CN218535185U - Spraying device for multi-wire cutting machine and multi-wire cutting machine - Google Patents
Spraying device for multi-wire cutting machine and multi-wire cutting machine Download PDFInfo
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- CN218535185U CN218535185U CN202222550530.6U CN202222550530U CN218535185U CN 218535185 U CN218535185 U CN 218535185U CN 202222550530 U CN202222550530 U CN 202222550530U CN 218535185 U CN218535185 U CN 218535185U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
Abstract
The utility model relates to a semiconductor cutting technical field specifically discloses a spray set and multi-wire saw for multi-wire saw, this spray set still including being used for spraying the slot spray assembly of cutting fluid to the line of cut spray assembly of cutting fluid, the slot spray assembly that is used for spraying the cutting fluid to the sheave slot, the line of cut spray assembly with be equipped with the sheave installation space that is used for installing the sheave between the slot spray assembly. Through setting up line of cut spraying assembly and the slot spraying assembly who mutually supports, spray cutting fluid to line of cut and sheave slot in cutting operation in-process, in time clear up the line of cut and the piece powder on the sheave slot, effectively avoid prior art in the line of cut around behind the slot by the accumulational piece powder pollution in the slot or ejecting outside the slot problem, the cutting ability of line of cut can effectively exert, effectively improve cutting efficiency, reduce the risk of wire jumper broken string among the cutting process simultaneously, effectively improve the cutting yield.
Description
Technical Field
The utility model relates to a semiconductor cutting technical field especially relates to a spray set and multi-wire saw for multi-wire saw.
Background
The multi-wire cutting is a commonly used semiconductor material cutting method, which is to cut a crystal bar raw material to a substrate with a required thickness by a diamond wire mesh reciprocating at a high speed and carrying a cutting liquid with a certain concentration. In the process of high-speed reciprocating motion of diamond wires, a large amount of heat and chip powder can be generated during grinding of the diamond wires and the crystal bars, and the constant-temperature cutting fluid plays roles in cooling and chip removal.
The existing multi-wire cutting machine is generally provided with a spray pipe above a sheave, cutting liquid is sprayed to a cutting wire through the spray pipe, however, the spray mode can only wash residual scrap powder on the cutting wire to a certain degree, the scrap powder in a groove of the sheave cannot be effectively washed, and along with the cutting operation, the scrap powder generated by partial grinding is attached and accumulated in the groove of the sheave and cannot be timely cleaned, so that in the cutting process, the cutting wire can carry a large amount of powder scraps when passing through the groove of the sheave to wrap the diamond wire, and the cutting efficiency is reduced; in addition, a large amount of debris powder deposited in the groove of the grooved pulley can eject the cutting line in the groove, so that the risk of wire jumping and wire breaking in cutting is increased, and the cutting yield is influenced.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to prior art current situation, provide a spray set and multi-wire saw for multi-wire saw, the utility model discloses a spray set can in time clear up the piece powder on line of cut and the sheave slot, effectively improves cutting efficiency and cutting yield.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
a spraying device for a multi-wire cutting machine comprises a cutting line spraying assembly and a groove spraying assembly, wherein the cutting line spraying assembly is used for spraying cutting liquid to a cutting line, the groove spraying assembly is used for spraying cutting liquid to a groove wheel groove, and a groove wheel installation space used for installing the groove wheel is formed between the cutting line spraying assembly and the groove spraying assembly.
In some embodiments, the cutting wire spray assembly is disposed above the sheave mounting space and the groove spray assembly is disposed below the sheave mounting space.
In some embodiments, the cutting wire spray assembly and/or the trench spray assembly includes a pipe body for conveying the cutting fluid and a nozzle for spraying the cutting fluid in the pipe body, the nozzle being provided on a sidewall of the pipe body.
In some embodiments, the pipe body is disposed in a parallel direction of the sheave.
In some embodiments, the tube body is provided with a plurality of nozzles, and each nozzle is arranged along the length direction of the tube body.
In some embodiments, the cutting wire spray assembly or the trench spray assembly is provided with a liquid inlet pipe, and a communicating pipe is arranged between the pipe body of the cutting wire spray assembly and the pipe body of the trench spray assembly.
