JP2014003245A5 - - Google Patents
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- Publication number
- JP2014003245A5 JP2014003245A5 JP2012139213A JP2012139213A JP2014003245A5 JP 2014003245 A5 JP2014003245 A5 JP 2014003245A5 JP 2012139213 A JP2012139213 A JP 2012139213A JP 2012139213 A JP2012139213 A JP 2012139213A JP 2014003245 A5 JP2014003245 A5 JP 2014003245A5
- Authority
- JP
- Japan
- Prior art keywords
- laminate
- plate member
- sticking
- plate
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims 3
- 239000012790 adhesive layer Substances 0.000 claims 2
- 239000000919 ceramic Substances 0.000 claims 2
- 230000002093 peripheral effect Effects 0.000 claims 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000010030 laminating Methods 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 230000002265 prevention Effects 0.000 claims 1
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012139213A JP5977592B2 (ja) | 2012-06-20 | 2012-06-20 | 貼付装置 |
| PCT/JP2013/062816 WO2013190926A1 (ja) | 2012-06-20 | 2013-05-07 | 貼付装置 |
| KR1020157000444A KR20150031435A (ko) | 2012-06-20 | 2013-05-07 | 첩부 장치 |
| KR1020167019018A KR101678352B1 (ko) | 2012-06-20 | 2013-05-07 | 첩부 장치 |
| US14/408,903 US9548232B2 (en) | 2012-06-20 | 2013-05-07 | Attaching apparatus |
| TW102117203A TWI505939B (zh) | 2012-06-20 | 2013-05-15 | 貼合裝置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012139213A JP5977592B2 (ja) | 2012-06-20 | 2012-06-20 | 貼付装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014003245A JP2014003245A (ja) | 2014-01-09 |
| JP2014003245A5 true JP2014003245A5 (cg-RX-API-DMAC7.html) | 2015-11-12 |
| JP5977592B2 JP5977592B2 (ja) | 2016-08-24 |
Family
ID=49768532
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012139213A Active JP5977592B2 (ja) | 2012-06-20 | 2012-06-20 | 貼付装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9548232B2 (cg-RX-API-DMAC7.html) |
| JP (1) | JP5977592B2 (cg-RX-API-DMAC7.html) |
| KR (2) | KR20150031435A (cg-RX-API-DMAC7.html) |
| TW (1) | TWI505939B (cg-RX-API-DMAC7.html) |
| WO (1) | WO2013190926A1 (cg-RX-API-DMAC7.html) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6855399B2 (ja) * | 2018-01-26 | 2021-04-07 | 株式会社スギノマシン | ノズルの振れの測定方法及びその装置 |
| JP7355709B2 (ja) * | 2020-05-29 | 2023-10-03 | 株式会社 日立パワーデバイス | 接合治具および半導体装置の製造方法 |
| IT202100018458A1 (it) * | 2021-07-13 | 2023-01-13 | Amx Automatrix S R L | Pressa di sinterizzazione |
Family Cites Families (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3165453B2 (ja) | 1991-01-31 | 2001-05-14 | 富士通株式会社 | プラズマディスプレイパネルの製造方法 |
| JPH07335512A (ja) * | 1994-06-08 | 1995-12-22 | Canon Inc | 接合方法および接合装置および接合物 |
| JPH09316399A (ja) * | 1996-05-28 | 1997-12-09 | Canon Inc | 基板貼合せ装置及び基板貼合せ方法 |
| JP2980073B2 (ja) * | 1997-08-29 | 1999-11-22 | 日本電気株式会社 | 熱圧着装置及びその制御方法 |
