JP2014176095A5 - - Google Patents
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- JP2014176095A5 JP2014176095A5 JP2014044851A JP2014044851A JP2014176095A5 JP 2014176095 A5 JP2014176095 A5 JP 2014176095A5 JP 2014044851 A JP2014044851 A JP 2014044851A JP 2014044851 A JP2014044851 A JP 2014044851A JP 2014176095 A5 JP2014176095 A5 JP 2014176095A5
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- JP
- Japan
- Prior art keywords
- region
- electrode
- piezoelectric layer
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- layer
- Prior art date
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- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 19
- 229910052721 tungsten Inorganic materials 0.000 claims 19
- 239000010937 tungsten Substances 0.000 claims 19
- WPPDFTBPZNZZRP-UHFFFAOYSA-N aluminum copper Chemical compound [Al].[Cu] WPPDFTBPZNZZRP-UHFFFAOYSA-N 0.000 claims 8
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 3
- 229910052750 molybdenum Inorganic materials 0.000 claims 3
- 239000011733 molybdenum Substances 0.000 claims 3
- 229910052814 silicon oxide Inorganic materials 0.000 claims 3
- 229910000449 hafnium oxide Inorganic materials 0.000 claims 2
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 claims 2
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/796,824 | 2013-03-12 | ||
| US13/796,824 US9450565B2 (en) | 2013-03-12 | 2013-03-12 | Border ring mode suppression in solidly-mounted bulk acoustic wave resonator |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014176095A JP2014176095A (ja) | 2014-09-22 |
| JP2014176095A5 true JP2014176095A5 (https=) | 2017-04-13 |
| JP6568339B2 JP6568339B2 (ja) | 2019-08-28 |
Family
ID=51529263
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014044851A Active JP6568339B2 (ja) | 2013-03-12 | 2014-03-07 | 強固に固定されたバルク弾性波共振器における境界リングモード抑制 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US9450565B2 (https=) |
| JP (1) | JP6568339B2 (https=) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101923572B1 (ko) * | 2015-03-16 | 2018-11-29 | 가부시키가이샤 무라타 세이사쿠쇼 | 탄성파 장치 및 그 제조 방법 |
| KR101923573B1 (ko) * | 2015-03-16 | 2018-11-29 | 가부시키가이샤 무라타 세이사쿠쇼 | 탄성파 장치 및 그 제조 방법 |
| US9985194B1 (en) | 2015-05-13 | 2018-05-29 | Qorvo Us, Inc. | Spurious mode suppression in bulk acoustic wave resonator |
| US10686425B2 (en) | 2017-06-30 | 2020-06-16 | Texas Instruments Incorporated | Bulk acoustic wave resonators having convex surfaces, and methods of forming the same |
| US10615772B2 (en) | 2017-06-30 | 2020-04-07 | Texas Instruments Incorporated | Acoustic wave resonators having Fresnel surfaces |
| US10622966B2 (en) | 2017-07-26 | 2020-04-14 | Texas Instruments Incorporated | Bulk acoustic wave resonators having a phononic crystal acoustic mirror |
| US10855251B2 (en) | 2017-08-08 | 2020-12-01 | Texas Instruments Incorporated | Unreleased plane acoustic wave resonators |
| US10277194B2 (en) | 2017-09-15 | 2019-04-30 | Globalfoundries Singapore Pte. Ltd. | Acoustic MEMs resonator and filter with fractal electrode and method for producing the same |
| US11233496B2 (en) | 2018-02-21 | 2022-01-25 | Vanguard International Semiconductor Singapore Pte. Ltd. | Acoustic resonator and filter with electrode having zig-zag edge and method for producing the same |