In some embodiments, a mounting hanger is attached to the tubular body of the cutting wire spray assembly.
In some embodiments, the liquid inlet pipe is connected with an infusion pump, and the infusion pump is connected with a liquid supply source.
The embodiment also provides a multi-wire cutting machine which comprises a cutting wire, a grooved pulley set and the spraying device, wherein the grooved pulley set comprises at least two grooved pulleys which are parallel to each other, the cutting wire passes around each grooved pulley to form a wire mesh, each grooved pulley is provided with a groove for the cutting wire to slide, the spraying direction of the cutting wire spraying assembly faces the cutting wire, and the spraying direction of the groove spraying assembly faces the groove.
In some embodiments, a set of spraying devices is correspondingly arranged beside each sheave, the cutting line spraying assembly is arranged above the corresponding sheave, and the groove spraying assembly is arranged below the corresponding sheave.
The beneficial effects of the utility model reside in that:
the utility model discloses a set up line of cut spraying assembly and slot spraying assembly of mutually supporting, spray cutting fluid to line of cut and slot wheel slot in cutting operation process, in time clear up the piece powder on line of cut and the slot wheel slot, effectively avoid among the prior art line of cut around behind the slot by the accumulational piece powder pollution of slot inslot or ejecting in the problem outside the slot, the cutting ability of line of cut can effectively exert, effectively improve cutting efficiency, reduce the risk of wire jumper broken string among the cutting process simultaneously, effectively improve the cutting yield.
Drawings
Fig. 1 is a schematic structural view of the spraying device for a multi-wire saw of the present invention.
Fig. 2 is a schematic structural view of another view angle of the spraying device for a multi-wire saw according to the present invention.
Fig. 3 is a schematic structural diagram of the multi-wire saw of the present invention.
Fig. 4 is a plan view of the multi-wire saw of the present invention.
Detailed Description
The present invention will be further explained with reference to the accompanying drawings and embodiments:
referring to fig. 1 to 3, the present embodiment discloses a spraying device 1 for a multi-wire saw, including a cutting wire spraying assembly 2 for spraying a cutting fluid to a cutting wire 9, and further including a groove spraying assembly 4 for spraying a cutting fluid to a groove of a sheave 10, wherein a sheave mounting space 3 for mounting the sheave 10 is provided between the cutting wire spraying assembly 2 and the groove spraying assembly 4.
In the process of cutting operation of the multi-wire cutting machine, the cutting line spraying assembly 2 sprays cutting fluid to the cutting line 9, the cutting line 9 carries the cutting fluid into a cutting seam of a cut workpiece A, the cutting fluid brings out chip powder in the cutting seam, the effects of cooling and chip removal are achieved, and meanwhile the chip powder on the cutting line 9 is cleaned in time; meanwhile, the groove spraying assembly 4 sprays cutting fluid to the groove of the grooved pulley 10, and the scrap powder in the groove of the grooved pulley 10 is washed out, so that the scrap powder in the groove of the grooved pulley 10 is cleaned in time, and the cutting line spraying assembly 2 and the groove spraying assembly 4 are respectively arranged on two sides of the grooved pulley 10, so that the cutting line spraying assembly 2 and the groove spraying assembly 4 are ensured not to interfere with each other.
The utility model discloses a set up line of cut spraying assembly 2 and slot spraying assembly 4 of mutually supporting, spray cutting fluid to line of cut 9 and slot wheel 10 slot at the cutting operation in-process, in time clear up the piece powder on line of cut 9 and the slot wheel 10 slot, effectively avoid among the prior art line of cut 9 around by the accumulational piece powder pollution in the slot behind the slot or ejecting in the problem outside the slot, the cutting capacity of line of cut 9 can effectively exert, effectively improve cutting efficiency, reduce the risk of wire jumper broken string among the cutting process simultaneously, effectively improve the cutting yield.
In one embodiment, as shown in fig. 1 and 3, the cutting wire spray assembly 2 is disposed below the sheave mounting space 3, and the groove spray assembly 4 is disposed above the sheave mounting space 3.