| US6081414A (en) | 1998-05-01 | 2000-06-27 | Applied Materials, Inc. | Apparatus for improved biasing and retaining of a workpiece in a workpiece processing system |
| JP2002192394A (ja) | 2000-12-28 | 2002-07-10 | Mitsubishi Gas Chem Co Inc | 無機基板のプレス加工法およびプレス装置 |
| JP3487833B2 (ja) * | 2001-04-24 | 2004-01-19 | 株式会社 日立インダストリイズ | 基板貼り合わせ方法及び貼り合わせ装置 |
| JP2003241157A (ja) * | 2002-02-21 | 2003-08-27 | Shibaura Mechatronics Corp | 基板貼り合わせ装置、基板貼り合わせ方法、及び液晶表示パネルの製造装置、並びに製造方法 |
| JP2003347360A (ja) * | 2002-05-31 | 2003-12-05 | Sumitomo Electric Ind Ltd | ボンディングステージ |
| KR100511854B1 (ko) | 2002-06-18 | 2005-09-02 | 아네르바 가부시키가이샤 | 정전 흡착 장치 |
| JP4245138B2 (ja) * | 2003-03-11 | 2009-03-25 | 富士通株式会社 | 基板貼合せ装置及び基板貼合せ方法 |
| JP4031732B2 (ja) * | 2003-05-26 | 2008-01-09 | 京セラ株式会社 | 静電チャック |
| JP4513329B2 (ja) * | 2004-01-16 | 2010-07-28 | 東京エレクトロン株式会社 | 処理装置 |
| US20060000802A1 (en) * | 2004-06-30 | 2006-01-05 | Ajay Kumar | Method and apparatus for photomask plasma etching |
| JP4480660B2 (ja) * | 2005-10-27 | 2010-06-16 | Ｎｅｃエンジニアリング株式会社 | 基板貼り合わせ装置 |
| KR20080015466A (ko) * | 2006-01-31 | 2008-02-19 | 동경 엘렉트론 주식회사 | 기판 처리 장치 및 그것에 이용되는 기판 탑재대,플라즈마에 노출되는 부재 |
| KR20080002323A (ko) | 2006-06-30 | 2008-01-04 | 엘지.필립스 엘시디 주식회사 | 합착 스테이지와 그 제어 장치 및 방법 |
| JP5160802B2 (ja) | 2007-03-27 | 2013-03-13 | 東京エレクトロン株式会社 | プラズマ処理装置 |
| TWI493609B (zh) * | 2007-10-23 | 2015-07-21 | Semiconductor Energy Lab | 半導體基板、顯示面板及顯示裝置的製造方法 |
| KR100961871B1 (ko) | 2008-04-02 | 2010-06-09 | 에이피시스템 주식회사 | 기판 접합 장치 |
| CN102160167B (zh) | 2008-08-12 | 2013-12-04 | 应用材料公司 | 静电吸盘组件 |
| KR101359070B1 (ko) | 2009-03-03 | 2014-02-05 | 도쿄엘렉트론가부시키가이샤 | 탑재대 구조, 성막 장치 및 원료 회수 방법 |
| JP5482282B2 (ja) * | 2009-03-03 | 2014-05-07 | 東京エレクトロン株式会社 | 載置台構造及び成膜装置 |
| KR101522633B1 (ko) | 2009-04-08 | 2015-05-22 | 주식회사 원익아이피에스 | 진공처리장치 |
| FR2961630B1 (fr) | 2010-06-22 | 2013-03-29 | Soitec Silicon On Insulator Technologies | Appareil de fabrication de dispositifs semi-conducteurs |
| KR101145756B1 (ko) | 2010-07-30 | 2012-05-16 | 이지스코 주식회사 | 고무 점착식 척킹기구 및 이를 이용한 기판 합착장치 |
| JP5379171B2 (ja) | 2010-08-23 | 2013-12-25 | 東京エレクトロン株式会社 | 接合システム、基板処理システム、接合方法、プログラム及びコンピュータ記憶媒体 |
| CN107452592B (zh) * | 2011-05-31 | 2019-11-12 | 应用材料公司 | 边缘保护板、边缘保护组件以及用于处理基板的设备 |
| TWI585028B (zh) * | 2013-01-30 | 2017-06-01 | 斯克林集團公司 | 剝離裝置及剝離方法 |
-
2012
- 2012-06-20 JP JP2012139213A patent/JP5977592B2/ja active Active
-
2013
- 2013-05-07 WO PCT/JP2013/062816 patent/WO2013190926A1/ja not_active Ceased
- 2013-05-07 US US14/408,903 patent/US9548232B2/en active Active
- 2013-05-07 KR KR1020157000444A patent/KR20150031435A/ko not_active Ceased
- 2013-05-07 KR KR1020167019018A patent/KR101678352B1/ko active Active
- 2013-05-15 TW TW102117203A patent/TWI505939B/zh active