JP2014112236A5 - - Google Patents

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JP2014112236A5
JP2014112236A5 JP2013269412A JP2013269412A JP2014112236A5 JP 2014112236 A5 JP2014112236 A5 JP 2014112236A5 JP 2013269412 A JP2013269412 A JP 2013269412A JP 2013269412 A JP2013269412 A JP 2013269412A JP 2014112236 A5 JP2014112236 A5 JP 2014112236A5
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patterns
pattern
parameter
response
linear
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JP2014112236A (ja
JP5940049B2 (ja
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JP2013269412A 2011-07-08 2013-12-26 波面収差に対する応答を調整したパターン設計の方法及びシステム Expired - Fee Related JP5940049B2 (ja)

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US201161505904P 2011-07-08 2011-07-08
US61/505,904 2011-07-08

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JP2012148374A Division JP5451821B2 (ja) 2011-07-08 2012-07-02 波面収差に対する応答を調整したパターン設計の方法及びシステム

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JP2014112236A JP2014112236A (ja) 2014-06-19
JP2014112236A5 true JP2014112236A5 (cg-RX-API-DMAC7.html) 2015-02-19
JP5940049B2 JP5940049B2 (ja) 2016-06-29

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JP2012148374A Expired - Fee Related JP5451821B2 (ja) 2011-07-08 2012-07-02 波面収差に対する応答を調整したパターン設計の方法及びシステム
JP2013269412A Expired - Fee Related JP5940049B2 (ja) 2011-07-08 2013-12-26 波面収差に対する応答を調整したパターン設計の方法及びシステム

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US (2) US8918742B2 (cg-RX-API-DMAC7.html)
JP (2) JP5451821B2 (cg-RX-API-DMAC7.html)
CN (1) CN102866590B (cg-RX-API-DMAC7.html)
NL (1) NL2008957A (cg-RX-API-DMAC7.html)

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CN110530530B (zh) * 2018-05-23 2021-01-15 中国科学院长春光学精密机械与物理研究所 一种波前提取算法及采用该算法的剪切干涉仪
TWI794544B (zh) * 2018-10-09 2023-03-01 荷蘭商Ａｓｍｌ荷蘭公司 用於高數值孔徑穿縫源光罩最佳化之方法
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