As a preferred embodiment, in this embodiment, a sheave installation space 3 for installing the sheave 10 is provided between the cutting line spray assembly 2 and the groove spray assembly 4, the cutting line spray assembly 2 is provided above the sheave installation space 3, and the groove spray assembly 4 is provided below the sheave installation space 3.
When the piece powder falls into the slot, along with the rotation of sheave 10, originally, the piece powder that is located the sheave 10 upper end moves from high to low in the slot, and partial piece powder drops naturally, and remaining piece powder is detained in the slot, installs in sheave 10 below when slot spray assembly 4, when scouring the slot of sheave 10 lower extreme, can really be acted on the piece powder that is detained in the slot, consequently, compare in locating sheave 10 top with slot spray assembly 4, locate sheave 10 below with slot spray assembly 4 and can promote the availability of cutting fluid, the cutting fluid quantity is still less.
Referring to fig. 1 and 2, the cutting line spray assembly 2 and the trench spray assembly 4 include a pipe body 51 for conveying the cutting fluid and a nozzle 52 for spraying the cutting fluid in the pipe body 51, and the nozzle 52 is disposed on a side wall of the pipe body 51. When the cutting device is used, cutting fluid is conveyed into the pipe body 51 and is sprayed out of the pipe body 51 through the nozzle 52, and when the cutting device is installed, the spraying angle of the nozzle 52 can be adjusted by adjusting the pipe body 51, so that the cutting fluid can more accurately face the cutting line 9 or the groove of the sheave 10.
Referring to fig. 2, the pipe body 51 is arranged in a parallel direction of the sheave 10, facilitating the installation arrangement of the nozzle 52.
Referring to fig. 2, a plurality of nozzles 52 are disposed on the pipe body 51, and the nozzles 52 are arranged along the length direction of the pipe body 51, so as to ensure that each segment of the groove of each sheave 10 or the cutting line 9 can be sprayed with the cutting fluid, and the cutting fluid is sprayed more uniformly, and the overall spraying effect is better.
Referring to fig. 1 and fig. 2, cutting line spray assembly 2 or slot spray assembly 4 is equipped with feed liquor pipe 6, be equipped with communicating pipe 7 between cutting line spray assembly 2's body 51 and slot spray assembly 4's body 51, in this embodiment, feed liquor pipe 6 is located on cutting line spray assembly 2, cutting fluid gets into in cutting line spray assembly 2's body 51 through feed liquor pipe 6, spout to cutting line 9 through cutting line spray assembly 2's nozzle 52, partial cutting fluid gets into in communicating pipe 7, flow direction slot spray assembly 4's body 51 in, spout to the slot through slot spray assembly 4's nozzle 52, the utility model discloses set up communicating pipe 7 between cutting line spray assembly 2 and slot spray assembly 4's body 51, make body 51 between them be linked together, can adopt the spare part of one set of control feed liquor can reach the effect of carrying cutting fluid to cutting line spray assembly 2 and slot spray assembly 4, overall structure is simpler.
Referring to fig. 1, the pipe 51 of the wire cutting shower assembly 2 is connected to the mounting hanger 8 so that the pipe 51 of the wire cutting shower assembly 2 can be quickly mounted on the multi-wire saw, and when the communicating pipe 7 is a hard pipe and has sufficient strength, the pipe 51 of the trench shower assembly 4 can also be synchronously mounted on the multi-wire saw through the communicating pipe 7.
The liquid inlet pipe 6 is connected to a liquid delivery pump (not shown) connected to a liquid supply source (not shown) from which cutting fluid is delivered to the liquid inlet pipe 6 and into the tube body 51 under the action of the liquid delivery pump.
Referring to fig. 3 and 4, the embodiment further provides a multi-wire cutting machine, which includes a cutting wire 9, a sheave assembly and the spraying device 1, the sheave assembly includes at least two sheaves 10 parallel to each other, the cutting wire 9 winds around each sheave 10 to form a wire mesh, each sheave 10 is provided with a groove for the cutting wire 9 to slide, the spraying direction of the cutting wire spraying assembly 2 is a direction toward the cutting wire 9, and the spraying direction of the groove spraying assembly 4 is a direction toward the groove.
