JP2014166728A - 液体噴射ヘッド、液体噴射装置、圧電素子及び超音波センサー - Google Patents
液体噴射ヘッド、液体噴射装置、圧電素子及び超音波センサー Download PDFInfo
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- JP2014166728A JP2014166728A JP2013039856A JP2013039856A JP2014166728A JP 2014166728 A JP2014166728 A JP 2014166728A JP 2013039856 A JP2013039856 A JP 2013039856A JP 2013039856 A JP2013039856 A JP 2013039856A JP 2014166728 A JP2014166728 A JP 2014166728A
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- electrode
- piezoelectric
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- piezoelectric layer
- piezoelectric element
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Classifications
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- B41J2/14201—Structure of print heads with piezoelectric elements
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
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- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/055—Devices for absorbing or preventing back-pressure
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
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- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
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- B41J2/01—Ink jet
- B41J2/135—Nozzles
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- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
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- B41J2/1628—Manufacturing processes etching dry etching
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
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- B41J2/01—Ink jet
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- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
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- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
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- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
- H10N30/082—Shaping or machining of piezoelectric or electrostrictive bodies by etching, e.g. lithography
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
- B41J2002/14241—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm having a cover around the piezoelectric thin film element
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- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
【解決手段】第1電極60、第1電極60上に設けられて複数の圧電体膜74が積層された圧電体層70、圧電体層70上に設けられた第2電極80、及び第1電極60と第2電極80とで挟まれた能動部320を複数備えた圧電素子300と、液体を噴射するノズル開口に連通し、圧電素子300により圧力変化が生じる圧力発生室12とを備え、圧電体層70の側面に、第1電極60側に臨む内面を有する溝を第1電極60から第2電極80に向かう第3の方向Zとは交差する第1の方向X及び第2の方向Yに沿って各圧電体膜74の界面ごとに複数形成する。
【選択図】図3
Description
かかる態様では、ノズル開口の高密度化に対応して圧電素子を高密度化しても、圧電素子の発熱による性能低下を防止できるため、液体噴射ヘッドとしては、高密度なノズル開口から液体を安定して高精細に吐出することができる。
かかる態様では、圧電素子の発熱による性能低下が防止された液体噴射装置を実現できる。
かかる態様では、溝が設けられた圧電体層の側面は、放熱板として機能し、生じた熱は外部に放熱され圧電素子の温度上昇が抑えられる。これにより、発熱量の増大に伴う圧電素子の性能低下を防止し、良好な圧電性能を有する圧電素子を得ることができる。
かかる態様では、圧電素子の発熱による性能低下が防止された超音波センサーを実現できる。
〈実施形態1〉
図1は、本発明の実施形態1に係る液体噴射ヘッドの一例であるインクジェット式記録ヘッドの斜視図であり、図2は、インクジェット式記録ヘッドの平面図及び断面図である。
本実施形態では、実施形態1で説明したインクジェット式記録ヘッドの製造方法のうち、圧電体層70の側面に溝77を形成する工程の別態様を例示する。図11は、インクジェット式記録ヘッドの製造方法を示す第1の方向Xの断面図である。
実施形態1及び実施形態2では、第1電極60を個別電極とし、第2電極80を共通電極としたが、逆であってもよい。図12は、本実施形態に係る圧電素子の第1の方向Xの断面図である。
実施形態1では、第2電極80を無電解めっき法により形成したが、これに限定されない。図13に、本実施形態に係る圧電素子300の要部を拡大した断面図を示す。なお、実施形態1と同一のものには同一の符号を付し、重複する説明は省略する。
実施形態2では、第2電極80の第1層81の材料としてイリジウムなどを用いた例について説明したが、第1層81として導電性酸化金属を用いることもできる。図14は、本実施形態に係る圧電素子の断面図及び要部を拡大した断面図であり、図15は、本実施形態に係るインクジェット式記録ヘッドの製造方法のうち圧電素子部分の製造方法を説明する断面図である。なお、実施形態1及び実施形態2と同一のものには同一の符号を付し、重複する説明は省略する。
本発明の一実施形態である超音波センサーについて説明する。なお、以下の説明する本実施形態は、特許請求の範囲に記載された本発明の内容を不当に限定するものではなく、本実施形態で説明される構成の全てが本発明の解決手段として必須であることとは限らない。また、上述した実施形態1と同一の部材には同一の符号をつけて重複する説明は省略する。
以上、本発明の一実施形態について説明したが、本発明の基本的な構成は上述したものに限定されるものではない。
圧電体層をウェットエッチングする際に、エッチングレート差を生じさせる要因について説明し、それにより形成される圧電体層の溝を例示する。
Claims (8)
- 第1電極、前記第1電極上に設けられて複数の圧電体膜が積層された圧電体層、前記圧電体層上に設けられた第2電極、及び前記第1電極と前記第2電極とで挟まれた能動部を複数備えた圧電素子と、
液体を噴射するノズル開口に連通し、前記圧電素子により圧力変化が生じる圧力発生室とを備え、
前記圧電体層の側面には、前記第1電極側に臨む内面を有する溝が前記第1電極から前記第2電極に向かう方向とは交差する方向に沿って前記各圧電体膜の界面ごとに複数形成されている
ことを特徴とする液体噴射ヘッド。 - 請求項1に記載する液体噴射ヘッドにおいて、
前記圧電体層は、前記第1電極側の前記圧電体膜が前記第2電極側の前記圧電体膜よりも外側に突出するように形成されている
ことを特徴とする液体噴射ヘッド。 - 請求項1又は請求項2に記載する液体噴射ヘッドにおいて、
前記第2電極は、無電解めっき法により形成されている
ことを特徴とする液体噴射ヘッド。 - 請求項1又は請求項2に記載する液体噴射ヘッドにおいて、
前記第2電極は、前記圧電体層上に形成された導電性酸化金属からなる第1層と、該第1層上に形成された導電性を有する第2層とを備える
ことを特徴とする液体噴射ヘッド。 - 請求項4に記載する液体噴射ヘッドにおいて、
前記第2電極の前記第2層は、無電解めっき法により形成されている
ことを特徴とする液体噴射ヘッド。 - 請求項1〜請求項5の何れか一項に記載の液体噴射ヘッドを具備することを特徴とする液体噴射装置。
- 第1電極と、
前記第1電極上に設けられて複数の圧電体膜が積層された圧電体層と、
前記圧電体層上に設けられた第2電極と、
前記第1電極と前記第2電極とで挟まれた能動部を複数備え、
前記圧電体層の側面には、前記第1電極側に臨む内面を有する溝が前記第1電極から前記第2電極に向かう方向とは交差する方向に沿って前記各圧電体層の界面ごとに複数形成されている
ことを特徴とする圧電素子。 - 請求項7に記載する圧電素子を具備することを特徴とする超音波センサー。
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US10622540B2 (en) * | 2016-12-12 | 2020-04-14 | Panasonic Intellectual Property Management Co., Ltd. | Piezoelectric functional film, actuator, and ink-jet head |
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US11411162B2 (en) * | 2018-09-19 | 2022-08-09 | Sae Magnetics (H.K.) Ltd. | Thin-film piezoelectric-material element, method of manufacturing the same, head gimbal assembly and hard disk drive |
US11289641B2 (en) * | 2018-09-19 | 2022-03-29 | Sae Magnetics (H.K.) Ltd. | Thin-film piezoelectric-material element, method of manufacturing the same, head gimbal assembly and hard disk drive |
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