JP2014063052A - 光変調器の製造方法および光変調器 - Google Patents

光変調器の製造方法および光変調器 Download PDF

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Publication number
JP2014063052A
JP2014063052A JP2012208417A JP2012208417A JP2014063052A JP 2014063052 A JP2014063052 A JP 2014063052A JP 2012208417 A JP2012208417 A JP 2012208417A JP 2012208417 A JP2012208417 A JP 2012208417A JP 2014063052 A JP2014063052 A JP 2014063052A
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Japan
Prior art keywords
wavelength
optical modulator
width
laser diode
manufacturing
Prior art date
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Pending
Application number
JP2012208417A
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English (en)
Japanese (ja)
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JP2014063052A5 (enExample
Inventor
Kimitaka Shibata
公隆 柴田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
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Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2012208417A priority Critical patent/JP2014063052A/ja
Priority to US13/846,067 priority patent/US8841143B2/en
Priority to CN201310427136.6A priority patent/CN103682978A/zh
Publication of JP2014063052A publication Critical patent/JP2014063052A/ja
Publication of JP2014063052A5 publication Critical patent/JP2014063052A5/ja
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/026—Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/026—Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
    • H01S5/0265—Intensity modulators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/12—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
    • H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/0014—Measuring characteristics or properties thereof
    • H01S5/0042—On wafer testing, e.g. lasers are tested before separating wafer into chips
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
    • H01S5/2054—Methods of obtaining the confinement
    • H01S5/2081—Methods of obtaining the confinement using special etching techniques
    • H01S5/2086—Methods of obtaining the confinement using special etching techniques lateral etch control, e.g. mask induced

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Geometry (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Semiconductor Lasers (AREA)
JP2012208417A 2012-09-21 2012-09-21 光変調器の製造方法および光変調器 Pending JP2014063052A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2012208417A JP2014063052A (ja) 2012-09-21 2012-09-21 光変調器の製造方法および光変調器
US13/846,067 US8841143B2 (en) 2012-09-21 2013-03-18 Method of manufacturing optical modulator
CN201310427136.6A CN103682978A (zh) 2012-09-21 2013-09-18 光调制器的制造方法以及光调制器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012208417A JP2014063052A (ja) 2012-09-21 2012-09-21 光変調器の製造方法および光変調器

Publications (2)

Publication Number Publication Date
JP2014063052A true JP2014063052A (ja) 2014-04-10
JP2014063052A5 JP2014063052A5 (enExample) 2015-08-06

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012208417A Pending JP2014063052A (ja) 2012-09-21 2012-09-21 光変調器の製造方法および光変調器

Country Status (3)

Country Link
US (1) US8841143B2 (enExample)
JP (1) JP2014063052A (enExample)
CN (1) CN103682978A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015133381A (ja) * 2014-01-10 2015-07-23 三菱電機株式会社 半導体装置の製造方法、半導体装置、半導体装置の製造システム

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5957855B2 (ja) * 2011-11-21 2016-07-27 住友電気工業株式会社 半導体集積素子
JP6388007B2 (ja) * 2016-08-08 2018-09-12 三菱電機株式会社 光デバイスの製造方法
CN120370575A (zh) 2016-08-12 2025-07-25 哈佛学院院长等 微机械薄膜锂铌酸锂电光装置
WO2019069359A1 (ja) * 2017-10-03 2019-04-11 三菱電機株式会社 半導体光集積素子
CN110544873B (zh) * 2019-08-29 2020-11-24 厦门市三安集成电路有限公司 分段式调制结构、激光器及其制作方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004140017A (ja) * 2002-10-15 2004-05-13 Sumitomo Electric Ind Ltd 光集積素子及びその製造方法
JP2004341092A (ja) * 2003-05-14 2004-12-02 Furukawa Electric Co Ltd:The 電界吸収型光変調器、電界吸収型光変調器付き半導体集積素子、それらを用いたモジュール及び電界吸収型光変調器付き半導体集積素子の製造方法
JP2011091164A (ja) * 2009-10-21 2011-05-06 Sumitomo Electric Ind Ltd 半導体集積素子
JP2011258713A (ja) * 2010-06-08 2011-12-22 Sumitomo Electric Device Innovations Inc 分布帰還型半導体レーザ素子の作製方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3386261B2 (ja) 1994-12-05 2003-03-17 三菱電機株式会社 光半導体装置、及びその製造方法
JP3141854B2 (ja) * 1998-09-28 2001-03-07 日本電気株式会社 光半導体装置の製造方法
SE515915C2 (sv) 1998-12-18 2001-10-29 Ericsson Telefon Ab L M Metod och integrerad krets för våglängdkompensering vid halvledartillverkning
JP4690515B2 (ja) * 2000-02-22 2011-06-01 古河電気工業株式会社 光変調器、半導体光素子、及びそれらの作製方法
JP2002033547A (ja) 2000-07-13 2002-01-31 Hitachi Ltd 半導体集積化光素子
JP2004513385A (ja) * 2000-10-30 2004-04-30 サンター　コーポレイション レーザ／ファイバ結合の制御
US6803604B2 (en) * 2001-03-13 2004-10-12 Ricoh Company, Ltd. Semiconductor optical modulator, an optical amplifier and an integrated semiconductor light-emitting device
JP2003060285A (ja) * 2001-08-10 2003-02-28 Furukawa Electric Co Ltd:The 光集積デバイス
KR100532260B1 (ko) * 2003-07-08 2005-11-29 삼성전자주식회사 반도체 단일 집적 광송신기
JP4952376B2 (ja) * 2006-08-10 2012-06-13 三菱電機株式会社 光導波路と半導体光集積素子の製造方法
JP2009194023A (ja) * 2008-02-12 2009-08-27 Sumitomo Electric Ind Ltd 半導体光素子を作製する方法
JP5461046B2 (ja) * 2009-03-31 2014-04-02 住友電工デバイス・イノベーション株式会社 光半導体装置
JP2013016648A (ja) * 2011-07-04 2013-01-24 Sumitomo Electric Ind Ltd 半導体光集積素子の製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004140017A (ja) * 2002-10-15 2004-05-13 Sumitomo Electric Ind Ltd 光集積素子及びその製造方法
JP2004341092A (ja) * 2003-05-14 2004-12-02 Furukawa Electric Co Ltd:The 電界吸収型光変調器、電界吸収型光変調器付き半導体集積素子、それらを用いたモジュール及び電界吸収型光変調器付き半導体集積素子の製造方法
JP2011091164A (ja) * 2009-10-21 2011-05-06 Sumitomo Electric Ind Ltd 半導体集積素子
JP2011258713A (ja) * 2010-06-08 2011-12-22 Sumitomo Electric Device Innovations Inc 分布帰還型半導体レーザ素子の作製方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015133381A (ja) * 2014-01-10 2015-07-23 三菱電機株式会社 半導体装置の製造方法、半導体装置、半導体装置の製造システム

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Publication number Publication date
US8841143B2 (en) 2014-09-23
CN103682978A (zh) 2014-03-26
US20140087493A1 (en) 2014-03-27

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