JP2014098565A - 電子デバイス、電子デバイスの製造方法、電子機器及び移動体 - Google Patents
電子デバイス、電子デバイスの製造方法、電子機器及び移動体 Download PDFInfo
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- JP2014098565A JP2014098565A JP2012249032A JP2012249032A JP2014098565A JP 2014098565 A JP2014098565 A JP 2014098565A JP 2012249032 A JP2012249032 A JP 2012249032A JP 2012249032 A JP2012249032 A JP 2012249032A JP 2014098565 A JP2014098565 A JP 2014098565A
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012249032A JP2014098565A (ja) | 2012-11-13 | 2012-11-13 | 電子デバイス、電子デバイスの製造方法、電子機器及び移動体 |
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| Application Number | Priority Date | Filing Date | Title |
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| JP2012249032A JP2014098565A (ja) | 2012-11-13 | 2012-11-13 | 電子デバイス、電子デバイスの製造方法、電子機器及び移動体 |
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| Publication Number | Publication Date |
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| JP2014098565A true JP2014098565A (ja) | 2014-05-29 |
| JP2014098565A5 JP2014098565A5 (enExample) | 2015-12-17 |
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| JP2012249032A Withdrawn JP2014098565A (ja) | 2012-11-13 | 2012-11-13 | 電子デバイス、電子デバイスの製造方法、電子機器及び移動体 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20170197820A1 (en) * | 2016-01-13 | 2017-07-13 | Seiko Epson Corporation | Electronic device, electronic apparatus, and moving object |
| US11105827B2 (en) | 2018-03-09 | 2021-08-31 | Seiko Epson Corporation | Physical quantity sensor, physical quantity sensor device, and inclinometer, inertia measurement device, structure monitoring device, and vehicle using physical quantity sensor device |
| JP2023085718A (ja) * | 2021-12-09 | 2023-06-21 | セイコーエプソン株式会社 | 圧電駆動装置、およびロボット |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008076263A (ja) * | 2006-09-22 | 2008-04-03 | Matsushita Electric Ind Co Ltd | 複合センサ |
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- 2012-11-13 JP JP2012249032A patent/JP2014098565A/ja not_active Withdrawn
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008076263A (ja) * | 2006-09-22 | 2008-04-03 | Matsushita Electric Ind Co Ltd | 複合センサ |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20170197820A1 (en) * | 2016-01-13 | 2017-07-13 | Seiko Epson Corporation | Electronic device, electronic apparatus, and moving object |
| US11105827B2 (en) | 2018-03-09 | 2021-08-31 | Seiko Epson Corporation | Physical quantity sensor, physical quantity sensor device, and inclinometer, inertia measurement device, structure monitoring device, and vehicle using physical quantity sensor device |
| US11630122B2 (en) | 2018-03-09 | 2023-04-18 | Seiko Epson Corporation | Physical quantity sensor, physical quantity sensor device, and inclinometer, inertia measurement device, structure monitoring device, and vehicle using physical quantity sensor device |
| JP2023085718A (ja) * | 2021-12-09 | 2023-06-21 | セイコーエプソン株式会社 | 圧電駆動装置、およびロボット |
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