| JP2020053966A (ja) | 2018-09-24 | 2020-04-02 | スカイワークス グローバル プライベート リミテッド | バルク弾性波デバイスにおける多層隆起フレーム |
| JP7456734B2 (ja) * | 2019-06-17 | 2024-03-27 | 太陽誘電株式会社 | 弾性波デバイス、フィルタおよびマルチプレクサ |
| US11469735B2 (en) * | 2018-11-28 | 2022-10-11 | Taiyo Yuden Co., Ltd. | Acoustic wave device, filter, and multiplexer |
| CN111384909B (zh) * | 2018-12-27 | 2025-12-12 | 天津大学 | 电极厚度不对称的体声波谐振器、滤波器和电子设备 |
| US10879872B2 (en) * | 2019-04-19 | 2020-12-29 | Akoustis, Inc. | BAW resonators with antisymmetric thick electrodes |
| WO2021200677A1 (ja) | 2020-03-31 | 2021-10-07 | 株式会社村田製作所 | 弾性波装置 |
| DE102021209875A1 (de) | 2020-09-18 | 2022-03-24 | Skyworks Global Pte. Ltd. | Akustische volumenwellenvorrichtung mit erhöhter rahmenstruktur |
| EP4210221A4 (en) * | 2020-09-23 | 2023-11-08 | Huawei Technologies Co., Ltd. | Resonator and preparation method, filter, and electronic device thereof |
| US12088278B2 (en) | 2020-09-30 | 2024-09-10 | Skyworks Global Pte. Ltd. | Bulk acoustic wave resonator with patterned mass loading layer and recessed frame |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FI107660B (fi) | 1999-07-19 | 2001-09-14 | Nokia Mobile Phones Ltd | Resonaattorirakenne |
| KR100865652B1 (ko) * | 2001-05-11 | 2008-10-29 | 우베 고산 가부시키가이샤 | 압전 박막 공진자 |
| WO2005034345A1 (en) * | 2003-10-06 | 2005-04-14 | Philips Intellectual Property & Standards Gmbh | Resonator structure and method of producing it |
| CN101278479B (zh) * | 2005-09-30 | 2011-04-13 | Nxp股份有限公司 | 薄膜体声波（baw）谐振器或相关改进 |
| JP2008182543A (ja) * | 2007-01-25 | 2008-08-07 | Ube Ind Ltd | 薄膜圧電共振器とそれを用いた薄膜圧電フィルタ |
| JPWO2009013938A1 (ja) * | 2007-07-20 | 2010-09-30 | 株式会社村田製作所 | 圧電共振子及び圧電フィルタ装置 |
| US8035277B2 (en) * | 2007-08-14 | 2011-10-11 | Avago Technologies Wireless Ip (Singapore) Pte.Ltd. | Method for forming a multi-layer electrode underlying a piezoelectric layer and related structure |
| WO2009023098A2 (en) * | 2007-08-14 | 2009-02-19 | Skyworks Solutions, Inc. | Bulk acoustic wave structure with aluminum copper nitride piezoelectric layer and related method |
| CN101796726B (zh) * | 2007-08-24 | 2014-04-02 | 太阳诱电株式会社 | 压电薄膜谐振器、使用该压电薄膜谐振器的滤波器、使用该滤波器的双工器、以及使用该滤波器或该双工器的通信设备 |
| JP5563739B2 (ja) * | 2008-02-20 | 2014-07-30 | 太陽誘電株式会社 | 圧電薄膜共振器、フィルタ、デュープレクサ、通信モジュール、および通信装置 |
| EP2277265A1 (en) * | 2008-04-29 | 2011-01-26 | Nxp B.V. | Bulk acoustic wave resonator |
| CN102301590B (zh) * | 2009-02-20 | 2014-07-02 | 宇部兴产株式会社 | 薄膜压电谐振器以及使用它的薄膜压电滤波器 |
| US8198958B1 (en) * | 2009-03-30 | 2012-06-12 | Triquint Semiconductor, Inc. | Power amplifier matching RF system and method using bulk acoustics wave device |
| JP2011160232A (ja) * | 2010-02-01 | 2011-08-18 | Ube Industries Ltd | 薄膜圧電共振器およびそれを用いた薄膜圧電フィルタ |
| US9401692B2 (en) * | 2012-10-29 | 2016-07-26 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic resonator having collar structure |
| JP2012244616A (ja) * | 2011-05-24 | 2012-12-10 | Taiyo Yuden Co Ltd | 圧電薄膜共振子、フィルタおよびモジュール |
-
2013
- 2013-03-12 US US13/796,824 patent/US9450565B2/en active Active
-
2014
- 2014-03-07 JP JP2014044851A patent/JP6568339B2/ja active Active
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