JP2014075601A - 半導体デバイスの製造方法 - Google Patents
半導体デバイスの製造方法 Download PDFInfo
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- JP2014075601A JP2014075601A JP2013252609A JP2013252609A JP2014075601A JP 2014075601 A JP2014075601 A JP 2014075601A JP 2013252609 A JP2013252609 A JP 2013252609A JP 2013252609 A JP2013252609 A JP 2013252609A JP 2014075601 A JP2014075601 A JP 2014075601A
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- Prior art keywords
- metal oxide
- channel
- layer
- oxide layer
- region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 69
- 238000000034 method Methods 0.000 title claims abstract description 14
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 8
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract description 80
- 150000004706 metal oxides Chemical class 0.000 claims abstract description 80
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000010410 layer Substances 0.000 description 147
- 239000000758 substrate Substances 0.000 description 14
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 11
- 238000002955 isolation Methods 0.000 description 10
- 230000014759 maintenance of location Effects 0.000 description 10
- 230000007704 transition Effects 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 7
- 238000000151 deposition Methods 0.000 description 7
- 230000008859 change Effects 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 239000011787 zinc oxide Substances 0.000 description 5
- 230000007613 environmental effect Effects 0.000 description 4
- 239000011810 insulating material Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- HVYWMOMLDIMFJA-DPAQBDIFSA-N cholesterol Chemical compound C1C=C2C[C@@H](O)CC[C@]2(C)[C@@H]2[C@@H]1[C@@H]1CC[C@H]([C@H](C)CCCC(C)C)[C@@]1(C)CC2 HVYWMOMLDIMFJA-DPAQBDIFSA-N 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 102000004190 Enzymes Human genes 0.000 description 1
- 108090000790 Enzymes Proteins 0.000 description 1
- 229910005191 Ga 2 O 3 Inorganic materials 0.000 description 1
- WQZGKKKJIJFFOK-GASJEMHNSA-N Glucose Natural products OC[C@H]1OC(O)[C@H](O)[C@@H](O)[C@@H]1O WQZGKKKJIJFFOK-GASJEMHNSA-N 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 125000005376 alkyl siloxane group Chemical group 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- WQZGKKKJIJFFOK-VFUOTHLCSA-N beta-D-glucose Chemical compound OC[C@H]1O[C@@H](O)[C@H](O)[C@@H](O)[C@@H]1O WQZGKKKJIJFFOK-VFUOTHLCSA-N 0.000 description 1
- 235000012000 cholesterol Nutrition 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 235000014113 dietary fatty acids Nutrition 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 229930195729 fatty acid Natural products 0.000 description 1
- 239000000194 fatty acid Substances 0.000 description 1
- 150000004665 fatty acids Chemical class 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000008103 glucose Substances 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 238000004549 pulsed laser deposition Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 239000013545 self-assembled monolayer Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/7869—Thin film transistors, i.e. transistors with a channel being at least partly a thin film having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
Abstract
【解決手段】半導体デバイス100は、金属酸化物層101、金属酸化物層におけるチャネル領域105、金属酸化物層におけるチャネル領域に形成された保持層104、および金属酸化物層におけるチャネル領域に接続された二つ以上のチャネル接点102、103を含む。
【選択図】図1
Description
Claims (1)
- 表面領域とバルク領域とを備えた金属酸化物層と、
前記金属酸化物層の前記バルク領域の固有抵抗より小さい固有抵抗を有する前記金属酸化物層の前記表面領域のチャネル領域と、
前記チャネル領域に形成された保持層と、
前記金属酸化物層における前記チャネル領域に接続された少なくとも二つのチャネル接点と、
を含む半導体デバイスの製造方法であって、
前記チャネル領域は、前記金属酸化物層を真空中で加熱して形成されるものであって前記保持層を形成する際の熱により前記保持層と同時に形成される
ことを特徴とする半導体デバイスの製造方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/313,341 US7314801B2 (en) | 2005-12-20 | 2005-12-20 | Semiconductor device having a surface conducting channel and method of forming |
US11/313,341 | 2005-12-20 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006340835A Division JP2007173820A (ja) | 2005-12-20 | 2006-12-19 | 半導体デバイス |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2014075601A true JP2014075601A (ja) | 2014-04-24 |
Family
ID=37776421
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006340835A Pending JP2007173820A (ja) | 2005-12-20 | 2006-12-19 | 半導体デバイス |
JP2013252609A Ceased JP2014075601A (ja) | 2005-12-20 | 2013-12-06 | 半導体デバイスの製造方法 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006340835A Pending JP2007173820A (ja) | 2005-12-20 | 2006-12-19 | 半導体デバイス |
