JP2014150264A5 - - Google Patents
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- JP2014150264A5 JP2014150264A5 JP2014045897A JP2014045897A JP2014150264A5 JP 2014150264 A5 JP2014150264 A5 JP 2014150264A5 JP 2014045897 A JP2014045897 A JP 2014045897A JP 2014045897 A JP2014045897 A JP 2014045897A JP 2014150264 A5 JP2014150264 A5 JP 2014150264A5
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- 238000000034 method Methods 0.000 claims 35
- 238000005259 measurement Methods 0.000 claims 21
- 230000003287 optical effect Effects 0.000 claims 10
- 238000001514 detection method Methods 0.000 claims 8
- 238000005286 illumination Methods 0.000 claims 6
- 238000005192 partition Methods 0.000 claims 6
- 238000004519 manufacturing process Methods 0.000 claims 4
- 230000001133 acceleration Effects 0.000 claims 2
- 230000001678 irradiating effect Effects 0.000 claims 2
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US23670109P | 2009-08-25 | 2009-08-25 | |
| US61/236,701 | 2009-08-25 | ||
| US12/859,983 US8493547B2 (en) | 2009-08-25 | 2010-08-20 | Exposure apparatus, exposure method, and device manufacturing method |
| US12/859,983 | 2010-08-20 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010187025A Division JP5637495B2 (ja) | 2009-08-25 | 2010-08-24 | 露光装置及び露光方法、並びにデバイス製造方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015002607A Division JP6035691B2 (ja) | 2009-08-25 | 2015-01-08 | 露光装置及び露光方法、並びにデバイス製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014150264A JP2014150264A (ja) | 2014-08-21 |
| JP2014150264A5 true JP2014150264A5 (enExample) | 2015-02-26 |
| JP6035686B2 JP6035686B2 (ja) | 2016-11-30 |
Family
ID=43625431
Family Applications (9)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010187025A Active JP5637495B2 (ja) | 2009-08-25 | 2010-08-24 | 露光装置及び露光方法、並びにデバイス製造方法 |
| JP2014045897A Active JP6035686B2 (ja) | 2009-08-25 | 2014-03-10 | 露光装置及び露光方法、並びにデバイス製造方法 |
| JP2015002607A Active JP6035691B2 (ja) | 2009-08-25 | 2015-01-08 | 露光装置及び露光方法、並びにデバイス製造方法 |
| JP2015121609A Active JP6035694B2 (ja) | 2009-08-25 | 2015-06-17 | 露光装置及び露光方法、並びにデバイス製造方法 |
| JP2016004156A Active JP6107980B2 (ja) | 2009-08-25 | 2016-01-13 | 露光装置及び露光方法、並びにデバイス製造方法 |
| JP2016218369A Active JP6292547B2 (ja) | 2009-08-25 | 2016-11-08 | 露光装置及び露光方法、並びにデバイス製造方法 |
| JP2018016060A Active JP6566389B2 (ja) | 2009-08-25 | 2018-02-01 | 露光装置及び露光方法、並びにデバイス製造方法 |
| JP2019138896A Active JP6788812B2 (ja) | 2009-08-25 | 2019-07-29 | 露光装置及び露光方法、並びにデバイス製造方法 |
| JP2020171916A Active JP6948581B2 (ja) | 2009-08-25 | 2020-10-12 | 露光装置及び露光方法、並びにデバイス製造方法 |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010187025A Active JP5637495B2 (ja) | 2009-08-25 | 2010-08-24 | 露光装置及び露光方法、並びにデバイス製造方法 |
Family Applications After (7)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015002607A Active JP6035691B2 (ja) | 2009-08-25 | 2015-01-08 | 露光装置及び露光方法、並びにデバイス製造方法 |
| JP2015121609A Active JP6035694B2 (ja) | 2009-08-25 | 2015-06-17 | 露光装置及び露光方法、並びにデバイス製造方法 |
| JP2016004156A Active JP6107980B2 (ja) | 2009-08-25 | 2016-01-13 | 露光装置及び露光方法、並びにデバイス製造方法 |
| JP2016218369A Active JP6292547B2 (ja) | 2009-08-25 | 2016-11-08 | 露光装置及び露光方法、並びにデバイス製造方法 |
| JP2018016060A Active JP6566389B2 (ja) | 2009-08-25 | 2018-02-01 | 露光装置及び露光方法、並びにデバイス製造方法 |
| JP2019138896A Active JP6788812B2 (ja) | 2009-08-25 | 2019-07-29 | 露光装置及び露光方法、並びにデバイス製造方法 |
| JP2020171916A Active JP6948581B2 (ja) | 2009-08-25 | 2020-10-12 | 露光装置及び露光方法、並びにデバイス製造方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (11) | US8493547B2 (enExample) |
| EP (5) | EP2470962B1 (enExample) |
| JP (9) | JP5637495B2 (enExample) |
| KR (8) | KR101680546B1 (enExample) |
| CN (4) | CN102549501B (enExample) |
| HK (2) | HK1250795A1 (enExample) |
| TW (7) | TWI649644B (enExample) |
| WO (1) | WO2011024985A1 (enExample) |
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| DE102012210309A1 (de) * | 2012-06-19 | 2013-12-19 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
| KR102203305B1 (ko) | 2012-10-02 | 2021-01-14 | 가부시키가이샤 니콘 | 노광 장치 및 노광 방법, 그리고 디바이스 제조 방법 |
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