor 33: Guide rail 34: Guide plate 40a: First lifting / lowering means 40b: Second Elevating means 50: water case 51: first bottom 52a: first opening 52b: second opening 53: frame body 54: rising part 55: rail 56: second Portion 60a: first plate-like cover 60b: second plate-like cover 61: one end 62: free end 63: first surface 64: second surface 65: central inclined surface 66: rail 67: brush 70a: first 1 bellows cover 70b: second bellows cover 80a, 80b: end material receiving portion 90: cutting waste guide plate 91: first inclined surface 92: second inclined surface 100: cutting waste collecting box 101: mesh portion 110 : Box placement part 111: Slope 112: Discharge port

Claims (2)

A first holding mechanism including a first chuck table for holding a workpiece; a second holding mechanism including a second chuck table disposed adjacent to the first chuck table; A cutting means to which a cutting blade for cutting an object is mounted, a cutting water supply means for supplying cutting water to the cutting blade, and a first processing feeding means for processing and feeding the first holding mechanism in the X-axis direction; A second machining feed means for machining and feeding the second holding mechanism in the X-axis direction; and an index feeding means for indexing and feeding the cutting means in the Y-axis direction perpendicular to the X-axis direction, A cutting device in which cutting water supplied to the cutting blade is scattered on the downstream side of the cutting blade in the processing feed direction, and the opposite side of the downstream side is upstream.
A first opening positioned above the first machining feed means and allowing the first holding mechanism to move in the machining feed direction, and positioned above the second machining feed means. A water case having a second opening that allows movement of the holding mechanism in the processing feed direction;
One end that covers the first opening on the downstream side in the processing feed direction of the first holding mechanism and covers the first processing feed means is fixed to the first holding mechanism, and the other end is a free end. A first plate-like cover for allowing cutting water and cutting waste to flow out from the free end side;
One end of the second holding mechanism that covers the second opening on the downstream side in the processing feed direction and covers the second processing feed means is fixed to the second holding mechanism, and the other end is a free end. A second plate-like cover for flowing cutting water and cutting waste from the free end side;
Receiving cutting water and cutting waste disposed adjacent to the downstream side of the water case and flowing from the free end sides of the first plate-like cover and the second plate-like cover; A cutting waste guide plate for guiding cutting water and cutting waste from the holding mechanism side to the second holding mechanism side;
A cutting waste collection box for receiving cutting water and cutting waste guided by the cutting waste guide plate, and having at least a bottom formed in a mesh shape and collecting the cutting waste;
The cutting waste guide plate is inclined so as to be sequentially lowered from the first holding mechanism side to the second holding mechanism side, and the inclination on the first holding mechanism side is inclined on the second holding mechanism side. A cutting device characterized in that it is formed larger than the above.   The first plate-like cover and the second plate-like cover are inclined so as to be sequentially lowered from both sides toward the center in the machining feed direction, and are gradually lowered from the upstream side toward the free end on the downstream side. The cutting device according to claim 1, wherein the cutting water and the cutting waste flow into the cutting waste guide plate without reducing the flow velocity on the free end side.

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