Country Status (3)
Country | Link |
---|---|
US (1) | US7314801B2 (ja) |
EP (1) | EP1801887A1 (ja) |
JP (2) | JP2007173820A (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5116225B2 (ja) | 2005-09-06 | 2013-01-09 | キヤノン株式会社 | 酸化物半導体デバイスの製造方法 |
TWI512997B (zh) * | 2009-09-24 | 2015-12-11 | Semiconductor Energy Lab | 半導體裝置,電源電路,和半導體裝置的製造方法 |
WO2011046010A1 (en) | 2009-10-16 | 2011-04-21 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic device including the liquid crystal display device |
KR102462145B1 (ko) * | 2009-10-16 | 2022-11-03 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 액정 표시 장치 및 이를 구비한 전자 장치 |
CN112447130A (zh) | 2009-10-21 | 2021-03-05 | 株式会社半导体能源研究所 | 显示装置和包括显示装置的电子设备 |
WO2011068025A1 (en) * | 2009-12-04 | 2011-06-09 | Semiconductor Energy Laboratory Co., Ltd. | Dc converter circuit and power supply circuit |
KR101773641B1 (ko) | 2010-01-22 | 2017-09-12 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
US8610180B2 (en) * | 2010-06-11 | 2013-12-17 | Semiconductor Energy Laboratory Co., Ltd. | Gas sensor and method for manufacturing the gas sensor |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63104340A (ja) * | 1986-10-20 | 1988-05-09 | Nec Corp | 窒化シリコン膜の成膜方法 |
US20030047785A1 (en) * | 2001-09-10 | 2003-03-13 | Masahi Kawasaki | Thin film transistor and matrix display device |
JP2004006686A (ja) * | 2002-03-26 | 2004-01-08 | Sanyo Electric Co Ltd | ZnO半導体層の形成方法、半導体素子の製造方法及び半導体素子 |
US20040038446A1 (en) * | 2002-03-15 | 2004-02-26 | Sanyo Electric Co., Ltd.- | Method for forming ZnO film, method for forming ZnO semiconductor layer, method for fabricating semiconductor device, and semiconductor device |
WO2005088726A1 (ja) * | 2004-03-12 | 2005-09-22 | Japan Science And Technology Agency | アモルファス酸化物及び薄膜トランジスタ |
JP2005285890A (ja) * | 2004-03-29 | 2005-10-13 | Casio Comput Co Ltd | 亜鉛酸化物の加工方法 |
JP2006005116A (ja) * | 2004-06-17 | 2006-01-05 | Casio Comput Co Ltd | 膜形成方法、半導体膜、及び積層絶縁膜 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2361480B (en) * | 2000-04-19 | 2002-06-19 | Murata Manufacturing Co | Method for forming p-type semiconductor film and light emitting device using the same |
US7339187B2 (en) * | 2002-05-21 | 2008-03-04 | State Of Oregon Acting By And Through The Oregon State Board Of Higher Education On Behalf Of Oregon State University | Transistor structures |
JP4108633B2 (ja) | 2003-06-20 | 2008-06-25 | シャープ株式会社 | 薄膜トランジスタおよびその製造方法ならびに電子デバイス |
US7262463B2 (en) | 2003-07-25 | 2007-08-28 | Hewlett-Packard Development Company, L.P. | Transistor including a deposited channel region having a doped portion |
US7026713B2 (en) | 2003-12-17 | 2006-04-11 | Hewlett-Packard Development Company, L.P. | Transistor device having a delafossite material |
-
2005
- 2005-12-20 US US11/313,341 patent/US7314801B2/en not_active Expired - Fee Related
-
2006
- 2006-12-18 EP EP06126360A patent/EP1801887A1/en not_active Withdrawn
- 2006-12-19 JP JP2006340835A patent/JP2007173820A/ja active Pending
-
2013
- 2013-12-06 JP JP2013252609A patent/JP2014075601A/ja not_active Ceased
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63104340A (ja) * | 1986-10-20 | 1988-05-09 | Nec Corp | 窒化シリコン膜の成膜方法 |
US20030047785A1 (en) * | 2001-09-10 | 2003-03-13 | Masahi Kawasaki | Thin film transistor and matrix display device |
JP2003086808A (ja) * | 2001-09-10 | 2003-03-20 | Masashi Kawasaki | 薄膜トランジスタおよびマトリクス表示装置 |
US20040038446A1 (en) * | 2002-03-15 | 2004-02-26 | Sanyo Electric Co., Ltd.- | Method for forming ZnO film, method for forming ZnO semiconductor layer, method for fabricating semiconductor device, and semiconductor device |
JP2004006686A (ja) * | 2002-03-26 | 2004-01-08 | Sanyo Electric Co Ltd | ZnO半導体層の形成方法、半導体素子の製造方法及び半導体素子 |
WO2005088726A1 (ja) * | 2004-03-12 | 2005-09-22 | Japan Science And Technology Agency | アモルファス酸化物及び薄膜トランジスタ |
JP2005285890A (ja) * | 2004-03-29 | 2005-10-13 | Casio Comput Co Ltd | 亜鉛酸化物の加工方法 |
JP2006005116A (ja) * | 2004-06-17 | 2006-01-05 | Casio Comput Co Ltd | 膜形成方法、半導体膜、及び積層絶縁膜 |
Non-Patent Citations (1)
Title |
---|
OLIVER SCHMIDT 他5名: "Effects of an Electrically Conducting Layer at the Zinc Oxide Surface", J.J.A.P, vol. 44, no. 10, JPN7014002934, 11 October 2005 (2005-10-11), JP, pages 7271 - 7274, ISSN: 0002916193 * |
Also Published As
Publication number | Publication date |
---|---|
JP2007173820A (ja) | 2007-07-05 |
US20070141789A1 (en) | 2007-06-21 |
US7314801B2 (en) | 2008-01-01 |
EP1801887A1 (en) | 2007-06-27 |
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