JP2014519037A - 圧力及び/又は力を測定するためのセンサ - Google Patents
圧力及び/又は力を測定するためのセンサ Download PDFInfo
- Publication number
- JP2014519037A JP2014519037A JP2014513191A JP2014513191A JP2014519037A JP 2014519037 A JP2014519037 A JP 2014519037A JP 2014513191 A JP2014513191 A JP 2014513191A JP 2014513191 A JP2014513191 A JP 2014513191A JP 2014519037 A JP2014519037 A JP 2014519037A
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- Prior art keywords
- force
- sensor
- measuring
- pressure
- measurement
- Prior art date
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- 238000005259 measurement Methods 0.000 claims abstract description 29
- 230000003068 static effect Effects 0.000 claims abstract description 27
- 238000003825 pressing Methods 0.000 claims abstract description 8
- 238000000053 physical method Methods 0.000 claims abstract description 3
- 230000000694 effects Effects 0.000 abstract description 4
- 238000001514 detection method Methods 0.000 abstract description 2
- 238000009530 blood pressure measurement Methods 0.000 description 9
- 239000000758 substrate Substances 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 239000004020 conductor Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/008—Transmitting or indicating the displacement of flexible diaphragms using piezoelectric devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
- G01L1/162—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L15/00—Devices or apparatus for measuring two or more fluid pressure values simultaneously
Abstract
Description
Claims (6)
- 押圧力が加わる、動圧又は動力を測定するための少なくとも一つの圧電式測定素子(2)を有する少なくとも一つの測定構成と、この少なくとも一つの圧電式測定素子(2)に圧力又は力を伝達するためのダイヤフラム(3)とを備えた、圧力及び/又は力を測定するためのセンサにおいて、
別の物理的な測定原理に基づき静圧又は静力を測定するための別の測定構成(4,7)を備えることを特徴とするセンサ。 - 静圧又は静力を測定するための測定構成(4)が、本センサの圧力及び/又は力の影響を受ける少なくとも一つの領域に配備されていることを特徴とする請求項1に記載のセンサ。
- 圧力又は力が加わる少なくとも一つの測定素子(2)の一つの面上に、当該の測定構成(4)が成膜されており、この測定素子(2)が、有利には、横方向モードで動作することを特徴とする請求項2に記載のセンサ。
- 静圧又は静力を測定するための少なくとも一つの圧電素子(7)が、ダイヤフラムにより押圧力を加えられる圧電式共振器として動作することを特徴とする請求項1から3までのいずれか一つに記載のセンサ。
- 押圧力の方向と異なる向きに、有利には、その方向に対して垂直な向きに、歪み測定構造(4)が成膜されていることを特徴とする請求項1から4までのいずれか一つに記載のセンサ。
- 少なくとも一つの別の歪み測定構造(4)が、本センサの圧力及び/又は力による影響を受けない領域に配備されていることを特徴とする請求項1から4までのいずれか一つに記載のセンサ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ATA828/2011 | 2011-06-03 | ||
ATA828/2011A AT511330B1 (de) | 2011-06-03 | 2011-06-03 | Sensor für die messung von druck und/oder kraft |
PCT/EP2012/060242 WO2012164016A2 (de) | 2011-06-03 | 2012-05-31 | Sensor für die messung von druck und/oder kraft |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014519037A true JP2014519037A (ja) | 2014-08-07 |
JP5913577B2 JP5913577B2 (ja) | 2016-04-27 |
Family
ID=46172795
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014513191A Expired - Fee Related JP5913577B2 (ja) | 2011-06-03 | 2012-05-31 | 圧力及び/又は力を測定するためのセンサ |
Country Status (6)
Country | Link |
---|---|
US (1) | US9291512B2 (ja) |
EP (1) | EP2715300B1 (ja) |
JP (1) | JP5913577B2 (ja) |
CN (1) | CN103748446B (ja) |
AT (1) | AT511330B1 (ja) |
