JP2015002548A - 振動素子、振動子、発振器、電子機器および移動体 - Google Patents

振動素子、振動子、発振器、電子機器および移動体 Download PDF

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Publication number
JP2015002548A
JP2015002548A JP2013127980A JP2013127980A JP2015002548A JP 2015002548 A JP2015002548 A JP 2015002548A JP 2013127980 A JP2013127980 A JP 2013127980A JP 2013127980 A JP2013127980 A JP 2013127980A JP 2015002548 A JP2015002548 A JP 2015002548A
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JP
Japan
Prior art keywords
base
vibration element
arm
vibrating arm
vibrating
Prior art date
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Withdrawn
Application number
JP2013127980A
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English (en)
Japanese (ja)
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JP2015002548A5 (https=
Inventor
明法 山田
Akinori Yamada
明法 山田
岩本　修
Osamu Iwamoto
修 岩本
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Seiko Epson Corp
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Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2013127980A priority Critical patent/JP2015002548A/ja
Priority to CN201410270270.4A priority patent/CN104242858A/zh
Priority to US14/307,999 priority patent/US20140368287A1/en
Publication of JP2015002548A publication Critical patent/JP2015002548A/ja
Publication of JP2015002548A5 publication Critical patent/JP2015002548A5/ja
Withdrawn legal-status Critical Current

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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • H03B5/32—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0547—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
JP2013127980A 2013-06-18 2013-06-18 振動素子、振動子、発振器、電子機器および移動体 Withdrawn JP2015002548A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2013127980A JP2015002548A (ja) 2013-06-18 2013-06-18 振動素子、振動子、発振器、電子機器および移動体
CN201410270270.4A CN104242858A (zh) 2013-06-18 2014-06-17 振动元件、振子、振荡器、电子设备以及移动体
US14/307,999 US20140368287A1 (en) 2013-06-18 2014-06-18 Resonator element, resonator, oscillator, electronic device, and moving object

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013127980A JP2015002548A (ja) 2013-06-18 2013-06-18 振動素子、振動子、発振器、電子機器および移動体

Publications (2)

Publication Number Publication Date
JP2015002548A true JP2015002548A (ja) 2015-01-05
JP2015002548A5 JP2015002548A5 (https=) 2016-08-04

Family

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JP2013127980A Withdrawn JP2015002548A (ja) 2013-06-18 2013-06-18 振動素子、振動子、発振器、電子機器および移動体

Country Status (3)

Country Link
US (1) US20140368287A1 (https=)
JP (1) JP2015002548A (https=)
CN (1) CN104242858A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11804820B2 (en) 2020-04-27 2023-10-31 Murata Manufacturing Co., Ltd. Resonator and resonance device

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI634742B (zh) * 2013-11-16 2018-09-01 精工愛普生股份有限公司 振動片、振動子、振盪器、電子機器及移動體
WO2016158045A1 (ja) * 2015-03-31 2016-10-06 株式会社村田製作所 共振子

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52129395A (en) * 1976-04-23 1977-10-29 Seiko Instr & Electronics Ltd Tuner fork type peizoelectric resonatpr
JPS5694813A (en) * 1979-12-27 1981-07-31 Seiko Instr & Electronics Ltd Tuning fork type piezoelectric oscillator
JPS58170110A (ja) * 1982-03-30 1983-10-06 Citizen Watch Co Ltd 水晶振動子
JP2004343541A (ja) * 2003-05-16 2004-12-02 Seiko Epson Corp 音叉型圧電振動片および音叉型圧電振動子
JP2005094724A (ja) * 2003-09-17 2005-04-07 Herutsu Kk 音叉型水晶振動子
JP2007271498A (ja) * 2006-03-31 2007-10-18 Kyocera Kinseki Corp 加速度センサ
WO2010035714A1 (ja) * 2008-09-26 2010-04-01 株式会社大真空 音叉型圧電振動片、および音叉型圧電振動デバイス
JP2011082956A (ja) * 2009-09-11 2011-04-21 Seiko Epson Corp 振動片、振動子、発振器、および電子機器
JP2014179901A (ja) * 2013-03-15 2014-09-25 Sii Crystal Technology Inc 圧電振動片、圧電振動子、発振器、電子機器、及び電波時計

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3493292A (en) * 1966-07-22 1970-02-03 Bulova Watch Co Inc Tuning fork structures
US7084556B1 (en) * 2005-06-09 2006-08-01 Eta Sa Manufacture Horlogere Suisse Small-sized piezoelectric resonator
JP5135566B2 (ja) * 2008-10-14 2013-02-06 有限会社ピエデック技術研究所 水晶振動子と水晶ユニットと水晶発振器及びそれらの製造方法
JP5476964B2 (ja) * 2009-12-09 2014-04-23 セイコーエプソン株式会社 振動子、発振器、ジャイロ及び電子機器
JP5479931B2 (ja) * 2010-02-03 2014-04-23 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動子、発振器、電子機器および電波時計
KR101837516B1 (ko) * 2011-02-25 2018-03-12 가부시키가이샤 다이신쿠 압전 진동편, 압전 진동자, 압전 진동편의 제조 방법, 및 압전 진동자의 제조 방법
JP2012186679A (ja) * 2011-03-07 2012-09-27 Seiko Epson Corp 圧電振動素子、圧電振動子、圧電発振器、及び電子機器
JP2014135655A (ja) * 2013-01-10 2014-07-24 Sii Crystal Technology Inc 圧電振動片、圧電振動子、発振器、電子機器及び電波時計
JP2014135654A (ja) * 2013-01-10 2014-07-24 Sii Crystal Technology Inc 圧電振動片、圧電振動子、発振器、電子機器及び電波時計
JP6013228B2 (ja) * 2013-02-25 2016-10-25 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動子、発振器、電子機器及び電波時計
JP6148881B2 (ja) * 2013-03-11 2017-06-14 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片、圧電振動子、発振器、電子機器及び電波時計

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52129395A (en) * 1976-04-23 1977-10-29 Seiko Instr & Electronics Ltd Tuner fork type peizoelectric resonatpr
JPS5694813A (en) * 1979-12-27 1981-07-31 Seiko Instr & Electronics Ltd Tuning fork type piezoelectric oscillator
JPS58170110A (ja) * 1982-03-30 1983-10-06 Citizen Watch Co Ltd 水晶振動子
JP2004343541A (ja) * 2003-05-16 2004-12-02 Seiko Epson Corp 音叉型圧電振動片および音叉型圧電振動子
JP2005094724A (ja) * 2003-09-17 2005-04-07 Herutsu Kk 音叉型水晶振動子
JP2007271498A (ja) * 2006-03-31 2007-10-18 Kyocera Kinseki Corp 加速度センサ
WO2010035714A1 (ja) * 2008-09-26 2010-04-01 株式会社大真空 音叉型圧電振動片、および音叉型圧電振動デバイス
JP2011082956A (ja) * 2009-09-11 2011-04-21 Seiko Epson Corp 振動片、振動子、発振器、および電子機器
JP2014179901A (ja) * 2013-03-15 2014-09-25 Sii Crystal Technology Inc 圧電振動片、圧電振動子、発振器、電子機器、及び電波時計

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11804820B2 (en) 2020-04-27 2023-10-31 Murata Manufacturing Co., Ltd. Resonator and resonance device

Also Published As

Publication number Publication date
US20140368287A1 (en) 2014-12-18
CN104242858A (zh) 2014-12-24

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