In the using process, the worktable with the cut workpiece A feeds to the wire net and is cut by the wire net, meanwhile,
the spraying device 1 sprays cutting fluid to the cutting line 9 and the groove of the grooved pulley 10 in the cutting operation process, and the chip powder on the grooves of the cutting line 9 and the grooved pulley 10 is cleaned in time.
Referring to fig. 4, a set of spraying devices 1 is correspondingly disposed beside each sheave 10, so as to ensure that each groove of each sheave 10 or each line segment of the cutting line 9 can be sprayed with the cutting fluid, and the cutting line spraying assembly 2 is disposed above the corresponding sheave 10, and the groove spraying assembly 4 is disposed below the corresponding sheave 10.
Of course, the above illustration is only a preferred embodiment of the present invention, and the scope of the present invention is not limited thereto, so all equivalent changes made in the principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A spraying device for a multi-wire cutting machine comprises a cutting line spraying assembly used for spraying cutting fluid to a cutting line, and is characterized by further comprising a groove spraying assembly used for spraying cutting fluid to a groove wheel groove, and a groove wheel installation space used for installing the groove wheel is arranged between the cutting line spraying assembly and the groove spraying assembly.
2. The spray device for a multi-wire saw of claim 1, wherein the wire spray assembly is disposed above the sheave mounting space, and the slot spray assembly is disposed below the sheave mounting space.
3. The spraying device for a multi-wire saw as claimed in claim 1, wherein the cutting wire spraying assembly and/or the trench spraying assembly comprise a pipe body for conveying the cutting fluid and a nozzle for spraying out the cutting fluid in the pipe body, and the nozzle is arranged on a side wall of the pipe body.
4. The spraying device for a multi-wire saw as claimed in claim 3, wherein the pipe body is disposed in a parallel direction of the sheaves.
5. The spraying device for the multi-wire saw as claimed in claim 4, wherein the tube body is provided with a plurality of nozzles, and each nozzle is arranged along the length direction of the tube body.
6. The spraying device for multi-wire sawing machine according to claim 3, wherein the cutting wire spraying assembly or the trench spraying assembly is provided with a liquid inlet pipe, and a communication pipe is arranged between a pipe body of the cutting wire spraying assembly and a pipe body of the trench spraying assembly.
7. The spraying device for multi-wire saw as claimed in claim 6, wherein a mounting hanger is connected to the tubular body of the wire spraying assembly.
8. The spraying device for the multi-wire saw as claimed in claim 6, wherein the liquid inlet pipe is connected with an infusion pump, and the infusion pump is connected with a liquid supply source.
9. A multi-wire sawing machine comprising a cutting wire, a sheave assembly and a spraying device according to any one of claims 1 to 8, wherein the sheave assembly comprises at least two sheaves parallel to each other, the cutting wire passes around each sheave to form a wire mesh, each sheave is provided with a groove for the cutting wire to slide, the spraying direction of the cutting wire spraying assembly is towards the cutting wire, and the spraying direction of the groove spraying assembly is towards the groove.
10. The multi-wire saw as claimed in claim 9, wherein a set of spraying devices is provided beside each of the sheaves, the cutting wire spraying assembly is provided above the corresponding sheave, and the groove spraying assembly is provided below the corresponding sheave.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222550530.6U CN218535185U (en) | 2022-09-26 | 2022-09-26 | Spraying device for multi-wire cutting machine and multi-wire cutting machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222550530.6U CN218535185U (en) | 2022-09-26 | 2022-09-26 | Spraying device for multi-wire cutting machine and multi-wire cutting machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218535185U true CN218535185U (en) | 2023-02-28 |
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ID=85275419
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222550530.6U Active CN218535185U (en) | 2022-09-26 | 2022-09-26 | Spraying device for multi-wire cutting machine and multi-wire cutting machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218535185U (en) |
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2022
- 2022-09-26 CN CN202222550530.6U patent/CN218535185U/en active Active
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