WO (1) | WO2012164016A2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11209325B2 (en) | 2016-11-30 | 2021-12-28 | Kistler Holding Ag | Measurement transducer for simultaneously measuring a force that can be both dynamic and static |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2983955B1 (fr) * | 2011-12-09 | 2014-10-03 | Openfield | Capteur de pression pour fluide |
CH709395A1 (de) | 2014-03-21 | 2015-09-30 | Kistler Holding Ag | Piezoelektrisches Messelement zur Messung des dynamischen Druckes sowie des statischen Druckes und/oder der Temperatur. |
CN104006904B (zh) * | 2014-05-15 | 2016-11-23 | 中国科学技术大学 | 一种自检验式动态压剪应力计 |
CN105651425A (zh) * | 2014-12-08 | 2016-06-08 | 航天长征火箭技术有限公司 | 检测粮仓储量的三维压力传感器 |
EP3329235A4 (en) * | 2015-07-31 | 2019-03-27 | Sikorsky Aircraft Corporation | MULTIFUNCTIONAL PIEZOELECTRIC LOAD SENSOR ARRANGEMENT |
US11022509B2 (en) * | 2016-11-30 | 2021-06-01 | Kistler Holding Ag | Measurement transducer for measuring a force |
TWI804619B (zh) | 2018-05-11 | 2023-06-11 | 義大利商坎帕克諾羅公司 | 設有電氣/電子系統的自行車曲柄臂 |
IT201800005299A1 (it) * | 2018-05-11 | 2019-11-11 | Componente di bicicletta dotato di sensore di sforzi/deformazioni compensato in temperatura | |
US10996120B1 (en) * | 2019-11-06 | 2021-05-04 | Vibration Measurement Solutions, Inc. | Pressure sensor |
AT525353B1 (de) | 2021-12-22 | 2023-03-15 | Piezocryst Advanced Sensorics | Drucksensor für statische und dynamische druckmessungen |
Citations (8)
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JP2002296131A (ja) * | 2001-03-29 | 2002-10-09 | Matsushita Electric Ind Co Ltd | 静圧動圧検知センサ |
JP2003106919A (ja) * | 2001-09-28 | 2003-04-09 | Matsushita Electric Ind Co Ltd | 静圧動圧検知センサ |
JP2003185516A (ja) * | 2001-12-13 | 2003-07-03 | Toyota Central Res & Dev Lab Inc | 圧力センサ |
JP2004132882A (ja) * | 2002-10-11 | 2004-04-30 | Matsushita Electric Ind Co Ltd | 静圧動圧検知センサ |
JP2004226295A (ja) * | 2003-01-24 | 2004-08-12 | Matsushita Electric Ind Co Ltd | 静圧動圧検知センサ |
JP2004226294A (ja) * | 2003-01-24 | 2004-08-12 | Matsushita Electric Ind Co Ltd | 静圧動圧検知センサ |
JP2005069959A (ja) * | 2003-08-27 | 2005-03-17 | Matsushita Electric Ind Co Ltd | 静圧動圧検知センサ |
JP5356218B2 (ja) * | 2006-05-04 | 2013-12-04 | キストラー ホールディング アクチエンゲゼルシャフト | 横効果付きの圧電測定素子と前記測定素子を含むセンサ |
Family Cites Families (25)
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US3624714A (en) * | 1970-04-23 | 1971-11-30 | Dynasciences Corp | Piezoresistive miniature pressure transducer |
AT353506B (de) | 1976-10-19 | 1979-11-26 | List Hans | Piezoelektrischer resonator |
AT369900B (de) | 1981-05-20 | 1983-02-10 | List Hans | Messwertaufnehmer mit piezoelektrischem sensorelement |
DE3125640A1 (de) * | 1981-06-30 | 1983-01-13 | Robert Bosch Gmbh, 7000 Stuttgart | Sensor |
AT393416B (de) * | 1989-04-27 | 1991-10-25 | Avl Verbrennungskraft Messtech | Messverfahren zur bestimmung bzw. ueberwachung von mechanischen und/oder physikalischen groessen |
US4995014A (en) * | 1990-01-29 | 1991-02-19 | Sparton Corporation | Low frequency hydrophone and depth sensor assembly |
CN2093392U (zh) * | 1991-05-20 | 1992-01-15 | 华东工学院 | 高频响压电薄膜式压力传感器 |
DE4217766C1 (en) * | 1992-05-29 | 1993-07-08 | Deutsche Aerospace Ag, 8000 Muenchen, De | Piezoelectric force and torque measurement transducer - contains two or more piezoelectric elements in modulator contg. plate acting on piezoelectric elements, summing amplifier for output voltages |
