JP2014028986A5 - - Google Patents

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Publication number
JP2014028986A5
JP2014028986A5 JP2012169184A JP2012169184A JP2014028986A5 JP 2014028986 A5 JP2014028986 A5 JP 2014028986A5 JP 2012169184 A JP2012169184 A JP 2012169184A JP 2012169184 A JP2012169184 A JP 2012169184A JP 2014028986 A5 JP2014028986 A5 JP 2014028986A5
Authority
JP
Japan
Prior art keywords
thin film
visible light
light transmittance
metal
aln
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2012169184A
Other languages
English (en)
Japanese (ja)
Other versions
JP5938290B2 (ja
JP2014028986A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2012169184A priority Critical patent/JP5938290B2/ja
Priority claimed from JP2012169184A external-priority patent/JP5938290B2/ja
Priority to PCT/JP2013/070618 priority patent/WO2014021325A1/ja
Priority to TW102127409A priority patent/TWI630658B/zh
Publication of JP2014028986A publication Critical patent/JP2014028986A/ja
Publication of JP2014028986A5 publication Critical patent/JP2014028986A5/ja
Application granted granted Critical
Publication of JP5938290B2 publication Critical patent/JP5938290B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2012169184A 2012-07-31 2012-07-31 透明導電膜及びその製造方法 Expired - Fee Related JP5938290B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2012169184A JP5938290B2 (ja) 2012-07-31 2012-07-31 透明導電膜及びその製造方法
PCT/JP2013/070618 WO2014021325A1 (ja) 2012-07-31 2013-07-30 透明導電膜及びその製造方法
TW102127409A TWI630658B (zh) 2012-07-31 2013-07-31 Transparent conductive film and method of manufacturing same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012169184A JP5938290B2 (ja) 2012-07-31 2012-07-31 透明導電膜及びその製造方法

Publications (3)

Publication Number Publication Date
JP2014028986A JP2014028986A (ja) 2014-02-13
JP2014028986A5 true JP2014028986A5 (enExample) 2015-09-17
JP5938290B2 JP5938290B2 (ja) 2016-06-22

Family

ID=50027998

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012169184A Expired - Fee Related JP5938290B2 (ja) 2012-07-31 2012-07-31 透明導電膜及びその製造方法

Country Status (3)

Country Link
JP (1) JP5938290B2 (enExample)
TW (1) TWI630658B (enExample)
WO (1) WO2014021325A1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6366221B2 (ja) * 2012-09-21 2018-08-01 コニカミノルタ株式会社 透明電極、及び電子デバイス
US10475548B2 (en) 2014-05-23 2019-11-12 The Regents Of The University Of Michigan Ultra-thin doped noble metal films for optoelectronics and photonics applications
CN104269221A (zh) * 2014-08-29 2015-01-07 上海蓝沛新材料科技股份有限公司 一种利用含钯化合物的墨水制备透明导电膜的方法
JP2016191967A (ja) * 2015-03-30 2016-11-10 株式会社神戸製鋼所 窒素含有Ｃｕ合金膜、積層膜、およびこれらの製造方法、ならびにＣｕ合金スパッタリングターゲット
JP7157729B2 (ja) * 2019-06-28 2022-10-20 日東電工株式会社 粘着剤層付き偏光フィルム及び液晶パネル
CN113913775A (zh) * 2021-09-30 2022-01-11 浙江师范大学 对向靶磁控溅射无损伤薄膜沉积系统
CN114622162A (zh) * 2022-03-14 2022-06-14 南京邮电大学 一种耐高温透明导电复合薄膜及其制备方法和应用

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63205609A (ja) * 1987-02-20 1988-08-25 Unitika Ltd 熱線反射膜
JPH07105740A (ja) * 1993-10-08 1995-04-21 Mitsui Toatsu Chem Inc 透明導電性フィルム
JP4510967B2 (ja) * 1999-12-03 2010-07-28 大阪府 導電性光選択透過シート
JP2004047216A (ja) * 2002-07-10 2004-02-12 Central Glass Co Ltd 透明導電膜
JP4961786B2 (ja) * 2006-03-17 2012-06-27 住友金属鉱山株式会社 透明導電膜、およびこれを用いた透明導電性フィルム
JP5059430B2 (ja) * 2007-01-26 2012-10-24 株式会社大阪真空機器製作所 スパッタ方法及びスパッタ装置

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