DE19628551B4 (de) * | 1995-08-04 | 2004-04-15 | Ifm Electronic Gmbh | Druckmeßgerät und Druckmeßanordnung |
DE19533756A1 (de) * | 1995-09-12 | 1997-03-13 | Fraunhofer Ges Forschung | Elektronisches Bauelement zur statischen und dynamischen Druckerfassung |
DE19640854A1 (de) * | 1996-10-02 | 1998-04-09 | Klaus Prof Dr Ing Horn | Längssteife Kraftaufnehmer mit integrierten hydraulischen Kraft-Druckumformern |
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CN101493367A (zh) * | 2008-01-21 | 2009-07-29 | 昆山双桥传感器测控技术有限公司 | 基于mems技术微型动态压力传感器及其制造方法 |
AT506705B1 (de) * | 2008-09-11 | 2009-11-15 | Piezocryst Advanced Sensorics | Piezoelektrischer drucksensor |
US8074521B2 (en) * | 2009-11-09 | 2011-12-13 | Kulite Semiconductor Products, Inc. | Enhanced static-dynamic pressure transducer suitable for use in gas turbines and other compressor applications |
CH704255A1 (de) | 2010-12-22 | 2012-06-29 | Kistler Holding Ag | Kraftsensorsystem und verfahren für planheitsmessungen von folien- oder blechbändern beim walzen. |
-
2011
- 2011-06-03 AT ATA828/2011A patent/AT511330B1/de not_active IP Right Cessation
-
2012
- 2012-05-31 WO PCT/EP2012/060242 patent/WO2012164016A2/de active Application Filing
- 2012-05-31 EP EP12723876.4A patent/EP2715300B1/de not_active Revoked
- 2012-05-31 US US14/123,585 patent/US9291512B2/en not_active Expired - Fee Related
- 2012-05-31 JP JP2014513191A patent/JP5913577B2/ja not_active Expired - Fee Related
- 2012-05-31 CN CN201280027155.3A patent/CN103748446B/zh active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002296131A (ja) * | 2001-03-29 | 2002-10-09 | Matsushita Electric Ind Co Ltd | 静圧動圧検知センサ |
JP2003106919A (ja) * | 2001-09-28 | 2003-04-09 | Matsushita Electric Ind Co Ltd | 静圧動圧検知センサ |
JP2003185516A (ja) * | 2001-12-13 | 2003-07-03 | Toyota Central Res & Dev Lab Inc | 圧力センサ |
JP2004132882A (ja) * | 2002-10-11 | 2004-04-30 | Matsushita Electric Ind Co Ltd | 静圧動圧検知センサ |
JP2004226295A (ja) * | 2003-01-24 | 2004-08-12 | Matsushita Electric Ind Co Ltd | 静圧動圧検知センサ |
JP2004226294A (ja) * | 2003-01-24 | 2004-08-12 | Matsushita Electric Ind Co Ltd | 静圧動圧検知センサ |
JP2005069959A (ja) * | 2003-08-27 | 2005-03-17 | Matsushita Electric Ind Co Ltd | 静圧動圧検知センサ |
JP5356218B2 (ja) * | 2006-05-04 | 2013-12-04 | キストラー ホールディング アクチエンゲゼルシャフト | 横効果付きの圧電測定素子と前記測定素子を含むセンサ |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11209325B2 (en) | 2016-11-30 | 2021-12-28 | Kistler Holding Ag | Measurement transducer for simultaneously measuring a force that can be both dynamic and static |
Also Published As
Publication number | Publication date |
---|---|
AT511330B1 (de) | 2012-11-15 |
WO2012164016A2 (de) | 2012-12-06 |
JP5913577B2 (ja) | 2016-04-27 |
CN103748446A (zh) | 2014-04-23 |
EP2715300B1 (de) | 2016-08-10 |
WO2012164016A3 (de) | 2013-06-06 |
US20140216175A1 (en) | 2014-08-07 |
US9291512B2 (en) | 2016-03-22 |
EP2715300A2 (de) | 2014-04-09 |
CN103748446B (zh) | 2016-01-27 |
AT511330A4 (de) | 2012-11-15 |
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